KR930015108A - MOS capacitors - Google Patents
MOS capacitors Download PDFInfo
- Publication number
- KR930015108A KR930015108A KR1019910023448A KR910023448A KR930015108A KR 930015108 A KR930015108 A KR 930015108A KR 1019910023448 A KR1019910023448 A KR 1019910023448A KR 910023448 A KR910023448 A KR 910023448A KR 930015108 A KR930015108 A KR 930015108A
- Authority
- KR
- South Korea
- Prior art keywords
- dielectric
- polygate
- mos capacitor
- polyside
- plate
- Prior art date
Links
Abstract
본 발명은 MOS 캐패시터에 관한 것으로 특히, 메모리 소자에 적당하도록 한 MOS 캐패시터에 관한 것이다. 이를 위하여 본 발명에서는, MOS 캐패시터에 있어서, 기판위에 제1유전체가 놓이며, 그 위에 제1플레이트로서 폴리게이트가 놓이며, 다시 제1유전체와 폴리게이트를 에워싸는 제2유전체가 형성되며, 제2유전체 상부에는 제2플레이트로서 폴리사이드가 형성되며, 폴리게이트는 입력단자에 연결되고, 폴리사이드는 메탈을 통해 액티브영역에 연결되는 구조를 갖는 MOS 캐패시터이다.The present invention relates to a MOS capacitor, and more particularly, to a MOS capacitor adapted to be suitable for a memory device. To this end, in the present invention, in the MOS capacitor, a first dielectric is placed on a substrate, a polygate is placed as a first plate, and a second dielectric is formed to surround the first dielectric and the polygate. A polyside is formed on the dielectric as a second plate, the polygate is connected to an input terminal, and the polyside is a MOS capacitor having a structure connected to an active region through a metal.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2도는 본 발명의 MOS 캐패시터 구조도.2 is a structure diagram of a MOS capacitor of the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910023448A KR930015108A (en) | 1991-12-19 | 1991-12-19 | MOS capacitors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910023448A KR930015108A (en) | 1991-12-19 | 1991-12-19 | MOS capacitors |
Publications (1)
Publication Number | Publication Date |
---|---|
KR930015108A true KR930015108A (en) | 1993-07-23 |
Family
ID=67356765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910023448A KR930015108A (en) | 1991-12-19 | 1991-12-19 | MOS capacitors |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR930015108A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100311179B1 (en) * | 1999-10-21 | 2001-11-02 | 박종섭 | MOS capacitor |
-
1991
- 1991-12-19 KR KR1019910023448A patent/KR930015108A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100311179B1 (en) * | 1999-10-21 | 2001-11-02 | 박종섭 | MOS capacitor |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |