KR920022400A - Contact hole etching method of semiconductor device - Google Patents
Contact hole etching method of semiconductor device Download PDFInfo
- Publication number
- KR920022400A KR920022400A KR1019910007905A KR910007905A KR920022400A KR 920022400 A KR920022400 A KR 920022400A KR 1019910007905 A KR1019910007905 A KR 1019910007905A KR 910007905 A KR910007905 A KR 910007905A KR 920022400 A KR920022400 A KR 920022400A
- Authority
- KR
- South Korea
- Prior art keywords
- contact hole
- etching method
- semiconductor device
- hole etching
- film
- Prior art date
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- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
내용 없음.No content.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1도는 본 발명에 따른 개략적인 공정도.1 is a schematic process diagram according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910007905A KR920022400A (en) | 1991-05-15 | 1991-05-15 | Contact hole etching method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910007905A KR920022400A (en) | 1991-05-15 | 1991-05-15 | Contact hole etching method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR920022400A true KR920022400A (en) | 1992-12-19 |
Family
ID=67432785
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910007905A KR920022400A (en) | 1991-05-15 | 1991-05-15 | Contact hole etching method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR920022400A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100940665B1 (en) * | 2007-11-29 | 2010-02-05 | 주식회사 동부하이텍 | Method for fabricating semiconductor device |
-
1991
- 1991-05-15 KR KR1019910007905A patent/KR920022400A/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100940665B1 (en) * | 2007-11-29 | 2010-02-05 | 주식회사 동부하이텍 | Method for fabricating semiconductor device |
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SUBM | Submission of document of abandonment before or after decision of registration |