KR910012325A - 레이저 스퍼터링장치 - Google Patents
레이저 스퍼터링장치 Download PDFInfo
- Publication number
- KR910012325A KR910012325A KR1019900020621A KR900020621A KR910012325A KR 910012325 A KR910012325 A KR 910012325A KR 1019900020621 A KR1019900020621 A KR 1019900020621A KR 900020621 A KR900020621 A KR 900020621A KR 910012325 A KR910012325 A KR 910012325A
- Authority
- KR
- South Korea
- Prior art keywords
- laser
- equalizing
- light intensity
- sputtering apparatus
- optical device
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/1224—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in vacuum
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
Abstract
내용 없음.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 본 발명의 제1의 실시예에 있어서의 레이저 스퍼터링장치의 구성도.
제 2 도는 제 1 도의 비구면렌즈와 레이저광강도분포와의 관계의 개념도.
Claims (3)
- 펄스광을 출사하는 레이저발진기의 레이저광을 레이저광강도를 균일화하는 광학장치를 통해서 진공조내에 설치한 타게트상에 조사시키는 광학계를 구비한 것을 특징으로하는 레이저 스퍼터링장치.
- 제 1 항에 있어서, 레이저광강도를 균일화하는 광학장치가, 비구면렌즈의 조합, 또는 비구면미터의 조합인 것을 특징으로 하는 레이저 스퍼터링장치.
- 제 1 항에 있어서, 레이저광강도를 균일화하는 광학장치가, 통형상산란장치인 것을 특징으로 하는 레이저스퍼터링장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1325060A JPH03188272A (ja) | 1989-12-14 | 1989-12-14 | レーザ・スパッタリング装置 |
JP1-325060 | 1989-12-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR910012325A true KR910012325A (ko) | 1991-08-07 |
KR930009990B1 KR930009990B1 (ko) | 1993-10-13 |
Family
ID=18172707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900020621A KR930009990B1 (ko) | 1989-12-14 | 1990-12-14 | 레이저스 피터링장치 |
Country Status (3)
Country | Link |
---|---|
US (1) | US5159169A (ko) |
JP (1) | JPH03188272A (ko) |
KR (1) | KR930009990B1 (ko) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0584587A (ja) * | 1991-09-27 | 1993-04-06 | Fanuc Ltd | レーザ加工方法及び装置 |
JPH05331632A (ja) * | 1992-06-01 | 1993-12-14 | Matsushita Electric Ind Co Ltd | レーザーアブレーション装置と薄膜形成方法 |
JP3255469B2 (ja) * | 1992-11-30 | 2002-02-12 | 三菱電機株式会社 | レーザ薄膜形成装置 |
JP3623001B2 (ja) * | 1994-02-25 | 2005-02-23 | 住友電気工業株式会社 | 単結晶性薄膜の形成方法 |
US5490912A (en) * | 1994-05-31 | 1996-02-13 | The Regents Of The University Of California | Apparatus for laser assisted thin film deposition |
US6113751A (en) * | 1998-08-06 | 2000-09-05 | Lockheed Martin Corporation | Electromagnetic beam assisted deposition method for depositing a material on an irradiated substrate |
JP3268443B2 (ja) * | 1998-09-11 | 2002-03-25 | 科学技術振興事業団 | レーザ加熱装置 |
US20040188401A1 (en) * | 2003-03-28 | 2004-09-30 | Sadao Mori | Laser processing apparatus |
DE102012012275B9 (de) * | 2012-06-21 | 2014-11-27 | Carl Zeiss Microscopy Gmbh | Bearbeitungssystem zur mikro-materialbearbeitung |
US11890807B1 (en) | 2017-08-31 | 2024-02-06 | Blue Origin, Llc | Systems and methods for controlling additive manufacturing processes |
US11819943B1 (en) * | 2019-03-28 | 2023-11-21 | Blue Origin Llc | Laser material fusion under vacuum, and associated systems and methods |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4758533A (en) * | 1987-09-22 | 1988-07-19 | Xmr Inc. | Laser planarization of nonrefractory metal during integrated circuit fabrication |
US5017277A (en) * | 1988-07-07 | 1991-05-21 | Matsushita Electric Industrial Co., Ltd. | Laser sputtering apparatus |
JPH082511B2 (ja) * | 1989-05-08 | 1996-01-17 | 松下電器産業株式会社 | レーザ加工装置 |
-
1989
- 1989-12-14 JP JP1325060A patent/JPH03188272A/ja active Pending
-
1990
- 1990-12-14 US US07/627,931 patent/US5159169A/en not_active Expired - Fee Related
- 1990-12-14 KR KR1019900020621A patent/KR930009990B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US5159169A (en) | 1992-10-27 |
KR930009990B1 (ko) | 1993-10-13 |
JPH03188272A (ja) | 1991-08-16 |
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