KR20240078364A - Chute and vibration conveyance device - Google Patents

Abstract

[Problem] In addition to preventing and suppressing situations where undulations change in each part of the conveying surface due to amplitude, workpieces reaching the transfer area to the next process equipment are stagnant in that area or their posture is disturbed. In addition to preventing and suppressing the occurrence of , a chute is provided that makes it possible to supply a fixed amount of work under conditions that prevent and suppress the change in posture of the work when transferring to the work transfer surface of the next process equipment.
[Solution] A conveyance path (2) having a conveyance surface (21) is provided, and a conveyance portion (3) that transmits vibration generated by elastic deformation to the conveyance surface (21). The vibration mode obtained by elastically deforming (3) is an elliptical vibration that combines the horizontal vibration mode and the vertical vibration mode, and the entire conveyance surface 21 is configured to be located in the abdominal part of the horizontal vibration mode, so that the entire conveyance surface 21 is uniform. An elliptical vibration was created.

Description

Chute and vibration conveyance device {CHUTE AND VIBRATION CONVEYANCE DEVICE}

The present invention relates to a chute and a vibration conveyance device applicable to a device (part feeder) that conveys a workpiece by vibration.

A vibration conveyance device (part feeder) that transports small workpieces such as electronic chip components by vibration, aligns them, and supplies them to the next process. It consists of a linear feeder that conveys the workpiece along a conveyance path that extends in a straight line, and a linear feeder. A device having a ball feeder connected to the upstream side is known.　In this part feeder, a configuration is adopted in which the work is discharged from the tip of the vibrating conveyance path (chute) of the linear feeder and fed onto, for example, a disk table rotating at a constant speed, and the appearance of the work fed on the disk table is adopted. It is often used in combination with an external inspection device that performs inspection and processing such as inspection.　In order to be able to properly perform inspection and processing such as external inspection, it is preferable that the workpieces discharged from the tip of the chute are arranged at equal pitch on the disk table.

However, in a normal linear feeder, since the position of the tip of the chute changes every moment due to vibration, the transfer position to the disk table changes depending on the timing at which the work is discharged, and the spacing between the works tends to fluctuate.　Therefore, it is difficult to arrange the discharged workpieces at equal pitches on the disk table.

In order to solve this problem, Patent Document 1 below discloses a workpiece appearance inspection device in which a vibration-free part that transports the workpiece in a vibration-free state is disposed between a linear feeder and a rotatable circular transfer table.　Specifically, a configuration is disclosed in which a vibration-free portion that has an inclination equal to that of the linear feeder and does not vibrate is connected to the downstream end of a linear feeder that descends at a slight inclination toward the conveyance table.　In a configuration in which a non-vibrating part that does not vibrate is installed between the downstream end of such a linear feeder and the transfer table, the work on the non-vibrating part moves forward while being pressed by the subsequent work, gradually descends toward the transfer table, and when it reaches the downstream end of the non-vibrating part. , it is pressed by the subsequent work located immediately behind it and transferred onto the transfer table.

Additionally, in the published publication of a patent application by the present applicant (Patent Document 2 below), a chute that transports a workpiece using ultrasonic vibration is disclosed.　By using ultrasonic vibration, the friction between the workpiece and the chute's conveyance surface is reduced, preventing and suppressing the occurrence of amplitude differences in each part of the conveyance surface, and reducing the drop between the conveyance surface and the workpiece transfer surface of the next process equipment. , it is possible to realize a fixed quantity supply of workpieces in situations where the workpiece posture change does not occur or is difficult to occur during transfer to the workpiece transfer surface of the next process equipment.

Japanese Patent Publication No. 2011-133458 Japanese Patent Publication No. 2021-195202

However, if the structure allows the work to slide on a vibration-free conveyance surface, the work may stagnate on the work conveyance path due to frictional force with the conveyance surface, or the work that cannot receive the pressing force from the subsequent work will flow downstream of the work conveyance path. If it stops at an end, the workpiece may become blocked or its posture may become disturbed.　This problem is also likely to occur in ultrasonic vibration, which can reduce friction compared to the mode of sliding the workpiece without vibration. If the driving force required to transport the workpiece becomes insufficient, for example, the workpiece transport speed is set quickly. Therefore, when the amount of work supplied increases, the work slows down in the transfer chute, making it easy for work to become blocked or to lose its posture due to pressure.

Additionally, a parts transport device using traveling waves has also been proposed as a means for transporting a workpiece using ultrasonic vibration.　However, in order to generate a traveling wave, it is necessary to prepare a path for the traveling wave to circulate in the conveying section, and the unique changes in undulations (irregularities) are different when the traveling wave is generated in each part of the conveying surface, and because of these restrictions, it is necessary to proceed to the next process as is. It is difficult to supply work to .

The present invention was made with this in mind, and its main purpose is to prevent and suppress situations where changes in undulations of the conveying surface due to amplitude occur in each part of the conveying surface, and even when the work conveying speed is set quickly, the workpiece can be transferred to the next process equipment. The object is to provide a chute and a vibration transport device equipped with the chute that can realize a fixed supply of work by preventing or suppressing the occurrence of a situation in which work reaching a transfer section stagnates in that section or loses its posture.

In addition, the present inventor has conducted extensive research to realize a vibration mode that can reduce friction compared to the mode in which the workpiece is slid without vibration, and as a result, the horizontal vibration mode is a vibration that bends in a direction parallel to the workpiece transport direction. It was found that the configuration of transporting the work on the transport surface by a vibration mode having is advantageous.

However, when workpiece conveyance processing is performed in a vibration mode having a horizontal vibration mode, not only does the conveyance path having a conveyance surface deflect in a direction parallel to the direction of workpiece conveyance, but also the displacement in the direction in which the conveyance path tilts diagonally (vertical direction) bending vibration) occurs, and this bending phenomenon in the vertical direction may interfere with smooth work conveyance processing.

The main purpose of the present invention is to solve the novel problems that appeared in the development process related to work conveyance, and to provide a chute and vibratory conveyance equipped with a chute that can realize a fixed quantity supply of work reaching the transfer portion to the next process equipment. To provide a device.

That is, the present invention relates to a chute that can transport a workpiece, which is a transport object, along the transport surface toward the downstream end (end) of the transport direction while transporting it to the work transfer surface of a predetermined next process facility.

A chute according to an embodiment of the present invention includes a conveyance path having a conveyance surface on an upward surface, a conveyance portion disposed at a position adjacent to the conveyance path and transmitting vibration generated by elastic deformation to the conveyance surface, and the conveyance portion. It has a drive unit that elastically deforms, and the vibration mode in which the transport part is elastically deformed by the drive unit is vibration that bends in a direction parallel to the transport direction of the work in the transport path (hereinafter referred to as “work transport direction”). It is an elliptical vibration that combines a horizontal vibration mode and a vertical vibration mode, which is vibration in the orthogonal direction perpendicular to the conveyance surface, and in this vibration mode, the entire conveyance surface is at least in a position equivalent to the abdomen of the horizontal vibration mode or thereabouts. By configuring it to be in a nearby position, it is characterized in that uniform elliptical vibration is generated across the entire conveyance surface.　Here, the point of vibration is the point where the amplitude is maximum and the displacement fluctuates the most.　Additionally, the horizontal vibration mode in one embodiment of the present invention may be a vibration mode that satisfies at least the condition that the vibration direction (bending direction) is parallel to the workpiece transport direction. Meanwhile, in one embodiment of the present invention, The vertical vibration mode may be a vibration mode that satisfies at least the condition that the vibration direction (bending direction) has a vertical component (orthogonal direction perpendicular to the conveyance surface).　Additionally, examples of the work in one embodiment of the present invention include minute components such as electronic components, but may also be articles other than electronic components.

In the suit according to one embodiment of the present invention, the vibration motor is an elliptical vibration that combines the horizontal vibration mode and the vertical vibration mode, and in the vibration mode in which the conveyance part is elastically deformed by the drive unit, the entire conveyance surface is in the horizontal vibration mode. By configuring it to be located at a position corresponding to (abdominal part of the vibration) or near it, a uniform elliptical vibration is generated over the entire conveyance surface, so that the vibration mode is cut (where the amplitude is minimized) over the entire conveyance surface. A uniform elliptical vibration state without points can be obtained.　And, as the conveying surface oscillates elliptically, frictional force is generated between the conveying surface and the workpiece, and this frictional force acts as a driving force to convey the workpiece. As the entire conveying surface vibrates elliptically in the same direction, the entire conveying surface A driving force is obtained from the chute, and the workpieces are blocked on the conveyance surface of the chute, or the workpiece posture is disturbed due to pressure on the workpiece relatively upstream in the conveyance direction (disordered posture due to pressurization). The situation can be avoided.　Moreover, with the chute according to one embodiment of the present invention, there is almost no change in the position (work discharge position) from which the work is discharged from the longitudinal end of the conveyance surface (downstream end in the work conveyance direction) to the work transfer surface of the predetermined next process equipment. Therefore, the work can be supplied to the work transfer surface of the next process equipment at the same pitch.　In addition, according to the suit according to one embodiment of the present invention, the vibration amplitude is very small and the gap between the next process equipment can be made extremely small, so the posture of the work during transfer is stable and the next process equipment When connecting to or adjusting the position, there is little need to consider the vibration amplitude, making adjustment easy.　These advantages can be obtained even if the work conveyance speed is set to a high speed, and application of the chute of one embodiment of the present invention also contributes to the improvement of the work conveyance amount per unit time.

In addition, the vibration conveying device according to one embodiment of the present invention is capable of conveying the workpiece, which is the object to be conveyed, toward the end of the main conveying path by vibration while conveying it downstream in the conveying direction, and is located at a position adjacent to the end of the main conveying path. It is characterized by arranging a chute having the above-described configuration.　According to the vibration conveying device according to one embodiment of the present invention, the effect of the above-described chute is obtained, and the friction force generated between the work and the conveyance surface that vibrates uniformly in an elliptical manner as a whole acts as a driving force to convey the work. This makes it possible to supply a constant supply of work from the end of the transfer surface of the chute toward the work transfer surface of the next process equipment without clogging of the work or loss of orientation due to pressure.

A chute according to another embodiment of the present invention includes a conveyance path having a conveyance surface, a conveyance portion that transmits vibration generated by elastic deformation to the conveyance surface, and a drive portion that elastically deforms the conveyance portion, and as the conveyance portion, the conveyance A first vibrating unit (main vibrating unit) disposed at a position adjacent to the furnace, and a direction normal to two surfaces of the first vibrating unit in a direction perpendicular to the workpiece transport direction (hereinafter referred to as “work transport direction”), respectively. An elastically deformable second vibration unit (sub-vibration unit) disposed in a protruding position is applied, and the vibration mode in which the transport unit is elastically deformed by the drive unit is at least a vibration bending in a direction parallel to the work transport direction. It has a horizontal vibration mode, and in this vibration mode, the first vibration unit and the second vibration unit vibrate in opposite phases to each other.　Here, the vibration mode in another embodiment of the present invention may be a vibration mode including a horizontal vibration mode that at least satisfies the condition that the vibration direction (bending direction) is parallel to the workpiece transport direction.　In addition, examples of the work in another embodiment of the present invention include minute components such as electronic components, but may also be articles other than electronic components.

In the suit according to this other embodiment of the present invention, the vibration motor may vibrate only in the horizontal vibration mode or vibrate in a combination of the horizontal vibration mode and other vibration modes, or in any of these vibrations, the direction parallel to the work conveyance direction in the vibration mode Frictional force is generated between the conveyance surface and the workpiece due to the bending vibration, and this frictional force acts as a driving force to convey the workpiece, so that the works are blocked with each other on the conveyance surface of the chute or are moved relative to each other in the conveyance direction. It is possible to prevent and suppress a situation in which the posture is disturbed due to pressure on the workpiece on the upstream side (the posture is disturbed due to pressure).　Furthermore, in the suit according to another embodiment of the present invention, the conveyance unit has at least a first vibration unit (main vibration unit) and a second vibration unit (sub-vibration unit), and in the vibration mode, these first vibration units and the second vibration unit Since the sections vibrate in opposite phases to each other, by utilizing the vibration of the second vibration section (sub-vibration section), the bending deformation in the vertical direction in the first vibration section (main vibration section) is suppressed and the entire first vibration section remains in phase. It vibrates.　As a result, uniform vibration in the horizontal direction occurs even in the conveyance path adjacent to the first vibration section, and displacement in the diagonal direction of the conveyance path can be prevented and suppressed.　As a result, the variation in the position (work discharge position) where the work is discharged from the longitudinal end of the conveyance surface (downstream end in the work conveyance direction) to the work transfer surface of the predetermined next process equipment becomes zero or virtually none, and the work is transferred to the next process equipment. It becomes possible to stably supply the workpiece to the transfer surface at the same pitch.

In particular, in the case where the second vibration unit is disposed at or near the center of gravity of the transport unit in the suit according to another embodiment of the present invention, the entire transport unit including the first vibration unit and the second vibration unit Therefore, the influence of bending deformation of the first vibration unit in the vertical direction can be offset in a good balance.

In addition, the vibration conveying device according to another embodiment of the present invention is capable of conveying the workpiece, which is the conveying object, toward the end of the main conveying path by vibration while conveying it downstream in the conveying direction, and is located at a position adjacent to the end of the main conveying path. It is characterized by arranging a chute having the above-described configuration.　According to the vibration conveying device according to another embodiment of the present invention, the effect of the above-described chute is obtained, bending vibration in the vertical direction is suppressed, and the friction force generated between the work and the conveyance surface that vibrates uniformly as a whole is achieved. By acting as a driving force, the work can be transported, making it possible to supply a constant supply of work from the end of the chute's transport surface toward the work transfer surface of the next process equipment without clogging of the work or loss of orientation due to pressure. I do it.

According to the present invention, based on the novel technical idea that elliptical vibration combining horizontal vibration mode and vertical vibration mode is generated uniformly over the entire conveyance surface, a situation in which undulation changes occur in each part of the conveyance surface due to amplitude In addition to preventing and suppressing the workpiece reaching the transfer area to the next process equipment, a driving force based on the friction force generated between the workpiece and the conveyance surface is provided, so that the workpiece moves forward even when the workpiece conveyance speed is set fast. It is possible to provide a chute and a vibration transport device equipped with the chute that can prevent and suppress the occurrence of stagnation or loss of posture at the transfer section and realize fixed-quantity or high-speed supply of workpieces to the next process equipment.

In addition, according to the present invention, based on the novel technical idea that vibration including a horizontal vibration mode is applied as a vibration mode, and in this vibration mode, the first vibration unit and the second vibration unit are configured to vibrate in opposite phases to each other, By effectively canceling the bending deformation in the vertical direction of the first vibration section and providing a driving force based on the friction force generated between the transfer surface and the workpiece reaching the transfer section to the next process equipment, the workpiece is moved at the transfer section. It is possible to provide a chute and a vibration conveyance device equipped with the chute that can prevent and suppress the occurrence of stagnation or loss of posture and realize a fixed supply of workpieces to the next process equipment.

Fig. 1 is an overall view of a vibration conveying device provided with a chute according to a first embodiment of the present invention.
Figure 2 is an enlarged view of the main part of Figure 1.
Fig. 3 is an overall external view of the suit according to the first embodiment.
Fig. 4 is a diagram showing a suit according to the first embodiment.
Fig. 5 is a diagram showing the horizontal vibration mode in the first embodiment through an analysis animation.
Fig. 6 is a diagram showing the horizontal vibration mode in the first embodiment through an analysis animation.
Fig. 7 is a diagram showing the vertical vibration mode in the first embodiment through an analysis animation.
Fig. 8 is a diagram showing the vertical vibration mode in the first embodiment through an analysis animation.
Fig. 9 is a diagram showing changes over time in the vibration mode in the first embodiment through an analysis animation.
Fig. 10 is a diagram schematically showing a workpiece conveyance process using the vibration mode of the first embodiment.
Fig. 11 is an overall view of a vibration conveying device provided with a chute according to a second embodiment of the present invention.
Figure 12 is an enlarged view of the main part of Figure 11.
Fig. 13 is an overall external view of the suit according to the second embodiment.
Fig. 14 is a diagram showing a suit according to the second embodiment.
Fig. 15 is a diagram showing the horizontal vibration mode in the second embodiment through an analysis animation.
Fig. 16 is a diagram showing the vertical vibration mode in the second embodiment through an analysis animation.
Fig. 17 is a diagram showing the vertical vibration mode in the second embodiment through an analysis animation.
Fig. 18 is a diagram showing changes over time in the vibration mode in the second embodiment through an analysis animation.
Fig. 19 is a diagram schematically showing a workpiece conveyance process using the vibration mode of the second embodiment.
Fig. 20 is a diagram showing the vibration state of the conveyance unit without the second vibration unit through an analysis animation.

[First Embodiment]

Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.

As shown in FIGS. 1 and 2, the chute 1 according to the first embodiment transports the work W, which is the object to be transported, while moving it toward the end L11 of the main transport path (linear main transport path L1) by vibration. It is applied to the vibration conveying device　1 and 2 show the linear conveyance path L1 of the linear feeder L as an example of the main conveyance path L1, and the chute 1 according to the first embodiment is located at a position adjacent to the terminal end L11 of the linear main conveyance path L1. It shows the arrangement of .

As shown in FIG. 2, the linear feeder L is capable of conveying the work W in the conveyance direction downstream along the linear main conveyance path L1 by applying vibration to the linear conveyance unit L2 having the linear main conveyance path L1, which is a straight conveyance path. will be.　In the linear feeder L in the first embodiment, the specific configuration of vibrating the linear conveyance unit L2 to convey the work W on the linear main conveyance path L1 toward the downstream side in the conveyance direction is not particularly limited, for example, from an excitation source. The applied exciting force directly or indirectly excites the leaf spring (driving spring) connecting the movable part to which the linear conveyance unit L2 is connected and the predetermined fixed part, thereby causing the movable part and the fixed part to vibrate in opposite directions. In this way, the linear conveyance unit L2 connected to the movable portion vibrates in the longitudinal direction, thereby conveying the work W downstream along the conveyance direction.　Additionally, as another example, it may be a linear feeder L that transports the work W along the linear main transport path L1 by traveling waves generated in the linear transport unit L2.

The starting and ending ends L11 of the linear main conveyance path L1 reach the outer edge of the linear conveyance section L2 and are set to an appropriate cross-sectional shape.　The linear main conveyance path L1 functions as a conveyance surface (linear conveyance surface) for conveying the workpiece W.　Additionally, the cross-sectional shape of the linear main conveying surface can be selected as an appropriate shape, such as an upward inverted U-shape, U-shape, or V-shape.　The linear feeder L can align the work W conveyed from the starting end of the linear main conveying path L1 in a line during conveyance and supply it to the next process equipment from the terminal end L11 of the linear main conveying path L1.

FIG. 1 illustrates a vibration conveyance device X provided with a ball feeder B on the upstream side of the linear conveyance unit L2.　The ball feeder B is capable of conveying the work W in the downstream direction of the conveyance direction along the spiral conveyance path B1 by applying vibration to the ball-shaped conveyance section B2 (ball conveyance section) having a spiral conveyance path B1 (spiral conveyance path) on the inner peripheral surface. will be.　In the ball feeder B, the specific configuration for vibrating the ball conveyance unit B2 to convey the work W on the spiral conveyance path B1 toward the downstream side in the conveyance direction is not particularly limited, and is similar to the above-described linear feeder L (configuration using a leaf spring, configuration that generates traveling waves, etc.) can be appropriately adopted.　When vibration is applied to the ball conveyance section B2, the work W climbs the spiral conveyance path B1 and is conveyed as is from the end (exit portion) of the spiral conveyance path B1 to the starting end of the linear main conveyance path L1 of the linear feeder L.

The work W that has reached the starting end (upstream end) of the linear main conveying path L1 is conveyed toward the terminal end L11 (downstream end) of the linear main conveying path L1, is transferred to the chute 1, and is transferred to the next process equipment Y. It is supplied to the transmission surface Y1.　1 and 2 show an embodiment in which the next process equipment Y is a rotary table T.　A predetermined revolving area defined along the vicinity of the outer periphery of the upward surface of the rotary table T is the work transfer surface Y1.　In addition, the rotary table T constitutes, for example, a part of an appearance inspection device that inspects the appearance of a workpiece. In this appearance inspection device, the workpiece W is arranged at an even pitch in a certain posture on a disk-shaped rotary table T. This improves inspection efficiency.

The chute 1 transports the work W transferred from the linear feeder L for a certain section and then supplies the work W to the next process equipment Y.　As shown in FIGS. 3 and 4, the chute 1 has a conveyance path (work conveyance path 2) having a conveyance surface (conveyance surface 21) on the upward surface and an open space below, and a workpiece conveyance path (2). A conveying unit (3) disposed at a position adjacent to the conveying path (2) and transmitting vibration generated by elastic deformation to the conveying surface (21), and a driving unit (4) that excites and elastically deforms the conveying portion (3). It is equipped with　Here, Figure 3 is a perspective view of the overall exterior of the chute 1, with different viewing directions in (a) and (b) of the same drawing.　In addition, (a) in FIG. 4 is a plan view of the chute 1, and (b), (c), and (d) in the same figure are respectively an arrow in the F1 direction and an arrow in the F2 direction in (a) in the same figure. F3 arrow diagram.

The chute 1 according to the first embodiment constitutes the transport unit 3 with an elastically deformable plate body provided in a standing position.　The chute 1 of the first embodiment has a surface 33 on the opposite side to the surface 34 forming the transport path 2 in the chute 1 from the central portion in the height direction H of the transport unit 3. It is supported on a support portion 5 arranged in an extended position in the thickness direction E of the conveyance portion 3 (see Fig. 3).　In the first embodiment, the transport unit 3 is configured to support two locations separated by a predetermined distance along the transport direction D1 of the work W by the support unit 5.　Each support part 5 has a rod shape made of a material with low rigidity, one end of which is attached to the conveyance part 3, and the other end of which is attached to a common fixing part 6.　A low-rigidity support portion 5 is provided between the conveyance unit 3 and the fixing portion 6, so that the vibration state of the conveyance unit 3 is not adversely affected.　Additionally, in Figure 4, the support portion 5 and the fixing portion 6 are omitted.

Here, the transport direction D1 of the workpiece W in the chute 1 can be specified as a direction from the back surface 31 of the transport unit 3 to the front surface 32.　In addition, the direction perpendicular to the front-back direction Z of the chute or transport unit 3 in a plane can be specified as the “thickness direction E of the chute 1 or transport unit 3”, and the front-back direction of the chute 1 The orthogonal direction perpendicular to Z can be specified as “the height direction H of the chute 1 or the conveyance unit 3.”

The chute 1 of the first embodiment has two side surfaces 33 and 34 (two sides orthogonal to the transport direction D1 of the workpiece W in the transport unit 3 in a planar view) of the transport unit 3. ) A driving unit 4 is provided on one side 33.　In the first embodiment, as shown in FIGS. 3 and 4, piezoelectric elements 4a and 4b are applied as the driving unit 4, and a total of four piezoelectric elements 4a and 4b are placed on one side of the conveyance unit 3. It is fixed around the central portion H in the height direction on the side 33 by an appropriate treatment such as pasting or fixing means.　Specifically, as shown in Fig. 3(b) and Fig. 4(d), the horizontal vibration mode described later is driven at a position where the area where the support part 5 is installed (support installation area) is sandwiched in the front-back direction Z. A piezoelectric element 4a for use is provided, and a piezoelectric element 4b for vertical vibration mode driving, which will be described later, is provided at a position where the support installation area is sandwiched in the height direction H.　The piezoelectric elements 4a and 4b are thin plates forming a rectangular shape, and the piezoelectric element 4a for horizontal vibration mode driving is provided in a vertically elongated position, and the piezoelectric element 4b for vertical vibration mode is arranged in a horizontally elongated position. The posture is being prepared.

The work conveyance path 2 is provided in an attitude so as to protrude in the thickness direction E (width direction E) of the conveyance section 3 in the central portion in the height direction H of the conveyance section 3.　In the first embodiment, the work transport path 2 is provided in the central portion of the transport unit 3 in the height direction H in an attitude that protrudes laterally from one side 34 of the transport unit 3.　A groove-shaped conveyance surface 21 is formed on the upward surface of the work conveyance path 2.　The shape of the groove of the conveyance surface 21 is not particularly limited, and in Fig. 5 and the like, the conveyance surface 21 has an upward inverted U-shaped cross section as an example.　The starting end 22 and the terminal end 23 of the work transport path 2 reach the outer edge of the work transport path 2 on the upstream side of the work transport direction D1 and the outer edge on the downstream side of the work transport direction D1, respectively.　The dimension of the work transport path 2 along the front-back direction Z is the same as the dimension of the transport unit 3 along the front-back direction Z.　That is, the chute 1 of the first embodiment is provided with a work conveyance path 2 extending laterally from the central portion H of the conveyance section 3 in the height direction.　In the first embodiment, the conveyance section 3 and the work conveyance path 2 are formed integrally.

In the chute 1 according to the first embodiment, no other parts are provided on the downward surface of the work conveyance path 2, so the space below the work conveyance path 2 is a free space (see Figure 3). (a), see (b) and (c) of Figure 4).　In the first embodiment, the downstream portion in the work transport direction D1 of the downward surface of the work transport path 2 is formed as a tapered surface 24 whose height dimension gradually decreases toward the longitudinal end 23 of the work transport path 2. It is being set (see (b) in Figure 4).

As shown in Figs. 1 and 2, the vibration conveying device With the downward surface (tapered surface 24) of the downstream end of the work conveyance path 2 close to Y1, the fixing portion 5 is fixed to a member (not shown) separate from the chute 1 by an appropriate means. It can be installed as is.　In this installation state, the downward surface of the downstream end set on the tapered surface 24 of the work transport path 2 is brought close to the work transfer surface Y1 of the rotary table T, so the transport surface 21 is in the work transport direction. It becomes a downward slope that gradually slopes diagonally downward from the upstream of D1 toward the downstream.　It is essential that the inclination angle of the downhill slope is such that the work W slides down due to gravity and does not break the posture of the work W. In the first embodiment, the transfer surface 21 is tilted at an angle of about 5° to 15°. It is set to a downhill gradient of .

And, the vibration conveying device ), the work W transferred to ) is transported in a certain section (the transport section of the work W by the transport surface 21), and then the work W can be supplied to the rotary table T, which is the next process equipment Y.　In the vibration conveyance device It is configured to produce an elliptical vibration that synthesizes the vertical vibration mode shown in .

As shown in FIG. 5 , the horizontal vibration mode is a vibration in which the bending and bending appear along the orthogonal direction perpendicular to the conveyance surface 21 and bend in the direction Z parallel to the work conveyance direction D1.　In the first embodiment, an alternating current voltage is applied only to the two piezoelectric elements 4a arranged at a predetermined distance apart in the front-back direction Z among the piezoelectric elements 4a and 4b provided near the central portion of the transport unit 3 in the height direction H. By doing this, when the transport unit 3 is excited, as shown in FIG. 6, the entire transport unit 3 is configured to generate vibration (horizontal vibration) that bends in a direction parallel to the work transport direction D1.　In Fig. 6, the direction of vibration (displacement direction) in the horizontal vibration mode is indicated by an arrow.　The vibration transport device

The vertical vibration mode is vibration in the orthogonal direction H perpendicular to the workpiece transport direction D1, as shown in FIGS. 7 and 8 .　In the first embodiment, an alternating voltage is applied only to the two driving units 4b arranged at a predetermined distance apart in the height direction H among the piezoelectric elements 4a and 4b provided near the central portion of the conveyance unit 3 in the height direction H. When the transport unit 3 is excited, dips and bends appear along the orthogonal direction H (a direction including the vertical direction component) perpendicular to the transport surface 21, and the entire transport unit 3 is viewed in a planar direction in the work transport direction. It is configured so that bending vibration (vertical vibration) occurs in the direction E perpendicular to D1 (direction E perpendicular to the distribution direction of the prosthesis and prosthesis).　In Fig. 7, the direction of vibration (displacement direction) in the vertical vibration mode is indicated by an arrow.　In addition, FIG. 8(a), like FIG. 6, shows the vertical vibration mode viewed from the direction directly opposite the surface 34 forming the conveyance path 2 (direction F1 in FIG. 4(a)). It is a drawing, and FIG. 8(b) is a diagram showing the vertical vibration mode seen from the F2 direction in FIG. 4(a).　5 to 8 and FIG. 9 described below display the vibration mode through an analysis animation, and in order to make it easier to understand the vibration situation of the vibration mode, the suit in the non-vibration state is partially omitted as an object of comparison. there is.

The chute 1 according to the first embodiment excites two different vibration modes, a horizontal vibration mode and a vertical vibration mode, at the same frequency and with a predetermined phase difference, thereby forming an ellipse shown in FIG. 9 on the conveyance surface 21. generates vibration.　Fig. 9 is a diagram showing the temporal transition of elliptical vibration repeating in the order (i) → (ii) → (iii) → (iv) → (i).　In addition, the piezoelectric element 4a is provided in the downward position of the horizontal vibration mode among the conveyance section 3, and the piezoelectric element 4b is provided in the downward position of the vertical vibration mode among the conveyance section 3, and an alternating voltage is applied. Excited by doing.　Additionally, the frequency when excited by the piezoelectric elements 4a and 4b is set to a frequency around the natural frequencies of the horizontal vibration mode and the vertical vibration mode.　The chute 1 of the first embodiment can vibrate the conveyance surface 21 in an ultrasonic range with a frequency of 20 kHz or higher in the vibration mode (standing wave).

In the suit 1 according to the first embodiment, the vibration mode in which the conveyance unit 3 is elastically deformed by the drive unit 4 (piezoelectric elements 4a, 4b) is divided into a horizontal vibration mode and a vertical vibration mode. It is a synthesized elliptical vibration, and in the vibration mode, the entire conveyance surface 21 is configured to be in a position corresponding to or near the double of the horizontal vibration mode, so that, as shown in FIGS. 9 and 10, the conveyance path 2 A uniform elliptical vibration is created throughout.　As a result, uniform elliptical vibration is generated on the entire conveyance surface 21 of the conveyance path 2, and the work W on the conveyance surface 21 is in contact with the conveyance surface 2, as shown in FIG. 10. ((ii) in the same drawing) and the state of being spaced apart from the conveyance surface 2 ((iii), (iv), (i) in the same drawing) are repeated in a predetermined cycle, and the workpiece is conveyed along the transfer direction D1. do.　That is, at the point when the work W contacts the conveyance surface 21, a friction force is generated between the work W and the conveyance surface 21, and this frictional force acts as a driving force to convey the work W in the work conveyance direction D1, Propulsion can be gained throughout Bansong-myeon (21).　In addition, the fact that uniform elliptical vibration is generated on the entire conveyance surface 21 of the conveyance path 2 means that even if any point in the vibration mode is cut out, an arbitrary point on the conveyance surface 21 at each viewpoint ( As an example, the relative positional relationship between points P and Q) in FIG. 10 is constant, and for example, undulations due to vibration do not partially appear on the conveyance surface 21.　(i), (ii), (iii), and (iv) in Figure 10 correspond to (i), (ii), (iii), and (iv) in Figure 9, respectively.　In addition, the ellipses and black circles on the ellipses shown in (i), (ii), (iii), and (iv) of Figures 9 and 10 schematically indicate the vibration state at which point in the elliptical vibration in each figure. It is expressed as .　Additionally, in Fig. 10, the conveyance surface 21A in a vibration-free state is indicated by a dotted line.

As described above, the chute 1 according to the first embodiment has a vibration mode in which the conveyance portion 3 is elastically deformed by the drive portion 4 (piezoelectric elements 4a, 4b) on the conveyance surface 21. ) and a horizontal vibration mode in which oscillations appear along the orthogonal direction H perpendicular to and bend in a direction parallel to the work conveyance direction D1 on the conveyance path 2, and an orthogonal direction perpendicular to the conveyance surface 21. It is an elliptical vibration that combines the vertical vibration mode, which is the vibration of H, and in the vibration mode, the entire conveyance surface 21 is configured to be at least a position corresponding to or near the double of the horizontal vibration mode, so that the entire conveyance surface 21 is Since it is a configuration in which uniform elliptical vibration is generated, a vibration state without any bends can be obtained on the conveyance surface 21.　Then, in the vibration mode, the conveying surface 21 vibrates uniformly in an elliptical manner, thereby generating a frictional force between the conveying surface 21 and the work W, and this frictional force acts as a driving force to convey the work W, and the conveying surface (21) Even when the driving force is obtained from all over the area and the work transfer speed is set quickly, the works W are blocked with each other on the transfer surface 21, or the works W on the relatively upstream side in the work transfer direction D1 are pressed. It is possible to avoid situations where posture is disturbed (posture is disturbed due to pressure).　In detail, according to the suit 1 according to the first embodiment, the vibration direction of the vertical vibration mode that combines with the horizontal vibration mode to generate elliptical vibration is orthogonal to the workpiece transport direction D1 and has a vertical component. Because it is a direction, the work W receiving gravity in a vertical downward direction repeats the state of being in contact with the conveyance surface 21 that vibrates in the vertical direction and the state of being separated from it, and the work W is on the conveyance surface 21. When in contact, the workpiece is pressed against the conveyance surface 21 by gravity, resulting in the generation of frictional force as a driving force.

That is, according to the chute 1 according to the first embodiment, the friction force generated between the conveyance surface 21 and the work W due to elliptical vibration is configured to act as a driving force, so even if the vibration amplitude is very small, the conveyance path 2 ) The work W can be conveyed smoothly throughout the entire process, and when connecting to the next process equipment Y or adjusting the position, it can be easily performed without much need to consider the vibration amplitude of the conveyance path 2.　Moreover, in addition to the fact that the space below the conveyance path 2 is a free space, it is possible to bring the gap between the conveyance path 2 and the next process equipment Y close to zero, and the downstream end 23 of the conveyance surface 21 It is possible to stabilize the posture of the workpiece W when transferring from the workpiece transfer surface Y1 of the next process equipment Y.

Furthermore, according to the chute 1 according to the first embodiment, since ultrasonic vibration is used, the amplitude in the vibration mode is extremely small, and the longitudinal end 23 of the conveyance surface 21 (downstream end in the work conveyance direction D1) ), since there is almost no change in the position (work discharge position) at which the work W is discharged to the work transfer surface Y1 of the predetermined next process equipment Y, the work W can be supplied to the work transfer surface Y1 of the next process equipment Y at equal pitch. Another advantage is that there is no vibration noise, so it does not have a negative impact on the working environment.

In particular, according to the suit 1 according to the first embodiment, the vibration amplitude of the horizontal vibration mode and the vibration amplitude of the vertical vibration mode can be individually and independently set, and the phase difference between both vibration modes can also be freely set, The conveyance speed of the work W can be easily adjusted.　Additionally, according to the chute 1 according to the first embodiment, the work W on the conveyance surface 21 can be conveyed in the reverse direction by reversing the rotation direction of the elliptical vibration.

In addition, according to the chute 1 according to the first embodiment, the conveyance surface 21 is set to a slope that gradually slopes downward toward the downstream end of the work conveyance direction D1, so that the work conveyance path 2 from the linear feeder L ), the workpiece W transferred to the conveyance surface 21 is conveyed so as to slide off, making it possible to perform a more smooth conveyance process.　Additionally, when the conveyance speed of the work W on the conveyance surface 21 is set to be slower than the conveyance speed of the work W on the linear main conveyance path L1 of the linear feeder L, the work W is transported on the conveyance surface 21. It can be conveyed with no or almost no gap in the conveyance direction D1, preventing the occurrence of accidents that increase the distance between the works W in the conveyance direction D1 (separation of the works W), and increasing the amount of work conveyed per unit time. This makes it possible to achieve more stable, constant supply processing of the work W.

Furthermore, according to the vibrating conveyance device It becomes possible to supply the work W at a constant pitch and at the same attitude toward the work transfer surface Y1 of process equipment Y, and transfer from the longitudinal end 23 of the transfer surface 21 to the work transfer surface Y1 of the next process equipment Y. It is possible to prevent or suppress the problem of the work W changing its posture during operation.

When paying attention to the relationship between the drive unit 4, the transport unit 3, and the transport path 2 in the first embodiment, the transport unit 3 is connected to the drive unit 4 (piezoelectric elements 4a, 4b). It can be seen as a vibrating part that is bonded and elastically deformed and vibrates according to the stretching/contracting displacement of the piezoelectric elements 4a and 4b, and the conveyance path 2 is disposed at a position adjacent to the vibrating part and is separated from the vibrating part. It can be understood as an action portion having an action surface (a surface corresponding to the above-described conveyance surface 21 and a surface in contact with a secondary member described later) whose entire surface from the starting end to the end vibrates due to transmitted vibration.　As described above, the vibration mode in which the vibrating part is elastically deformed by the piezoelectric element is an elliptical vibration that combines the horizontal vibration mode and the vertical vibration mode, and the entire action surface in the vibration mode corresponds to the double of the vibration mode. By configuring it to be at or near the position, uniform elliptical vibration is generated across the entire operating surface.　If the vibrating part integrally or integrally equipped with such an action surface is considered as a primary member of a linear actuator, it contacts the action area (action surface) of the primary side member and moves relative to the longitudinal direction of the action surface of the primary side member. It is possible to construct a linear actuator having a secondary side member (not shown) disposed so as to be used.　According to such a linear actuator, the entire operating surface vibrates uniformly in an elliptical manner, thereby generating friction between the operating surface and the secondary member. This frictional force acts as a driving force to generate relative movement, and furthermore, the entire operating surface moves without bending. By elliptical oscillation in the same direction, driving force is obtained throughout the operating surface.　In addition, since the operating surface extends in a straight line, the load due to friction between the secondary side members is distributed and there is also an advantage that wear is difficult.　The chute 1 according to the first embodiment can be said to be an example of the use of such a linear actuator.

Additionally, the present invention is not limited to the above-described embodiments.　For example, in the above-described embodiment, an aspect in which the conveyance surface of the chute is set to have a downward slope along the work conveyance direction is exemplified, but a flat conveyance surface that is not inclined can also be adopted.　Additionally, according to the present invention, which can provide sufficient driving force to the workpiece on the conveyance surface, the conveyance surface can be set to have an uphill gradient along the workpiece conveyance direction.

The conveyance unit disposed at a position adjacent to the work conveyance path may be separate from the work conveyance path as long as it satisfies the condition of transmitting vibration generated by elastic deformation to the conveyance surface.　That is, the chute of the present invention includes both a configuration in which the conveyance path and the conveyance portion are provided as separate entities, and a configuration in which the conveyance path and the conveyance portion are provided as one piece.　Additionally, a configuration in which the conveyance path and the conveyance section are integrated (a configuration in which a part of the conveyance section is formed and processed as a conveyance path) is also included in the present invention.

Additionally, in the present invention, the cross-sectional groove shape of the conveyance surface and the length of the workpiece conveyance path along the workpiece conveyance direction can be appropriately selected and changed.　Examples of the cross-sectional shape of the conveyance surface include shapes such as an upward inverted U-shape, U-shape, and V-shape.　It may be provided with a regulating portion having a regulating wall that faces the conveying surface in a predetermined direction, and may be configured to regulate the movement of the workpiece conveyed on the conveying surface in a direction away from the conveying surface.

In the present invention, it is possible to apply a magnetostrictive element or other element as a driving unit instead of or in addition to the piezoelectric element.　In addition, a configuration in which each driving unit is disposed at a position where the transport unit is inserted in the thickness direction may be adopted.　Each drive unit is not limited to being placed at or near the oscillation node, and depending on the vibration mode, the arrangement location may be arranged at or near the oscillation node.　In other words, in order to vibrate more efficiently in the vibration mode, it is desirable to arrange the drive unit (attach the piezoelectric element) at a position where deformation due to elastic deformation is large.

Additionally, the conveyance path may be provided in a horizontal vibration mode near the lower end of the conveyance section.　In this case, the configuration is such that the conveyance unit is not placed in the space below the conveyance path, and the degree of freedom in designing the relative position of the conveyance path with respect to the next process equipment is increased, making it possible to easily supply work on the work transfer surface of the next process equipment. You can choose a layout.　Additionally, the present invention also includes a configuration in which the conveyance path is provided in a horizontal vibration mode near the upper end of the conveyance section.

As a vertical vibration mode, it is also possible to employ vertical vibration generated by elastic deformation in which the entire conveyance unit expands and contracts in the height direction (vertical direction).

In addition, the vibration conveying device according to the present invention is not limited to having all a ball feeder, a linear feeder, and a chute, but has a configuration in which the chute is disposed at a position adjacent to the end of the main conveying path (spiral conveying path) of the ball feeder. Alternatively, a configuration may be used in which a ball feeder is not provided and a chute is arranged at a position adjacent to the end of the main conveyance path (linear main conveyance path) of the linear feeder.　In addition, even if the linear feeder has a linear main conveyance path and a return track formed on the upward surface of the linear conveyance section to return the workpieces excluded from the linear main conveyance path to the upstream side (for example, to the storage section of the ball feeder) do.

Furthermore, a chute according to the present invention is provided between the ball feeder and the linear feeder, and the work that has reached the starting end of the work conveyance path from the end of the spiral conveyance path is conveyed to the end of the work conveyance path, and the linear main conveyance of the linear feeder is performed. It is also possible to realize a configuration that transfers to the starting point of the train.　In this case, the vibration conveying device is equipped with a ball feeder and a chute, and the “work transfer surface of the next process equipment” in the present invention can be understood as the starting end of the linear main conveying path.　It may be configured to supply work directly from the hopper to the chute.

An arrangement in which parts of the main conveyance path and chute conveyance paths overlap in the height direction so that the area adjacent to the end of the main conveyance path is positioned adjacent to the end of the main conveyance path and the area near the starting end of the chute conveyance path is located below the area near the end of the main conveyance path. may be adopted, and the work may be allowed to fall near the starting end of the chute conveyance path by its own weight from the end of the main conveyance path set at a downward slope.　In this case, there is no limitation on the amplitude of the conveyance path, it becomes possible to vibrate at a high amplitude, and the work supply amount can be increased.

In addition, the next process equipment in the present invention is not limited to the rotary table of the visual inspection device, and may be any device that constitutes a suitable inspection device or part of a processing device and has a work transfer surface.

Examples of the workpiece to be transported include micro-components such as electronic components, but the workpiece may be an article other than electronic components.

[Second Embodiment]

Hereinafter, a second embodiment of the present invention will be described with reference to the drawings.　In addition, in the specification and drawings related to the second embodiment, the same symbols are assigned to components that are substantially the same as those of the above-described first embodiment, thereby omitting duplicate descriptions.

As shown in FIGS. 11 and 12, the chute 1 according to the second embodiment moves the workpiece W, which is a conveyance object, toward the longitudinal end L11 of the main conveyance path (linear main conveyance path L1) by vibration in the conveyance direction. It is applied to the vibration conveying device　11 and 12 show the linear conveyance path L1 of the linear feeder L as an example of the main conveyance path L1, and the chute 1 according to the second embodiment is located at a position adjacent to the terminal end L11 of the linear main conveyance path L1. It shows the arrangement of .

As shown in FIG. 12, the linear feeder L is capable of conveying the work W in the conveyance direction downstream along the linear main conveyance path L1 by applying vibration to the linear conveyance unit L2 having the linear main conveyance path L1, which is a straight conveyance path. will be.　In the linear feeder L in the second embodiment, the specific configuration of vibrating the linear conveyance unit L2 to convey the work W on the linear main conveyance path L1 toward the downstream side in the conveyance direction is not particularly limited, for example, from an excitation source. The applied exciting force directly or indirectly excites the leaf spring (driving spring) connecting the movable part to which the linear conveyance unit L2 is connected and the predetermined fixed part, so that the movable part and the fixed part vibrate in opposite directions to each other, thereby One configuration is that the linear conveyance unit L2 connected to the movable portion vibrates in the longitudinal direction to convey the work W downstream along the conveyance direction.　Additionally, as another example, it may be a linear feeder L that transports the work W along the linear main transport path L1 by traveling waves generated in the linear transport unit L2.

The starting and ending ends L11 of the linear main conveyance path L1 reach the outer edge of the linear conveyance section L2 and are set to an appropriate cross-sectional shape.　The linear main conveyance path L1 functions as a conveyance surface (linear conveyance surface) for conveying the workpiece W.　Additionally, the cross-sectional shape of the linear main conveying surface can be selected as an appropriate shape, such as an upward inverted U-shape, U-shape, or V-shape.　The linear feeder L can align the work W conveyed from the starting end of the linear main conveying path L1 in a line during conveyance and supply it to the next process equipment from the terminal end L11 of the linear main conveying path L1.

FIG. 11 illustrates a vibration conveyance device X provided with a ball feeder B on the upstream side of the linear conveyance unit L2.　The ball feeder B is capable of conveying the work W in the downstream direction of the conveyance direction along the spiral conveyance path B1 by applying vibration to the ball-shaped conveyance section B2 (ball conveyance section) having a spiral conveyance path B1 (spiral conveyance path) on the inner peripheral surface. will be.　In the ball feeder B, the specific configuration for vibrating the ball conveyance unit B2 to convey the work W on the spiral conveyance path B1 toward the downstream side in the conveyance direction is not particularly limited, and is similar to the above-described linear feeder L (configuration using a leaf spring, configuration that generates traveling waves, etc.) can be appropriately adopted.　When vibration is applied to the ball conveyance section B2, the work W climbs the spiral conveyance path B1 and is conveyed as is from the end (exit portion) of the spiral conveyance path B1 to the starting end of the linear main conveyance path L1 of the linear feeder L.

The work W that has reached the starting end (upstream end) of the linear main conveying path L1 is conveyed toward the terminal end L11 (downstream end) of the linear main conveying path L1, is transferred to the chute 1, and is transferred to the next process equipment Y. It is supplied to the transmission surface Y1.　11 and 12 show an embodiment in which the next process equipment Y is a rotary table T.　A predetermined revolving area defined along the vicinity of the outer periphery of the upward surface of the rotary table T is the work transfer surface Y1.　In addition, the rotary table T constitutes, for example, a part of an appearance inspection device that inspects the appearance of a workpiece. In this appearance inspection device, the workpiece W is arranged at an even pitch in a certain posture on a disk-shaped rotary table T. This improves inspection efficiency.

The chute 1 transports the work W transferred from the linear feeder L for a certain section and then supplies the work W to the next process equipment Y.　As shown in FIGS. 13 and 14, the chute 1 has a conveyance surface 21 and an open downward space (work conveyance path 2), and a conveyance mechanism that conveys vibration generated by elastic deformation. It is provided with a conveyance unit 3 that transmits to the surface 21 and a drive unit 4 that excites the conveyance unit 3 to elastically deform it.　Here, Figure 13 is an overall external view of the chute 1, with different viewing directions in (a) and (b) of the same drawing.　Additionally, FIG. 14(a) is a diagram of an arrow in the F1 direction in FIG. 13(a), and FIG. 14(b) is a diagram of an arrow in the F2 direction in (a) of the same figure.

The transport unit 3 in the second embodiment includes a first vibration unit 31 (main vibration unit) disposed at a position adjacent to the work transport path 2, and a work transfer unit among the first vibration units 31. It has a second vibration unit 32 (sub-vibration unit) disposed in an attitude protruding in the normal direction with respect to the two surfaces in the direction perpendicular to the direction D1.

The first vibration unit 31 is made of an elastically deformable plate body, and a work conveyance path 2 is provided at the lower end.　Here, the transport direction D1 of the work W in the work transport path 2 can be specified as a direction from the back surface 311 of the first vibration unit 31 to the front surface 312.　In addition, the direction perpendicular to the front-back direction Z of the chute 1 or the first vibration unit 31 in a plane can be specified as “the thickness direction E of the chute 1 or the first vibration unit 31”, The orthogonal direction perpendicular to the front-back direction Z of the chute 1 can be specified as “the height direction H of the chute 1 or the first vibration unit 31.”　In the second embodiment, the conveyance path 2 is provided at the lower end of one side 313 of the two opposing sides (two sides) of the first vibration section 1 in the thickness direction E.　Hereinafter, this surface 313 will be referred to as the conveyance path setting surface 313, and the opposite surface (side) will be referred to as the conveyance path non-setting surface 314.

The second vibration unit 32 is composed of an elastically deformable plate body, and extends from the vicinity of the center of the conveyance path setting surface 313 and the conveyance path non-setting surface 314 of the first vibration unit 31 to each surface (conveyance path). They are each arranged in a protruding posture in the direction normal to the setting surface 313 and the non-setting surface 314 of the conveyance path.　Among the second vibrating units 32, the portion 32A protruding from the conveyance path setting surface 313 of the first vibrating portion 31 and the portion 32B protruding from the conveying path non-setting surface 314 are each other. The second vibration unit 32 has the same shape and is disposed at or near the center of gravity of the first vibration unit 31.　The normal direction (projection direction of the second vibration unit 32) of the conveyance path setting surface 313 and the conveyance path non-setting surface 314 approximately coincides with the thickness direction E of the first vibration portion 31.　The second vibration unit 32 has a cross-sectional shape parallel to each surface of the transport path setting surface 313 and the transport path non-setting surface 314 of the first vibration unit 31 in a horizontal direction extending in the work transport direction D1. It is set to a long cross-sectional shape.　Additionally, in the second embodiment, the size of the workpiece transport direction D1 of the second vibration unit 32 is set smaller than the size of the first vibration unit 31 in the same direction D1.　This second vibration unit 32 is arranged symmetrically with respect to an imaginary plane (object surface) that passes through the center of the thickness direction E of the first vibration unit 31 and is parallel to the surface of the conveyance path setting surface 313, there is.

The chute 1 of the second embodiment is a support portion arranged in an attitude extending from the conveyance path non-set surface 314 in the thickness direction E of the conveyance section 3 at the center portion in the height direction H of the first vibration section 31. (5) is provided (see FIG. 13).　In the second embodiment, two locations of the first vibrating unit 31 are separated by a predetermined distance along the transport direction D1 of the workpiece W (a portion 32B of the second vibrating unit 32 protruding from the transport path non-set surface 314). The support portion 5 is disposed at a position where ) is inserted in the workpiece transport direction D1.　Each support part 5 has a rod shape made of a material with low rigidity, one end of which is attached to the first vibration part 31, and the other end of which is attached to the common fixing part 6.　A low-rigidity support part 5 is provided between the first vibrating part 31 and the fixing part 6, so that the vibration state of the first vibrating part 31 is not adversely affected.　The support part 5 can also be considered as a part that constitutes the conveyance part 3 together with the first vibration part 31 and the second vibration part 32.　The second vibration unit 32 is disposed at or near the center of gravity of the transport unit 3.　In the second embodiment, the first vibration unit 31 and the second vibration unit 32 are formed integrally.　Additionally, in Figure 14, the support portion 5 and the fixing portion 6 are omitted.

In the chute 1 of the second embodiment, a drive unit 4 is provided at a predetermined location of the first vibration unit 31.　In the second embodiment, as shown in FIGS. 13 and 14, piezoelectric elements 4a and 4b are applied as the driving unit 4, and two piezoelectric elements 4a are applied to the back surface of the first vibration unit 31 ( 311) and the front surface 312 are respectively fixed to the central portion of the height direction H by an appropriate treatment or fixing means such as pasting, and one piezoelectric element 4b is placed on the conveyance path setting surface of the first vibration unit 31 ( It is fixed around the central part of H in the height direction in 313) by appropriate treatment or fixing means such as pasting.　The piezoelectric elements 4a and 4b are thin plates forming a rectangular shape, and the piezoelectric element 4a for horizontal vibration mode driving is provided in a vertically elongated position, and the piezoelectric element 4b for vertical vibration mode is arranged in a horizontally elongated position. The posture is being prepared.　The piezoelectric elements 4a and 4b are provided at positions where large strains occur (vibration positive positions) in each vibration mode.　And, in the chute 1 of the second embodiment, as shown in FIGS. 12 and 14, the first vibration unit 31 and the second vibration unit are positioned in an intersecting position at an inclination angle of approximately 45 degrees with respect to the horizontal plane. (3) is arranged so that the conveyance path 2 provided at the lower end of the first vibration section 31 is continuous to the longitudinal end L11 of the linear conveyance path L.

The work conveyance path 2 is provided at the lower end of the first vibration unit 31 in an attitude that protrudes in the thickness direction E (width direction E) of the first vibration unit 31.　In the second embodiment, the work conveyance path 2 is provided in an attitude protruding laterally from the conveyance path formation surface 313.　A groove-shaped conveyance surface 21 is formed on the upward surface of the work conveyance path 2.　The shape of the groove of the conveyance surface 21 is not particularly limited, and in Fig. 13 and the like, the conveyance surface 21 with an upward inverted U-shape in cross section is shown as an example.　The starting end 22 and the terminal end 23 of the work transport path 2 reach the outer edge of the work transport path 2 on the upstream side of the work transport direction D1 and the outer edge on the downstream side of the work transport direction D1, respectively.　The dimension of the work conveyance path 2 along the front-back direction Z is the same as the dimension of the first vibration unit 31 along the front-back direction Z.　That is, the chute 1 of the second embodiment is provided with a work conveyance path 2 extending laterally from the lower end of the first vibration unit 31.　In the second embodiment, the first vibration unit 31 and the work conveyance path 2 are formed integrally.

In the chute 1 according to the second embodiment, no other parts are provided on the downward surface of the work conveyance path 2, and therefore the space below the work conveyance path 2 is a free space.　In the second embodiment, the first vibration unit 31 is arranged in an attitude inclined at a predetermined angle as described above, and in this arrangement position, the lower surface of the work conveyance path 2 is set to be a horizontal surface ( (see (b) in Figure 14).

As shown in Figs. 11 and 12, the vibration conveying device The downward surface of the downstream end of the work conveyance path 2 is brought close to Y1, and the fixing part 5 can be installed on a separate member (not shown) from the chute 1 with the fixing part 5 fixed by an appropriate means.　In the second embodiment, in this installation state, the conveyance surface 21 is set to have a downward slope that gradually slopes diagonally downward from the upstream of the workpiece conveyance direction D1 toward the downstream.　It is important that the inclination angle of the downhill slope is such that the work W slides down due to gravity and does not break the posture of the work W. In the second embodiment, the transfer surface 21 is tilted at an angle of about 5° to 15°. It is set to a downhill gradient of .

And, the vibration conveying device ), the work W transferred to ) is transported in a certain section (the transport section of the work W by the transport surface 21), and then the work W can be supplied to the rotary table T, which is the next process equipment Y.　In the vibration conveyance device It is configured to create an elliptical vibration that combines vibration modes.

As shown in FIG. 15, the horizontal vibration mode is a vibration in which the conveyance surface 21 bends in the direction Z parallel to the work conveyance direction D1.　In the second embodiment, when the first vibration unit 31 is excited by applying an alternating voltage only to the piezoelectric element 4a, the entire first vibration unit 31 vibrates in a direction parallel to the workpiece transport direction D1 (horizontal It is configured to generate vibration.　In addition, in this horizontal vibration mode, as shown in FIG. 15, the first vibration unit 31 and the second vibration unit 32 provided with the conveyance path 2 are aligned in the stretching direction D of the conveyance path 2. It is a vibration mode in which they vibrate in opposite phases to each other.　The vibration transport device there is.

As shown in Figs. 16 and 17, the vertical vibration mode is a vibration in which the conveyance surface 21 bends in the orthogonal direction H perpendicular to the work conveyance direction D1.　In the second embodiment, when the first vibration unit 31 is excited by applying an alternating voltage only to the piezoelectric element 4b, the entire first vibration unit 31 is bent in the orthogonal direction E perpendicular to the workpiece transport direction D1. It is configured to generate vibration (vertical vibration).　Additionally, this vertical vibration mode is a vibration mode in which the entire conveyance path 2 bends in the orthogonal direction perpendicular to the work conveyance direction D1, thereby causing bending in the second vibration unit 32 as well.　In addition, FIG. 16 is a diagram showing the vertical vibration mode seen from the conveyance path setting surface 313 side, similar to FIG. 15, and FIG. 17 is a diagram showing the vertical vibration mode viewed from the F2 direction in FIG. 14(a).　15 to 18 show the vibration mode through an analysis animation, and to make it easier to understand the vibration situation of the vibration mode, the suit in the non-vibration state is partially omitted as an object of comparison and is shown as a black line.

The suit 1 according to the second embodiment of the present invention excites two different vibration modes, a horizontal vibration mode and a vertical vibration mode, at the same frequency and with a predetermined phase difference, thereby forming the vibration shown in FIG. 18 on the conveyance surface 21. Creates an elliptical vibration.　Figure 18 is a diagram showing the temporal transition of elliptical vibration repeating in the order (i) → (ii) → (iii) → (iv) → (i).　In addition, the piezoelectric elements 4a and 4b are provided at positions where large deformation occurs in each vibration mode (horizontal vibration mode and vertical vibration mode) of the first vibration unit 31, and are excited by applying an alternating voltage.　Additionally, the frequency when excited by the piezoelectric elements 4a and 4b is set to a frequency around the natural frequencies of the horizontal vibration mode and the vertical vibration mode.　The chute 1 of the second embodiment can vibrate the conveyance surface 21 in an ultrasonic range with a frequency of 20 kHz or higher in the vibration mode (standing wave).

In the suit 1 according to the second embodiment, the vibration mode in which the conveyance part 3 is elastically deformed by the drive part 4 (piezoelectric elements 4a, 4b) is a horizontal vibration mode and a vertical vibration mode. It is an elliptical vibration that combines, and in the vibration mode, the entire conveyance surface 21 is configured to be in a position corresponding to or near the position of the horizontal vibration mode, as shown in FIGS. 18 and 19, the conveyance path 2 ) A uniform elliptical vibration is created throughout.　As a result, uniform elliptical vibration is generated on the entire conveyance surface 21 of the conveyance path 2, and the work W on the conveyance surface 21 is in contact with the conveyance surface 2, as shown in FIG. 19. ((ii) in the same drawing) and the state of being spaced apart from the conveyance surface 2 ((iii), (iv), (i) in the same drawing) are repeated in a predetermined cycle, and the workpiece is conveyed along the transfer direction D1. do.　That is, at the point when the work W contacts the conveyance surface 21, a friction force is generated between the work W and the conveyance surface 21, and this frictional force acts as a driving force to convey the work W in the work conveyance direction D1, Propulsion can be gained throughout Bansong-myeon (21).　In addition, the fact that uniform elliptical vibration is generated on the entire conveyance surface 21 of the conveyance path 2 means that even if any point in the vibration mode is cut out, an arbitrary point on the conveyance surface 21 at each viewpoint ( As an example, the relative positional relationship between points P and Q) in FIG. 19 is constant, and for example, undulations due to vibration do not partially appear on the conveyance surface 21.　(i), (ii), (iii), and (iv) in Figure 19 correspond to (i), (ii), (iii), and (iv) in Figure 18, respectively.　In addition, the ellipses shown in (i), (ii), (iii), and (iv) of Figure 19 and the black circles on the ellipses schematically represent the vibration state at which point in the elliptical vibration in each figure. .　Additionally, in Fig. 19, the conveyance surface 21A in a vibration-free state is indicated by a dotted line.

As described above, in the chute 1 according to the second embodiment, the vibration mode in which the conveyance portion 3 is elastically deformed by the drive portion 4 (piezoelectric elements 4a, 4b) is applied to the conveyance surface 21. ) and a horizontal vibration mode in which oscillations appear along the orthogonal direction H perpendicular to and bend in a direction parallel to the work conveyance direction D1 on the conveyance path 2, and an orthogonal direction perpendicular to the conveyance surface 21. It is an elliptical vibration that combines the vertical vibration mode, which is the vibration of H, and in the vibration mode, the entire conveyance surface 21 is configured to be at least a position corresponding to or near the double of the horizontal vibration mode, so that the entire conveyance surface 21 is Since it is a configuration in which uniform elliptical vibration is generated, a vibration state without any bends can be obtained on the conveyance surface 21.　Then, in the vibration mode, the conveying surface 21 vibrates uniformly in an elliptical manner, thereby generating a frictional force between the conveying surface 21 and the work W, and this frictional force acts as a driving force to convey the work W, and the conveying surface (21) Even when the driving force is obtained from all over the area and the work transfer speed is set quickly, the works W are blocked with each other on the transfer surface 21, or the works W on the relatively upstream side in the work transfer direction D1 are pressed. It is possible to avoid situations where posture is disturbed (posture is disturbed due to pressure).　In detail, according to the suit 1 according to the second embodiment, the vibration direction of the vertical vibration mode that combines with the horizontal vibration mode to generate elliptical vibration is orthogonal to the workpiece transport direction D1 and also has a vertical component. Because it is a direction, the work W receiving gravity in a vertical downward direction repeats the state of being in contact with the conveyance surface 21 that vibrates in the vertical direction and the state of being separated from it, and the work W is on the conveyance surface 21. When in contact, the workpiece is pressed against the conveyance surface 21 by gravity, resulting in the generation of frictional force as a driving force.

That is, according to the chute 1 according to the second embodiment, the friction force generated between the conveyance surface 21 and the work W due to elliptical vibration is configured to act as a driving force, so even if the vibration amplitude is very small, the conveyance path 2 ) The work W can be conveyed smoothly throughout the entire process, and when connecting to the next process equipment Y or adjusting the position, it can be easily performed without much need to consider the vibration amplitude of the conveyance path 2.　Moreover, in addition to the fact that the space below the conveyance path 2 is a free space, it is possible to bring the gap between the conveyance path 2 and the next process equipment Y close to zero, and the downstream end 23 of the conveyance surface 21 It is possible to stabilize the posture of the workpiece W when transferring from the workpiece transfer surface Y1 of the next process equipment Y.

In particular, according to the suit 1 according to the second embodiment, in the horizontal vibration mode, the second vibration unit 32 (sub-vibration unit) vibrates in the opposite phase to the first vibration unit 31 (main vibration unit), The second vibration unit 32 receives the reaction force from the first vibration unit 31, and the amount of bending deformation within the first vibration unit 31 is reduced.　As a result, the entire conveyance path 2 provided in the first vibration unit 31 becomes easier to vibrate uniformly (variation in amplitude depending on the position becomes small), and furthermore, the workpiece conveyance in the conveyance path 3 is reduced. Since the displacement in directions other than the direction parallel to the direction D1 becomes small, stable conveyance of the work W throughout the conveyance path 2 becomes possible.　In particular, in the second embodiment, the workpiece W is transported using elliptical vibration generated by combining the horizontal vibration mode and the vertical vibration mode. In this case, the ratio or phase difference between the amplitudes of the horizontal vibration and the vertical vibration is , greatly affects the conveyance speed and stability.　Therefore, if a large vertical vibration component occurs partially in the horizontal vibration mode, the ratio or phase difference between the amplitudes of the horizontal and vertical vibrations is partially collapsed, causing problems such as unstable conveyance. do.　In this respect, in the second embodiment, vibration in the vertical direction in the horizontal vibration mode can be suppressed, and stable conveyance is possible even when elliptical vibration is used.

When the sub-vibration unit 32 is not provided, as shown in FIG. 20, the horizontal vibration mode causes vibration in the oblique direction around the ends (upper end, lower end) of the first vibration unit 31 in the height direction H. Displacement is likely to occur, and if the conveyance path 2 is set in this area, the conveyance path 2 will also be displaced in the oblique direction during the vibration mode, and the work W on the conveyance surface 21 will be moved to the downstream end of the conveyance direction D1. It cannot be returned smoothly.　This problem can be solved by making the conveyance unit 3 provided with a second vibration unit 32 that vibrates in the opposite phase to the first vibration unit 31.　And, by providing the conveyance path 2 near the lower end of the conveyance section 3, a configuration is created in which the conveyance section 3 is not placed in the space below the conveyance path 2, and conveyance to the next process equipment Y is achieved. The degree of freedom in designing the relative positions of the furnace 2 increases, and a layout that can easily supply the workpiece W onto the workpiece transfer surface Y1 of the next process equipment Y can be selected.

Moreover, according to the chute 1 according to the second embodiment, since ultrasonic vibration is used, the amplitude in the vibration mode is extremely small, and the longitudinal end 23 of the conveyance surface 21 (downstream end in the work conveyance direction D1) ), since there is almost no change in the position (work discharge position) at which the work W is discharged to the work transfer surface Y1 of the predetermined next process equipment Y, the work W can be supplied to the work transfer surface Y1 of the next process equipment Y at equal pitch. Another advantage is that there is no vibration noise, so it does not have a negative impact on the working environment.

Furthermore, according to the chute 1 according to the second embodiment, since the second vibration unit 32 is disposed at or near the center of gravity of the conveyance unit 3, the first vibration unit 31 and The effect of bending deformation in the vertical direction of the first vibration unit 31 can be offset by the vibration of the second vibration unit 32 in a well-balanced manner throughout the conveyance unit 3 including the second vibration unit 32. You can.　More specifically, when the second vibration unit 32 receives the vibration reaction force of the first vibration unit 31, in order to stabilize (balance) the posture of the first vibration unit 31, the first vibration unit ( It is desirable to receive a reaction force near the center of gravity of 31), and the position is near the center of the first vibration unit 31, so the second vibration unit 32 is provided near the center of the first vibration unit 31. It is appropriate to do so.

Furthermore, according to the chute 1 according to the second embodiment, the second vibration unit 32 is disposed in a protruding position on both sides of the first vibration unit 31 in the thickness direction E, so that the second vibration unit 32 is disposed in a protruding position. The rotational moment of the second vibration unit 32 itself generated by the vibration of the eastern part 32 can be offset by generating a rotational moment of the same magnitude at the pair of protruding ends of the second vibration unit 31, 1 The posture of the vibration unit 31 is stabilized.　From this point of view, in order to cancel the rotational moment, it is necessary to generate rotational moments of the same magnitude on both sides, and in the second embodiment, mutual balance is provided in both spaces sandwiching the first vibration section 31 in the thickness direction E. A configuration is adopted in which the second vibration unit 32 maintains a positive relationship.　Specifically, the virtual center plane passing through the center of the thickness direction E of the first vibration unit 31 and extending in the orthogonal direction perpendicular to the thickness direction E of the first vibration unit 31 is set as a symmetry plane, and the second The vibrating part 32 is set to a symmetrical shape.

In particular, according to the suit 1 according to the second embodiment, the vibration amplitude of the horizontal vibration mode and the vibration amplitude of the vertical vibration mode can be individually and independently set, and the phase difference between both vibration modes can also be freely set, The conveyance speed of the work W can be easily adjusted.　Furthermore, according to the chute 1 according to the second embodiment, the work W on the conveyance surface 21 can be conveyed in the reverse direction by reversing the rotation direction of the elliptical vibration.

Furthermore, according to the chute 1 according to the second embodiment, the conveyance surface 21 is set to a slope that gradually slopes downward toward the downstream end of the work conveyance direction D1, so that the work conveyance path 2 is connected from the linear feeder L. ), the workpiece W transferred to the conveyance surface 21 is conveyed so as to slide off, making it possible to perform a more smooth conveyance process.　Additionally, when the conveyance speed of the work W on the conveyance surface 21 is set to be slower than the conveyance speed of the work W on the linear main conveyance path L1 of the linear feeder L, the work W is transported on the conveyance surface 21. It can be conveyed with no or almost no gap in the conveyance direction D1, preventing the occurrence of accidents that increase the distance between the works W in the conveyance direction D1 (separation of the works W), and increasing the amount of work conveyed per unit time. This makes it possible to achieve more stable, constant supply processing of the work W.

In addition, according to the vibration conveying device It becomes possible to supply the work W at a constant pitch and at the same attitude toward the work transfer surface Y1 of process equipment Y, and transfer from the longitudinal end 23 of the transfer surface 21 to the work transfer surface Y1 of the next process equipment Y. It is possible to prevent or suppress the problem of the work W changing its posture during operation.

Additionally, the present invention is not limited to the above-described embodiments.　For example, in the above-described embodiment, a configuration in which the conveyance path is disposed at the lower end of the first vibration section is exemplified, but the arrangement location of the conveyance path, such as a configuration in which the conveyance path is disposed at the upper end of the first vibration section, can be appropriately selected and changed. You can.　Additionally, depending on the arrangement position of the conveyance path, the arrangement position of the second vibration unit may also be changed to an appropriate location that does not interfere with the conveyance path.

It is possible to change the protruding dimensions and weight of the second vibrating part as appropriate depending on the shape of the first vibrating part, etc.

In the above-described embodiment, an aspect in which the conveyance surface of the chute is set to have a downward slope along the work conveyance direction is exemplified, but a flat conveyance surface that is not inclined can also be adopted.　Additionally, according to the present invention, which can provide sufficient driving force to the workpiece on the conveyance surface, the conveyance surface can be set to have an uphill gradient along the workpiece conveyance direction.

A configuration in which the first vibration section and the second vibration section are separate, and a configuration in which the conveyance path and the first vibration section are separate, are also included in the present invention.

Additionally, in the present invention, the cross-sectional groove shape of the conveyance surface and the length of the workpiece conveyance path along the workpiece conveyance direction can be appropriately selected and changed.　Examples of the cross-sectional shape of the conveyance surface include shapes such as an upward inverted U-shape, U-shape, and V-shape.　It may be provided with a regulating portion having a regulating wall that faces the conveying surface in a predetermined direction, and may be configured to regulate the movement of the workpiece conveyed on the conveying surface in a direction away from the conveying surface.

In the present invention, it is possible to apply a magnetostrictive element or other element as a driving unit instead of or in addition to the piezoelectric element.　Additionally, the arrangement position of the drive unit in the first transport unit can also be appropriately selected and changed, and depending on the vibration mode, the arrangement position of the drive unit may be arranged at or near the abdomen of the vibration.　In other words, in order to vibrate more efficiently in the vibration mode, it is desirable to arrange the drive unit (attach the piezoelectric element) at a position where deformation due to elastic deformation is large.

As a vertical vibration mode, it is also possible to employ vertical vibration generated by elastic deformation in which the entire conveyance unit expands and contracts in the height direction (vertical direction).

Furthermore, the present invention also includes an aspect in which a workpiece on a conveyance surface can be transported in a vibration mode consisting of only a horizontal vibration mode.

In addition, the vibration conveying device according to the present invention is not limited to having all a ball feeder, a linear feeder, and a chute, but has a configuration in which the chute is disposed at a position adjacent to the end of the main conveying path (spiral conveying path) of the ball feeder. Alternatively, a configuration may be used in which a ball feeder is not provided and a chute is arranged at a position adjacent to the end of the main conveyance path (linear main conveyance path) of the linear feeder.　In addition, even if the linear feeder has a linear main conveyance path and a return track formed on the upward surface of the linear conveyance section to return the workpieces excluded from the linear main conveyance path to the upstream side (for example, to the storage section of the ball feeder) do.

Furthermore, a chute according to the present invention is provided between the ball feeder and the linear feeder, and the work that has reached the starting end of the work conveyance path from the end of the spiral conveyance path is conveyed to the end of the work conveyance path, and the linear main conveyance of the linear feeder is performed. It is also possible to realize a configuration that transfers to the starting point of the train.　In this case, the vibration conveying device is equipped with a ball feeder and a chute, and the “work transfer surface of the next process equipment” in the present invention can be understood as the starting end of the linear main conveying path.　It may be configured to supply work directly from the hopper to the chute.

An arrangement in which parts of the main conveyance path and chute conveyance paths overlap in the height direction so that the area adjacent to the end of the main conveyance path is positioned adjacent to the end of the main conveyance path and the area near the starting end of the chute conveyance path is located below the area near the end of the main conveyance path. may be adopted, and the work may be allowed to fall near the starting end of the chute conveyance path by its own weight from the end of the main conveyance path set at a downward slope.　In this case, there is no limitation on the amplitude of the conveyance path, it becomes possible to vibrate at a high amplitude, and the work supply amount can be increased.

In addition, the next process equipment in the present invention is not limited to the rotary table of the visual inspection device, and may be any device that constitutes a suitable inspection device or part of a processing device and has a work transfer surface.

Examples of the workpiece to be transported include micro-components such as electronic components, but the workpiece may be an article other than electronic components.

According to the chute according to the second embodiment of the present invention, it is a chute capable of transporting a workpiece, which is a conveyance object, along the conveyance surface toward the downstream end of the conveyance direction, to the work transfer surface of a predetermined next process equipment, and has a conveyance surface. It is provided with a furnace, a conveyance section for transmitting vibration generated by elastic deformation to the conveyance surface, and a drive section for elastically deforming the conveyance section, wherein the conveyance section includes a first vibration section disposed at a position adjacent to the conveyance path, and the first vibrating section. Among the vibrating units, there is a second elastically deformable vibration unit disposed in an attitude protruding in each of the normal directions of the two surfaces in the direction perpendicular to the transport direction of the work, and the vibration mode in which the transport unit is elastically deformed by the drive unit is at least It has a horizontal vibration mode that is vibration bending in a direction parallel to the conveyance direction of the work, and in the vibration mode, the first vibration section and the second vibration section vibrate in opposite phases to each other.

The second vibration unit according to the second embodiment of the present invention is disposed at or near the center of gravity of the conveyance unit.

The vibration conveying device according to the second embodiment of the present invention is capable of conveying the workpiece, which is the object to be conveyed, in the downstream direction of the conveying direction while moving it toward the end of the main conveying path by vibration, and is located adjacent to the end of the main conveying path. 2 Place the suit according to the embodiment.

In addition, the specific configuration of each part is not limited to the above embodiment, and various modifications are possible without departing from the spirit of the present invention.

1: suit
21: Return side
2: Return route (work transfer route)
3: Transport department
4, 4a, 4b: Drive unit (piezoelectric element)
L1: Main conveyance path (linear main conveyance path)
W: Walk
X: Vibration conveying device
Y: Next process equipment (rotary table)
Y1: Work transfer surface

Claims (2)

It is a chute that can transport the workpiece, which is the object to be transported, along the transport surface toward the downstream end of the transport direction, while transporting it to the work transfer surface of the predetermined next process equipment.
a conveyance path having the conveyance surface on an upward surface;
a conveyance unit disposed at a position adjacent to the conveyance path and transmitting vibration generated by elastic deformation to the conveyance surface;
Equipped with a driving unit that elastically deforms the transport unit,
The vibration mode in which the conveyance part is elastically deformed by the drive unit is a horizontal vibration mode that is vibration bending in a direction parallel to the conveyance direction of the work, and a vertical vibration mode that is vibration in a direction perpendicular to the direction perpendicular to the conveyance direction of the work. It is an elliptical vibration combining modes,
A suit characterized in that, in the vibration mode, the entire conveyance surface is configured to be at least in a position corresponding to or near the position of the horizontal vibration mode, so that uniform elliptical vibration is generated on the entire conveyance surface. It is a vibration conveying device that can convey the workpiece, which is the object to be conveyed, toward the end of the main conveying path by vibration while conveying it downstream in the conveying direction.
A vibratory conveyance device characterized in that the chute according to claim 1 is disposed at a position adjacent to the end of the main conveyance path.