KR20250115991A - 막 두께 계측 장치 및 막 두께 계측 방법 - Google Patents

막 두께 계측 장치 및 막 두께 계측 방법

Info

Publication number
KR20250115991A
KR20250115991A KR1020257014960A KR20257014960A KR20250115991A KR 20250115991 A KR20250115991 A KR 20250115991A KR 1020257014960 A KR1020257014960 A KR 1020257014960A KR 20257014960 A KR20257014960 A KR 20257014960A KR 20250115991 A KR20250115991 A KR 20250115991A
Authority
KR
South Korea
Prior art keywords
pixel area
light
film thickness
measurement
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257014960A
Other languages
English (en)
Korean (ko)
Inventor
겐이치 오츠카
히데키 마스오카
가즈야 이구치
Original Assignee
하마마츠 포토닉스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 하마마츠 포토닉스 가부시키가이샤 filed Critical 하마마츠 포토닉스 가부시키가이샤
Publication of KR20250115991A publication Critical patent/KR20250115991A/ko
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mathematical Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020257014960A 2022-12-06 2023-09-01 막 두께 계측 장치 및 막 두께 계측 방법 Pending KR20250115991A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022194695 2022-12-06
JPJP-P-2022-194695 2022-12-06
PCT/JP2023/032088 WO2024122132A1 (ja) 2022-12-06 2023-09-01 膜厚計測装置及び膜厚計測方法

Publications (1)

Publication Number Publication Date
KR20250115991A true KR20250115991A (ko) 2025-07-31

Family

ID=91378730

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257014960A Pending KR20250115991A (ko) 2022-12-06 2023-09-01 막 두께 계측 장치 및 막 두께 계측 방법

Country Status (6)

Country Link
EP (1) EP4563936A1 (https=)
JP (1) JPWO2024122132A1 (https=)
KR (1) KR20250115991A (https=)
CN (1) CN120344818A (https=)
TW (1) TW202438843A (https=)
WO (1) WO2024122132A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012063321A (ja) 2010-09-17 2012-03-29 Hamamatsu Photonics Kk 反射率測定装置、反射率測定方法、膜厚測定装置及び膜厚測定方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10021378A1 (de) * 2000-05-02 2001-11-08 Leica Microsystems Optische Messanordnung mit einem Ellipsometer
JP2002005823A (ja) * 2000-06-19 2002-01-09 Dainippon Screen Mfg Co Ltd 薄膜測定装置
JP2012156177A (ja) * 2011-01-24 2012-08-16 Sony Corp 電荷検出装置、電荷転送装置、固体撮像装置、撮像装置、及び、電子機器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012063321A (ja) 2010-09-17 2012-03-29 Hamamatsu Photonics Kk 反射率測定装置、反射率測定方法、膜厚測定装置及び膜厚測定方法

Also Published As

Publication number Publication date
CN120344818A (zh) 2025-07-18
JPWO2024122132A1 (https=) 2024-06-13
TW202438843A (zh) 2024-10-01
EP4563936A1 (en) 2025-06-04
WO2024122132A1 (ja) 2024-06-13

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Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

Q12 Application published

Free format text: ST27 STATUS EVENT CODE: A-1-1-Q10-Q12-NAP-PG1501 (AS PROVIDED BY THE NATIONAL OFFICE)