KR910003741B1 - 요-철 윤곽을 가지는 금속판을 화학증착법에 의해 형성하는 방법 및 장치 - Google Patents

요-철 윤곽을 가지는 금속판을 화학증착법에 의해 형성하는 방법 및 장치 Download PDF

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Publication number
KR910003741B1
KR910003741B1 KR1019880014965A KR880014965A KR910003741B1 KR 910003741 B1 KR910003741 B1 KR 910003741B1 KR 1019880014965 A KR1019880014965 A KR 1019880014965A KR 880014965 A KR880014965 A KR 880014965A KR 910003741 B1 KR910003741 B1 KR 910003741B1
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South Korea
Prior art keywords
contour
metal plate
mask
contour surface
die
Prior art date
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Expired
Application number
KR1019880014965A
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English (en)
Korean (ko)
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KR890008342A (ko
Inventor
슈우스께 마쓰무라
하지메 고지마
다까히로 미야노
Original Assignee
마쓰시다 덴꼬오 가부시끼가이샤
미요시 도시오
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Publication of KR890008342A publication Critical patent/KR890008342A/ko
Application granted granted Critical
Publication of KR910003741B1 publication Critical patent/KR910003741B1/ko
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26B—HAND-HELD CUTTING TOOLS NOT OTHERWISE PROVIDED FOR
    • B26B19/00—Clippers or shavers operating with a plurality of cutting edges, e.g. hair clippers, dry shavers
    • B26B19/38—Details of, or accessories for, hair clippers, or dry shavers, e.g. housings, casings, grips, guards
    • B26B19/384—Dry-shaver foils; Manufacture thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/047—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Chemical Vapour Deposition (AREA)
KR1019880014965A 1987-11-13 1988-11-14 요-철 윤곽을 가지는 금속판을 화학증착법에 의해 형성하는 방법 및 장치 Expired KR910003741B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62-287623 1987-11-13
JP28762387 1987-11-13

Publications (2)

Publication Number Publication Date
KR890008342A KR890008342A (ko) 1989-07-10
KR910003741B1 true KR910003741B1 (ko) 1991-06-10

Family

ID=17719649

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880014965A Expired KR910003741B1 (ko) 1987-11-13 1988-11-14 요-철 윤곽을 가지는 금속판을 화학증착법에 의해 형성하는 방법 및 장치

Country Status (3)

Country Link
US (1) US4867223A (https=)
KR (1) KR910003741B1 (https=)
DE (1) DE3837442A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160042267A (ko) * 2014-10-07 2016-04-19 에스엔유 프리시젼 주식회사 모노머 진공 증착 장치

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2747036B2 (ja) * 1989-07-07 1998-05-06 日本電信電話株式会社 薄膜形成方法
US5139825A (en) * 1989-11-30 1992-08-18 President And Fellows Of Harvard College Process for chemical vapor deposition of transition metal nitrides
US5383512A (en) * 1993-01-27 1995-01-24 Midwest Research Institute Method for fabricating a substrate having spaced apart microcapillaries thereon
DE4440386A1 (de) * 1994-11-11 1996-05-15 Pacesetter Ab Elektroden für medizinische Anwendungen
US6463992B1 (en) * 2000-03-22 2002-10-15 Pratt & Whitney Canada Corp. Method of manufacturing seamless self-supporting aerodynamically contoured sheet metal aircraft engine parts using nickel vapor deposition
US7191522B2 (en) * 2004-06-04 2007-03-20 Rovcal, Inc. Cutting blade and cutting blade assembly for electric shaver

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2685121A (en) * 1949-05-07 1954-08-03 Ohio Commw Eng Co Method and apparatus for manufacture of metal films
US2701901A (en) * 1952-04-03 1955-02-15 Ohio Commw Eng Co Method of manufacturing thin nickel foils
US3176356A (en) * 1962-07-12 1965-04-06 Union Carbide Corp Method and apparatus for obtaining release of gas plated metal deposits from substrate surfaces
US3608615A (en) * 1970-08-20 1971-09-28 Phelps Dodge Corp Foil production
JPS59197560A (ja) * 1983-04-22 1984-11-09 Nec Corp レ−ザ利用金属堆積方法
JPS6055123A (ja) * 1983-09-05 1985-03-30 Nishimatsu Kensetsu Kk 誘導杭を移動する地中連続壁掘削方法、並びに、その装置
JPS61235059A (ja) * 1985-04-10 1986-10-20 Mitsui Eng & Shipbuild Co Ltd アモルフアス金属部材の製作方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160042267A (ko) * 2014-10-07 2016-04-19 에스엔유 프리시젼 주식회사 모노머 진공 증착 장치

Also Published As

Publication number Publication date
DE3837442C2 (https=) 1990-10-31
US4867223A (en) 1989-09-19
KR890008342A (ko) 1989-07-10
DE3837442A1 (de) 1989-05-24

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