KR920006795A - 전 복소 광 변조 능력을 갖는 공간 광 변조기 - Google Patents
전 복소 광 변조 능력을 갖는 공간 광 변조기 Download PDFInfo
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- KR920006795A KR920006795A KR1019910016547A KR910016547A KR920006795A KR 920006795 A KR920006795 A KR 920006795A KR 1019910016547 A KR1019910016547 A KR 1019910016547A KR 910016547 A KR910016547 A KR 910016547A KR 920006795 A KR920006795 A KR 920006795A
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- modulation
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2/00—Demodulating light; Transferring the modulation of modulated light; Frequency-changing of light
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
- G09G3/346—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on modulation of the reflection angle, e.g. micromirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/37—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements
- G09F9/372—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements the positions of the elements being controlled by the application of an electric field
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/04—Structural and physical details of display devices
- G09G2300/0439—Pixel structures
- G09G2300/0443—Pixel structures with several sub-pixels for the same colour in a pixel, not specifically used to display gradations
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 전 복소 광 변조에 대한 프로세스의 프로우 챠트, 제3도는 본 발명에 따른 분할된 굴곡 비임형 DMD의 사시도, 제4도는 분할된 DMD의 평면도.
Claims (6)
- 빛을 전 복소 변조하기 위한 방법에 있어서, 화상요소를 다수의 변조 요소로 분할하는 단계, 번지 지정회로를 상기 각 변조 요소에 제공하는 단계, 원하는 순수 위상각 및 변조 진폭을 선택하는 단계, 상기 위상각 및 진폭을 이루기 위해 적절한 각을 결정하는 단계, 원하는 각 또는 각들을 이루기 위해 상기 변조 요소들을 번지 지정하는 단계, 및 상기 화상 요소로서 상기 변조 요소를 분해하는 단계를 포함하는 것을 특징으로 하는 방법.
- 제1항에 있어서, 상기 번지 지정회로가 1개의 변조 요소에 대응하는 1개의 요소인, 활성화 전극으로 구성되는 것을 특징으로 하는 방법.
- 제1항에 있어서, 상기 변조 요소들의 상기 번지 지정이 선정된 전압을 전극에 인가하는 것과, 상기 전극을 상기 변조 요소 바로 아래에 배치하는 것으로 이루어지는 것을 특징으로 하는 방법.
- 빛을 진폭 변조하기 위한 방법에 있어서, 화상 요소를 다수의 변조 요소로 분할하는 단계, 번지 지정회로를 상기 각 변조 요소에 제공하는 단계, 변조 진폭을 선택하는 단계, 상기 진폭을이루기 위해 적절한 위상각을 결정하는 단계, 상기 각을 이루기 위해 상기 변조 요소들을 번지 지정하는 단계, 입사 광을 상기 변조 요소상에 유도하는 단꼐, 및 상기 변조 요소들을 상기 화상 요소로 통합하는 단계를 포함하는 것을 특징으로 하는 방법.
- 각 화소가 공통의 수평 축을 따라 1/2로 분할되는, 적층 구조로 구성된 다수의 화상 요소, 기판, 상의 기판상의 스페이서 층, 상기 스페이서 상의 제1반사층, 상기 제1층상의 제2반사층, 및 전기적 번지 지정회로를 포함하는 상기 적층구조, 상기 반사 층에 형성된 정전기적으로 편향가능한 요소를 포함하고 상기 제1층에만 형성된 힌지에 의해 상기 반사 층의 잔여부분에 접속되는 각각의 상기 화소 각각의 상기 제1 및 제2편향 회로가 독립적으로 번지 지정 가능한 전기적 번지 지정 회로를 포함하고, 상기 스페이서가 상기 편향가능한 요소와 상기 활성화 전극 사이에 배치된 웰을 정하는 것을 특징으로 하는 공간 광변조기.
- 제1항에 있어서, 상기 변조기가 2개의 절반으로 분할되고, 스페이서가 2개의 절반 사이의 갭의 어느 단부에 배치되며, 상기 절반이 정전기력을 인가하면 독립적으로 편향될 수 있고, 상기 정전기력이 각각의 상기 절반 아래의 각 전극을 활성화하여 인가되는 것을 특징으로 하는 변조기.※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/590,405 US5148157A (en) | 1990-09-28 | 1990-09-28 | Spatial light modulator with full complex light modulation capability |
US590,405 | 1990-09-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR920006795A true KR920006795A (ko) | 1992-04-28 |
KR100231123B1 KR100231123B1 (ko) | 1999-11-15 |
Family
ID=24362124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910016547A KR100231123B1 (ko) | 1990-09-28 | 1991-09-20 | 전 복소 광 변조 능력을 갖는 공간 광 변조기 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5148157A (ko) |
EP (1) | EP0477566B1 (ko) |
JP (1) | JP3155307B2 (ko) |
KR (1) | KR100231123B1 (ko) |
DE (1) | DE69123676T2 (ko) |
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JP6593623B2 (ja) * | 2015-03-30 | 2019-10-23 | 株式会社ニコン | 空間光変調器の設定方法、駆動データの作成方法、露光装置、露光方法、およびデバイス製造方法 |
DE102016217785A1 (de) | 2016-09-16 | 2018-03-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Optische Anordnung zur Erzeugung von Lichtfeldverteilungen und Verfahren zum Betrieb einer optischen Anordnung |
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Publication number | Priority date | Publication date | Assignee | Title |
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US3886310A (en) * | 1973-08-22 | 1975-05-27 | Westinghouse Electric Corp | Electrostatically deflectable light valve with improved diffraction properties |
US4229732A (en) * | 1978-12-11 | 1980-10-21 | International Business Machines Corporation | Micromechanical display logic and array |
US4420897A (en) * | 1982-03-18 | 1983-12-20 | General Electric Company | Electroscopic display devices |
US4661809A (en) * | 1982-05-05 | 1987-04-28 | Litton Systems, Inc. | Magneto-optic chip with gray-scale capability |
US4793699A (en) * | 1985-04-19 | 1988-12-27 | Canon Kabushiki Kaisha | Projection apparatus provided with an electro-mechanical transducer element |
EP0332953B1 (en) * | 1988-03-16 | 1993-09-15 | Texas Instruments Incorporated | Spatial light modulator and method |
US4954789A (en) * | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
-
1990
- 1990-09-28 US US07/590,405 patent/US5148157A/en not_active Expired - Lifetime
-
1991
- 1991-08-28 EP EP91114435A patent/EP0477566B1/en not_active Expired - Lifetime
- 1991-08-28 DE DE69123676T patent/DE69123676T2/de not_active Expired - Fee Related
- 1991-09-20 KR KR1019910016547A patent/KR100231123B1/ko not_active IP Right Cessation
- 1991-09-27 JP JP24949191A patent/JP3155307B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69123676T2 (de) | 1997-04-17 |
DE69123676D1 (de) | 1997-01-30 |
JPH0688943A (ja) | 1994-03-29 |
EP0477566A2 (en) | 1992-04-01 |
KR100231123B1 (ko) | 1999-11-15 |
EP0477566A3 (en) | 1992-05-13 |
JP3155307B2 (ja) | 2001-04-09 |
EP0477566B1 (en) | 1996-12-18 |
US5148157A (en) | 1992-09-15 |
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