KR880700261A - Tin oxide thin film gas sensor element - Google Patents

Tin oxide thin film gas sensor element

Info

Publication number
KR880700261A
KR880700261A KR1019860700721A KR860700721A KR880700261A KR 880700261 A KR880700261 A KR 880700261A KR 1019860700721 A KR1019860700721 A KR 1019860700721A KR 860700721 A KR860700721 A KR 860700721A KR 880700261 A KR880700261 A KR 880700261A
Authority
KR
South Korea
Prior art keywords
thin film
tin oxide
sensor element
gas sensor
oxide thin
Prior art date
Application number
KR1019860700721A
Other languages
Korean (ko)
Other versions
KR940002511B1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of KR880700261A publication Critical patent/KR880700261A/en
Application granted granted Critical
Publication of KR940002511B1 publication Critical patent/KR940002511B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
KR1019860700721A 1985-02-20 1986-02-19 Gas sensor element of tin oxide film KR940002511B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP32228/1985 1985-02-20
JP60032228A JPS61191954A (en) 1985-02-20 1985-02-20 Metal oxide thin film gas sensor element
PCT/JP1986/000077 WO1986004989A1 (en) 1985-02-20 1986-02-19 Gas sensor element of tin oxide film

Publications (2)

Publication Number Publication Date
KR880700261A true KR880700261A (en) 1988-02-22
KR940002511B1 KR940002511B1 (en) 1994-03-25

Family

ID=12353109

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860700721A KR940002511B1 (en) 1985-02-20 1986-02-19 Gas sensor element of tin oxide film

Country Status (4)

Country Link
JP (1) JPS61191954A (en)
KR (1) KR940002511B1 (en)
GB (2) GB2182448B (en)
WO (1) WO1986004989A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0643978B2 (en) * 1986-06-27 1994-06-08 大阪瓦斯株式会社 Gas sensor and manufacturing method thereof
GB9512929D0 (en) * 1995-06-24 1995-08-30 Sun Electric Uk Ltd Multi-gas sensor systems for automatic emissions measurement
US6134944A (en) * 1999-04-29 2000-10-24 The Regents Of The University Of California System and method for preconcentrating, identifying, and quantifying chemical and biological substances
JP5350593B2 (en) * 2007-01-15 2013-11-27 キャタピラー エス エー アール エル Panel manufacturing method
DE102013218840A1 (en) 2013-09-19 2015-03-19 Robert Bosch Gmbh Micro hot plate device and sensor with a micro hotplate device
CN104568002B (en) * 2014-12-26 2017-05-03 昆山工研院新型平板显示技术中心有限公司 Environmental detection device
CN107315033B (en) 2016-04-26 2021-08-06 新唐科技日本株式会社 Gas detection device and hydrogen detection method
CN107315034B (en) 2016-04-26 2021-06-08 新唐科技日本株式会社 Gas detection device and hydrogen detection method
CN106092200A (en) * 2016-07-08 2016-11-09 南京信息工程大学 A kind of environmental detection set
WO2018123674A1 (en) 2016-12-28 2018-07-05 パナソニックＩｐマネジメント株式会社 Gas detection device, gas sensor system, fuel cell vehicle, and hydrogen detection method
CN110114662B (en) 2016-12-28 2022-03-18 新唐科技日本株式会社 Gas detection device, gas detection system, fuel cell vehicle, and gas detection method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424094A (en) * 1977-07-26 1979-02-23 Fuji Electric Co Ltd Production of gas detecting element
JPS5811844A (en) * 1981-07-15 1983-01-22 Matsushita Electric Ind Co Ltd Gaseous no2 detector and detecting method
JPS5983046A (en) * 1982-11-02 1984-05-14 Hitachi Ltd Gas sensor and preparation thereof
JPS5990040A (en) * 1982-11-15 1984-05-24 Matsushita Electric Ind Co Ltd Detector for gaseous carbon monoxide

Also Published As

Publication number Publication date
JPS61191954A (en) 1986-08-26
GB8625006D0 (en) 1986-11-19
KR940002511B1 (en) 1994-03-25
GB8624904D0 (en) 1986-11-19
WO1986004989A1 (en) 1986-08-28
GB2182448B (en) 1989-01-11
GB2182448A (en) 1987-05-13
JPH053895B2 (en) 1993-01-18

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