KR940021330U - Vacuum shutoff valves for semiconductor equipment - Google Patents

Vacuum shutoff valves for semiconductor equipment

Info

Publication number
KR940021330U
KR940021330U KR2019930001541U KR930001541U KR940021330U KR 940021330 U KR940021330 U KR 940021330U KR 2019930001541 U KR2019930001541 U KR 2019930001541U KR 930001541 U KR930001541 U KR 930001541U KR 940021330 U KR940021330 U KR 940021330U
Authority
KR
South Korea
Prior art keywords
semiconductor equipment
shutoff valves
vacuum shutoff
vacuum
valves
Prior art date
Application number
KR2019930001541U
Other languages
Korean (ko)
Other versions
KR950007914Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930001541U priority Critical patent/KR950007914Y1/en
Publication of KR940021330U publication Critical patent/KR940021330U/en
Application granted granted Critical
Publication of KR950007914Y1 publication Critical patent/KR950007914Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019930001541U 1993-02-06 1993-02-06 Vacuum cutting valve of semiconductor apparatus KR950007914Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930001541U KR950007914Y1 (en) 1993-02-06 1993-02-06 Vacuum cutting valve of semiconductor apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930001541U KR950007914Y1 (en) 1993-02-06 1993-02-06 Vacuum cutting valve of semiconductor apparatus

Publications (2)

Publication Number Publication Date
KR940021330U true KR940021330U (en) 1994-09-24
KR950007914Y1 KR950007914Y1 (en) 1995-09-25

Family

ID=19350413

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930001541U KR950007914Y1 (en) 1993-02-06 1993-02-06 Vacuum cutting valve of semiconductor apparatus

Country Status (1)

Country Link
KR (1) KR950007914Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101023728B1 (en) * 2004-06-29 2011-03-25 엘지디스플레이 주식회사 Loader and unloader of sputter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101023728B1 (en) * 2004-06-29 2011-03-25 엘지디스플레이 주식회사 Loader and unloader of sputter

Also Published As

Publication number Publication date
KR950007914Y1 (en) 1995-09-25

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Legal Events

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E701 Decision to grant or registration of patent right
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Payment date: 20070827

Year of fee payment: 13

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