KR920020630A - 평판표시소자용 기판예비처리장치 - Google Patents

평판표시소자용 기판예비처리장치 Download PDF

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Publication number
KR920020630A
KR920020630A KR1019910005321A KR910005321A KR920020630A KR 920020630 A KR920020630 A KR 920020630A KR 1019910005321 A KR1019910005321 A KR 1019910005321A KR 910005321 A KR910005321 A KR 910005321A KR 920020630 A KR920020630 A KR 920020630A
Authority
KR
South Korea
Prior art keywords
preliminary processing
housing
flat panel
panel display
substrate preliminary
Prior art date
Application number
KR1019910005321A
Other languages
English (en)
Other versions
KR930007972B1 (ko
Inventor
이희국
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019910005321A priority Critical patent/KR930007972B1/ko
Publication of KR920020630A publication Critical patent/KR920020630A/ko
Application granted granted Critical
Publication of KR930007972B1 publication Critical patent/KR930007972B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Liquid Crystal (AREA)

Abstract

내용 없음

Description

평판표시소자용 기판예비처리장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 구성을 개략적으로 도시한 측단면도.

Claims (3)

  1. 하우징(1) 내부에 이 하우징(1)의 내벽과 이격되게 제1 통로(2)를 형성하도록되면서 양쪽 측벽에 다수의 관통구멍(9)이 뚫려진 내부케이스(5)가 설치되고, 이 내부케이스(5)의 하부와 이격되게 제2 통로(6)를 형성하도록 히이터(8)가 내장된 약품저장조(7)가 갖춰지며, 상기 내부케이스(5)의 상, 하부에는 격벽(10)을 사이에 두고 자외선램프(10)가 설치되는 한편, 상기 약품저장조(7)의 방출관(14)에 송풍팬(15)이 갖춰진 평판표시소자용 기판예비처리장치.
  2. 제1항에 있어서, 상기 하우징(1)에는 하우징(1)내부를 진공상태로 만들어주도록 진공펌프(12)가 연결된 것을 특징으로 하는 평판표시소자용 기판예비처리장치.
  3. 제1항에 있어서, 상기 내부케이스(5)와 약품저장조(7) 사이의 제2통로(6)에 산소공급관(16)이 연결된 것을 특징으로 하는 평판표시소자용 기판예비처리장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019910005321A 1991-04-02 1991-04-02 평판표시소자용 기판예비처리장치 KR930007972B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019910005321A KR930007972B1 (ko) 1991-04-02 1991-04-02 평판표시소자용 기판예비처리장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019910005321A KR930007972B1 (ko) 1991-04-02 1991-04-02 평판표시소자용 기판예비처리장치

Publications (2)

Publication Number Publication Date
KR920020630A true KR920020630A (ko) 1992-11-21
KR930007972B1 KR930007972B1 (ko) 1993-08-25

Family

ID=19312841

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910005321A KR930007972B1 (ko) 1991-04-02 1991-04-02 평판표시소자용 기판예비처리장치

Country Status (1)

Country Link
KR (1) KR930007972B1 (ko)

Also Published As

Publication number Publication date
KR930007972B1 (ko) 1993-08-25

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