KR20240129180A - 원자힘 현미경(afm) 장치 및 그의 동작 방법 - Google Patents
원자힘 현미경(afm) 장치 및 그의 동작 방법 Download PDFInfo
- Publication number
- KR20240129180A KR20240129180A KR1020247023015A KR20247023015A KR20240129180A KR 20240129180 A KR20240129180 A KR 20240129180A KR 1020247023015 A KR1020247023015 A KR 1020247023015A KR 20247023015 A KR20247023015 A KR 20247023015A KR 20240129180 A KR20240129180 A KR 20240129180A
- Authority
- KR
- South Korea
- Prior art keywords
- sample
- tip
- scanning
- information
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011017 operating method Methods 0.000 title 1
- 239000000523 sample Substances 0.000 claims abstract description 227
- 238000003384 imaging method Methods 0.000 claims abstract description 38
- 239000000758 substrate Substances 0.000 claims abstract description 4
- 238000012545 processing Methods 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 22
- 238000013459 approach Methods 0.000 claims description 17
- 230000003993 interaction Effects 0.000 claims description 16
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 5
- 230000008859 change Effects 0.000 claims description 3
- 230000001939 inductive effect Effects 0.000 claims 2
- 238000012876 topography Methods 0.000 description 30
- 230000006870 function Effects 0.000 description 9
- 238000005259 measurement Methods 0.000 description 9
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 230000000116 mitigating effect Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 238000000418 atomic force spectrum Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
- G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/04—Display or data processing devices
- G01Q30/06—Display or data processing devices for error compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2030290A NL2030290B1 (en) | 2021-12-24 | 2021-12-24 | Atomic Force Microscope (AFM) device and method of operating the same |
| NL2030290 | 2021-12-24 | ||
| PCT/NL2022/050755 WO2023121463A1 (en) | 2021-12-24 | 2022-12-23 | Atomic force microscope (afm) device and method of operating the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20240129180A true KR20240129180A (ko) | 2024-08-27 |
Family
ID=81648833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020247023015A Pending KR20240129180A (ko) | 2021-12-24 | 2022-12-23 | 원자힘 현미경(afm) 장치 및 그의 동작 방법 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20250004010A1 (https=) |
| JP (1) | JP2024546629A (https=) |
| KR (1) | KR20240129180A (https=) |
| NL (1) | NL2030290B1 (https=) |
| WO (1) | WO2023121463A1 (https=) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004264039A (ja) * | 2003-01-30 | 2004-09-24 | Hitachi Ltd | 走査プローブ顕微鏡及びｃｄ・断面プロファイル計測方法並びに半導体デバイス製造方法 |
| JP4727499B2 (ja) * | 2005-07-13 | 2011-07-20 | 日本電子株式会社 | 走査型プローブ顕微鏡及びその動作方法 |
| CN106030316B (zh) * | 2013-12-07 | 2019-02-19 | 布鲁克公司 | 实时基线确定的力测量 |
| KR101710337B1 (ko) * | 2015-06-02 | 2017-02-28 | 파크시스템스 주식회사 | 조정 가능한 스캔 속도를 가지는 측정 장치 및 측정 방법 |
| CN112955996B (zh) * | 2018-06-29 | 2024-01-19 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | 扫描速度动态变化的sem引导的afm形貌扫描方法 |
-
2021
- 2021-12-24 NL NL2030290A patent/NL2030290B1/en active
-
2022
- 2022-12-23 WO PCT/NL2022/050755 patent/WO2023121463A1/en not_active Ceased
- 2022-12-23 JP JP2024532950A patent/JP2024546629A/ja active Pending
- 2022-12-23 KR KR1020247023015A patent/KR20240129180A/ko active Pending
- 2022-12-23 US US18/709,243 patent/US20250004010A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20250004010A1 (en) | 2025-01-02 |
| NL2030290B1 (en) | 2023-06-30 |
| WO2023121463A1 (en) | 2023-06-29 |
| JP2024546629A (ja) | 2024-12-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20240710 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application |