CN120344818A - 膜厚测量装置及膜厚测量方法 - Google Patents

膜厚测量装置及膜厚测量方法

Info

Publication number
CN120344818A
CN120344818A CN202380083744.1A CN202380083744A CN120344818A CN 120344818 A CN120344818 A CN 120344818A CN 202380083744 A CN202380083744 A CN 202380083744A CN 120344818 A CN120344818 A CN 120344818A
Authority
CN
China
Prior art keywords
pixel region
light
film thickness
spectroscopic
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380083744.1A
Other languages
English (en)
Chinese (zh)
Inventor
大冢贤一
增冈英树
井口和也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of CN120344818A publication Critical patent/CN120344818A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mathematical Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN202380083744.1A 2022-12-06 2023-09-01 膜厚测量装置及膜厚测量方法 Pending CN120344818A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022194695 2022-12-06
JP2022-194695 2022-12-06
PCT/JP2023/032088 WO2024122132A1 (ja) 2022-12-06 2023-09-01 膜厚計測装置及び膜厚計測方法

Publications (1)

Publication Number Publication Date
CN120344818A true CN120344818A (zh) 2025-07-18

Family

ID=91378730

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380083744.1A Pending CN120344818A (zh) 2022-12-06 2023-09-01 膜厚测量装置及膜厚测量方法

Country Status (6)

Country Link
EP (1) EP4563936A1 (https=)
JP (1) JPWO2024122132A1 (https=)
KR (1) KR20250115991A (https=)
CN (1) CN120344818A (https=)
TW (1) TW202438843A (https=)
WO (1) WO2024122132A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10021378A1 (de) * 2000-05-02 2001-11-08 Leica Microsystems Optische Messanordnung mit einem Ellipsometer
JP2002005823A (ja) * 2000-06-19 2002-01-09 Dainippon Screen Mfg Co Ltd 薄膜測定装置
JP2012063321A (ja) 2010-09-17 2012-03-29 Hamamatsu Photonics Kk 反射率測定装置、反射率測定方法、膜厚測定装置及び膜厚測定方法
JP2012156177A (ja) * 2011-01-24 2012-08-16 Sony Corp 電荷検出装置、電荷転送装置、固体撮像装置、撮像装置、及び、電子機器

Also Published As

Publication number Publication date
JPWO2024122132A1 (https=) 2024-06-13
KR20250115991A (ko) 2025-07-31
TW202438843A (zh) 2024-10-01
EP4563936A1 (en) 2025-06-04
WO2024122132A1 (ja) 2024-06-13

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