KR20250071946A - 기억 장치 - Google Patents
기억 장치 Download PDFInfo
- Publication number
- KR20250071946A KR20250071946A KR1020257010768A KR20257010768A KR20250071946A KR 20250071946 A KR20250071946 A KR 20250071946A KR 1020257010768 A KR1020257010768 A KR 1020257010768A KR 20257010768 A KR20257010768 A KR 20257010768A KR 20250071946 A KR20250071946 A KR 20250071946A
- Authority
- KR
- South Korea
- Prior art keywords
- insulator
- conductor
- oxide
- transistor
- addition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
- H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
- H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
- H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
- H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
Landscapes
- Semiconductor Memories (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022147574 | 2022-09-16 | ||
| JPJP-P-2022-147574 | 2022-09-16 | ||
| PCT/IB2023/058971 WO2024057167A1 (ja) | 2022-09-16 | 2023-09-11 | 記憶装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20250071946A true KR20250071946A (ko) | 2025-05-22 |
Family
ID=90274456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020257010768A Pending KR20250071946A (ko) | 2022-09-16 | 2023-09-11 | 기억 장치 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20250374513A1 (https=) |
| JP (1) | JPWO2024057167A1 (https=) |
| KR (1) | KR20250071946A (https=) |
| CN (1) | CN119896059A (https=) |
| WO (1) | WO2024057167A1 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021053473A1 (ja) | 2019-09-20 | 2021-03-25 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI685113B (zh) * | 2015-02-11 | 2020-02-11 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
| JP2019047101A (ja) * | 2017-09-05 | 2019-03-22 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
| US11289475B2 (en) * | 2019-01-25 | 2022-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of semiconductor device |
-
2023
- 2023-09-11 US US19/107,667 patent/US20250374513A1/en active Pending
- 2023-09-11 CN CN202380065238.XA patent/CN119896059A/zh active Pending
- 2023-09-11 KR KR1020257010768A patent/KR20250071946A/ko active Pending
- 2023-09-11 WO PCT/IB2023/058971 patent/WO2024057167A1/ja not_active Ceased
- 2023-09-11 JP JP2024546513A patent/JPWO2024057167A1/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021053473A1 (ja) | 2019-09-20 | 2021-03-25 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
Non-Patent Citations (3)
| Title |
|---|
| H. Fujiwara et. al, "Surrounding Gate Vertical-Channel FET with Gate Length of 40 nm Using BEOL Compatible High-Thermal-Tolerance In-Al-Zn Oxide Channel", 2020 Symposium on VLSI Technology: Digest of Technical Papers, pp.1-2, TH2.2 |
| M. Oota et. al, "3D-Stacked CAAC-In-Ga-Zn Oxide FETs with Gate Length of 72nm", IEDM Tech. Dig., 2019, pp. 50-53 |
| X. Duan et. al, "Novel Vertical Channel-All-Around(CAA) IGZO FETs for 2T0C DRAM with High Density beyond 4F2 by Monolithic Stacking", IEDM Tech. Dig., 2021, pp. 222-225 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN119896059A (zh) | 2025-04-25 |
| US20250374513A1 (en) | 2025-12-04 |
| JPWO2024057167A1 (https=) | 2024-03-21 |
| WO2024057167A1 (ja) | 2024-03-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN117956789A (zh) | 存储装置 | |
| US20250218503A1 (en) | Semiconductor device | |
| KR20250022704A (ko) | 반도체 장치, 기억 장치, 및 반도체 장치의 제작 방법 | |
| KR20250071946A (ko) | 기억 장치 | |
| KR20250139309A (ko) | 반도체 장치 및 기억 장치 | |
| US20260059740A1 (en) | Semiconductor device | |
| US20250287612A1 (en) | Semiconductor device | |
| KR20250156740A (ko) | 반도체 장치 | |
| US20250246226A1 (en) | Semiconductor device | |
| KR20250003661A (ko) | 반도체 장치 | |
| KR20250156120A (ko) | 반도체 장치 및 기억 장치 | |
| KR20250109700A (ko) | 기억 장치 | |
| KR20250088511A (ko) | 반도체 장치 | |
| KR20250071945A (ko) | 기억 장치 | |
| KR20260002824A (ko) | 기억 장치 | |
| KR20250099327A (ko) | 반도체 장치, 반도체 장치의 제작 방법, 및 전자 기기 | |
| KR20250048253A (ko) | 반도체 장치 및 기억 장치 | |
| TW202424973A (zh) | 半導體裝置及半導體裝置的驅動方法 | |
| KR20250107184A (ko) | 반도체 장치 및 반도체 장치의 제작 방법 | |
| KR20240151163A (ko) | 기억 장치 | |
| KR20250059443A (ko) | 기억 장치 | |
| WO2026033394A1 (ja) | 半導体装置 | |
| WO2026018134A1 (ja) | 半導体装置、及び記憶装置 | |
| KR20250078457A (ko) | 기억 장치 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20250402 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application |