KR920013001A - Manufacturing method of color filter - Google Patents

Manufacturing method of color filter Download PDF

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Publication number
KR920013001A
KR920013001A KR1019900022929A KR900022929A KR920013001A KR 920013001 A KR920013001 A KR 920013001A KR 1019900022929 A KR1019900022929 A KR 1019900022929A KR 900022929 A KR900022929 A KR 900022929A KR 920013001 A KR920013001 A KR 920013001A
Authority
KR
South Korea
Prior art keywords
lens
pixels
forming
layer
color filter
Prior art date
Application number
KR1019900022929A
Other languages
Korean (ko)
Other versions
KR930003687B1 (en
Inventor
양노석
박한수
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019900022929A priority Critical patent/KR930003687B1/en
Priority to GB9114523A priority patent/GB2251978A/en
Priority to JP3165766A priority patent/JPH04234705A/en
Publication of KR920013001A publication Critical patent/KR920013001A/en
Application granted granted Critical
Publication of KR930003687B1 publication Critical patent/KR930003687B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0232—Optical elements or arrangements associated with the device
    • H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors

Abstract

내용 없음No content

Description

칼라필터의 제조방법Manufacturing method of color filter

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2(A)~(D)도는 이 발명에 따른 칼라필터의 제조공정도이다.(A)-(D) is a manufacturing process drawing of the color filter which concerns on this invention.

Claims (6)

복수의 화소들이 매트릭스형상으로 배치된 기판의 상부에 형성하는 칼라필터의 제조방법에 있어서, 상기 기판에 평탄화층을 형성하는 제1과정; 상기 제1평탄화층의 상부에 상기 복수의 화소중 임의의 화소와 대응하도록 염색층을 형성하는 공정과, 상기 염색층의 상부에 중간층을 형성하는 공정으로 이루어지는 제2과정; 상기 제2과정을 적어도 2회 반복처리하는 제3과정; 상기 제3과정 후 최상의 중간층에 렌즈층을 형성하는 공정과, 상기 렌즈층을 노광 및 현상하여 상기 화소들과 일치하는 부분은 평평하고 그 나머지부분은 계단형상을 갖는 렌즈패턴을 형성하는 공정으로 이루어지는 제4과정; 상기 렌즈패턴을 열처리하여 렌즈를 형성하는 제5과정으로 이루어지는 것을 특징으로 하는 칼라필터의 제조방법.Claims [1] A method of manufacturing a color filter in which a plurality of pixels are formed on a substrate arranged in a matrix, comprising: a first process of forming a planarization layer on the substrate; Forming a dye layer on the first planarization layer so as to correspond to any of the plurality of pixels, and forming an intermediate layer on the dye layer; A third process of repeating the second process at least twice; Forming a lens layer on the uppermost intermediate layer after the third process, and exposing and developing the lens layer to form a lens pattern having a flat portion corresponding to the pixels and a remaining portion having a stepped shape. Fourth process; And a fifth process of forming a lens by heat-treating the lens pattern. 제1항에 있어서, 상기 노광시 동일한 패턴에서 부분마다 서로 다른 광투과율을 갖는 마스크를 이용하는 것을 특징으로 하는 칼라필터의 제조방법.The method of manufacturing a color filter according to claim 1, wherein a mask having a different light transmittance is used for each part in the same pattern during the exposure. 제2항에 있어서, 상기 마스크는 동일한 패턴내에서 화소들과 일치하는 부분의 광투과율이 0%이고, 이 부분에서 멀어질수록 광투과율이 커지는 것을 특징으로 하는 칼라필터의 제조방법.The method of claim 2, wherein the mask has a light transmittance of 0% in the same pattern as the pixels in the same pattern and increases in distance from the mask. 제1항에 있어서, 상기 열처리는 저온에서 하는 것을 특징으로 하는 칼라필터의 제조방법.The method of claim 1, wherein the heat treatment is performed at a low temperature. 제1항에 있어서, 상기 렌즈를 화소들과 일치하는 부분은 평평하고, 그 나머지부분은 소정의 곡률반경을 갖도록 형성하는 것을 특징으로 하는 칼라필터의 제조방법.The method of claim 1, wherein a portion of the lens coinciding with the pixels is flat and the remaining portion has a predetermined radius of curvature. 제5항에 있어서, 상기 소정의 곡률반경에 의해 집광러리를 조절할 수 있도록 형성하는 것을 특징으로 하는 칼라필터의 제조방법.The method of manufacturing a color filter according to claim 5, wherein the condensing slurry can be adjusted by the predetermined radius of curvature. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019900022929A 1990-12-31 1990-12-31 Color filter and making method thereof KR930003687B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1019900022929A KR930003687B1 (en) 1990-12-31 1990-12-31 Color filter and making method thereof
GB9114523A GB2251978A (en) 1990-12-31 1991-07-05 Forming a colour filter on a semiconductor substrate having a pixel matrix
JP3165766A JPH04234705A (en) 1990-12-31 1991-07-05 Manufacture of color filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019900022929A KR930003687B1 (en) 1990-12-31 1990-12-31 Color filter and making method thereof

Publications (2)

Publication Number Publication Date
KR920013001A true KR920013001A (en) 1992-07-28
KR930003687B1 KR930003687B1 (en) 1993-05-08

Family

ID=19309330

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900022929A KR930003687B1 (en) 1990-12-31 1990-12-31 Color filter and making method thereof

Country Status (3)

Country Link
JP (1) JPH04234705A (en)
KR (1) KR930003687B1 (en)
GB (1) GB2251978A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2863422B2 (en) * 1992-10-06 1999-03-03 松下電子工業株式会社 Solid-state imaging device and method of manufacturing the same
CN1089951C (en) * 1994-01-28 2002-08-28 松下电器产业株式会社 Solid photographic device and manufacture of same
CN101769784B (en) * 2008-12-27 2012-06-20 鸿富锦精密工业（深圳）有限公司 Sensor assembly

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5968967A (en) * 1982-10-13 1984-04-19 Toshiba Corp Manufacture of solid-state image pick-up device
JPS59198754A (en) * 1983-04-26 1984-11-10 Toshiba Corp Solid-state color image pickup device
US4694185A (en) * 1986-04-18 1987-09-15 Eastman Kodak Company Light sensing devices with lenticular pixels
JPH01246505A (en) * 1988-03-29 1989-10-02 Canon Inc Solid state image pickup element
JPH02282702A (en) * 1989-04-25 1990-11-20 Seiko Epson Corp Manufacture of lens array

Also Published As

Publication number Publication date
GB2251978A (en) 1992-07-22
GB9114523D0 (en) 1991-08-21
JPH04234705A (en) 1992-08-24
KR930003687B1 (en) 1993-05-08

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