KR920010781A - Drive with seal mechanism - Google Patents

Drive with seal mechanism Download PDF

Info

Publication number
KR920010781A
KR920010781A KR1019910020980A KR910020980A KR920010781A KR 920010781 A KR920010781 A KR 920010781A KR 1019910020980 A KR1019910020980 A KR 1019910020980A KR 910020980 A KR910020980 A KR 910020980A KR 920010781 A KR920010781 A KR 920010781A
Authority
KR
South Korea
Prior art keywords
cover
space
seal mechanism
drive device
driving
Prior art date
Application number
KR1019910020980A
Other languages
Korean (ko)
Other versions
KR0151159B1 (en
Inventor
유우지 가미가와
Original Assignee
이노우에 아키라
도오교오 에레구토론 가부시끼가이샤
다카시마 히로시
도오교오 에레구토론 큐우슈우 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이노우에 아키라, 도오교오 에레구토론 가부시끼가이샤, 다카시마 히로시, 도오교오 에레구토론 큐우슈우 가부시끼가이샤 filed Critical 이노우에 아키라
Publication of KR920010781A publication Critical patent/KR920010781A/en
Application granted granted Critical
Publication of KR0151159B1 publication Critical patent/KR0151159B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)

Abstract

내용 없음No content

Description

시일 기구를 가지는 구동장치Drive with seal mechanism

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명에 관한 세정장치의 전체적 구조를 나타낸 평면도,1 is a plan view showing the overall structure of the cleaning apparatus according to the present invention;

제2도는 제1도의 로더 부분을 나타낸 평면도.2 is a plan view of the loader portion of FIG.

Claims (13)

제1공간을 규정하는 제1커버와, 개방 끝단부를 구비하고, 이를 통하여 상기 제1커버를 네스팅 식으로 덮은 제2커버와, 상기 제2커버가 상기 제1커버와의 사이에 제2공간을 규정하는 것과, 상기 제1 및 제2커버를 축방향으로 상대적으로 이동시키기 위한 구동수단과, 상기 구동수단의 일부가 적어도 상기 제1공간내에 배열 설치되는 것과, 상기 제1커버의 둘레벽에 따른 상기 제2커버의 개방 끝단부의 이동범위에 미치도록 상기 제1 및 제2커버 둘레벽에 따라서 이들을 덮는 제3커버와, 상기 제3커버가 상기 제1 및 제2커버와의 사이에 제3공간을 규정하는 것과, 상기 제1공간을 양압 상태에 유지하는 급기(給氣)수단과, 상기 제1 및 제2커버의 축방향의 상대적인 이동에 의해 생기는 상기 제2공간의 용적 변화에 따라서 상기 제2공간에 대하여 가스를 공급 및 배출하여, 상기 제2공간의 압력을 실질적으로 일정하게 유지하는 압력 조정수단과, 상기 제3공간을 부압상태로 유지하는 배기수단을 구비하는 시일 기구를 가지는 구동장치.A second cover having a first cover defining a first space, an open end portion, through which the first cover is nested, and a second space between the first cover and the first cover; A driving means for relatively moving the first and second covers in the axial direction, a portion of the driving means being arranged at least in the first space, and a peripheral wall of the first cover. A third cover covering the first and second cover circumferential walls so as to extend a moving range of the open end of the second cover; and a third cover between the first and second covers. According to the volume change of the air supply means which defines a space, the air supply means which keeps a said 1st space in a positive pressure state, and the axial direction relative movement of the said 1st and 2nd cover, Supply and discharge gas to the second space And a seal mechanism comprising pressure adjusting means for keeping the pressure in the second space substantially constant, and exhaust means for maintaining the third space in a negative pressure state. 제1항에 있어서, 상기 제1 및 제2공간을 실질적으로 격리하는 시일 수단을 추가로 구비하는 시일 기구를 가지는 구동장치.The drive device according to claim 1, further comprising a seal mechanism further comprising a seal means for substantially insulating the first and second spaces. 제1항에 있어서, 상기 제3커버가 상기 제1커버와 일체적으로 형성되고, 상기 제2의 커버의 둘레벽과 대면하는 그 끝단부가 개방 끝단부이고, 다른쪽 끝단부가 폐쇄 끝단부인 시일 기구를 가지는 구동장치.The seal mechanism according to claim 1, wherein the third cover is integrally formed with the first cover, and an end thereof facing the circumferential wall of the second cover is an open end, and the other end is a closed end. Driving device having. 제2항에 있어서, 상기 시일 수단이 상기 제1커버에 대하여 고정되는 시일 기구를 가지는 구동장치.3. A drive device according to claim 2, wherein said sealing means has a sealing mechanism fixed to said first cover. 제1항에 있어서, 상기 구동수단이 상기 제1커버를 관통하고, 또한 상기 구동수단과 제2커버를 연결하는 샤프트를 구비하여, 상기 샤프트가 상기 제1커버를 관통하는 부분에 제2시일수단이 배열설치되는 시일 기구를 가지는 구동장치.2. The second sealing means according to claim 1, wherein the driving means has a shaft penetrating the first cover and further connects the driving means and the second cover, so that the shaft penetrates the first cover. A drive device having a seal mechanism provided with this arrangement. 제3항에 있어서, 상기 배기수단이 상기 제3커버의 상기 폐쇄 끝단부 근방으로부터 제3공간을 배기하는 시일 기구를 가지는 구동장치.4. The drive device according to claim 3, wherein the exhaust means has a seal mechanism for exhausting a third space from the vicinity of the closed end of the third cover. 제1항에 있어서, 상기 급기수단이 불활성 가스 공급수단으로 되는 시일 기구를 가지는 구동장치.The drive device according to claim 1, wherein the air supply means has a seal mechanism that serves as an inert gas supply means. 제1항에 있어서, 상기 압력 조정수단이, 공기의 도입 및 배출수단으로 되는 시일 기구를 가지는 구동장치.2. The drive device according to claim 1, wherein the pressure adjusting means has a sealing mechanism that serves as air introduction and discharge means. 제1공간을 규정하는 제1커버와, 개방 끝단부를 구비하고, 이를 개재하여 상기 제1커버를 네스팅식으로 덮는 제2커버와 상기 제1 및 제2커버를 상대적으로 이동시키기 위한 구동수단과, 상기 구동수단의 일부가 적어도 상기 제1공간내에 배열설치되는 것과, 상기 제1커버의 둘FP벽에 따른 상기 제2커버의 개방 끝단부의 이동범위 위에 미치도록 상기 제1 및 제2커버 둘레벽에 따라서 이들을 덮는 제3커버와, 상기 제3커버가 상기 제1 및 제2커버와의 사이에 제3공간을 규정하는 것과, 상기 제1공간을 양압상태로 유지하는 급기수단과, 상기 제3공간을 부압상태로 유지하는 배기수단을 구비하는 시일 기구를 가지는 구동장치.A first cover defining a first space, an open end portion, a second cover nestingly covering the first cover, and driving means for relatively moving the first and second covers; And a part of the driving means arranged at least in the first space, the first and second cover circumferential walls extending over the moving range of the open end of the second cover along the two FP walls of the first cover. A third cover which covers them, a third cover defining a third space between the first and second covers, supplying means for maintaining the first space in a positive pressure state, and the third cover. A drive device having a seal mechanism including an exhaust means for maintaining a space at a negative pressure. 제9항에 있어서, 상기 제1 및 제2공간을 실질적으로 격리하는 시일수단을 추가로 구비하는 시일 기구를 가지는 구동장치.10. A drive device according to claim 9, further comprising a seal mechanism further comprising a seal means for substantially insulating said first and second spaces. 제9항에 있어서, 상기 제3커버가, 상기 제1커버와 일체적으로 형성되고, 상기 제2커버의 둘레벽과 대면하는 그 끝단부가 개방 끝단부이고, 다른쪽 끝단부가 폐쇄 끝단부인 시일 기구를 가지는 구동장치.10. The sealing mechanism according to claim 9, wherein the third cover is integrally formed with the first cover, and an end thereof facing the circumferential wall of the second cover is an open end, and the other end is a closed end. Driving device having. 제9항에 있어서, 상기 급기수단이 불활성 가스 공급 수단으로 되는 시일 기구를 가지는 구동장치.10. The driving apparatus according to claim 9, wherein the air supply means has a seal mechanism that serves as an inert gas supply means. 제11항에 있어서, 상기 배기수단이 상기 제3커버의 상기 폐쇄 끝단부 근방으로부터 상기 제3공간을 배기하는 시일 기구를 가지는 구동장치.12. A drive apparatus according to claim 11, wherein said exhaust means has a seal mechanism for exhausting said third space from near said closed end of said third cover. ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.※ Note: This is to be disclosed by the original application.
KR1019910020980A 1990-11-28 1991-11-22 Driving apparatus having seal elements for cleaning KR0151159B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP02331313A JP3078834B2 (en) 1990-11-28 1990-11-28 Drive
JP90-331313 1990-11-28

Publications (2)

Publication Number Publication Date
KR920010781A true KR920010781A (en) 1992-06-27
KR0151159B1 KR0151159B1 (en) 1998-12-01

Family

ID=18242289

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910020980A KR0151159B1 (en) 1990-11-28 1991-11-22 Driving apparatus having seal elements for cleaning

Country Status (2)

Country Link
JP (1) JP3078834B2 (en)
KR (1) KR0151159B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4907310B2 (en) * 2006-11-24 2012-03-28 東京エレクトロン株式会社 Processing apparatus, processing method, and recording medium
JP5316180B2 (en) * 2009-04-08 2013-10-16 株式会社安川電機 Pre-aligner device, transport device including the same, and semiconductor manufacturing device
JP5465979B2 (en) 2009-10-26 2014-04-09 東京エレクトロン株式会社 Semiconductor manufacturing equipment

Also Published As

Publication number Publication date
JP3078834B2 (en) 2000-08-21
KR0151159B1 (en) 1998-12-01
JPH04196532A (en) 1992-07-16

Similar Documents

Publication Publication Date Title
KR910015790A (en) Scroll compressor
KR850002872A (en) Shroud Type Compressors
KR860009240A (en) Reversible Airtight Compressor and Its Operation Method
DE3274145D1 (en) Unitized lip seal
GB0202841D0 (en) Blower motor
ATE375444T1 (en) HOUSING COVER WITH ACOUSTICALLY ISOLATED STOP
KR920006679A (en) Pressure release device
CA2135546A1 (en) Ac traction motor with drive end bearing assembly for locomotive
KR920010781A (en) Drive with seal mechanism
US3957274A (en) Sealing arrangement for a machine with a cover insulated against structure-borne sound
US3123109A (en) Means for preventing loss of lubricant in gear chambers
JPS55142902A (en) Scroll fluid machine
ES2107069T5 (en) PISTON WITH BOARD.
FR2407377A1 (en) ROTARY CYLINDER
DE59908704D1 (en) Cylinder head gasket
FR2402770A1 (en) IMPROVEMENTS TO AIR-COOLED COMBUSTION ENGINES, IN ORDER TO REDUCE NOISE
KR840003343A (en) Valve Sealing Device
US11976440B2 (en) Working machine
JPS6132037B2 (en)
SU754166A1 (en) Apparatus for ventilating moving cabin
SU1087729A1 (en) Shaft seal
JPS5554610A (en) Structure of rotor bearing capable of preventing oil leakage
JPS61160665A (en) Breather device of transmission case in autobicycle
JPS54105700A (en) Glove box with half body suit
JPS6218831B2 (en)

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20080530

Year of fee payment: 11

LAPS Lapse due to unpaid annual fee