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구금속분 스파터링(SPOTTERING)장치Old metal powder sputtering device
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1도는 본 발명의 실시예에 따른 구성을 보인 개략도.1 is a schematic view showing a configuration according to an embodiment of the present invention.
Claims (1)
진공조(1)내부에 스파터(2)가 내설된 스파터링 장치에 있어서, 진공조(1)와 스파터(2)에는 각기 진공펌프에 연결된 진공로(3)(4)가 형성되고 진공조(1)의 진공로(4)에는 밸프(5)가 착설되며, 스파터(2), 상부와, 하부에는 전극(6)(7)이 상호대향되게 착설되고, 전극(6)(7)사이에 피복기재(8)와 서어보모터(9)의 구동에 의하여 회전되는 피도물재치대(11)를 착설하고 피복기재(8) 주위에 냉수공급호(13)를 설치한 귀금속분스파터링 장치.In the spattering apparatus in which the spatter 2 is embedded in the vacuum chamber 1, the vacuum chamber 1 and the spatter 2 are formed with vacuum paths 3 and 4 respectively connected to the vacuum pump. A valve 5 is installed in the vacuum furnace 4 of the tank 1, and the electrodes 6, 7 are installed in the spatter 2, the upper part, and the lower part so as to face each other, and the electrodes 6, 7 The precious metal powder spatter ring in which the workpiece holder 11 rotated by the driving of the sheathing base 8 and the servomotor 9 is installed between them, and a cold water supply arc 13 is installed around the sheathing base 8. Device.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019900005940A1990-04-271990-04-27
Precious Metal Spattering Device
KR910018571A
(en)
PROCEDURE FOR THE ABSORPTION OF CO 2..H2S AND SIMILAR IMPURITIES AND REGENERATION OF THE SOLUTION WITH HEAT RETURN IN THE REGENERATION COLUMN BY A CURRENT OF INERT GASES