KR910015883A - 감광성 필름 형성 공중합체 및 그로 구성되는 조성물 및 그로써 네가티브 또는 포지티브 사진 상을 제조하는 방법 - Google Patents

감광성 필름 형성 공중합체 및 그로 구성되는 조성물 및 그로써 네가티브 또는 포지티브 사진 상을 제조하는 방법 Download PDF

Info

Publication number
KR910015883A
KR910015883A KR1019910002477A KR910002477A KR910015883A KR 910015883 A KR910015883 A KR 910015883A KR 1019910002477 A KR1019910002477 A KR 1019910002477A KR 910002477 A KR910002477 A KR 910002477A KR 910015883 A KR910015883 A KR 910015883A
Authority
KR
South Korea
Prior art keywords
copolymer
group
photosensitive
composition
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019910002477A
Other languages
English (en)
Korean (ko)
Inventor
우 쳉지우
엠 무어링 앤
티이 야아들리 제임즈
Original Assignee
우 쳉지우
엠 무어링 앤
티이 야아들리 제임즈
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 우 쳉지우, 엠 무어링 앤, 티이 야아들리 제임즈 filed Critical 우 쳉지우
Publication of KR910015883A publication Critical patent/KR910015883A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/039Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03CPHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00Photosensitive materials
    • G03C1/52Compositions containing diazo compounds as photosensitive substances
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0048Photosensitive materials characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Materials For Photolithography (AREA)
KR1019910002477A 1990-02-16 1991-02-13 감광성 필름 형성 공중합체 및 그로 구성되는 조성물 및 그로써 네가티브 또는 포지티브 사진 상을 제조하는 방법 Withdrawn KR910015883A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US48073390A 1990-02-16 1990-02-16
US480733 1990-02-16

Publications (1)

Publication Number Publication Date
KR910015883A true KR910015883A (ko) 1991-09-30

Family

ID=23909140

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910002477A Withdrawn KR910015883A (ko) 1990-02-16 1991-02-13 감광성 필름 형성 공중합체 및 그로 구성되는 조성물 및 그로써 네가티브 또는 포지티브 사진 상을 제조하는 방법

Country Status (3)

Country Link
EP (1) EP0442755A3 (enExample)
KR (1) KR910015883A (enExample)
TW (1) TW207574B (enExample)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0136110A3 (en) * 1983-08-30 1986-05-28 Mitsubishi Kasei Corporation Positive photosensitive compositions useful as photoresists
US4596763A (en) * 1984-10-01 1986-06-24 American Hoechst Corporation Positive photoresist processing with mid U-V range exposure
DE3686032T2 (de) * 1985-12-27 1993-02-18 Japan Synthetic Rubber Co Ltd Strahlungsempfindliche positiv arbeitende kunststoffzusammensetzung.
JPS63167351A (ja) * 1986-12-22 1988-07-11 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン フォトレジスト組成物
DE3810631A1 (de) * 1988-03-29 1989-10-12 Hoechst Ag Positiv arbeitendes lichtempfindliches gemisch und daraus hergestelltes aufzeichnungsmaterial mit hohem waermestand

Also Published As

Publication number Publication date
EP0442755A2 (en) 1991-08-21
EP0442755A3 (en) 1991-10-23
TW207574B (enExample) 1993-06-11

Similar Documents

Publication Publication Date Title
CN1930524B (zh) 使具有面涂层的深紫外线光致抗蚀剂成像的方法及其材料
KR930001349A (ko) 레지스트 물질 및 패턴 형성 방법
KR870011504A (ko) 신규의 혼합 에스테르-함유 감광제 조성물
TWI776174B (zh) 包含光酸產生劑的抗反射塗料組成物、經塗覆的基底和形成圖案之方法
US8088564B2 (en) Base soluble polymers for photoresist compositions
KR102798349B1 (ko) 오버코팅된 포토레지스트를 위한 코팅된 하층
KR950001416A (ko) 네가형 감광성 조성물 및 이것을 사용한 패턴의 형성방법
KR860003538A (ko) 감광성 내식막의 제조방법
JP2000038417A (ja) 環状ジオン重合体
US20200326623A1 (en) A negative tone lift off resist composition comprising an alkali soluble resin and cross linkers and a method for manufacturing metal film patterns on a substrate
KR910001465A (ko) 감광성 조성물, 그로 구성되는 광그래피 성분 및 광 그래피상을 제조하는 방법
KR910015883A (ko) 감광성 필름 형성 공중합체 및 그로 구성되는 조성물 및 그로써 네가티브 또는 포지티브 사진 상을 제조하는 방법
TW202146487A (zh) 聚合物、包含其之底層塗料組成物及圖案化方法
EP0017563B1 (fr) Article pour la réalisation d'auxiliaires visuels comportant un support transparent et revêtu d'une composition photopolymérisable
JPH03241355A (ja) 感光性エレメント
KR970049033A (ko) 영상 콘트라스트가 향상된 수성 현상성의 음화 작용성 감광 조성물
TW202018419A (zh) 聚合物主鏈中含有雜原子之阻劑下層膜形成組成物
KR890002712A (ko) 쿠르쿠민을 함유하는 영상반전 네가티브 작용성 포토레지스트
KR900005232A (ko) 음화 상 생성방법.
KR910003448A (ko) 감광성 조성물, 그로 구성되는 감광성 요소 및 그로써 음성상을 제조하는 방법
CA2037385A1 (en) Dual-tone imaging using novolac photoresists and carbodiimides
US5316891A (en) Fine pattern forming method
de Grandpre et al. A totally aqueous developable bilayer resist system
EP0506593B1 (en) Uniformly coated photoresist compositions
KR910014752A (ko) 포지티브 작용 감광성 내식막 조성물, 그를 포함한 사진소자 및 그의 제조 방법

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19910213

PG1501 Laying open of application
PC1202 Submission of document of withdrawal before decision of registration

Comment text: [Withdrawal of Procedure relating to Patent, etc.] Withdrawal (Abandonment)

Patent event code: PC12021R01D

Patent event date: 19920516

WITB Written withdrawal of application