Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Electron Co LtdfiledCriticalSeiko Electron Co Ltd
Application grantedgrantedCritical
Publication of TW253975BpublicationCriticalpatent/TW253975B/zh
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
Engineering & Computer Science
(AREA)
Manufacturing & Machinery
(AREA)
Computer Hardware Design
(AREA)
Microelectronics & Electronic Packaging
(AREA)
Power Engineering
(AREA)
Testing Or Measuring Of Semiconductors Or The Like
(AREA)
Testing Of Individual Semiconductor Devices
(AREA)