KR940008040A - 반도체 집적회로기판 제조 및 검사방법과 그 기판의 반제품 - Google Patents
반도체 집적회로기판 제조 및 검사방법과 그 기판의 반제품 Download PDFInfo
- Publication number
- KR940008040A KR940008040A KR1019930018279A KR930018279A KR940008040A KR 940008040 A KR940008040 A KR 940008040A KR 1019930018279 A KR1019930018279 A KR 1019930018279A KR 930018279 A KR930018279 A KR 930018279A KR 940008040 A KR940008040 A KR 940008040A
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor integrated
- integrated circuit
- power
- voltage
- supplying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 239000004065 semiconductor Substances 0.000 title claims abstract 27
- 239000011265 semifinished product Substances 0.000 title claims 5
- 230000015556 catabolic process Effects 0.000 claims abstract 14
- 238000007689 inspection Methods 0.000 claims 8
- 238000000034 method Methods 0.000 claims 8
- 238000005259 measurement Methods 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 5
- 238000011156 evaluation Methods 0.000 claims 4
- 230000001066 destructive effect Effects 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000001939 inductive effect Effects 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- 239000000047 product Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000011165 process development Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP92-243638 | 1992-09-11 | ||
| JP24363892 | 1992-09-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR940008040A true KR940008040A (ko) | 1994-04-28 |
Family
ID=51401513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019930018279A Withdrawn KR940008040A (ko) | 1992-09-11 | 1993-09-10 | 반도체 집적회로기판 제조 및 검사방법과 그 기판의 반제품 |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR940008040A (enrdf_load_stackoverflow) |
| TW (1) | TW253975B (enrdf_load_stackoverflow) |
-
1993
- 1993-08-12 TW TW082106467A patent/TW253975B/zh not_active IP Right Cessation
- 1993-09-10 KR KR1019930018279A patent/KR940008040A/ko not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| TW253975B (enrdf_load_stackoverflow) | 1995-08-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19930910 |
|
| PG1501 | Laying open of application | ||
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |