KR930018776U - 에트모스캔 튜브 - Google Patents

에트모스캔 튜브

Info

Publication number
KR930018776U
KR930018776U KR2019920001360U KR920001360U KR930018776U KR 930018776 U KR930018776 U KR 930018776U KR 2019920001360 U KR2019920001360 U KR 2019920001360U KR 920001360 U KR920001360 U KR 920001360U KR 930018776 U KR930018776 U KR 930018776U
Authority
KR
South Korea
Prior art keywords
etmoscan
tube
etmoscan tube
Prior art date
Application number
KR2019920001360U
Other languages
English (en)
Other versions
KR0121151Y1 (ko
Inventor
이동칠
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR92001360U priority Critical patent/KR0121151Y1/ko
Publication of KR930018776U publication Critical patent/KR930018776U/ko
Application granted granted Critical
Publication of KR0121151Y1 publication Critical patent/KR0121151Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
KR92001360U 1992-01-30 1992-01-30 에트모스캔 튜브 KR0121151Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92001360U KR0121151Y1 (ko) 1992-01-30 1992-01-30 에트모스캔 튜브

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92001360U KR0121151Y1 (ko) 1992-01-30 1992-01-30 에트모스캔 튜브

Publications (2)

Publication Number Publication Date
KR930018776U true KR930018776U (ko) 1993-08-21
KR0121151Y1 KR0121151Y1 (ko) 1998-08-01

Family

ID=19328473

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92001360U KR0121151Y1 (ko) 1992-01-30 1992-01-30 에트모스캔 튜브

Country Status (1)

Country Link
KR (1) KR0121151Y1 (ko)

Also Published As

Publication number Publication date
KR0121151Y1 (ko) 1998-08-01

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