KR830000571U - Scanning image observation device for scanning electron microscope and similar devices - Google Patents
Scanning image observation device for scanning electron microscope and similar devicesInfo
- Publication number
- KR830000571U KR830000571U KR2019800003494U KR800003494U KR830000571U KR 830000571 U KR830000571 U KR 830000571U KR 2019800003494 U KR2019800003494 U KR 2019800003494U KR 800003494 U KR800003494 U KR 800003494U KR 830000571 U KR830000571 U KR 830000571U
- Authority
- KR
- South Korea
- Prior art keywords
- scanning
- electron microscope
- observation device
- similar devices
- image observation
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019800003494U KR830002860Y1 (en) | 1980-05-30 | 1980-05-30 | Scanning apparatus for scanning electron microscope and similar devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019800003494U KR830002860Y1 (en) | 1980-05-30 | 1980-05-30 | Scanning apparatus for scanning electron microscope and similar devices |
Publications (2)
Publication Number | Publication Date |
---|---|
KR830000571U true KR830000571U (en) | 1983-06-17 |
KR830002860Y1 KR830002860Y1 (en) | 1983-12-10 |
Family
ID=19217614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019800003494U KR830002860Y1 (en) | 1980-05-30 | 1980-05-30 | Scanning apparatus for scanning electron microscope and similar devices |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR830002860Y1 (en) |
-
1980
- 1980-05-30 KR KR2019800003494U patent/KR830002860Y1/en active
Also Published As
Publication number | Publication date |
---|---|
KR830002860Y1 (en) | 1983-12-10 |
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