KR880013007A - 평균 원자수의 정량 분석방법 - Google Patents

평균 원자수의 정량 분석방법 Download PDF

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Publication number
KR880013007A
KR880013007A KR1019880004124A KR880004124A KR880013007A KR 880013007 A KR880013007 A KR 880013007A KR 1019880004124 A KR1019880004124 A KR 1019880004124A KR 880004124 A KR880004124 A KR 880004124A KR 880013007 A KR880013007 A KR 880013007A
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KR
South Korea
Prior art keywords
determining
gray level
quantitative analysis
measured
quantitative
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KR1019880004124A
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English (en)
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뒤뷔 일랭
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레옹 세라팽
뻬쉬니
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Application filed by 레옹 세라팽, 뻬쉬니 filed Critical 레옹 세라팽
Publication of KR880013007A publication Critical patent/KR880013007A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering

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  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Electron Tubes For Measurement (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

내용 없음

Description

평균 원자수의 정량 분석방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
도면은 회색색조와 원자수의 상관관계를 도시한 검정곡선 그래프이다.

Claims (2)

  1. 후방 산란된 전자의 국부세기를 대응영상의 회색 레벨에 의해 측정되도록 영상 분석기에 접속된 분석기 X를 구비하고, (a)기지된 샘플들에 의해 보정곡선 G=f ()을 결정하는 단계와 ; (b)고려대상에 따라 미지의 위상의 회색 레벨(G1)을 결정하는 단계와 ; (c)(a)에 주어진 식에 의해()을 결정하는 단계와 ; (d)식=g(n1, z1)에 의해 화학 조성물을 결정하는 단계 ; (여기서 n1는 고려대상에 따라 위상에 있는 원자번호(zi)를 가진 원소의 원자 존재비)의 작동단계들을 포함하는 주사 전자 현미경을 사용하여 두 광원소(3 Z 11) 또는 적어도 하나의 중원소(Z 12) 및 단일 광원소(3 Z 11)중 하나의 원소를 포함하는 샘플의 평면 현미경 사진에 있는 미지의 위상의 ±0.1 단위 정확도로 평균 원자수()를 정량 측정하는 정량 분석방법에 있어서, G 또는 G1의 값은 미지의 위상의 전표면 및/또는 가시영역에 있는 레퍼렌스 샘플 또는 샘플들을 걸쳐서 영상 분석기에 의해 측정된 회색 레벨의 등차 중항으로 측정된 것을 특징으로 하는 정량 분석방법.
  2. 제 1 항에 있어서, 0.1μ㎥까지의 공간 설명도가 실행할 수 있도록 주사현미경의 가속전압이 10KV 미만과 바람직하게는 5KV 인 것을 특징으로 하는 정량분석 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880004124A 1987-04-13 1988-04-12 평균 원자수의 정량 분석방법 KR880013007A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8705562A FR2613834A1 (fr) 1987-04-13 1987-04-13 Methode de dosage a l'aide du numero atomique moyen de phases contenant un element leger a l'aide d'un microscope a balayage et d'un analyseur d'images
FR8705562 1987-04-13

Publications (1)

Publication Number Publication Date
KR880013007A true KR880013007A (ko) 1988-11-29

Family

ID=9350291

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880004124A KR880013007A (ko) 1987-04-13 1988-04-12 평균 원자수의 정량 분석방법

Country Status (13)

Country Link
US (1) US4847495A (ko)
EP (1) EP0291420A1 (ko)
JP (1) JPS63290948A (ko)
KR (1) KR880013007A (ko)
AU (1) AU597167B2 (ko)
BR (1) BR8801732A (ko)
DK (1) DK195788A (ko)
FI (1) FI881694A (ko)
FR (1) FR2613834A1 (ko)
IL (1) IL85995A0 (ko)
IS (1) IS3331A7 (ko)
NO (1) NO881578L (ko)
PT (1) PT87223A (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3345060B2 (ja) * 1992-11-09 2002-11-18 日本テキサス・インスツルメンツ株式会社 走査形電子顕微鏡における画像信号処理方法およびその装置
JP2013011474A (ja) * 2011-06-28 2013-01-17 Akita Univ Ｍｇ−Ｌｉ系合金の微細組織・構造の評価方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7800869A (nl) * 1978-01-25 1979-07-27 Philips Nv Elektronenmikroskoop.
US4559450A (en) * 1982-08-06 1985-12-17 Unisearch Limited Quantitative compositional analyser for use with scanning electron microscopes
AU558630B2 (en) * 1982-08-06 1987-02-05 Unisearch Limited Auantitative compositional analyser for use with scanning electron microscopes
US4697080A (en) * 1986-01-06 1987-09-29 The United States Of America As Represented By The United States Department Of Energy Analysis with electron microscope of multielement samples using pure element standards

Also Published As

Publication number Publication date
AU597167B2 (en) 1990-05-24
PT87223A (pt) 1989-05-12
US4847495A (en) 1989-07-11
IS3331A7 (is) 1988-10-14
FR2613834A1 (fr) 1988-10-14
NO881578L (no) 1988-10-14
AU1452088A (en) 1988-10-20
DK195788D0 (da) 1988-04-11
FI881694A0 (fi) 1988-04-12
EP0291420A1 (fr) 1988-11-17
FI881694A (fi) 1988-10-14
JPS63290948A (ja) 1988-11-28
NO881578D0 (no) 1988-04-12
BR8801732A (pt) 1988-11-16
DK195788A (da) 1988-10-14
IL85995A0 (en) 1988-09-30

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