KR930018272A - Chip Gas Sensor - Google Patents

Chip Gas Sensor Download PDF

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Publication number
KR930018272A
KR930018272A KR1019920003120A KR920003120A KR930018272A KR 930018272 A KR930018272 A KR 930018272A KR 1019920003120 A KR1019920003120 A KR 1019920003120A KR 920003120 A KR920003120 A KR 920003120A KR 930018272 A KR930018272 A KR 930018272A
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KR
South Korea
Prior art keywords
sensor
substrate
chip
gas sensor
gas
Prior art date
Application number
KR1019920003120A
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Korean (ko)
Inventor
권창순
Original Assignee
강진구
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 강진구, 삼성전자 주식회사 filed Critical 강진구
Priority to KR1019920003120A priority Critical patent/KR930018272A/en
Publication of KR930018272A publication Critical patent/KR930018272A/en

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Abstract

본 발명은 칩형 가스센서에 관한 것으로, 좀 더 구체적으로는 150∼200℃에서 정온 동작되는 PTC기판, 상기 기판, 상·하면에 형성된 발열용 전극, 절연체, 센서용 전극, 감가스물이 순차적으로 형성된 것을 특징으로 하는 칩형 가스센서에 관한 것이다.The present invention relates to a chip-type gas sensor, and more specifically to a PTC substrate, the substrate, the heating electrode formed on the substrate, the upper and lower surfaces, the insulator, the sensor electrode, the degassing material are sequentially formed at 150 ~ 200 ℃ It relates to a chip-type gas sensor characterized in that.

본 발명의 가스센서는 박막의 감가스물이 도포된 칩형 가스센서로서 구조가 단순하고 PVD법에 의해 촉매의 종류와 양에 상관없이 첨가될 수 있어 센서 동작 온도롤 200℃이하로 하더라도 목적하는 감도 특성을 얻을 수 있고 이에 따라 PCB 회로 상에 직접 장착할 수 있을 뿐만아니라 센서 자체의 특성 열화가 매우 작은 장점이 있다. 또한 기판으로 사용되는 PTC 히터는 외부 환경의 영향을 받지 않고 센서를 일정한 온도로 유지시켜 주므로 센서 특성이 매우 안정되고 히터 코일일 필요없게 되어 센서 양산시에도 경제성이 높은 것이 특성이다.The gas sensor of the present invention is a chip-type gas sensor coated with a thin gas-sensitive gas, and its structure is simple and can be added regardless of the type and amount of the catalyst by PVD method. In addition, it can be directly mounted on the PCB circuit, and the characteristic deterioration of the sensor itself is very small. In addition, the PTC heater used as the substrate keeps the sensor at a constant temperature without being influenced by the external environment, so the sensor characteristic is very stable and the heater coil does not need to be a heater coil.

또한, 상기 센서 소체는 기판과 가열 소자, 감가스물 및 전극이 일체형으로 구성되어 있어서 취급이 용이하고, 칩형태로서 크기를 임으로 조절할 수 있는 장점이 있다.In addition, the sensor element has an advantage in that the substrate and the heating element, the gas-sensitive material and the electrode is integrally formed to be easily handled and can be arbitrarily adjusted in size as a chip form.

Description

칩형 가스센서Chip Gas Sensor

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2(a)도는 본 발명에 의한 칩형 가스센서의 사시도이며, 제2(b)도는 본 발명에 의한 칩형 가스센서의 단면도이고, 제3도는 칩형 가스센서의 초기 특성 및 가스반응 특성을 나타낸 그래프이다.2 (a) is a perspective view of a chip-type gas sensor according to the present invention, Figure 2 (b) is a cross-sectional view of the chip-type gas sensor according to the present invention, Figure 3 is a graph showing the initial characteristics and gas reaction characteristics of the chip-type gas sensor to be.

Claims (3)

가스센서에 있어서, PTC기판, 상기 기판 상·하면에 형성된 발열용 전극, 절연체, 센서용 전극, 감가스물이 순차적으로 형성된 것을 특징으로 하는 칩형 가스센서.A gas sensor comprising: a PTC substrate, a heating electrode formed on upper and lower surfaces of the substrate, an insulator, an electrode for a sensor, and a gaseous substance formed sequentially. 제1항에 있어서, 상기 감가스물이 박막으로 형성된 것을 특징으로 하는 칩형 가스센서.The chip type gas sensor according to claim 1, wherein the gas sensitive material is formed into a thin film. 제1항에 있어서, 상기 센서용전극의 크기가 발열용 전극의 크기보다 작게 형성된 것을 특징으로 하는 칩형 가스센서.The chip type gas sensor according to claim 1, wherein the size of the sensor electrode is smaller than that of the heating electrode. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019920003120A 1992-02-27 1992-02-27 Chip Gas Sensor KR930018272A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019920003120A KR930018272A (en) 1992-02-27 1992-02-27 Chip Gas Sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019920003120A KR930018272A (en) 1992-02-27 1992-02-27 Chip Gas Sensor

Publications (1)

Publication Number Publication Date
KR930018272A true KR930018272A (en) 1993-09-21

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920003120A KR930018272A (en) 1992-02-27 1992-02-27 Chip Gas Sensor

Country Status (1)

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KR (1) KR930018272A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100257317B1 (en) * 1997-05-07 2000-08-01 한갑수 Gas sensor with ptc element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100257317B1 (en) * 1997-05-07 2000-08-01 한갑수 Gas sensor with ptc element

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