KR900002434B1 - Manufacture method of electro-luminescence elements displaying many colors - Google Patents

Manufacture method of electro-luminescence elements displaying many colors Download PDF

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KR900002434B1
KR900002434B1 KR1019870009596A KR870009596A KR900002434B1 KR 900002434 B1 KR900002434 B1 KR 900002434B1 KR 1019870009596 A KR1019870009596 A KR 1019870009596A KR 870009596 A KR870009596 A KR 870009596A KR 900002434 B1 KR900002434 B1 KR 900002434B1
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fluorescent layer
insulating layer
pattern
layer
display device
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KR890004197A (en
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윤기천
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삼성전관 주식회사
김정배
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/23—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  for the control of the colour

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Abstract

The manufacturing method of a multi-colored EL display device for improving the space resolution has the following steps (a) coating a transparent conductive film (11) and a lower insulating layer (10) in sequence on the substrate (12); (b) depositing a graphite film (13) on the lower insulating layer; (c) coating a first fluorescent layer (3) ad a second fluorescent layer (9) and forming a pattern; (d) coating an upper insulating layer (2) and electrode (1).

Description

다색칼라 EL 표시소자의 제조방법Manufacturing method of multicolor color EL display device

제 1 도는 종래의 스택드 포스퍼방법에 의한 다색칼라 EL 표시소자의 단면도.1 is a cross-sectional view of a multicolor color EL display element by a conventional stacked phosphor method.

제 2 도는 종래의 패턴드 포스퍼방법에 의한 다색칼라 EL 표시소자 단면도.2 is a cross-sectional view of a multicolored color EL display device by a conventional patterned phosphor method.

제 3 도는 본 발명의 패턴드 포스퍼방법에 의한 다색칼라 EL 표시소자의 제조공정도.3 is a manufacturing process diagram of a multicolor color EL display device by the patterned phosphor method of the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 상부전극 2 : 상부절연층1: upper electrode 2: upper insulation layer

3 : 제 1 형광층 4 : 제 1 하부 절연층3: first fluorescent layer 4: first lower insulating layer

5 : 제 1 하부전극 6 : 중간절연층5: first lower electrode 6: intermediate insulating layer

7 : 제 2 상부전극 8 : 제 2 상부절연층7 second upper electrode 8 second upper insulating layer

9 : 제 2 형광층 10 : 하부절연층9 second fluorescent layer 10 lower insulating layer

11 : 투명도전막 12 : 기판11 transparent conductive film 12 substrate

13 : 흑연막 14 : 포토레지스터13 graphite film 14 photoresist

본 발명은 패턴드 포스퍼(Patterned phospher)방법을 이용한 다색칼라 EL 표시소자에 관한 것으로, 특히 하부절연층위에 흑연막을 도포하여 패턴을 형성한 후 형광체를 순차적으로 증착하여 형광층을 패턴화하는 다색칼라 EL 표시소자의 제조방법에 관한 것이다. 일반적으로 다색칼라 EL 표시소자를 제조하는 방법에는 스택드 포스퍼(Stacked phosphor)방법과 패턴드 포스퍼방법이 있다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multicolor color EL display device using a patterned phospher method, and in particular, to form a pattern by applying a graphite film on a lower insulating layer, and then deposit phosphors sequentially to multicolor the fluorescent layer. A manufacturing method of a color EL display element is provided. In general, a method of manufacturing a multicolor color EL display device includes a stacked phosphor method and a patterned phosphor method.

제 1 도는 스택트 포스퍼방법에 의해 제조된 다색칼라 EL 표시소자의 단면도를 나타낸 것이다. 스택트 포스퍼방법은 오래전부터 연구되어 왔는데, 제 1 형광층(3)에서 발광되는 휘도(a)가 제 2 형광층(9)에서 발광되는 휘도(b)에 비해 상대적으로 감소되는 문제점이 있다.1 shows a cross-sectional view of a multicolor color EL display device manufactured by a stack phosphor method. The stack phosphor method has been studied for a long time, and there is a problem in that the luminance a emitted from the first fluorescent layer 3 is reduced relative to the luminance b emitted from the second fluorescent layer 9. .

상기한 상대적인 발광휘도의 감소를 위해 패턴드 포스퍼방법에 의한 다색칼라 EL 표시소자의 제조방법이 제안되고 있는데, 제 2 도는 패턴드 포스퍼방법에 의해 제조된 다색칼라 EL 표시소자의 단면도를 나타낸 것이다.In order to reduce the relative light emission luminance, a method of manufacturing a multicolor color EL display device by a patterned phosphor method has been proposed. FIG. 2 shows a cross-sectional view of a multicolor color EL display device manufactured by a patterned phosphor method. will be.

상기 다색칼라 EL 표시소자는 투명도전막(11)위에 하부절연층(10)을 코팅한 후 제 1 형광층(3)과 제 2 형광층(9)을 순차적으로 코팅하여 포토리소그라피(Photolithography)공정으로 형광층 패턴을 형성하고, 상기 형성된 형광층 패턴위에 상부절연층(2)과 상부전극(1)을 순차적으로 형성하였다. 상기한 패턴드 포스퍼방법으로 다색칼라 EL 표시소자를 제조하는데 있어서, 투명도전막(11)위에 하부절연층(10)을 코팅 한 후 제 1 형광층(3)과 제 2 형광층(9)을 순차적으로 코팅하여 포토리소그라피 공정으로 미세하게 형광층 패턴을 형성하면, 형광체에 가해지는 화공약품에 의한 형광체의 형광 효율 감소등으로 인하여 휘도가 감소되며, 따라서 공간해상도를 증가시킬 수 없는 문제점이 있었다. 본 발명은 상기의 문제점을 해결하기 위해 안출된 패턴드 포스퍼방식의 다색칼라 EL 표시소자의 제조방법으로써, 하부절연층위에 흑연막을 도포하여 패턴을 형성한 후 형광체를 순차적으로 증착하여 형광층의 패턴을 형성하므로써 형광층의 패턴형성시 포토리소그라피공정에서 발생하는 화공약품에 의한 형광체의 효율감소를 방지하여 발광휘도를 증가시키며, 미세패턴을 형성하여 공간해상도를 증가시키는 것이 그 목적이다. 이하에 첨부된 도면을 참조하여 본 고안의 실시예를 상세히 설명한다.In the multicolor color EL display device, the lower insulating layer 10 is coated on the transparent conductive film 11, and then the first fluorescent layer 3 and the second fluorescent layer 9 are sequentially coated to perform a photolithography process. A fluorescent layer pattern was formed, and an upper insulating layer 2 and an upper electrode 1 were sequentially formed on the formed fluorescent layer pattern. In manufacturing a multicolor color EL display device using the patterned phosphor method, after coating the lower insulating layer 10 on the transparent conductive film 11, the first fluorescent layer 3 and the second fluorescent layer 9 are coated. When the fluorescent layer pattern is finely formed by sequentially coating the photolithography process, the luminance is decreased due to the decrease in the fluorescence efficiency of the phosphor by chemicals applied to the phosphor, and thus there is a problem in that the spatial resolution cannot be increased. The present invention provides a method of manufacturing a patterned phosphor type multicolor color EL display device, which is designed to solve the above problems. The purpose of the pattern is to prevent the decrease in the efficiency of the phosphor due to chemicals generated in the photolithography process during the pattern formation of the fluorescent layer to increase the light emission luminance, and to form a fine pattern to increase the spatial resolution. Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

제 3 도는 본 발명의 패턴드 포스퍼방식에 의한 다색칼라 EL 표시소자의 제조공정도를 나타낸 것이다. 투명도전막(11)이 코팅되어있는 기판(12)위에 스퍼터링방식에 의해 하부절연층(10)을 코팅하고, 하부절연층(10)위에 흑연(13)을 스피나로 코팅하면 제 3-a도와 같이 되며, 이때 코팅한 흑연막(13)의 두께는 스피나의 속도를 변화시켜 0.3-1.0υm 까지 얻을 수 있다. 흑연막(12)의 두께는 원하는 형광체의 두께와 같아야 하는데, 흑연막(12)의 패턴은 포토리소그라피방법에 의하여 제 3-b도와 같이 얻을 수 있다. 흑연막(13)의 폭은 표시소자의 피치(pitch)와 관계가 있으므로 본 발명에서는 흑연막(13)의 폭을 화소와 화소사이의 거리의

Figure kpo00001
로 정하여 흑연막(13)에 의한 공간해상도의 감소를 방지할 수 있다.3 shows a manufacturing process diagram of a multicolor color EL display device by a patterned phosphor method of the present invention. When the lower insulating layer 10 is coated on the substrate 12 on which the transparent conductive film 11 is coated by sputtering, and the graphite 13 is coated with spinna on the lower insulating layer 10 as shown in FIG. At this time, the thickness of the coated graphite film 13 can be obtained up to 0.3-1.0υm by changing the speed of the spinner. The thickness of the graphite film 12 should be equal to the thickness of the desired phosphor, and the pattern of the graphite film 12 can be obtained as shown in FIG. 3-b by the photolithography method. Since the width of the graphite film 13 is related to the pitch of the display element, in the present invention, the width of the graphite film 13 is determined by the distance between the pixel and the pixel.
Figure kpo00001
Decreasing the spatial resolution by the graphite film 13 can be prevented.

상기와 같이 흑연막(13)의 패턴을 형성한 후 제 1 형광층(3)을 전자빔으로 증착하여, 포토리소그라피방법으로 제 3-c 도와 같이 패턴을 형성하고, 제 2 형광층(9)을 다시 전자빔으로 증착하면 제 3-d 도와 같이 된다.After the pattern of the graphite film 13 is formed as described above, the first fluorescent layer 3 is deposited by an electron beam to form a pattern as in the 3-c diagram by a photolithography method, and the second fluorescent layer 9 is formed. When deposited again with an electron beam, it becomes like a 3-d degree.

제 2 형광층(9)을 형성 한 후 리프트-오프 방식에 의하여 필요없는 부분을 제거하여 제 3-e도와 같이 두 형광층의 패턴을 형성하고, 상기한 바와같이 형광층(3,9)을 형성한 후 상부 절연층(2)과 상부전극(1)을 스퍼터링방법으로 순차적으로 코팅하면 제 2-f 도와 같은 다색칼라 EL 표시소자를 얻을 수 있다.After the second fluorescent layer 9 is formed, unnecessary portions are removed by a lift-off method to form a pattern of two fluorescent layers as shown in FIG. 3-e, and the fluorescent layers 3 and 9 are formed as described above. After the formation, the upper insulating layer 2 and the upper electrode 1 are sequentially coated by a sputtering method, thereby obtaining a multicolor color EL display device as shown in FIG.

상기한 바와 같이 제조된 다색칼라 EL 표시소자는 두형광층(3,9)의 패턴을 형성할 때 흑연막(13)이 있어서 포토리소그라피공정 및 리프트오프공정시 화공약품에 의한 형광체의 형광효율의 감소를 방지할 수 있어 발광휘도를 증가시키며, 미세패턴을 형성할 수 없이 공간해상도를 증가시키고, 또한 흑연막(13)으로 인해 상대적 콘트라스트를 향상시킬 수 있다.The multicolored color EL display device fabricated as described above has a graphite film 13 when forming patterns of the two fluorescent layers 3 and 9, so that the fluorescence efficiency of the phosphor by chemicals during the photolithography process and the lift-off process The reduction can be prevented to increase the luminance of light emission, to increase the spatial resolution without forming a fine pattern, and to improve the relative contrast due to the graphite film 13.

Claims (1)

기판(12)위에 투명도전막(11)과 하부절연층(10)을 순차적으로 코팅한 후 제 1 형광층(3)과 제 2 형광층(9)을 코팅하여 형광층패턴을 형성하고, 상부절연층(2)과 상부전극(1)이 순차적으로 코팅된 다색칼라 EL 표시소자에 있어서, 상기 하부절연층(10)위에 흑연막(13)을 도포하여 패턴을 형성한 후 상기 제 1 형광층(3)과 상기 제 2 형광층(9)을 순차적으로 증착하여 형광층을 패턴화하는 것을 특징으로 하는 다색칼라 EL 표시소자의 제조방법.The transparent conductive film 11 and the lower insulating layer 10 are sequentially coated on the substrate 12, and then, the first fluorescent layer 3 and the second fluorescent layer 9 are coated to form a fluorescent layer pattern. In the multicolor color EL display device in which the layer 2 and the upper electrode 1 are sequentially coated, the first fluorescent layer may be formed by applying a graphite film 13 on the lower insulating layer 10 to form a pattern. 3) and the second fluorescent layer (9) are sequentially deposited to pattern the fluorescent layer.
KR1019870009596A 1987-08-31 1987-08-31 Manufacture method of electro-luminescence elements displaying many colors KR900002434B1 (en)

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