KR20240056464A - Posture changing device and film forming apparatus - Google Patents

Abstract

[Task] To provide technology to prevent dust from attaching to the substrate.
[Solution] An attitude change device for changing the attitude of a substrate carrier, comprising: a rotation means for rotating the substrate carrier, the rotation means comprising: a plurality of rollers disposed with the substrate carrier interposed therebetween; It is installed on at least one of the rollers and includes a dust collection cover that individually surrounds the rollers. The dust collection cover includes a regulating wall portion that regulates movement of dust from the bottom side of the dust collection cover to the ceiling side when the substrate carrier is rotated by the rotation means.

Description

POSTURE CHANGING DEVICE AND FILM FORMING APPARATUS}

The present invention relates to an apparatus for changing the posture of a substrate carrier and a film forming apparatus.

In the manufacture of organic EL displays, etc., deposition materials such as organic materials and metal materials are deposited on a substrate. Depending on the processing, it is necessary to invert the top and bottom of the substrate, so a device for changing the posture of the substrate is installed between processing devices (Patent Document 1, etc.).

Patent Document 1: Korean Patent Publication No. 10-2015-0100999

In a system in which a substrate is transported by mounting it on a substrate carrier, the substrate is turned upside down along with the substrate carrier. When changing the posture of the substrate carrier, it is undesirable for dust (particles) to scatter and adhere to the substrate.

The present invention provides a technology for preventing dust from adhering to a substrate.

According to the present invention,

An attitude change device that changes the attitude of a substrate carrier,

Provided with a rotation means for rotating the substrate carrier,

The means of meeting is,

a plurality of rollers disposed with the substrate carrier between them;

A dust collection cover installed on at least one of the plurality of rollers and individually surrounding the rollers,

The dust collection cover is,

A ceiling portion where the peripheral surface of the roller is exposed,

a bottom formed to face the peripheral surface of the roller;

a regulating wall portion disposed spaced apart from the bottom portion and regulating dust on the bottom side from moving toward the ceiling when the rotation means rotates the substrate carrier;

A posture change device characterized in that is provided.

Additionally, according to the present invention,

An attitude change device that changes the attitude of a substrate carrier,

Rotating means for rotating the substrate carrier;

a plurality of transport rollers for transporting the substrate carrier;

and moving means for moving the plurality of conveyance rollers between a conveyance position and a retracted position that avoids interference with the rotation means or the substrate carrier when the rotation means rotates.

A posture change device characterized in that is provided.

Additionally, according to the present invention, the posture change device,

Equipped with a deposition device for depositing a deposition material on a substrate held on a substrate carrier.

A film forming device characterized in that is provided.

According to the present invention, it is possible to provide a technology for preventing dust from attaching to a substrate.

1 is a layout diagram of a film deposition apparatus according to an embodiment of the present invention.
Figure 2 is an explanatory diagram of the deposition apparatus.
Figure 3 is an explanatory diagram of a posture change device.
4 is an explanatory diagram of a posture change device.
Figures 5 (A) and (B) are diagrams illustrating the operation of the posture change device.
Figures 6 (A) and (B) are diagrams illustrating the operation of the posture change device.
Figures 7 (A) and (B) are diagrams illustrating the operation of the posture change device.
Figure 8 is an exploded perspective view of the dust collection cover.
9(A) to 9(C) are explanatory diagrams showing the state of change in the posture of the dust collection cover when the holding unit is rotated.
Fig. 10 is an explanatory diagram showing a change in posture of a dust collection cover according to another embodiment.
Figure 11 (A) is an overall view of the organic EL display device, and (B) is a diagram showing the cross-sectional structure of one pixel.

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Meanwhile, the following embodiments do not limit the invention according to the claims. Although a plurality of features are described in the embodiment, not all of these features are necessarily essential to the invention, and the plurality of features may be arbitrarily combined. Furthermore, in the accompanying drawings, the same or similar components are given the same reference numerals, and duplicate descriptions are omitted.

<First embodiment>

<Overview of the tabernacle equipment>

1 is a layout diagram of a film forming apparatus 1 according to an embodiment of the present invention. Meanwhile, in each drawing, the arrow Z represents the up-down direction (gravity direction), and the arrows X and Y represent the horizontal directions orthogonal to each other. The film forming apparatus 1 is an apparatus for depositing a deposition material on a substrate G, and forms a thin film of the deposition material in a predetermined pattern using a mask M. In particular, the film forming apparatus 1 of the present embodiment is an inline type film forming apparatus capable of carrying out a film forming method of depositing a deposition material on the substrate G using a vapor deposition apparatus while transporting the substrate G.

The material of the substrate G on which film formation is performed in the film formation apparatus 1 can be appropriately selected from materials such as glass, resin, and metal, and one in which a resin layer such as polyimide is formed on glass is preferably used. The deposition material is a material such as an organic material or an inorganic material (metal, metal oxide, etc.). The film forming device 1 can be applied to, for example, a manufacturing device that manufactures electronic devices such as display devices (flat panel displays, etc.), thin film solar cells, organic photoelectric conversion elements (organic thin film imaging elements), and optical members. And, in particular, it is applicable to manufacturing equipment that manufactures organic EL panels.

The film forming apparatus 1 is an apparatus that transports the substrate G and the mask M using the substrate carrier 100. The substrate carrier 100 includes, for example, a mechanism for holding the substrate G and a mechanism for holding the mask M. The mechanism holding the substrate G is, for example, an electrostatic chuck, and the mechanism holding the mask M is, for example, a magnetic adsorption chuck. The mask M is held by the substrate carrier 100 so as to overlap the substrate G, and the substrate G is held between the substrate carrier 100 and the mask M. The substrate carrier 100, the substrate G, and the mask M are plate-shaped and are transported in a horizontal position.

The substrate carrier 100 is conveyed circularly (counterclockwise in the example shown) along the film formation path 1A and the return path 1B. The conveyance mechanism is a roller conveyor in this embodiment. A substrate loading room 110 is installed in the film forming path 1A. The substrate G to be film formed is brought into the substrate loading chamber 110 from the outside of the film forming apparatus 1, and the substrate is brought into the substrate loading chamber 110 from the direction change device 125 of the return path 1B. It is overlapped and held on the carrier 100. The substrate carrier 100 holding the substrate G is conveyed to the posture change device 111, and its posture is changed in the posture change device 111. In this embodiment, the substrate carrier 100 is flipped 180 degrees from the posture in which the substrate G is held on the substrate carrier 100 to the posture in which the substrate G is held below the substrate carrier 100. .

The substrate carrier 100 whose posture has been reversed is transported to the alignment room 112. In the alignment room 112, the mask M conveyed from the return path 1B is aligned with the substrate G held on the substrate carrier 100, and the mask M is placed on the substrate carrier 100. ) is held and supported. The substrate carrier 100 (100GM) holding the substrate G and the mask M is accelerated at a predetermined transfer speed in the acceleration chamber 113 and transferred to the deposition apparatus 114. Here, a deposition material is deposited on the substrate G. Afterwards, the substrate carrier 100 (100GM) holding the substrate G and the mask M on which film formation has been completed is decelerated in the deceleration chamber 115, and the mask M is transferred to the substrate carrier in the separation chamber 116. It is separated from (100). The separated mask M is conveyed to the mask mounting room 121 on the return path 1B.

The posture of the substrate carrier 100 from which the mask M is separated is changed in the posture change device 117. In this embodiment, the substrate carrier 100 is flipped 180 degrees from the posture in which the substrate G is held below the substrate carrier 100 to the posture in which the substrate G is held above the substrate carrier 100. . Thereafter, the substrate carrier 100 is transported to the substrate separation chamber 118, where the substrate G is separated from the substrate carrier 100. The separated substrate G is discharged from the film forming apparatus 1.

The substrate carrier 100 from which the substrate G has been separated is conveyed to the direction change device 119 on the return path 1B. The posture of the substrate carrier 100 is changed in the posture changing device 120. The substrate carrier 100 is flipped 180 degrees so that it is upside down. The substrate carrier 100 is transported to the mask mounting room 121, and the mask M is held by the substrate carrier 100. The substrate carrier 100 (100M) holding the mask M is transferred to the mask separation chamber 123 by the transfer device 122, and the mask M is separated from the substrate carrier 100. The separated mask M is returned to the alignment room 112.

The posture of the substrate carrier 100 from which the mask M is separated is changed in the posture change device 120. The substrate carrier 100 is flipped 180 degrees so that it is upside down. Then, the substrate carrier 100 is transported to the substrate loading room 110 via the direction change device 125. The film forming process is performed sequentially by repeating the above process.

<Deposition device>

FIG. 2 is an explanatory diagram of the deposition apparatus 114. The deposition apparatus 114 includes a transfer chamber 2 forming a transfer chamber 2a for transferring the substrate carrier 100 holding the substrate G and the mask M, and a plurality of source chambers 3. is provided. A plurality of source chambers 3 are arranged side by side in the X direction, and the transfer chamber 2a is located above these source chambers 3.

The transfer chamber 2a is maintained in a vacuum when in use, and an inlet 2b is provided at one end in the X direction, and an outlet 2c is provided at the other end. The substrate carrier 100 holding the substrate G and the mask M is brought into the transfer chamber 2a through the delivery port 2b, and, after processing, is carried out to the outside through the delivery port 2c. Gate valves (not shown) are installed at the delivery port 2b and the discharge port 2c.

A plurality of conveyance rollers 2d arranged in the X direction are installed in the conveyance chamber 2a. This row of conveyance rollers 2d is arranged in two rows spaced apart in the Y direction. Each conveyance roller 2d rotates around the rotation axis in the Y direction. The substrate carrier 100 is placed at both ends in the Y direction on two rows of conveyance rollers 2d, and is conveyed in a horizontal position in the X direction by rotation of the conveyance rollers 2d.

Within each source chamber 3, an internal space is formed that is maintained as a vacuum when in use. The source chamber 3 has a box shape with an opening formed at the top, and the transfer chamber 2a and the internal space of the source chamber 3 communicate through the opening. In each source chamber 3, an evaporation source 3a is installed above to emit a evaporation material. The deposition source 3a of this embodiment is a so-called line source and is installed extending in the Y direction. The deposition source 3a is provided with a crucible that accommodates the raw material of the deposition material, a heater that heats the crucible, etc., and heats the raw material to release the vapor of the deposition material into the transfer chamber 2a.

The deposition device 114 transfers the substrate carrier 100 holding the substrate G and the mask M within the transfer chamber 2, and deposits a deposition material on the substrate G using the deposition source 3a. is deposited. In this embodiment, a plurality of source chambers 3 are arranged in the transport direction of the substrate carrier 100. When different types of deposition materials are discharged from the three source chambers 3, different deposition materials can be continuously deposited on the substrate G. Meanwhile, the number of source chambers 3 is not limited to three, but may be one or two, or may be four or more.

<Attitude change device>

The posture change device 111 will be described with reference to FIGS. 3 and 4 . FIG. 3 is a diagram of the internal structure of the posture change device 111 viewed from the Y direction, and FIG. 4 is a diagram viewed from the X direction. The posture change device 111 includes a chamber 4 forming an internal space maintained in a vacuum when used, a plurality of transfer units 5 disposed within the chamber 4, and a holding device disposed within the chamber 4. Unit 6, a rotation unit 8 that rotates the holding unit 6 from the outside of the chamber 4, and a moving unit that moves each transfer unit 5 in the Y direction from the outside of the chamber 4 (9) is provided. Meanwhile, for convenience, the holding unit 6 is expressed separately from the rotation unit 8, but the holding unit 6 and the rotation unit 8 are integrated to rotate the substrate carrier 100. You may construct a means for this.

The chamber 4 has an inlet 4a at one end in the ) is brought into the chamber 4 from the loading port 4a, and is taken out to the outside from the loading port 4b after the attitude change. Gate valves 4c and 4d are installed at the inlet 4a and outlet 4b to open and close them.

The transport units 5 are installed in plural numbers spaced apart in the X and Y directions. Each conveyance unit 5 is provided with a plurality of conveyance rollers 5a arranged in the X direction and a drive source such as a motor that rotates the conveyance rollers 5a. Each conveyance roller 5a is supported in a cantilever state and rotates around a rotation axis in the Y direction. The substrate carrier 100 has both ends in the Y direction placed on two rows of conveyance rollers 5a spaced apart in the Y direction, and is conveyed in a horizontal position in the X direction by rotation of the conveyance rollers 5a.

Each conveyance unit 5 is parallel in the Y direction (roller axial direction of the conveyance roller 5a) between the conveyance position indicated by the two-dot chain line in FIG. 4 and the retraction position indicated by the solid line by the moving unit 9. move The transfer position is a position near the center of the attitude change device 111 in the Y direction, and the retraction position is a position outside the Y direction. Each transfer unit 5 transfers the substrate carrier 100 at the transfer position. The retreat position is a position that avoids interference between the rotating holding unit 6 or rotating unit 8 and the transfer unit 5.

The moving unit 9 includes a drive mechanism 90 and an actuating shaft 91. The drive mechanism 90 includes an actuator such as an electric cylinder that advances and retreats the operating axis 91 in the Y direction, and is disposed outside the chamber 4. The operating shaft 91 extends in and out of the chamber 4 through an opening (not shown) formed in the side wall of the chamber 4. The seal structure 92 has a cylindrical structure such as a bellows, and seals the opening formed in the side wall of the chamber 4 and the operating shaft 91 to maintain airtightness within the chamber 4.

The holding unit 6 has a pair of base members 60 spaced apart in the Y direction. Each base member 60 is a plate-shaped member along the X-Z plane. The pair of base members 60 are connected by a plurality of beam members 60a, and these rotate integrally around the rotation center line 81a.

The holding unit 6 includes a plurality of holding rollers 63 that hold the substrate carrier 100 between them. The plurality of holding rollers 63 constitute four rows of rollers arranged in the X direction. The four rows of roller rows are divided into two rows of rollers spaced apart in the Y direction, and the two rows of roller rows are roller rows spaced up and down.

Each roller row is freely rotatably supported by a roller support member 61 or 62 around the rotation axis in the Y direction. Two roller support members 61 are provided, and in the examples of Figs. 3 and 4, they are located on the upper side. The two roller support members 61 are spaced apart in the Y direction, and the holding roller 63 supported by the roller support member 61 is supported on the inner side of the roller support member 61 in a cantilever state. Two roller support members 62 are also provided, and are located on the lower side in the examples of Figs. 3 and 4. The two roller support members 62 are spaced apart in the Y direction, and the holding roller 63 supported by the roller support member 62 is supported on the inner side of the roller support member 62 in a cantilever state.

The roller support members 61 and 62 are supported on the base member 60 so as to be movable (elevated) in the Z direction via a plurality of guide units 65. The guide unit 65 is, for example, a telescoping guide mechanism, and has a cylinder fixed to the base member 60, a rod supported on the cylinder so as to be able to advance and retreat in the Z direction, and a roller support member 61 on the rod. 62) is fixed. A lifting unit 64 is provided between the base member 60 and the roller support members 61 and 62, respectively. The lifting unit 64 of this embodiment is an actuator that expands and contracts in the Z direction, for example, an electric cylinder. By expanding and contracting the lifting unit 64, the roller support members 61 and 62 can be raised and lowered relative to the base member 60.

And, by the plurality of holding rollers 63 supported by the roller supporting member 61 and the plurality of holding rollers 63 supported by the roller supporting member 62, the Y-direction of the substrate carrier 100 The substrate carrier 100 is supported with the ends sandwiched between the ends. In the example of FIGS. 3 and 4 , a plurality of holding rollers 63 supported by the roller supporting member 61 are located on one surface side (upper side) of the substrate carrier 100, and are attached to the roller supporting member 62. A plurality of supported holding rollers 63 are located on the other side (lower side) of the substrate carrier 100, and the substrate carrier 100 can be supported by being sandwiched between the upper and lower sides by these holding rollers 63.

It is not desirable for dust (particles) to fly up and adhere to the substrate G due to the rotation of the holding roller 63. In this embodiment, each holding roller 63 is individually surrounded by a dust collection cover 7. Details of the dust collection cover 7 will be described later.

Each base member 60 is also provided with stoppers 66A and 66B. In the examples of FIGS. 3 and 4 , the stopper 66A is located on the delivery port 4a side, and the stopper 66B is located on the discharge port 4b side. The stoppers 66A and 66B each include a roller 69, a swing arm 68 that rotatably supports the roller 69, and an actuator 67 such as a motor that rotates the swing arm 68. do. The actuator 67 is fixed to the base member 60, and the roller 69 is supported on the swing arm 68 so as to be freely rotatable around the rotation axis in the Y direction. By rotating the swing arm 68, the roller 69 is moved between the operating position on the conveyance path of the substrate carrier 100 and the retracted position shown in FIGS. 3 and 4. By contacting the end surface of the substrate carrier 100 with the peripheral surface of the roller 69 in the operating position, displacement of the substrate carrier 100 in the direction of the substrate surface is restricted. Additionally, when moving the roller 69 from the retracted position to the operating position, the substrate carrier 100 can be moved to the holding position by pressing the end surface of the substrate carrier 100 on the peripheral surface of the roller 69. .

In this way, the holding unit 6 of this embodiment includes two sets of mechanisms (a base member 60, roller support members 61 and 62, a plurality of rollers 63, a plurality of lifting units 64, a plurality of mechanisms). guide unit 65 and stoppers 66A and 66B) are arranged to be spaced apart in the Y direction. And the holding unit 6 is configured to be rotatable around the rotation center line 81a in the Y direction by the rotation unit 8.

The rotation unit 8 includes a driving unit 80A and a driven unit 80B. Each unit 80A and 80B has a rotation axis 81 installed coaxially on the rotation center line 81a. Each rotation axis 81 extends in and out of the chamber 4 through an opening (not shown) formed in the side wall of the chamber 4, and one rotation axis 81 is one of the two base members 60. On one side, the other rotation axis 81 is fixed to the other base member 60, respectively. The seal structure 82 has a cylindrical structure such as a bellows, and seals the opening formed in the side wall of the chamber 4 and the rotation axis 81 to maintain airtightness within the chamber 4.

The unit 80A includes a motor, which is a driving source that rotates the rotation shaft 81, and a reducer that reduces the rotation of the motor and transmits it to the rotation shaft 81. The unit 80B includes a bearing that rotatably supports the rotating shaft 81.

The operation of the posture change device 111 will be described with reference to FIGS. 5A to 7B. FIG. 5A shows a step in which the substrate carrier 100 holding the substrate G is brought into the posture change device 111. The substrate G is held on the upper side of the substrate carrier 100 . Each conveyance unit 5 is located at a conveyance position, and the substrate carrier 100 is conveyed on the conveyance roller 5a. Each holding roller 63 is spaced apart from the substrate carrier 100 . The roller 69 of the stopper 66B is located in the operating position.

FIG. 5B shows a state in which loading of the substrate carrier 100 has been completed. Gate valves 4c and 4d close the inlet 4a and outlet 4b, respectively. The lower lifting unit 64 raises the roller support member 62. As a result, the substrate carrier 100 comes into contact with the plurality of holding rollers 63 supported by the roller support member 62 and is lifted upward from the transfer unit 5. And, the substrate carrier 100 is supported from the lower side by a plurality of holding rollers 63 supported by the roller supporting member 62, and by a plurality of holding rollers 63 supported by the roller supporting member 61. From the upper side, it is in a fitted state.

As shown in FIG. 6A, the stopper 66A is driven, and the roller 69 of the stopper 66A is moved to the operating position. The roller 69 comes into contact with the end surface of the substrate carrier 100 and presses the substrate carrier 100 in the X direction. The substrate carrier 100 moves to the right side of FIG. 6(A) in the X direction to a position in contact with the roller 69 of the stopper 66B. When the substrate carrier 100 moves, the holding roller 63 rolls according to the movement of the substrate carrier 100. The substrate carrier 100 is clamped by a plurality of holding rollers 63 in its normal direction (Z direction at this stage) so that its displacement is regulated, and its displacement is regulated by a stopper 66A in its surface direction (X direction at this stage). and 66B), the displacement is regulated by each roller 69. Subsequently, by driving the moving unit 9, each conveying unit 5 moves to the retracted position. As a result, each conveyance unit 5 is moved to a position outside the base member 60 that does not interfere with the holding unit 6, as shown in FIG. 4 .

By driving the rotation unit 8, the holding unit 6 is rotated as shown in FIG. 6B. Since the displacement of the substrate carrier 100 in its normal and surface directions is controlled by the holding unit 6, it does not fall. Figure 7 (A) shows the state in which the meeting is completed. The holding unit 6 rotates 180 degrees and is inverted in the Z direction and the X direction from the state in Fig. 6(A). Since the roller support unit 62 is located at the upper side and the roller support unit 61 is located at the lower side, a plurality of holding rollers 63 supported by the roller support unit 61 before and after rotation, and the roller The positions of the plurality of holding rollers 63 supported on the supporting unit 62 (whether above or below) with respect to the substrate carrier 100 are switched. In addition, the stopper 66B is located on the inlet 4a side, and the stopper 66A is located on the outlet 4b side, and before and after the rotation, the positions of the stopper 66A and the stopper 66B are also different from each other. It changes. The substrate carrier 100 is also reversed in the Z direction and the X direction, and the substrate G is held on the lower side of the substrate carrier 100. By driving the moving unit 9, each conveyance unit 5 moves from the retracted position to the conveyance position.

Afterwards, the lower lifting unit 64 lowers the roller support member 61. Thereby, the substrate carrier 100 is placed on the transfer unit 5, and each holding roller 63 is spaced apart from the substrate carrier 100. The roller 69 of the stopper 66A is moved from the operating position to the retracted position. Gate valves 4c and 4d open the inlet 4a and the outlet 4b. FIG. 7B shows the step of unloading the substrate carrier 100. The substrate carrier 100 is transported in the X direction by driving the transport unit 5. At the time of loading, the substrate carrier 100, where the substrate G was held on the upper side, is changed (reversed) to an attitude where the substrate G is held on the lower side.

Thereafter, when the roller 69 of the stopper 66B is returned to the retracted position and the roller 69 of the stopper 66A is moved to the operating position, the state of the attitude change device 111 is that of the holding unit 6. The state is substantially the same as the step in (A) of FIG. 5 except that the top and bottom and front and back are reversed, and the next substrate carrier 100 can be loaded. The subsequent operation of the posture change device 111 is substantially the same as the operation described with reference to FIGS. 5 (A) to 7 (B), and the posture change of the sequentially loaded substrate carrier 100 is repeated. It can be done.

<Dust collection cover>

The structure of the dust collection cover 7 will be described with reference to FIG. 8. Figure 8 is an exploded perspective view of the dust collection cover 7. The posture of the dust collection cover 7 in FIG. 8 is the posture of the holding unit 6 shown in FIG. 5 (A), and the posture of each dust collection cover 7 supported on the roller support member 62 Corresponding to the posture, the posture of each dust collection cover 7 supported by the roller support member 61 corresponds to the reversed posture.

The dust collection cover 7 is a box-shaped member that captures dust generated by rotation of the holding roller 63 and prevents it from scattering to the outside. The dust collection cover of this embodiment has a main body portion 7A and a separation portion 7B that is detachable from the main body member 7A. By fixing the main body portion 7A to the roller support member 61 or 62, the dust collection cover 7 is supported by the roller support member 61 or 62.

The dust collection cover 7 has a bottom portion 70 and a ceiling portion 71 that are vertically related in the Z direction, a left side portion and a right side portion with the X direction as the left and right direction, and a front portion with the Y direction as the front and rear direction. It is provided with a front part (73). On the other hand, the rear part of the dust collection cover 7 of the present embodiment, which is the rear part in the front-back direction, is formed by the roller support member 61 or 62. However, the dust collection cover 7 may have its own rear portion.

The ceiling portion 71 is formed by the left and right ceiling walls 71a and 71a of the main body portion 7A. The left and right ceiling walls 71a and 71a have a roof shape that slopes in the opposite direction, and a gap 71b is formed between the left and right ceiling walls 71a. A portion of the peripheral surface 63a of the holding roller 63 is exposed to the outside through the gap 71b, and the exposed portion of the peripheral surface 63a is in contact with the substrate carrier 100. In this embodiment, the ceiling portion 71 has left and right ceiling walls 71a and 71a and is shaped to partially cover the peripheral surface 63a of the holding roller 63, but the ceiling portion 71 is entirely open. You can continue. However, according to this embodiment, dust capturing performance and scattering prevention performance can be improved. Additionally, in this embodiment, the left and right ceiling walls 71a are inclined, but may be horizontal. However, according to this embodiment, the exposure of the peripheral surface 63a of the holding roller 63 can be reduced, and the dust capturing performance and scattering prevention performance can be improved.

The bottom portion 70 and the left and right side portions 72 are walls formed by the main body portion 7A. The bottom portion 70 has a horizontal plate shape, and the left and right side portions 72 are erected from the bottom portion 70. It has a vertical plate shape. The bottom portion 70 and the left and right side portions 72 are located around the peripheral surface 63a of the holding roller 63 and face the peripheral surface 63a. A permanent magnet 74 is disposed on the bottom 70, and adsorbs ferromagnetic dust such as iron powder to improve the capturing performance.

The front portion 73 is a wall formed by the separation portion 7B and has a vertical plate shape. The separation portion 7B has left and right edges 76 that overlap the left and right side portions 72, and mounting grooves 76a are provided in the edges 76. On the left and right side portions 72, fixing knobs 77 are provided, which are attached to the side portions 72 with a screw structure. By inserting the middle portion of the fixing knob 77 into the installation groove 76a, the separation portion 7B is mounted on the main body 7A, and the fixing knob 77 is fastened to the side portion 72, so that the ear portion ( 76) is sandwiched between the fixing knob 77 and the side portion 72, so that the separation portion 7B is fixed to the main body portion 7A. In this way, when the separation portion 7B is mounted on the main body portion 7A, the opening on the front side of the main body portion 7A is closed by the front portion 73, and the front portion 73 is closed by the roller 63. It faces the end surface 63b.

The separation portion 7B has a tray 75 connected to the front portion 73. Dust falls on the tray 75 and is loaded. The tray 75 is made of a ferromagnetic material such as iron, and when the separation portion 7B is mounted on the main body portion 7A, the tray 75 overlaps the magnet 74. Ferromagnetic dust such as iron powder on the tray 75 is easily held in the tray 75 by the magnetic force of the magnet 74. When the separation portion 7B is removed from the main body portion 7A, the tray 75 is simultaneously removed from the bottom portion 70, so the tray 75 can be easily cleaned.

Intermediate plates 78 spaced apart from the bottom portion 70 in the Z direction are provided on the left and right side portions 72 . The left intermediate plate 78 installed on the left side 72 is formed to protrude toward the right side 72, and the right intermediate plate 78 installed on the right side 72 is formed to protrude toward the left side 72. . An opening 79 is formed between the left and right intermediate plates 78 in the X direction, and dust falls from the holding roller 63 onto the tray 75 and is captured. The middle plate 78 has a width similar to the width of the side portion 72 in the Y direction, divides the inner space of the dust collection cover 7 into the bottom portion 70 side and the ceiling portion 71 side, and holds the holding unit 6. ) is rotated and the top and bottom are reversed, it functions as a regulation wall portion that regulates the dust accumulated on the bottom portion 70 side from moving toward the ceiling portion 71 side.

The intermediate plate 78 of this embodiment has a fixed portion 78a, which is an end on the side 72 side, and an inclined portion 78b, which is an end on the opposite side. The fixing part 78a is fixed to the side part 72 and extends horizontally from the side part 72. The inclined portion 78b is a portion extending at an angle from the fixing portion 78a. In this way, the middle plate 78 has a shape in which the end opposite to the side portion 72 is curved toward the bottom portion 70. This shape makes it easy for dust to fall from the holding roller 63 to the tray 7, but when the holding unit 6 rotates and is upside down, dust falls from the tray 7 to the ceiling 71. It has an effect that is difficult to reverse.

Meanwhile, in the present embodiment, the intermediate plate 78 is curved by the flat fixing portion 78a and the flat inclined portion 78b, but it may be curved in an arc shape. Additionally, in this embodiment, the middle plate 78 is fixed to the side portion 72, but it may be fixed to the front portion 73.

9(A) to 9(C), the state of the dust collection cover 7 when the holding unit 6 is rotated will be described. FIG. 9A shows a state in which the dust collection cover 7 is positioned with the ceiling 71 up and the bottom 70 down. The posture of the dust collection cover 7 in FIG. 9 (A) is the posture of the holding unit 6 shown in FIG. 5 (A), and each dust collection cover supported on the roller support member 62 Equivalent to the posture in (7). The roller 63 is in contact with the lower surface of the substrate carrier 100. When dust is generated by the rotation of the roller 63, it passes through the opening 79 by gravity, falls on the tray 75, and is captured, and the dust 200 is loaded on the tray 75.

FIG. 9(B) shows the posture of the dust collection cover 7 when the holding unit 6 is rotated 90 degrees from the state in FIG. 9(A). As the holding unit 6 rotates, the dust collection cover 7 also rotates. When the amount of dust 200 captured in the tray 75 is large, the dust moves to the end (lower side) of the tray 75 by gravity, as shown in FIG. 9(B), and some of the dust moves to the tray 75. There are cases where it protrudes from 75 and overflows onto the lower side portion 72.

Figure 9(C) shows the posture of the dust collection cover 7 when the holding unit 6 is rotated further by 90 degrees from the state in Figure 9(B), and the holding unit 6 is Z The posture of the dust collection cover 7 when reversed in direction and X direction is shown. The dust collection cover 7 is positioned so that the ceiling 71 is downward and the bottom 70 is upward. The posture of the dust collection cover 7 in FIG. 9 (C) is the posture of the holding unit 6 shown in FIG. 7 (A), and each dust collection cover supported on the roller support member 62 Equivalent to the posture in (7). The roller 63 is in contact with the lower surface of the substrate carrier 100. Dust captured in the tray 75 or dust that overflows onto the side portion 72 in the position shown in (B) of FIG. 9 tries to move toward the ceiling portion 71 by gravity, but is stuck in the middle plate 78. This is prevented by Accordingly, the dust 200 is prevented from flying out of the gap 71b to the outside of the dust collection cover 7 and adhering to the substrate G held by the substrate carrier 100.

<Other types of dust collection covers>

10(A) to 10(C) show another example of the configuration of the dust collection cover 7. The illustrated example differs from the dust collection cover 7 illustrated in Figures 8 to 9 (C) only in the configuration of the middle plate 78, and has the middle plate 78'. The intermediate plate 78' has a fixed portion 78a' fixed to the side portion 72, and a movable portion 78b' whose angle is variable with respect to the fixed portion 78a'.

The fixed portion 78a' corresponds to the fixed portion 78 in FIG. 8, and the movable portion 78b' corresponds to the inclined portion 78b, but the inclined portion 78b is formed integrally with the fixed portion 78a. While the angle is constant, the movable part 78b' is connected to the fixed part 78a' through a hinge 78c, and the angle is variable. The hinge 78c rotatably connects the movable part 78b' with respect to the fixed part 78a' around the center of rotation in the Y direction, and has a protrusion in the angle range (rotation range) of the movable part 78b'. There are structural restrictions imposed by In this embodiment, the angle of the movable portion 78b' is made variable using the hinge 78c, but a structure in which the angle is made variable by an elastic body may be used.

FIG. 10(A) corresponds to the state in FIG. 9(A) and shows the dust collection cover 7 in an attitude where the ceiling 71 is up and the bottom 70 is down. The movable portion 78b' is inclined at the same angle as the inclined portion 78b with respect to the horizontal direction. When dust is generated by the rotation of the roller 63, it falls on the tray 75 by gravity and is captured, and the dust 200 is loaded onto the tray 75.

Figure 10(B) corresponds to the state in Figure 9(B) and shows the posture of the dust collection cover 7 when the holding unit 6 is rotated 90 degrees from the state in Figure 10(A). there is. At this time, the movable part 78b' of the intermediate plate 78' located on the upper side rotates with respect to the fixed part 78a' due to its own weight, and both the fixed part 78a' and the movable part 78b' are vertical. It is in an in posture. As a result, the opening 79 is half closed. There is no change in the middle plate 78' located on the lower side.

Figure 10(C) corresponds to the state in Figure 9(C), and shows the posture of the dust collection cover 7 when the holding unit 6 is further rotated 90 degrees from the state in Figure 10(B). It is showing. The dust collection cover 7 is positioned so that the ceiling 71 is downward and the bottom 70 is upward. At this time, the movable part 78b' of the intermediate plate 78', which was located on the lower side in the step of Figure 10 (B), also rotates with respect to the fixed part 78a' due to its own weight, and the fixed part 78a' and the movable portion 78b' are all in a horizontal position. As a result, the opening 79 is substantially completely closed. The dust captured in the tray 75 and the dust that overflowed on the side 72 in the position shown in Figure 9 (B) try to move towards the ceiling 71 by gravity, but the opening 79 is closed. This can be reliably prevented by the intermediate plate 78'. Accordingly, the dust 200 is prevented from flying out of the gap 71b to the outside of the dust collection cover 7 and adhering to the substrate G held by the substrate carrier 100.

<Other types of rollers>

In the above-described form, an example in which the holding unit 6 has a plurality of holding rollers 63 has been described. Unlike the holding roller 63, the rotation unit 8 may be provided with a plurality of rollers arranged so as to sandwich the substrate carrier 100 therebetween. These rollers are, for example, idle rollers. In some states, the idle roller below the substrate carrier 100 is at the same height as the conveyance roller 5a. The idle roller itself is not driven, and is arranged mainly for the purpose of distributing the load of the substrate carrier 100 to the transport roller 5a. Since the idle roller is not connected to the driving means, even if the idle roller is configured to rotate together with the rotation unit 8, complexity or enlargement of the device can be avoided. Therefore, by arranging the idle roller to sandwich the substrate carrier, the device can be simplified. Meanwhile, when the substrate carrier 100 rotates, the idle roller does not need to hold the substrate carrier 100.

The dust collection cover 7 explained in the above-described form may also be installed on an idle roller. Additionally, the dust collection cover 7 may be provided only on the idle roller, and the cover may not be provided on the holding roller 63. For example, there is a case where a roller is not used at the tip of the holding portion of the holding unit 6.

<Electronic device>

Next, an example of an electronic device will be described. Hereinafter, the configuration of an organic EL display device will be illustrated as an example of an electronic device.

First, the organic EL display device to be manufactured will be described. FIG. 11 (A) is an overall view of the organic EL display device 500, and FIG. 11 (B) is a view showing the cross-sectional structure of one pixel.

As shown in FIG. 11 (A), in the display area 51 of the organic EL display device 500, a plurality of pixels 52 including a plurality of light-emitting elements are arranged in a matrix shape. Details will be explained later, but each light emitting element has a structure including an organic layer sandwiched between a pair of electrodes.

Meanwhile, the pixel referred to here refers to the minimum unit that enables display of a desired color in the display area 51. In the case of a color organic EL display device, the pixel 52 is formed by a combination of a plurality of sub-pixels of the first light-emitting element 52R, the second light-emitting element 52G, and the third light-emitting element 52B that exhibit different light emission. is composed. The pixel 52 is often composed of a combination of three types of subpixels: a red (R) light-emitting element, a green (G) light-emitting element, and a blue (B) light-emitting element, but is not limited to this. The pixel 52 may include at least one type of subpixel, preferably two or more types of subpixels, and more preferably three or more types of subpixels. The sub-pixels constituting the pixel 52 include, for example, a combination of four types of sub-pixels: a red (R) light-emitting element, a green (G) light-emitting element, a blue (B) light-emitting element, and a yellow (Y) light-emitting element. You can continue.

FIG. 11(B) is a partial cross-sectional schematic diagram taken along the line A-B in FIG. 11(A). The pixel 52 includes a first electrode (anode) 54 on a substrate 53, a hole transport layer 55, and one of a red layer 56R, a green layer 56G, and a blue layer 56B. and a plurality of subpixels composed of an organic EL element including an electron transport layer 57 and a second electrode (cathode) 58. Among these, the hole transport layer 55, red layer 56R, green layer 56G, blue layer 56B, and electron transport layer 57 correspond to the organic layer. The red layer 56R, green layer 56G, and blue layer 56B are formed in patterns corresponding to light-emitting elements (sometimes referred to as organic EL elements) that emit red, green, and blue colors, respectively.

Additionally, the first electrode 54 is formed separately for each light-emitting element. The hole transport layer 55, the electron transport layer 57, and the second electrode 58 may be formed in common across the plurality of light-emitting elements 52R, 52G, and 52B, or may be formed for each light-emitting element. That is, as shown in FIG. 11 (B), after the hole transport layer 55 is formed as a common layer over a plurality of subpixel areas, the red layer 56R, green layer 56G, and blue layer 56B are sub-pixel regions. It may be formed separately for each pixel area, and further, the electron transport layer 57 and the second electrode 58 may be formed as a common layer over a plurality of subpixel areas.

Meanwhile, in order to prevent short circuit between adjacent first electrodes 54, an insulating layer 59 is provided between the first electrodes 54. Furthermore, since the organic EL layer is deteriorated by moisture and oxygen, a protective layer 600 is provided to protect the organic EL element from moisture and oxygen.

In Figure 11 (B), the hole transport layer 55 and the electron transport layer 57 are shown as one layer, but depending on the structure of the organic EL display element, they are formed as a plurality of layers having a hole blocking layer and an electron blocking layer. It's okay. Additionally, between the first electrode 54 and the hole transport layer 55, there is a hole injection layer having an energy band structure that allows smooth injection of holes from the first electrode 54 into the hole transport layer 55. may be formed. Similarly, an electron injection layer may be formed between the second electrode 58 and the electron transport layer 57.

Each of the red layer 56R, green layer 56G, and blue layer 56B may be formed as a single light-emitting layer or may be formed by stacking a plurality of layers. For example, the red layer 56R may be composed of two layers, the upper layer may be formed as a red light-emitting layer, and the lower layer may be formed as a hole transport layer or an electron blocking layer. Alternatively, the lower layer may be formed as a red light-emitting layer, and the upper layer may be formed as an electron transport layer or a hole blocking layer. By providing a layer below or above the light emitting layer in this way, there is an effect of improving the color purity of the light emitting element by adjusting the light emission position in the light emitting layer and adjusting the optical path length.

Meanwhile, although an example of the red layer 56R is shown here, a similar structure may be adopted for the green layer 56G and the blue layer 56B. Additionally, the number of stacked layers may be two or more. Furthermore, layers of different materials, such as a light-emitting layer and an electron block layer, may be stacked, or layers of the same material may be stacked, for example, by stacking two or more light-emitting layers.

In the manufacture of such electronic devices, the above-described film forming apparatus 1 is applicable, and the manufacturing method includes a transport process for transporting the substrate G, and attaching the deposition apparatus 114 to the substrate G being transported. It may include a deposition process of depositing at least one layer of each layer.

The invention is not limited to the above embodiments, and various changes and modifications are possible without departing from the spirit and scope of the invention. Therefore, the claims are attached to disclose the scope of the invention.

1: Tabernacle device
6: Holding unit
63: Retention roller
7: Dust collection cover
71: Ceiling
70: bottom
78: middle plate
111: Posture change device
100: substrate carrier

Claims (9)

An attitude change device that changes the attitude of a substrate carrier,
Provided with a rotation means for rotating the substrate carrier,
The means of meeting is,
a plurality of rollers disposed with the substrate carrier between them;
A dust collection cover installed on at least one of the plurality of rollers and individually surrounding the rollers,
The dust collection cover is,
A ceiling portion where the circumferential surface of the roller is exposed,
a bottom formed to face the peripheral surface of the roller;
A posture change device comprising a regulating wall portion disposed spaced apart from the bottom portion and regulating dust on the bottom side from moving toward the ceiling portion when the rotation means rotates the substrate carrier. An attitude change device that changes the attitude of a substrate carrier,
Provided with a rotation means for rotating the substrate carrier,
The means of meeting is,
a plurality of rollers disposed with the substrate carrier between them;
A dust collection cover installed on at least one of the plurality of rollers and individually surrounding the rollers,
The dust collection cover is,
a bottom formed to face the peripheral surface of the roller;
a left side and a right side portion erected from the bottom so as to face the circumferential surface of the roller;
a left intermediate plate formed to protrude from the left side to the right side;
A posture change device comprising a right middle plate formed to protrude from the right side to the left side. According to paragraph 2,
The right end of the left intermediate plate is curved toward the bottom,
A posture change device, characterized in that the left end of the right middle plate is curved toward the bottom. According to paragraph 2,
The left middle plate includes a first fixed part fixed to the left side, and a first movable part whose angle is variable with respect to the first fixed part,
The right middle plate includes a second fixed part fixed to the right side, and a second movable part whose angle is variable with respect to the second fixed part. According to clause 4,
When the posture of the dust collection cover is such that the bottom is downward, the first movable part and the second movable part are displaced so that an opening is formed between the left middle plate and the right middle plate,
A posture changing device characterized in that, when the dust collection cover is in an posture where the bottom is upper, the first movable part and the second movable part are displaced so that the opening is closed. According to any one of claims 1 to 5,
A posture change device characterized in that a magnet is disposed at the bottom. According to any one of claims 1 to 5,
A posture change device, characterized in that a removable tray is disposed on the bottom. According to any one of claims 1 to 5,
a plurality of transport rollers for transporting the substrate carrier;
A posture change device comprising moving means for moving the plurality of conveyance rollers between a conveyance position and a retracted position that avoids interference with the rotation means or the substrate carrier when the rotation means rotates. . According to any one of claims 1 to 5,
The plurality of rollers are,
A plurality of first rollers located on one side of the substrate carrier,
It includes a plurality of second rollers located on the other side of the substrate carrier,
A posture change device wherein the positions of the plurality of first rollers and the plurality of second rollers change with each other when rotated by the rotation means.