KR920017694A - 극고효율 다공성 금속필타 - Google Patents

극고효율 다공성 금속필타 Download PDF

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Publication number
KR920017694A
KR920017694A KR1019910005292A KR910005292A KR920017694A KR 920017694 A KR920017694 A KR 920017694A KR 1019910005292 A KR1019910005292 A KR 1019910005292A KR 910005292 A KR910005292 A KR 910005292A KR 920017694 A KR920017694 A KR 920017694A
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KR
South Korea
Prior art keywords
air filter
particulate air
sintered
particle size
metal
Prior art date
Application number
KR1019910005292A
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English (en)
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KR0172610B1 (ko
Inventor
비.데이비스 크리스토퍼
Original Assignee
원본미기재
모트 메탈러지칼 코오퍼레이션
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Application filed by 원본미기재, 모트 메탈러지칼 코오퍼레이션 filed Critical 원본미기재
Publication of KR920017694A publication Critical patent/KR920017694A/ko
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0002—Casings; Housings; Frame constructions
    • B01D46/0012—In-line filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2027—Metallic material
    • B01D39/2031—Metallic material the material being particulate
    • B01D39/2034—Metallic material the material being particulate sintered or bonded by inorganic agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • B22F3/11—Making porous workpieces or articles
    • B22F3/1103—Making porous workpieces or articles with particular physical characteristics

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Filtering Materials (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Abstract

내용 없음

Description

극고효율 다공성 금속필타
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 특징이 결합된 가스라인 필타유니트의 사시도,
제2도는 제1도의 필타어셈블리내에 채택된 필타디스크의 상부 평면도,
제3도는 제2도의 디스크의 선3-3을 취한 단면도.

Claims (8)

  1. 반도체 제조산업 및 마이크로전자 제조산업에서의 공정가스 여과용 극고효율의 미립자 에어필타에 있어서, 다공성 소결 금속으로 제조되어 있고, 0.068인치의 두께로 표준화했을때 필타면적 11.3in2에 대하여 30SLPM의 유량에서 측정된 여과효율은 대부분의 투과입자 크기에 대하여 로그로 환산하여 6 이상이고, 단위면적당 비표면은 0.055㎡/㎠이상인 필타부재로 이루어져 있는 것을 특징으로 하는 극고효율의 미립자 에어필타.
  2. 제1항에 있어서, 상기 소결금속 부재는 예비소결 평균입자 크기가 20마이크론 미만인 금속분말로부터 형성된 것을 특징으로 하는 미립자 에어필타.
  3. 제2항에 있어서, 상기 평균 입자크기는 10 마이크론 미만인 것을 특징으로 하는 미립자 에어필타.
  4. 제1항에 있어서, 상기 소결부재는 밀도가 5g/cc 이상이고 이소프로필알코올 기포점이 8인치 Hg이상인 것을 특징으로 하는 미립자 에어필타.
  5. 제1항에 있어서, 상기 소결금속부재는 사용시에 그안에 모든 분말입자를 수용하기에 충분한 정도로 소결된 것을 특징으로 하는 미립자 에어필타.
  6. 제1항에 있어서, 상기 소결입자부재는 소결목 감소현상을 견디기에 충분한 정도로 소결된 것을 특징으로 하는 미립자 에어필타.
  7. 제1항에 있어서, 상기 압력강하는 대기압하에서의 30 SLPM의 유량으로 유출될때 15psid미만인 것을 특징으로 하는 미립자 에어필타.
  8. 제1항에 있어서, 상기 금속은 스테인레스강, 니켈 및 니켈합금으로 이루
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019910005292A 1991-03-12 1991-04-02 극고효율 다공성 금속필타 KR0172610B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/665,963 US5114447A (en) 1991-03-12 1991-03-12 Ultra-high efficiency porous metal filter
US665,963 1991-03-12

Publications (2)

Publication Number Publication Date
KR920017694A true KR920017694A (ko) 1992-10-21
KR0172610B1 KR0172610B1 (ko) 1999-02-18

Family

ID=24672261

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910005292A KR0172610B1 (ko) 1991-03-12 1991-04-02 극고효율 다공성 금속필타

Country Status (4)

Country Link
US (1) US5114447A (ko)
EP (1) EP0504092A1 (ko)
JP (1) JPH04317710A (ko)
KR (1) KR0172610B1 (ko)

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Also Published As

Publication number Publication date
KR0172610B1 (ko) 1999-02-18
JPH04317710A (ja) 1992-11-09
EP0504092A1 (en) 1992-09-16
US5114447A (en) 1992-05-19

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