KR20240140186A - 향상된 웨이퍼 제조를 위한 시스템들 및 방법들 - Google Patents

향상된 웨이퍼 제조를 위한 시스템들 및 방법들 Download PDF

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Publication number
KR20240140186A
KR20240140186A KR1020247030785A KR20247030785A KR20240140186A KR 20240140186 A KR20240140186 A KR 20240140186A KR 1020247030785 A KR1020247030785 A KR 1020247030785A KR 20247030785 A KR20247030785 A KR 20247030785A KR 20240140186 A KR20240140186 A KR 20240140186A
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KR
South Korea
Prior art keywords
thresholds
scan data
assembly line
model
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247030785A
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English (en)
Korean (ko)
Inventor
써밋 에스. 바가바트
Original Assignee
글로벌웨이퍼스 씨오., 엘티디.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 글로벌웨이퍼스 씨오., 엘티디. filed Critical 글로벌웨이퍼스 씨오., 엘티디.
Publication of KR20240140186A publication Critical patent/KR20240140186A/ko
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0265—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion
    • G05B13/027—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion using neural networks only
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41805—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by assembly
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32359—Modeling, simulating assembly operations
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32368—Quality control
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/40—Robotics, robotics mapping to robotics vision
    • G05B2219/40111—For assembly
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Artificial Intelligence (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • General Engineering & Computer Science (AREA)
  • Evolutionary Computation (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
KR1020247030785A 2020-02-10 2021-02-02 향상된 웨이퍼 제조를 위한 시스템들 및 방법들 Pending KR20240140186A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US16/786,579 US11415971B2 (en) 2020-02-10 2020-02-10 Systems and methods for enhanced wafer manufacturing
US16/786,579 2020-02-10
PCT/US2021/016136 WO2021162887A1 (en) 2020-02-10 2021-02-02 Systems and methods for enhanced wafer manufacturing
KR1020227031343A KR102708800B1 (ko) 2020-02-10 2021-02-02 향상된 웨이퍼 제조를 위한 시스템들 및 방법들

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020227031343A Division KR102708800B1 (ko) 2020-02-10 2021-02-02 향상된 웨이퍼 제조를 위한 시스템들 및 방법들

Publications (1)

Publication Number Publication Date
KR20240140186A true KR20240140186A (ko) 2024-09-24

Family

ID=74844999

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020247030785A Pending KR20240140186A (ko) 2020-02-10 2021-02-02 향상된 웨이퍼 제조를 위한 시스템들 및 방법들
KR1020227031343A Active KR102708800B1 (ko) 2020-02-10 2021-02-02 향상된 웨이퍼 제조를 위한 시스템들 및 방법들

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020227031343A Active KR102708800B1 (ko) 2020-02-10 2021-02-02 향상된 웨이퍼 제조를 위한 시스템들 및 방법들

Country Status (7)

Country Link
US (2) US11415971B2 (https=)
EP (1) EP4104023B1 (https=)
JP (1) JP7661348B2 (https=)
KR (2) KR20240140186A (https=)
CN (1) CN115244472A (https=)
TW (1) TWI851876B (https=)
WO (1) WO2021162887A1 (https=)

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TWI911639B (zh) * 2024-02-02 2026-01-11 黃廖全 鏡片研磨裝置

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Also Published As

Publication number Publication date
US11846917B2 (en) 2023-12-19
KR20220140793A (ko) 2022-10-18
US11415971B2 (en) 2022-08-16
WO2021162887A1 (en) 2021-08-19
EP4104023B1 (en) 2024-06-26
EP4104023A1 (en) 2022-12-21
JP2023513276A (ja) 2023-03-30
CN115244472A (zh) 2022-10-25
US20220334568A1 (en) 2022-10-20
TWI851876B (zh) 2024-08-11
US20210247748A1 (en) 2021-08-12
KR102708800B1 (ko) 2024-09-23
TW202137026A (zh) 2021-10-01
JP7661348B2 (ja) 2025-04-14

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Legal Events

Date Code Title Description
A107 Divisional application of patent
PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20240912

Application number text: 1020227031343

Filing date: 20220908

PA0201 Request for examination
PG1501 Laying open of application