KR20240053912A - Substrate Clamping Device - Google Patents

Abstract

The present invention provides a clamp for clamping both sides of a substrate; Including,
The clamp includes a rotatable first clamp and a second clamp provided below the first clamp and placing the substrate between the first clamp and the first clamp and the second clamp. A substrate clamping device may be provided that includes anti-slip members that clamp against the upper and lower surfaces of both sides of the substrate, respectively.

Description

Substrate clamping device capable of preventing slipping

The present invention relates to a substrate clamping device that can reliably maintain a clamped state without slipping when clamping a substrate.

As the degree of integration of various electronic components that make up printed circuit boards increases, the patterns have become considerably finer, requiring a very sophisticated pattern printing process. As a result, the defect rate has increased, which has led to the importance of inspection of printed circuit boards. This is being highlighted. Additionally, in order to increase the reliability of inspection and production process, there is a need for a device that maintains the flatness of a flexible substrate.

Inspection devices for inspecting these various substrates may be equipped with a clamping device as a means of fixing the object to be inspected.

The clamping device must maintain a secure clamping state when clamping the substrate, and if the substrate is flexible, it must be clamped in a taut state. Conventionally, a clamping device is provided that effectively clamps the substrate securely and keeps it in a taut state. It didn't work out.

Korean Registered Patent Publication No. 10-0176627

The problem to be solved by the present invention is to provide a substrate clamping device that can reliably clamp a substrate and maintain it in a flat state without sagging.

The solution of the present invention is a clamp that clamps both sides of the substrate respectively; Including,

The clamp is,

It includes a rotatable first clamp and a second clamp provided below the first clamp and placing the substrate between the first clamp and the first clamp.

A substrate clamping device may be provided on one surface of the first clamp and the second clamp, including anti-slip members that clamp against the upper and lower surfaces of both sides of the substrate, respectively.

In this way, the present invention can keep a substrate, which can sag downward, in a horizontal state and flat by clamping it by the clamps of the clamping unit across both sides of the substrate and pulling it by the pulling unit.

Since the clamp of the present invention is formed with an anti-slip member, when clamping both sides of the substrate, the clamped state can be reliably maintained without slipping.

In addition, since the anti-slip member of the present invention is provided in the clamp through insert injection molding, it has the effect of preventing phenomena such as weakening of the bonding force or separation due to deformation even when used repeatedly or over a long period of time. there is.

1 is an overall configuration diagram of a substrate inspection device equipped with a clamping device of the present invention.
Figure 2 is a perspective view of a first clamp forming a clamping device according to an embodiment of the present invention.
Figure 3 is a perspective view of a second clamp forming a clamping device according to an embodiment of the present invention.
Figure 4 is a schematic plan view of a clamping device according to an embodiment of the present invention.
Figure 5 is a schematic front view of a clamping device according to an embodiment of the present invention.
Figure 6 is a front view of a state in which a substrate is placed on a second clamp of a clamping device according to an embodiment of the present invention.
Figure 7 is a plan view of Figure 6.
Figure 8 is a schematic plan view showing an embodiment of the clamping device of the present invention provided in a pulling unit.
Figure 9 is a schematic plan view of an embodiment different from Figure 8.
Figure 10 is a schematic plan view of another embodiment than Figure 8 or Figure 9.

In an embodiment of the present invention, the substrate may be a printed circuit board before various components are mounted. A printed circuit board is a board made of a material such as paper phenol resin or glass epoxy resin, coated with copper foil, and printed with various circuits.

A printed circuit board is constructed by removing the remaining portions on which circuits are not printed using etching techniques such as etching, and various electronic components are soldered and mounted on these circuits.

Typically, in order to conduct an energization test for each contact part of a printed circuit board, an electric signal is sent to each contact part of the printed circuit board using various test equipment. At this time, it is possible to determine whether there is an abnormality in the printed circuit board by checking the current status.

The substrate inspection device may include an inspection unit 20, a shuttle unit 30, a loading unit 40, a loading unit 50, and an alignment unit 60.

The inspection unit 20 may include a probe unit that contacts the circuit pattern of the board.

The electrical conduction test corresponds to the BBT (Bare Board Tester) test process, and involves touching a probe pin to the board to check for electrical defects, such as short circuits in the circuit formed on the board or whether signal current flows correctly through the circuit pattern. will be.

When inspecting both sides of the substrate 10, probe units may be provided on the top and bottom of the substrate 10, and can be synchronized to inspect both sides of the substrate 10 at the same time.

Additionally, the substrate 10 tested in the present invention may be a strip type substrate on which a plurality of circuit pattern portions are formed.

In the case of this type of substrate strip, since a plurality of circuit pattern parts are provided, the total area can be increased, and therefore, the plurality of circuit pattern parts can be sequentially inspected by the inspection unit 20.

The alignment unit 60 may be disposed between the initial position and the inspection position, and when the substrate 10 is mounted on the shuttle unit 30, the alignment state of the substrate 10 can be inspected or confirmed, and the shuttle unit 30 ) can be moved to the inspection position when the inspection of the alignment unit 60 is completed.

The alignment information of the substrate confirmed in the alignment unit 60 may be transmitted to the shuttle unit 30 or the inspection unit 20, and the alignment between the substrate 10 and the inspection unit 20 may be performed on the substrate confirmed in the alignment unit 60. It can be performed based on the sorting information. Alignment between the substrate 10 and the inspection unit 20 may be achieved by the shuttle unit 30 or the inspection unit 20.

As an example, the shuttle unit 30, which has acquired the alignment information of the substrate, may move the substrate 10 so that the substrate 10 is aligned with the inspection unit 20. The shuttle unit 30 may have an x-axis movement degree of freedom and a y-axis movement degree of freedom so that the mounted substrate is aligned with the inspection unit 20.

Additionally, the inspection unit 20, which has acquired the alignment information of the substrate, can be moved to be aligned with the substrate. The inspection unit 20 may have a degree of freedom to move along the x-axis and a degree of freedom to move along the y-axis so as to be aligned with the substrate.

For the transfer of the substrate, the x-axis movement freedom or the y-axis movement freedom may already be provided to the shuttle unit 30.

Accordingly, it may be advantageous for the alignment between the substrate 10 and the inspection unit 20 to be performed by the shuttle unit 30. If the x-axis movement freedom and y-axis movement freedom necessary for aligning the substrate are provided to the shuttle unit 30, various means required for x-axis movement or y-axis movement may be excluded from the inspection unit 20. Therefore, there is an advantage that the structure of the inspection unit 20 is simplified.

A substrate 10 may be mounted on the shuttle unit 30. The shuttle unit 30 may travel back and forth between initial position inspection positions where substrates are loaded or unloaded along the same movement path. Loading a substrate into the shuttle unit 30 indicates loading a new substrate into the shuttle unit 30. Unloading the substrate into the shuttle unit 30 indicates lifting the substrate mounted on the shuttle unit 30.

The loading unit 40 may be comprised of a first loading unit and a second loading unit, and a substrate waiting for energization inspection may be loaded in the first loading unit 41, and an inspection unit ( The board for which the energization test has been completed by 20) can be loaded.

The loading unit 50 can move the substrate mounted on the loading unit 40 or the shuttle unit 30. The loading unit 50 may be composed of a first loading unit 51 and a second loading unit 52, and the first loading unit 51 is the first loading unit when the shuttle unit 30 is placed in the initial position. The substrate loaded in (41) is moved to the shuttle unit 30, and the second loading unit 52 is mounted on the shuttle unit 20 and moves the substrate that has passed through the inspection unit 20 to the second loading unit 42. You can do it.

In order to simplify the movement line of the loading unit 50, the first loading unit 51 and the second loading unit 52 may be arranged to face each other with their initial positions sandwiched between them.

The shuttle unit 30 can be moved by a driving means, which may include a motor and a ball screw, but is not limited to this and various driving means such as a belt type may be used.

Referring to FIGS. 2 and 3 , the shuttle unit 20 may be provided with a clamping device 100 capable of clamping and fixing the substrate 10 .

The substrate clamping device 100 according to the present invention needs to prevent the substrate 10 from shaking in order to ensure process reliability during a production process such as a pattern formation process or an inspection process for inspecting a pre-formed circuit pattern portion.

The clamping device 100 of the present invention can prevent the substrate 10 from shaking during the production process or inspection process by clamping the substrate 10.

The clamping device 100 may be composed of a pair of first clamps 110 and second clamps 120 and a rotating member 130 that rotates the first clamps 110.

The clamp, which consists of a pair of first clamp 110 and a second clamp 120, may have a length sufficient to face both sides of the substrate 10, and may have one or more clamps along the longitudinal direction of both sides of the substrate 10. It can be formed as a plurality.

For example, in an embodiment of the present invention, three first clamps 110 are provided along the longitudinal direction of both sides of the substrate 10, and a second clamp disposed below the first clamp 110 ( 120) can be provided as one. Of course, the number of installed clamps may be singular or plural.

Additionally, the first clamp 110 may have a rotation axis 132 that can be rotated by the rotation member 130.

The pivoting member 130 may be made of a cylinder, and the rod of the cylinder may be connected to the clamp 110.

The rod of the cylinder may be rotated to face the upper surface of the substrate 10 by pushing the clamp 110 or, conversely, may be connected to a position away from the substrate 10 by pulling the clamp 110.

The first clamp 110 may be provided with a push-up member 140 that lifts the first clamp 110 upward to release the clamping state of the substrate 10, and is pushed up by the rotating member 130. A return spring, which is an elastic member, may be provided on the rotation axis 112 so that when the push-up member 140 is pushed and lowered again, the first clamp 110 is lowered again into a clamping state.

Here, in the present invention, anti-slip members 112 and 122 may be provided in the first clamp 110 and the second clamp 120, respectively.

The anti-slip members 112 and 122 may be made of, for example, rubber or resin, and may be formed on the first clamp 110 and the second clamp 120 by insert injection molding.

Since the first clamp 110 and the second clamp 120 are made of metal, and the anti-slip members 112 and 122 can be made of rubber or resin, two materials (metal) are used in the mold for injection molding. and rubber materials, metal materials, resin materials, etc.) are inserted and molded, and after insert injection molding, one side of the anti-slip members 112 and 122 is one side of the first clamp 110 and the second clamp 120. It can be exposed from, and these exposed parts can be clamped while facing both sides of the substrate 10 to prevent slipping.

If the anti-slip members 112 and 122 are attached to one surface in the direction in which the first clamp 110 and the second clamp 120 face each other with adhesive, etc., the adhesive may be damaged by the temperature of the surrounding environment during repeated use. As the adhesive strength decreases, the attachment positions of the anti-slip members 112 and 122 may change or may be separated from the first clamp 110 and the second clamp 120.

Therefore, the present invention provides anti-slip members 112 and 122 on one surface of the first clamp 110 and the second clamp 120 in the direction facing each other through insert injection molding, thereby reducing the risk of slippage during long-term use or due to temperature, etc. As a result, the first clamp 110 and the second clamp 120 can be used repeatedly for a long period of time without being easily changed or separated from the first clamp 110 and the second clamp 120.

When the first clamp 110 and the second clamp 120 are provided with anti-slip members 112 and 122, one side of the first clamp 110 and the second clamp 120, that is, the substrate 10 Each can be provided on the facing side for clamping.

At this time, when the longitudinal direction in the y-axis direction of the first clamp 110 is defined as the first direction, and the width direction in the x-axis direction is defined as the second direction, the width in the second direction is defined as the first direction. Let's say the first width (w1), and when the width of the anti-slip member 112 in the second direction is called the second width (w2), the second width (w2) is 50% to 50% of the first width (w1). It can be formed and fixed at 70% of the length.

In addition, when the longitudinal direction of the second clamp 120 in the y-axis direction of the second clamp 120 is defined as the first direction, and the width direction in the x-axis direction is defined as the second direction, the width in the second direction is defined as the first direction. When it is called the third width (w3) and the width of the anti-slip member 112 in the second direction is the fourth width (w4), the fourth width (w4) is 40% to 40% of the third width (w3). It can be formed and fixed at 60% of the length.

In addition, the anti-slip member 112 provided on the first clamp 110 and the anti-slip member 122 provided on the second clamp 120 are clamped while facing each side of the substrate 10. At this time, the substrate ( When defining the length of the surface in contact for clamping on both sides of 10) as the contact length, the length of the second width (w2) of the anti-slip member 112 and the fourth width (w4) of the anti-slip member 122 The length of can be formed to be longer than the contact length.

The contact length is the length of the surface contacted to clamp the length of the second width (w2) of the anti-slip member 112 and the length of the fourth width (w4) of the anti-slip member 122 to both sides of the substrate 10, respectively. In the case of forming the same as, there is no room for contact area to prevent slipping of the anti-slip members 112 and 122 that clamp both sides of the substrate 10, so both sides of the substrate 10 are in contact due to manufacturing tolerances. There is a possibility that the length exceeds the length of the second width (w2) and the fourth width (w4) of the anti-slip members 112 and 122, and in that case, the substrate 10 and the anti-slip members 112 and 122 ) may occur in areas that are not in contact, which may reduce the anti-slip effect.

Meanwhile, the length of the second width (w2) of the anti-slip member 112 and the length of the fourth width (w4) of the anti-slip member 122 are the lengths of the surfaces in contact for clamping each side of the substrate 10. When formed shorter than the contact length, a portion is formed that is in direct contact with the first clamp 110 and the second clamp 120 without contacting the end side of the substrate 10 and the anti-slip members 112 and 122. Therefore, the anti-slip effect may be reduced.

The number of installed first clamps 110 and second clamps 120 can be as follows.

The first is a case where both the first clamp 110 and the second clamp 120 are provided in single pieces, and clamping can be done while facing the entire length of both sides of the substrate 10.

Second, the first clamp 110 is provided in plural rather than singular, and the second clamp 120 is provided in single, or vice versa, the first clamp 110 is provided in singular and the second clamp 120 is provided in plural. In the case of provision, a plurality of first clamps 110 or second clamps 120 face each other over the entire length of the first clamp 110 or second clamp 120, and the substrate 10 between them is clamped. Therefore, the entire length of both sides of the substrate 10 can be pressed and clamped more reliably and evenly.

The third is a case where a plurality of first clamps 110 and second clamps 120 are provided. Since the plurality of first clamps 110 and second clamps 120 correspond to each other on a one-to-one basis, the substrate 10 It can be clamped by applying pressure more reliably and evenly over the entire length of both sides.

The longer the clamp, the more difficult it may be to maintain flatness with the facing substrate 10, and accordingly, it may be difficult to securely clamp it in close contact.

Accordingly, the present invention can clamp both sides of the substrate 10 in close contact by maintaining flatness through a plurality of first clamps 110 and second clamps 120 having shorter lengths.

The clamping device 100 of the present invention can pull both sides of the substrate 10 in the width direction, which is the x-axis direction, to flatten the substrate 10. However, since the structure is not clamped in the longitudinal direction of the y-axis direction of the substrate 10, it may be difficult to maintain a reliably fixed state with respect to movement in the longitudinal direction.

However, the present invention provides a plurality of both the first clamp 110 and the second clamp 120, or at least a plurality of either the first clamp 110 or the second clamp 120 to clamp both sides of the substrate 10. When clamping, the fixed state can be reliably maintained even if movement occurs in the longitudinal y-axis direction.

When inspecting the substrate 10, when the inspection probe is lifted and lowered in the vertical direction to inspect the substrate 10, the substrate 10 must move in the x-axis direction and the y-axis direction, so the substrate 10 The entire clamping device 100, including the clamp being clamped, is moved at the same time by a separate moving means, and therefore, the substrate 10 can be moved while clearly clamped without shaking, especially when moving in the y-axis direction. there is.

In addition, the first clamp 110 may be formed with a flat clamping portion 111 that faces the second clamp 120 and is formed in a plane to ensure that the substrate 10 is clamped.

Unlike the first clamp 110, the second clamp 120 may be flat in the direction of the third width w3. That is, it may be made of a rectangular flat plate whose overall length in the y-axis direction is longer than the length in the x-axis direction.

Additionally, a moving member 150 may be supported below the second clamp 120. The moving member 150 can support the entire length of the second clamp 120 and can move in the x-axis direction by a separate moving means (eg, a motor, a ball screw, etc.).

Additionally, a plurality of alignment pins 121 may be formed to protrude at intervals along the length direction of the second clamp 120 rather than the width direction. At this time, a plurality of through grooves 113 through which the alignment pin 121 penetrates and protrudes may be formed in the first clamp 110.

The alignment pin 121 may serve to align the substrate 10 when clamping it. In other words, in the first clamp 110 and the second clamp 120 provided on both sides of the substrate 10, the alignment pin 121 formed on the second clamp 120 penetrates the first clamp 110. It is disposed to protrude at a predetermined height through the groove 113. In this case, the first clamp 110 is arranged to be spaced apart from the second clamp 120 and the substrate 10 is provided on both sides of the substrate 10. When placed in the second clamp 120, the placed position can be automatically set by the alignment pin 121.

When the substrate 10 is placed on the second clamp 120 provided on both sides of the substrate 10 while being guided by the alignment pin 121, the first clamp 110 at a spaced apart position controls the movement of the pivoting member 130. The substrate 10 may be clamped while being rotated through the push-up member 140 to face the second clamp 120 and pressing both sides of the substrate 10 . At this time, the protruding alignment pin 121 protrudes through the through hole 111 formed in the first clamp 110, so that it is not interfered with by the alignment pin 121 when the first clamp 110 rotates. The substrate 10 can be clamped by rotating toward the second clamp 120.

A plurality of fastening holes 114 may be formed in the first clamp 110 at intervals along the longitudinal direction for coupling to the push-up member 140 through fastening members such as screws or bolts.

Figure 8 is a schematic plan view showing an example of the clamping device of the present invention provided in a pulling unit. Referring to FIG. 8, the clamping device 100 of the present invention is a single clamp rather than a plurality of divided structures, and is provided with a first clamp 110 and a second clamp 120, and is shown to form a square shape. A pair of frames 12 in the y-axis direction and a pair of frames 13 in the x-axis direction are formed, and a substrate 10 is clamped inside the frames 12 and 13 by a clamping device 100. It may include a pulling unit 200 that moves so that it can be pulled tautly.

An opening 14 is formed inside the frames 12 and 13, and the frames 12 and 13 can be moved to a position for performing the next process.

The pulling unit 200 may be provided on both sides (upper and lower in FIG. 1) of the first clamp 110 and the second clamp 120, and may include a pair of moving members 150 that are connected to the clamp and move simultaneously. ), a screw 220 that moves a pair of moving members 150, and a drive unit 230 that rotates the screw 220.

The driving unit 230 may be made of, for example, a motor capable of forward and reverse driving.

In one embodiment of the present invention, two pairs of moving members 150 may be provided on each screw 220 at intervals. The pair of moving members 150 are each provided with a clamping device 100 and can move together.

On one side of the pair of moving members 150, coupling members 213 and 214 may be provided that are screwed to the screw 220 and move according to the rotation of the screw 220. The coupling members 213 and 214 may be respectively fixed to the pair of moving members 150 and moved together.

Accordingly, when the screw 20 rotates by the operation of the driving unit 230, the coupling members 213 and 214 move in a straight line, and at the same time, the pair of moving members 150 can move.

On the outer peripheral surface of the screw 220, the direction of the screw thread may be formed to be opposite to the movement path of the pair of moving members 150 so that the pair of moving members 150 can approach or move away from each other. That is, the screw 220 may include a first thread portion 221 and a second thread portion 222 in which threads are formed in opposite directions.

The screw 220 may be a ball screw type.

Alternatively, the pulling unit 200 may be configured as a lead screw type. That is, it is composed of a combination of a plurality of sliders, a lead screw, and a drive unit, and a pair of moving members 150 can be moved toward or away from each other by the coupling members 213 and 214 that move with the rotation of the lead screw, As the pair of moving members 150 move, the clamp may also move simultaneously.

Meanwhile, the pulling unit 200 is another example, and as shown in FIG. 9, one screw 220 of the screws 220 on both sides is provided with a driving part 230, and the other screw 220 is provided with a driving part ( In a state where 230) is not provided, the power transmission member 240 through which the power of the driving unit 230 is transmitted can be connected and synchronized. The power transmission member 240 may be made of a belt or the like. That is, the screw 220 on one side may be a driving screw, and the screw 220 on the opposite side may be a driven screw.

Pulleys 232 are coupled to the screws 220 on both sides, and power transmission members 240 are connected to the pulleys 232 on both sides to transmit power.

In addition, a support member 234 is provided on one end of the screw 220 to support the end of the screw 220 and allow it to rotate smoothly, and the screw 220 penetrates one support member 234 to form a driving unit. It can be connected to (230).

Therefore, when the driving unit 230 drives, the screw 220 rotates, and the rotational force of one screw 220 connected to the driving unit 230 is transmitted to the other screw 220 on the opposite side through the power transmission member 240. is transmitted through the pulley 232, and then the screw 220 on the other side can be rotated, and thus the screws 220 on both sides can be rotated simultaneously.

As the screws 220 on both sides are simultaneously rotated by the power transmission member 240, the pair of moving members 150 can move at the same time while widening the gap between them, and thus, the substrate 10 is pulled tautly. It can be made flat.

Figure 10 is a schematic plan view of an example different from Figures 8 and 9. Referring to FIG. 10, a pulling unit 300 of another structure is provided at the upper and lower parts of the clamping device 100, and includes a belt 310 that moves circularly, and a slider 320 that is coupled to and moves on one side of the belt 310. ), it may include a rotating roll 330 that engages the belt 310 and moves the belt 310 in a circular manner.

A driving means (not shown) such as a motor that allows the rotation roll 330 to rotate may be coupled to at least one of the rotation rolls 330.

The belt 310 may have a structure such as a timing belt, for example, and may move circularly by receiving the rotational force of the rotating roll 330.

The belt 310, which moves circularly by winding the rotating rolls 330 provided on both sides, may be composed of a first belt 311 and a second belt 312 that are connected to each other at intervals by the rotating rolls 330.

Two sliders 320, a first slider 321 and a second slider 322, may be provided, and may be coupled to move together with the moving member 210.

The first slider 321 and the second slider 322 may be coupled to the first belt 311 and the second belt 312, respectively, and the first belt 311 may be linked to the first slider 321. It is coupled, the second belt 312 passes through, the first belt 311 passes through the second slider 322, and the second belt 312 may be coupled in an interlocking manner.

Accordingly, passage grooves 321a and 322a through which the first belt 311 and the second belt 312 can pass may be formed in the first slider 321 and the second slider 322, respectively.

When the rotating roll 330 is rotated by the driving means, the belt 310 circulates, and in FIG. 10, for example, when the first belt 311 disposed on the upper side of the frame 12 moves to the left, the drawing The second belt 312 located below the first belt 311 moves to the right, and then when the first belt 311 moves, the passage groove 322a of the second slider 322 is opened by the first belt ( Since 311) moves, the second slider 322 does not move together when the first belt 311 moves, and since the first slider 321 is interlocked with the first belt 311, the first belt 311 As 311 moves, the first slider 321 may also move simultaneously.

At this time, the second belt 312 passes through the passage groove 321a of the first slider 321 and is interlocked with the second slider 322, so it moves with the second belt 312 moving to the right. The second slider 322 can move to the right.

Meanwhile, in the case of the belt 320 located below the moving member 210 in FIG. 10, it can move in a direction opposite to the movement direction of the belt 320 located above. If the rotation direction of the belt 320 located at the top in the drawing is counterclockwise, and the rotation direction of the belt 320 located at the bottom is also counterclockwise, the first slider 321 located at the bottom Since the moving direction of the first belt 311 is to the right as the first belt 311 moves to the right, and the moving direction of the second slider 322 is to the left as the second belt 312 moves to the left, the slider located at the top ( 320), it may become impossible to move because it is opposite to the direction of movement.

Accordingly, the circular movement direction of the belt 320 located at the top and the circular movement direction of the belt 320 located at the bottom may be opposite directions.

In the embodiment of FIG. 10 , the clamping device 100 may be comprised of a plurality of divided first clamps 110 and second clamps 120, unlike the examples shown in FIGS. 8 and 9.

In the embodiment shown in FIGS. 8 to 10, the clamping device 100 can clamp the substrate 10 flat and accurately perform an inspection for whether electricity is supplied.

That is, in the embodiment of FIGS. 8 and 9, in a state in which both sides of the substrate 10 are clamped by the first clamp 110 and the second clamp 120, the pulling unit 200 is operated to separate the substrate. The substrate 10 can be pulled tautly in the x-axis direction, which is the width direction of (10), and thus the substrate 10 can be maintained in a flat state with a predetermined tension.

In other words, when the driving unit 230 of the pulling unit 200 operates, the screw 220 connected to the driving unit 230 rotates, and at this time, the outer peripheral surface of the screw 220 is formed by coupling members 213 and 214, respectively. A pair of coupled moving members 150 are provided in a spaced apart state. As the screw 220 rotates, the pair of moving members 150 may move along the longitudinal direction of the screw 220.

The screw 220 corresponding to each movement path of the pair of moving members 150 consists of a first screw part 221 and a second screw part 222 with threads formed in opposite directions, so that the rotation of the screw 220 Accordingly, the pair of moving members 150 may move closer to or farther away from each other.

Therefore, when the driving unit 230 is operated, the pair of moving members 150 move in a direction away from each other, and the substrate 10 clamped by the first clamp 110 and the second clamp 120 is x Because it is pulled in the axial direction, it may become tense.

The pulling units 200 and 300 in the example of FIGS. 8 to 10 may be respectively provided on both sides of the y-axis direction of the substrate 10, and the driving units on both sides of the pulling unit 200 in the example shown in FIG. 8 The driving units on both sides of the pulling unit 300 in the example of 230 and FIG. 9 may be controlled and synchronized by the controller to operate simultaneously with each other.

In the example of FIG. 10, the pulling unit 300 has a belt-driven structure, and the belt 310 moves circularly according to the rotation of the rotary roll 330, and then the first member coupled to the belt 310 The first slider 321 and the second slider 322 can move simultaneously, and the clamping device 100 connected to the first slider 321 and the second slider 322 can also move simultaneously.

10... board 12,13... frame
14... opening
20... inspection department 30... shuttle department
40... loading section 41... first loading section
42... second loading section 50... loading section
51... first loading part 52... second loading part
60... Alignment section
100... Clamping device
110... first clamp 111... clamping part
112,122... Anti-slip member 113... Through groove
114... Fastener
120... second clamp 121... alignment pin
130... rotation member 132... rotation axis
140... Push-up member 150... Movement member
200... pulling unit 213,214... joining member
220... screw 221... first threaded portion
222... second screw part 230... driving part
232... pulley 234... support member
300... pulling unit
310...belt 311...first belt
312... second belt 320... slider
321...1st slider 322...2nd slider
330... rotation roll
w1... first width w2... second width
w3... 3rd width w4... 4th width

Claims (9)

Clamps that clamp each side of the substrate; Including,
The clamp is,
It includes a rotatable first clamp and a second clamp provided below the first clamp and placing the substrate between the first clamp and the first clamp.
A substrate clamping device including anti-slip members on one surface of the first clamp and the second clamp, respectively, facing the upper and lower surfaces of both sides of the substrate and clamping the substrate.
According to claim 1,
The anti-slip member is a substrate clamping device wherein the anti-slip member is provided by insert injection molding on one surface in the direction in which the first clamp and the second clamp face each other.
According to claim 1,
A substrate clamping device wherein the anti-slip member is made of a rubber material.
According to claim 1,
The first clamp is provided to be rotatable in plural ways,
The second clamp consists of one clamp that remains fixed and has a length such that it faces all of the plurality of first clamps,
A substrate clamping device in which upper surfaces of both sides of the substrate disposed between the first clamp and the second clamp are divided and clamped.
According to claim 1,
The first clamp is provided to be rotatable in plural ways,
The second clamps are comprised of a plurality of plurality of clamps having a length such that they all face the plurality of first clamps,
A substrate clamping device in which the upper and lower surfaces of both sides of the substrate disposed between the first clamp and the second clamp are divided and clamped.
According to claim 1,
A substrate clamping device in which a plurality of alignment pins are formed to protrude from the second clamp at intervals along the longitudinal direction to align the placement position of the substrate.
According to claim 1,
When the longitudinal direction of the first clamp in the y-axis direction of the first clamp is defined as the first direction, and the width direction in the x-axis direction is defined as the second direction, the width in the second direction is referred to as the first width, When the width of the anti-slip member in the second direction is referred to as the second width,
The second width is formed to have a length of 50% to 70% of the first width.
According to claim 1,
When the longitudinal direction of the second clamp in the y-axis direction of the second clamp is defined as the first direction, and the width direction in the x-axis direction is defined as the second direction, the width in the second direction is referred to as the third width, When the width of the anti-slip member in the second direction is referred to as the fourth width,
The fourth width is a substrate clamping device in which the length is 40% to 60% of the third width.
According to claim 1,
The anti-slip member provided on the first clamp and the anti-slip member provided on the second clamp are clamped while facing each side of the substrate,
When the longitudinal direction of the first clamp in the y-axis direction of the first clamp is defined as the first direction, and the width direction in the x-axis direction is defined as the second direction, the width in the second direction is referred to as the first width, The width of the anti-slip member in the second direction is called the second width,
When the longitudinal direction of the second clamp in the y-axis direction of the second clamp is defined as the first direction, and the width direction in the x-axis direction is defined as the second direction, the width in the second direction is referred to as the third width, The width of the anti-slip member in the second direction is called the fourth width,
When defining the length of the surface in contact for clamping each side of the substrate as the contact length,
A substrate clamping device wherein the length of the second width and the fourth width of the anti-slip member are formed to be longer than the contact length.