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Application filed by 니혼덴시 가부시기 가이샤filedCritical니혼덴시 가부시기 가이샤
Priority to KR2019800003494UpriorityCriticalpatent/KR830002860Y1/ko
Publication of KR830000571UpublicationCriticalpatent/KR830000571U/ko
Application grantedgrantedCritical
Publication of KR830002860Y1publicationCriticalpatent/KR830002860Y1/ko
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Analysing Materials By The Use Of Radiation
(AREA)
KR2019800003494U1980-05-301980-05-30주사전자현미경 및 그 유사장치의 주사상 관찰장치
KR830002860Y1
(ko)