KR830000572U - Scanning electron microscope and scanning image observation device of similar device - Google Patents

Scanning electron microscope and scanning image observation device of similar device

Info

Publication number
KR830000572U
KR830000572U KR2019800003518U KR800003518U KR830000572U KR 830000572 U KR830000572 U KR 830000572U KR 2019800003518 U KR2019800003518 U KR 2019800003518U KR 800003518 U KR800003518 U KR 800003518U KR 830000572 U KR830000572 U KR 830000572U
Authority
KR
South Korea
Prior art keywords
scanning
electron microscope
image observation
scanning electron
similar device
Prior art date
Application number
KR2019800003518U
Other languages
Korean (ko)
Other versions
KR830002861Y1 (en
Inventor
요시히로 히라다
히로시 우찌우미
Original Assignee
니혼덴시 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 니혼덴시 가부시기가이샤 filed Critical 니혼덴시 가부시기가이샤
Priority to KR2019800003518U priority Critical patent/KR830002861Y1/en
Publication of KR830000572U publication Critical patent/KR830000572U/en
Application granted granted Critical
Publication of KR830002861Y1 publication Critical patent/KR830002861Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
KR2019800003518U 1980-05-31 1980-05-31 Scanning apparatus for scanning electron microscopes and similar devices KR830002861Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019800003518U KR830002861Y1 (en) 1980-05-31 1980-05-31 Scanning apparatus for scanning electron microscopes and similar devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019800003518U KR830002861Y1 (en) 1980-05-31 1980-05-31 Scanning apparatus for scanning electron microscopes and similar devices

Publications (2)

Publication Number Publication Date
KR830000572U true KR830000572U (en) 1983-06-17
KR830002861Y1 KR830002861Y1 (en) 1983-12-10

Family

ID=19217636

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019800003518U KR830002861Y1 (en) 1980-05-31 1980-05-31 Scanning apparatus for scanning electron microscopes and similar devices

Country Status (1)

Country Link
KR (1) KR830002861Y1 (en)

Also Published As

Publication number Publication date
KR830002861Y1 (en) 1983-12-10

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