KR20240067642A - Method and apparatus for Stage calibration system - Google Patents

Abstract

The present invention relates to a stage calibration system and method. The stage calibration method of the present invention includes the steps of moving a stage for loading a product so that the stage passes through a first point and a second point; acquiring first image information by photographing a mark displayed on the stage passing the first point; acquiring second image information by photographing the mark of the stage passing the second point; Obtaining first position information about the mark from the first image information and obtaining second position information about the mark from the second image information; And it may include correcting the position of the stage using the first location information and the second location information so that the first location information and the second location information match.

Description

Stage calibration system and calibration method {Method and apparatus for Stage calibration system}

The present invention relates to a stage calibration system and calibration method, and more specifically, to a stage calibration system and calibration method that corrects the position of the stage using marks displayed on the stage.

Recently, the semiconductor industry has been developing in the direction of improving the integration of semiconductor devices, and to this end, stages are being used to enable precise positioning at semiconductor manufacturing sites.

The stage is used to manufacture and test semiconductor and FPD (Flat Pannel Display) samples that require high precision. Specifically, the sample is placed on a sample seating table, and the table is moved in the X-axis direction, Y-axis direction, and Z direction. Processing and testing of samples are performed not only by moving them in the axial direction but also by rotating them.

However, there was a problem in that the position of the stage changed due to vibration during the movement, causing the position of the semiconductors loaded on the stage to change, causing product defects. To solve these problems, research and development on technology to calibrate stages is currently in progress.

Korean Patent Publication No. 10-2260620 (2021.06.07.)

The problem to be solved by the present invention is to provide a stage calibration system and calibration method that corrects the position of the stage using image information captured from stage marks at each point of the moving stage.

The problems of the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.

The stage calibration method according to the present invention includes moving the stage for loading a product so that the stage passes through a first point and a second point; acquiring first image information by photographing a mark displayed on the stage passing the first point; acquiring second image information by photographing the mark of the stage passing the second point; Obtaining first position information about the mark from the first image information and obtaining second position information about the mark from the second image information; And it may include correcting the position of the stage using the first location information and the second location information so that the first location information and the second location information match.

A stage calibration system according to the present invention includes a position alignment unit that aligns the position of the stage; a moving unit that moves the stage so that the stage passes a first point and a second point; an image capturing unit configured to acquire first image information and second image information by photographing the mark of the stage at the first point and the second point; A control unit configured to acquire first location information about the mark from the first image information and obtain second location information about the mark from the second image information, wherein the control unit combines the first location information and the The position of the stage can be corrected by controlling the position alignment unit so that the second position information matches.

Specific details of other embodiments are included in the detailed description and drawings.

According to embodiments of the present invention, it is possible to accurately and easily correct the position of the stage using image information obtained by photographing the mark of the stage passing through each point.

In addition, even if the position of the mark changes within the reference range due to the stage's vibration, the stage's position correction time is output to the user, so the user can easily predict the stage's position correction time.

By accurately and easily correcting the position of the stage, the defect rate of products loaded on the stage can be minimized.

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

1 is a schematic diagram illustrating a stage calibration system according to an embodiment of the present invention.
Figure 2 is a plan view for explaining the stage of Figure 1.
FIG. 3 is a diagram showing first image information and second image information captured by the image capturing unit of FIG. 1 of a mark of a stage passing through a first point and a second point.
FIG. 4 is a diagram for explaining first location information of the first image information, second location information of the second image information, and reference range of FIG. 3.
FIG. 5 is a diagram illustrating how the position alignment unit of FIG. 1 corrects the position of the stage.
FIG. 6 is a diagram showing 2-1 image information captured by the image capturing unit of FIG. 1 of a mark of a stage that re-passes the second point.
FIG. 7 is a diagram for explaining the first location information, second location information, reference range, and 2-1 location information of FIG. 6.
FIG. 8 is a flowchart for explaining a process by which the stage calibration system of FIG. 1 corrects the stage position.
FIG. 9 is a flowchart for explaining a detailed process for correcting the position of the stage of FIG. 8.
FIG. 10 is a flowchart for explaining a detailed process of generating position correction time information for the stage of FIG. 9.

The advantages and features of the present invention and methods for achieving them will become clear by referring to the embodiments described in detail below along with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various different forms. The present embodiments are merely provided to ensure that the disclosure of the present invention is complete and to be understood by those skilled in the art in the technical field to which the present invention pertains. It is provided to fully inform those who have the scope of the invention, and the present invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

Embodiments described herein will be explained with reference to cross-sectional views and/or plan views, which are ideal illustrations of the present invention. In the drawings, the thicknesses of films and regions are exaggerated for effective explanation of technical content. Accordingly, the regions illustrated in the drawings have schematic properties, and the shapes of the regions illustrated in the drawings are intended to illustrate a specific shape of the region of the device and are not intended to limit the scope of the invention. In various embodiments of the present specification, terms such as first, second, and third are used to describe various components, but these components should not be limited by these terms. These terms are merely used to distinguish one component from another. Embodiments described and illustrated herein also include complementary embodiments thereof.

The terminology used herein is for describing embodiments and is not intended to limit the invention. As used herein, singular forms also include plural forms, unless specifically stated otherwise in the context. As used in the specification, “comprises” and/or “comprising” means the presence of one or more other components, steps, operations and/or elements in a mentioned element, step, operation and/or element. or does not rule out addition.

Unless otherwise defined, all terms (including technical and scientific terms) used in this specification may be used with meanings that can be commonly understood by those skilled in the art to which the present invention pertains. Additionally, terms defined in commonly used dictionaries are not interpreted ideally or excessively unless clearly specifically defined.

Hereinafter, with reference to the drawings, the concept of the present invention and embodiments thereof will be described in detail.

1 is a schematic diagram illustrating a stage calibration system according to an embodiment of the present invention. Figure 2 is a plan view for explaining the stage of Figure 1. FIG. 3 is a diagram showing first image information and second image information captured by the image capturing unit of FIG. 1 of a mark of a stage passing through a first point and a second point. FIG. 4 is a diagram for explaining first location information of the first image information, second location information of the second image information, and reference range of FIG. 3. FIG. 5 is a diagram illustrating how the position alignment unit of FIG. 1 corrects the position of the stage. FIG. 6 is a diagram showing 2-1 image information captured by the image capturing unit of FIG. 1 of a mark of a stage that re-passes the second point. FIG. 7 is a diagram for explaining the first location information, second location information, reference range, and 2-1 location information of FIG. 6.

Referring to Figures 1 to 7, the stage calibration system 10 according to an embodiment of the present invention changes the position when the stage 100, which loads an object such as a substrate, is moved due to vibration. The position of the stage 100 can be corrected. The stage calibration system 10 may include a stage 100, an image capturing unit 200, a moving unit 300, a position alignment unit 400, and a control unit 500. The stage calibration system 10 may further include an output unit 600.

The stage 100 may support (load) an object (eg, a substrate, etc.). In an embodiment, an object may be placed on one side of the stage 100. One side of the stage 100 may be flat, but is not limited thereto.

The stage 100 may include at least one mark 110 on one side. In an embodiment, stage 100 may include a pair of marks 110. A pair of marks 110 may be located adjacent to vertices of the stage 100. In an embodiment, each of the marks 110 may be formed in an “L” shape, but is not limited thereto.

The mobile unit 300 may be connected to the stage 100. The moving unit 300 may move the stage 100 to pass a plurality of points. In an embodiment, the mobile unit 300 may sequentially pass the stage 100 through a first point, a second point, a third point, a fourth point, etc. The moving unit 300 may move the stage 100 along the X-axis and Y-axis directions. The moving unit 300 may rotate the stage 100 based on the Z axis.

As the stage 100 moves from the first to the ninth points by the moving unit 300, its position may change due to vibration. In this specification, changing the position of the stage 100 may mean that the X and Y coordinate values of the mark 110 displayed on the stage 100 change.

The image capturing unit 200 may be located on one side of the stage 100. The video capturing unit 200 can photograph the stage 100. In an embodiment, the image capturing unit 200 may be a camera, but is not limited thereto.

The image capturing unit 200 may photograph the product supported on the stage 100 and/or the mark 110 of the stage 100. Accordingly, the image capturing unit 200 can obtain image information. The image capturing unit 200 may transmit the acquired image information to the control unit 500.

The image capturing units 200 may be positioned on the movement path of the stage 100, respectively. Accordingly, the image capturing unit 200 may obtain image information by photographing the stage 100 moving sequentially from the first point to the ninth point.

In an embodiment, the image capturing unit 200 may photograph the mark 110 displayed on the stage 100 passing through the first point and the second point. The image capturing unit 200 may acquire first image information I1 by photographing the mark 110 of the stage 100 passing through the first point. The image capturing unit 200 may acquire second image information I2 by photographing the mark 110 of the stage 100 passing the second point. The image capturing unit 200 may acquire 2-1 image information (I2-1) by photographing the mark 110 of the stage 100 re-passing to the second point.

The position alignment unit 400 can align the position of the stage 100. In an embodiment, the position alignment unit 400 may change the X and Y coordinates of the stage 100 by providing an external force to the stage 100. Accordingly, the position of the stage 100 can be corrected by the position alignment unit 400.

The output unit 600 may output information about the stage calibration system 10. In an embodiment, the output unit 600 may be a display panel, but is not limited thereto. The user can check the operation status of the stage calibration through the information output from the output unit 600.

The control unit 500 can control the mobile unit 300 using the input movement path information. Accordingly, the mobile unit 300 can move the stage 100 according to the movement path information. The control unit 500 may receive image information from the image capturing unit 200.

In an embodiment, the control unit 500 may obtain first location information C1 about the mark 110 from the first image information I1. The first position information C1 may be position information about the mark 110 of the stage 100 passing through the first point. The first location information C1 may include first X, Y coordinate values.

The control unit 500 may obtain second location information C2 about the mark 110 from the second image information I2. The second location information C2 may be location information about the mark 110 of the stage 100 passing through the second point. The second location information C2 may include first X, Y coordinate values, which are X, Y coordinate values.

The control unit 500 may use the first location information C1 and the second location information C2 to correct the stage position so that the first location information C1 and the second location information C2 match. In an embodiment, correcting the position of the stage 100 may mean changing the X and Y coordinate values of the stage 100 by controlling the position alignment unit 400.

In an embodiment, the control unit 500 may calculate a first error value between the first location information C1 and the second location information C2. For example, the control unit 500 may calculate the first error value by subtracting the second X, Y coordinate values from the first X, Y coordinate values. The first error value may include a third X, Y coordinate value obtained by subtracting the second X, Y coordinate value from the first X, Y coordinate value.

The control unit 500 may determine whether the calculated first error value is outside the preset reference range (B). If the first error value is outside the reference range (B), the control unit 500 may correct the position of the stage 100 using the first error value. The reference range (B) can be set to the X, Y coordinate range. In an embodiment, the reference range (B) may be set to the X, Y coordinate range of -5<X<5 and -5<Y<5.

In an embodiment, the control unit 500 may control the position alignment unit 400 to change the position of the stage 100 from the second X, Y coordinate values to the third X, Y coordinate values. Accordingly, the position of the stage 100 can be corrected.

For example, the first X, Y coordinate value may be (10, 10), and the second X, Y coordinate value may be (10, 17). The control unit 500 may calculate the first error value using the first X, Y coordinate values and the second X, Y coordinate values. The third X, Y coordinate value included in the first error value may be (0, -7). If the calculated (0, -7) is outside the reference range (B), the control unit 500 may control the position alignment unit 400 to change the position of the stage 100 by (0, -7). . Accordingly, the position of the stage 100 can be corrected.

As the position of the stage 100 is corrected by (0, -7), the position of the mark 110 displayed on the stage 100 at the second point can also be corrected by (0, -7). Accordingly, the second X, Y coordinate values at the second point may be corrected to (10, 10). As the second X and Y coordinate values are corrected, the first location information C1 and the second location information C2 may match.

If the first error value is within the reference range (B), the control unit 500 may control the moving unit 300 so that the stage 100 re-passes the second point. Accordingly, the moving unit 300 may move the stage 100 so that the stage 100 passes through the first point and the second point again.

For example, if the second X, Y coordinate value is (10, 13), the third X, Y coordinate value may be (0, -3). At this time, the third X, Y coordinate values may be within the reference range (B). At this time, the control unit 500 may determine that the first error value is within the reference range (B). If the first error value is within the reference range (B), the control unit 500 may control the moving unit 300 so that the stage 100 re-passes the second point.

The image capturing unit 200 may acquire 2-1 image information (I2-1) by photographing the mark 110 of the stage 100 re-passing the second point. The acquired 2-1 image information (I2-1) may be transmitted to the control unit 500.

The control unit 500 may obtain 2-1 location information (C2-1) from 2-1 image information (I2-1). The 2-1st location information (C2-1) may include the 2-1st X, Y coordinate values consisting of X and Y coordinates. The control unit 500 may calculate a second error value between the first location information (C1) and the 2-1st location information (C2-1).

If the second error value is greater than the first error value and is within the reference range (B), the control unit 500 corrects the position of the stage 100 using the first error value, the second error value, and the reference range (B). Point-in-time information can be generated. The control unit 500 may transmit the generated position correction time point information to the output unit 600. The position correction time point information may include predicted time point information for correcting the position of the stage 100. Accordingly, the user can predict when to correct the position of the stage 100. Accordingly, the position correction time may be a time after the current time.

In an embodiment, when the second error value is greater than the first error value and is within the reference range (B), the control unit 500 sets a first distance value ( D1) can be calculated. Additionally, the control unit 500 may calculate a second distance value D2, which is the shortest distance between the second error value and the reference range B.

The second image information (I2) and the 2-1st image information (I2-1) may include time information at which the image information was generated by the image capturing unit 200 photographing the mark 110 of the stage 100. there is. The control unit 500 may calculate a time value that is the difference between the creation time of the second image information (I2) and the creation time of the 2-1st image information (I2-1). The control unit 500 may calculate the position correction point of the stage 100 by dividing the first distance value D1 by the second distance value D2 and multiplying the time value.

For example, the first X, Y coordinate values included in the first image information I1 may be (10, 10). The second X, Y coordinate values included in the second image information I2 may be (10, 11). Additionally, the time information at which the second image information I2 was generated may be 4 seconds (s). The third X, Y coordinate value included in the 2-1 image information (I2-1) may be (10, 13). Additionally, the time information at which the 2-1st image information (I2-1) was generated may be 14 seconds (s). The reference range (B) can be set to the X, Y coordinate range of -5<X<5 and -5<Y<5. Accordingly, the reference range B may form a square range.

The first error value may be the third X, Y coordinate value of (0, -1). The second error value may be the fourth X, Y coordinate value of (0, -3). At this time, the first distance value D1 may be 2.

The control unit 500 may calculate the second distance value D2, which is the shortest distance between the second error value and the reference range B. In an embodiment, the second distance value D2 may be 2. Additionally, the time value that is the difference between the creation time of the second image information (I2) and the creation time of the 2-1st image information (I2-1) may be 10 seconds (s). The edge unit may generate location correction time point information by dividing the first distance value (D1) (2) from the second distance value (D2) (2) and multiplying the time value (10 seconds). In an embodiment, the position correction point may be 10 seconds later.

The calibration operation of the stage calibration system according to the present invention configured as described above will be described as follows.

FIG. 8 is a flowchart for explaining a process by which the stage calibration system of FIG. 1 corrects the stage position. FIG. 9 is a flowchart for explaining a detailed process for correcting the position of the stage of FIG. 8. FIG. 10 is a flowchart for explaining a detailed process of generating position correction time information for the stage of FIG. 9.

Referring to FIGS. 1 to 10 , the control unit 500 may move the stage 100 for loading products through the moving unit 300 to pass a plurality of points. At this time, the stage 100 may pass through first and second points that are spaced apart from each other.

The image capturing unit 200 may acquire first image information I1 by photographing the mark 110 displayed on the stage 100 passing the first point. The acquired first image information I1 may be transmitted to the control unit 500 or the database unit.

The image capturing unit 200 may acquire second image information I2 by photographing the mark 110 of the stage 100 passing the second point. The acquired second image information I2 may be transmitted to the control unit 500 or the database unit.

The control unit 500 may obtain first location information C1 about the mark 110 from the first image information I1. The control unit 500 may obtain second image information (I2) about the mark 110 from the second image information (I2).

The control unit 500 uses the first location information (C1) and the second location information (C2) to correct the position of the stage 100 so that the first location information (C1) and the second location information (C2) match. You can.

As shown in FIG. 9 , the control unit 500 may calculate a first error value between the first position information C1 and the second position information C2 in order to correct the position of the stage 100. As described above, the first error value may include a third X, Y coordinate value obtained by subtracting the second X, Y coordinate value from the first X, Y coordinate value. The control unit 500 may determine whether the calculated first error value is outside the preset reference range (B).

If the first error value is outside the preset reference range (B), the control unit 500 may correct the position of the stage 100 using the first error value. At this time, the control unit 500 may control the position alignment unit 400 to correct the position of the stage 100. Accordingly, the position of the stage 100 can be correctly aligned.

If the first error value is within the preset reference range (B), the control unit 500 may move the stage 100 so that the stage 100 re-passes the second point. The image capturing unit 200 may acquire 2-1 image information (I2-1) by photographing the mark 110 of the stage 100 re-passing the second point. The acquired 2-1 image information (I2-1) may be transmitted to the control unit 500.

The control unit 500 may obtain 2-1 position information (C2-1) regarding the mark 110 from 2-1 image information (I2-1). The control unit 500 may calculate a second error value between the first location information (C1) and the 2-1st location information (C2-1).

The control unit 500 may determine whether the calculated second error value is outside the reference range (B). If the second error value is outside the preset reference range (B), the control unit 500 may correct the position of the stage 100 using the second error value.

If the second error value does not exceed the reference range (B), the control unit 500 may determine whether the second error value is greater than the first error value. When the second error value is greater than the first error value, the control unit 500 may generate position correction time information of the stage 100 using the first error value, the second error value, and the reference range (B). The control unit 500 may output the generated position correction point to the user through the output unit 600.

As shown in FIG. 10, stage position correction time information can be generated through the following process. When the second error value is greater than the first error value, the control unit 500 may calculate a first distance value D1, which is the shortest distance between the first error value and the second error value. The control unit 500 may calculate the second distance value D2, which is the shortest distance between the second error value and the reference range B. The first distance value (D1) and the second distance value (D2) may be constants. Additionally, the control unit 500 may calculate a time value that is the difference between the creation time of the second image information (I2) and the creation time of the 2-1st image information (I2-1). In an embodiment, the first distance value (D1), the second distance value (D2), and the time value may be calculated simultaneously, but the present invention is not limited thereto, and in another embodiment, they may be calculated sequentially.

The control unit 500 may generate location correction time information by dividing the first distance value D1 from the second distance value D2 and multiplying the time value. The position correction time point information may include predicted time point information for correcting the position of the stage 100.

In the above, preferred embodiments of the present invention have been shown and described, but the present invention is not limited to the specific embodiments described above, and can be used in the technical field to which the invention pertains without departing from the gist of the present invention as claimed in the patent claims. Of course, various modifications can be made by those skilled in the art, and these modifications should not be understood individually from the technical idea or perspective of the present invention.

10: Stage calibration system 100: Stage
200: video recording unit 300: mobile unit
400: Position alignment unit 500: Control unit
600: output unit

Claims (8)

moving the stage for loading products so that the stage passes through a first point and a second point;
acquiring first image information by photographing a mark displayed on the stage passing the first point;
acquiring second image information by photographing the mark of the stage passing the second point;
Obtaining first position information about the mark from the first image information and obtaining second position information about the mark from the second image information; and
A stage calibration method comprising correcting the position of the stage using the first position information and the second position information so that the first position information and the second position information match. According to claim 1,
The step of correcting the position of the stage is,
calculating a first error value between the first location information and the second location information; and
When the calculated first error value is outside a preset reference range, a stage calibration method comprising correcting the position of the stage using the first error value. According to clause 2,
The first location information includes first X, Y coordinate values,
The second location information includes second X and Y coordinate values,
The first error value includes third X, Y coordinate values obtained by subtracting the second X, Y coordinate values from the first X, Y coordinate values,
In the step of correcting the position of the stage, a stage calibration method of correcting the position of the stage so that the position of the stage is changed by the third X and Y coordinate values. According to clause 2,
If the calculated first error value is within the reference range, moving the stage so that the stage passes the second point again;
Obtaining 2-1 image information by photographing the mark of the stage re-passing the second point;
calculating a second error value between the first position information and 2-1 position information about the mark obtained from the 2-1 image information; and
When the second error value is greater than the first error value and is within the reference range, outputting a position correction point of the stage using the first error value, the second error value, and the reference range. How to calibrate the stage. According to clause 4,
The step of outputting the position correction point is,
calculating a first distance value that is the shortest distance between the first error value and the second error value;
calculating a second distance value that is the shortest distance between the second error value and the reference range;
Calculating a time value that is the difference between the creation time of the second image information and the creation time of the 2-1 image information, and multiplying the time value by dividing the first distance value by the second distance value to correct the position A stage calibration method comprising generating viewpoint information. According to claim 1,
A stage calibration method wherein the mark is located adjacent to a vertex of the stage. A stage for loading products and having a mark on one side;
a position alignment unit that aligns the position of the stage;
a moving unit that moves the stage so that the stage passes a first point and a second point;
an image capturing unit configured to acquire first image information and second image information by photographing the mark of the stage at the first point and the second point;
Comprising a control unit that obtains first position information about the mark from the first image information and acquires second position information about the mark from the second image information,
A stage calibration system in which the control unit corrects the position of the stage by controlling the position alignment unit so that the first position information matches the second position information. According to clause 7,
The control unit,
Calculating a first error value between the first location information and the second location information, and controlling the position alignment unit to correct the position of the stage when the calculated first error value is outside a preset reference range Stage calibration system.