KR20240030370A - Substrate cleaning device - Google Patents

Abstract

The present invention relates to a substrate cleaning device, and more specifically, to provide a cleaning device for cleaning a substrate, which is an object to be cleaned. The structure for moving the cleaning object up and down is improved to reduce the volume of the entire cleaning device, and in particular, the cleaning device is improved. By improving the structure for lifting objects up and down, cleaning objects can be raised and lowered in a minimum space. In particular, the horizontality of the cleaning objects can be maintained during the lifting process as well as precise height adjustment, and cleaning efficiency can be increased by rotating the cleaning objects. To this end, the present invention relates to a substrate cleaning device, including a table on which an object to be cleaned is placed; a spin motor coupled to the table and rotating the cleaning object while operating by applied power and signals; A lifting module coupled to the spin motor; A lifting driving unit that raises or lowers the lifting module, wherein the lifting module is formed in the form of a bar extending in the longitudinal direction, and one end in the longitudinal direction is coupled to the spin motor, and the lifting driving unit It is combined with and is characterized by including a guide block that guides the raising or lowering of the lifting bar.

Description

Substrate cleaning device

The present invention relates to a substrate cleaning device, and more specifically, to provide a cleaning device for cleaning a substrate, which is an object to be cleaned. The structure for moving the cleaning object up and down is improved to reduce the volume of the entire cleaning device, and in particular, the cleaning device is improved. By improving the structure for lifting objects up and down, cleaning objects can be raised and lowered in a minimum space. In particular, the horizontality of the cleaning objects can be maintained during the lifting process as well as precise height adjustment, and cleaning efficiency can be increased by rotating the cleaning objects. As far as it is concerned, it is about a substrate cleaning device.

As is known, when manufacturing a semiconductor substrate into an integrated circuit, a cleaning process is performed to clean the semiconductor substrate to remove residual chemicals, small particles, and contaminants generated during various manufacturing processes. need. In particular, when manufacturing highly integrated integrated circuits, the cleaning process to remove fine contaminants attached to the surface of the semiconductor substrate is very important.

These cleaning methods for semiconductor substrates include a wet cleaning method using liquid as a medium and a dry cleaning method performed in a dry manner. The wet cleaning methods include an immersion method in which the substrate is immersed in a liquid and a method in which liquid is sprayed on the substrate. There is a single-fed type.

Conventionally, in the manufacture of semiconductor substrates, substrate cleaning has been performed based on the RCA cleaning method, which is an immersion wet cleaning method. After RCA cleaning, the oxide film formed on the surface of the substrate is removed with hydrofluoric acid and then rinsed with ultrapure water.

Additionally, a spin-type method can be used in the cleaning process to clean the substrate. Support pins that support the substrate are installed on the upper surface of the spin head, and as the spin head rotates, the substrate supported by the support pins rotates. It is a method of treating the substrate by supplying a processing liquid to the surface of the substrate while rotating the substrate.

Conventional substrate cleaning devices have a problem in that it is difficult to maintain horizontal precision during the lifting and lowering operation because the structure that raises or lowers the substrate is configured to move through a cylinder drive. In particular, when the horizontality is misaligned during the lifting and lowering process, the cleaning efficiency of the substrate decreases. There is a problem.

In addition, since the bowl that supplies the cleaning liquid is raised or lowered, the structure of the entire cleaning device becomes complicated, its volume increases, and the space required for up and down movement increases.

Republic of Korea Patent No. 10-1080865 Republic of Korea Patent No. 10-2270779

The present invention was proposed to solve the above problems. It reduces the volume of the entire cleaning device by improving the structure for moving the cleaning object up and down, and in particular, improves the structure for lifting the cleaning object up and down to minimize space. The purpose is to provide a substrate cleaning device that can elevate and lower an object to be cleaned.

In addition, the purpose of the present invention is to provide a substrate cleaning device that can precisely adjust the height to maximize cleaning efficiency and, in particular, maintain cleaning precision by maintaining the horizontality of the cleaning object during the lifting process.

In addition, in the present invention, the structure of the bowl that performs the cleaning process and the exhaust and bath connected to it are fixed, which simplifies the structure of the entire cleaning device, thereby reducing manufacturing costs and minimizing the overall volume. The purpose is to provide a substrate cleaning device that can respond to various installation purposes and installation environments by being easy to stack.

In order to achieve the above object, the present invention,

A table on which the cleaning object is placed;

a spin motor coupled to the table and rotating the cleaning object while operating by applied power and signals;

A lifting module coupled to the spin motor;

Including a lifting drive unit that raises or lowers the lifting module,

The lifting module is,

It is formed in the form of a bar extending in the longitudinal direction, and one end in the longitudinal direction is coupled to the spin motor, and

It is coupled to the lifting drive unit and includes a guide block that guides the raising or lowering of the lifting bar.

In addition, the lifting drive unit includes a lifting hole through which the lifting bar is inserted, a base plate having a coupling groove into which the guide block is coupled, a driving means disposed on the base plate, and a lifting device that is connected to the driving means and receives power. It is characterized in that it includes a bottom plate disposed below the means and the base plate and coupled to the other longitudinal end of the lifting bar.

At this time, the elevating means extends in the longitudinal direction and consists of a screw with an elevating thread formed on the outer peripheral surface, wherein one end in the longitudinal direction is rotatably coupled to the spin motor, and the other end in the longitudinal direction is connected to the bottom plate. It is rotatably coupled to the spin motor and raises and lowers the spin motor according to the direction of rotation.

In addition, the lifting means is made of an annular belt that extends in the longitudinal direction and is of an endless type, and the annular belt is coupled to the spin motor and the bottom plate, respectively, and rotates through the driving force transmitted through the driving means. It is characterized by raising and lowering the spin motor.

In addition, the bottom plate is characterized in that a manifold is disposed to supply a cleaning liquid for cleaning the bottom surface of the cleaning object placed on the bottom plate.

In addition, a pair of the lifting bars is arranged symmetrically, and one end in the longitudinal direction is coupled to either the outer peripheral surface or the bottom surface of the spin motor.

The present invention achieved as described above has the effect of increasing cleaning efficiency by maintaining the horizontality of the cleaning object during the process of raising and lowering the cleaning object, and maximizing cleaning efficiency by allowing cleaning to proceed while rotating the cleaning object.

In addition, the present invention can fix the position of the bowl and the structure of the bowl's exhaust, drainage, etc. during the process of lifting the object to be cleaned, so the overall volume can be reduced due to the simple configuration, and the time and cost required for maintenance can be reduced. There is a possible effect.

In addition, the present invention improves the precision of the lifting position by improving the structure of the lifting module and the lifting drive unit for lifting the object to be cleaned, and minimizes the space occupied by the lifting module and the lifting drive unit to reduce the overall volume of the cleaning device, thereby reducing the volume of the entire cleaning device. It has the advantage of being highly usable as it can respond to the installation environment.

1 is a schematic diagram showing a substrate cleaning device according to the present invention.
Figure 2 is an exemplary diagram showing a substrate cleaning device according to the present invention.
3 and 4 are exemplary diagrams showing the operating state of the lifting and lowering driving means according to an embodiment of the present invention.
Figure 5 is an exemplary diagram showing a lifting and lowering driving means according to another embodiment of the present invention.

Hereinafter, other purposes and features of the present invention in addition to the above purposes will be clearly revealed through description of embodiments with reference to the accompanying drawings.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by a person of ordinary skill in the technical field to which the present invention pertains. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related technology, and should not be interpreted in an ideal or excessively formal sense unless explicitly defined in the present application. No.

Hereinafter, a preferred embodiment of the substrate cleaning device will be described with reference to the attached drawings.

First, the substrate cleaning device 1 according to the present invention includes a table 10 on which a cleaning object is placed, a spin motor 20 that rotates the table 10 while operating by applied power and signals, and the spin motor 20. It includes a lifting module 30 coupled to a motor 20 and a lifting driving unit 40 that raises or lowers the lifting module 30.

The table 10 is configured to rotate by combining a spin motor 20, which will be described later, on which a substrate, which is a cleaning object, is placed, and a cleaning object W is placed on its upper surface.

At this time, the upper surface of the table 10, that is, the surface on which the cleaning object W is placed, has a spindle to prevent the placed cleaning object W from leaving when the table 10 is rotated by the spin motor 20. A plurality of chucks 11 are arranged, and the spin chucks 11 are arranged to protrude upward from the upper surface of the table 10 and are arranged radially at intervals from each other.

Meanwhile, the table 10 is configured to be replaceable with a spin motor 20, which will be described later, corresponding to the type and diameter of the incoming cleaning object W.

This table 10 is composed of multiple stages, as shown in FIG. 1, and is arranged to be able to go up and down on the bowl B, which supplies the cleaning liquid to the cleaning object at a constant flow rate.

Here, since the structure and operational relationship of the bowl (B) are not the main components of the present invention, detailed illustration and description will be omitted.

The spin motor 20 rotates the table 10 while operating by applied power and signals. It is disposed below the table 10 and the motor shaft is coupled to the table 10.

The spin motor 20 configured as described above is arranged to be able to lift up and down on the bowl B, which supplies and exhausts the cleaning liquid and air for cleaning the cleaning object. This means that the conventional cleaning device has the bowl lift up and down. Compared to this, the size and structure of Paul can be formed relatively simply.

Meanwhile, the type and capacity of the spin motor 20 can be changed considering the diameter of the cleaning object, the rotation speed of the table, etc., and of course, it is not limited to the ratio shown in the drawing.

The elevating module 30 guides the elevating path of the spin motor 20 while the spin motor 20 is elevating and simultaneously maintains the horizontality of the spin motor 20.

For this purpose, the lifting module 30 is formed in the form of a bar extending in the longitudinal direction, and one end in the longitudinal direction includes a lifting bar 31 coupled to the spin motor 20, and the lifting driving unit 40. It is coupled with and includes a guide block 32 that guides the raising or lowering of the lifting bar 31.

The lifting bar 31 extends in the longitudinal direction and is arranged symmetrically in pairs. One end in the longitudinal direction is coupled to either the outer peripheral surface or the bottom surface of the spin motor 20, and the other end in the longitudinal direction is a lifting drive unit to be described later. It is coupled to the bottom plate (46) of (40).

The lifting bar 31 constructed as described above guides the lifting path of the spin motor 20 by rising or lowering in conjunction with it when the spin motor 20 is raised or lowered by the lifting drive unit 40, which will be described later. , At this time, it is coupled to either the side or the bottom surface of the spin motor 20 to maintain the horizontality of the spin motor 20 during the lifting process or cleaning process.

Here, the length of the lifting bar 31 can be changed in response to the lifting height of the spin motor 20, and of course, it is not limited to the ratio shown in the drawing.

The guide block 32 supports the lifting bar 31 when it rises or lowers and guides its movement path, and is integrally coupled to the base plate 41 constituting the lifting drive unit 40. , the lifting bar 31 is movably disposed on each guide block 32.

That is, the guide block 32 is integrally coupled to the base plate 41 and the pair of lifting bars 31 are arranged to be movable while the position is fixed.

The number of guide blocks 32 may be changed in accordance with the vertical length or left and right width of the lifting bar 31, and a plurality of guide blocks 32 may be placed at spaced apart positions in the vertical direction.

Here, the lifting bar 31 and the guide block 32 include one moving body, such as an LM guide made of a rail and a block or a rack and pinion gear made of a rack and pinion, and a fixed body movably disposed along the moving body. Of course, various changes can be made to this lifting bar and guide block in addition to the LM guide or rack and pinion gear described above.

The lifting drive unit 40 is for lifting the lifting module 30, and includes a lifting hole 411 through which the lifting bar 31 is inserted, and a coupling groove 412 through which the guide block 32 is coupled. ) is formed, a base plate 41, a driving means 42 disposed on the base plate 41, an elevating means 43 that is connected to the driving means 42 and receives power, and the base plate 41 ) and includes a bottom plate 46 disposed below and coupled to the other end in the longitudinal direction of the lifting bar 31.

The base plate 41 is made in the form of a flat plate and has a lifting hole 411 through which the lifting bar 31 is inserted, and a coupling groove 412 where the guide block 32 is coupled is formed.

The lifting holes 411 are formed to penetrate upward and downward at positions spaced apart from each other so that the lifting bar 31 is movably inserted therethrough, and the coupling groove 412 is formed adjacent to the lifting holes 411. The guide block 32 is integrated into one piece.

The driving means 42 generates power while operating by applied power and signals, and is coupled to the base plate 41, but is preferably disposed below the base plate 41. ) and maximize the lifting space formed between the spin motor 20.

This driving means 42 may be made of a motor that operates by applied power and signals, and the type and capacity of the motor correspond to the load of the lifting structure, such as the spin motor 20 and the lifting bar 31. This may be changed.

The lifting means 43 is connected to the driving means 42 and receives power to raise or lower the spin motor 20. As an example of this lifting means 43, it extends in the longitudinal direction and has an outer peripheral surface. It may be made of a screw 44 with a thread for lifting, and in another embodiment, it may be made of an endless type annular belt 45 extending in the longitudinal direction.

The screw 44 extends in the longitudinal direction and has an elevating thread formed on the outer peripheral surface. One longitudinal end is rotatably coupled to the spin motor 20, and the other longitudinal end is rotatable to the bottom plate 46, which will be described later. The driving block 441 is connected to the driving means 42 through a power transmission means 421 such as a chain or belt, receives power, rotates, and transmits rotational force to the screw 44.

When the rotational force is transmitted from the driving means 42 to the driving block 441, the screw 44 coupled to the driving block 441 rotates and operates the spin motor 20 according to the rotation direction. Rise or fall.

The driving block 441 penetrates up and down in the center so that the screw 44 can rotate, and a power transmission means 421 for connecting to the driving means 42 is coupled to the outer surface.

As described above, the lifting means 43 consisting of a screw 44 rotates the driving block 441 through the power transmission means 421 while the driving means 42 operates, and the rotation of the driving block 441 In conjunction with this, the screw 44 rotates to raise or lower the spin motor 20.

The annular belt 45 proposed as another embodiment of the lifting means 43 is made of an endless type that extends in the longitudinal direction but is closed at both ends in the longitudinal direction, and one end in the longitudinal direction is coupled to the spin motor 20 and extends in the longitudinal direction. The other end is coupled to the bottom plate (46).

At this time, a driving pulley 451 that is connected through the driving means 42 and the power transmission means 421 to receive power and rotate the annular belt 45, the spin motor 20, and the bottom plate 46 ) further includes a driven pulley 452 disposed on each side and engaged with the annular belt 45.

The bottom plate 46 is made in the form of a flat plate and is disposed below the base plate 41, the other longitudinal end of the lifting bar 31 is coupled, and the longitudinal other end of the lifting means 43 rotates. Possibly combined.

This bottom plate 46 rises or falls in conjunction with the process of raising or lowering the lifting means 43.

In the present invention made as described above, in the process of cleaning the object placed on the table 10 coupled to the spin motor, the object is cleaned by rotating the spin motor 20, and the spin motor is used to rotate the object. As it rises or falls, the object to be cleaned is cleaned using various cleaning liquids.

At this time, the lift drive unit 40 is driven to lift the spin motor 20, and the spin motor 20 is raised and lowered through a pair of lift bars 31 symmetrically coupled to each other on either the outer or bottom surface of the spin motor 20. Alternatively, the horizontality of the descending spin motor 20 can be maintained.

In particular, the present invention is configured to proceed with cleaning while moving the cleaning object placed on the spin motor from the bottom to the top of the bowl, and the rising height can be precisely adjusted, and the cleaning is performed by maintaining the horizontality of the spin motor 20 when lifting. Efficiency can be increased.

Meanwhile, in the present invention, a manifold 50 is further provided for supplying cleaning liquid for cleaning the bottom surface of the cleaning object placed on the spin motor. The manifold 50 has several valves, pipes, or distributors arranged therein. As such, it is placed on the bottom plate 46 and connected to a supply means (not shown in the drawing) that supplies the cleaning liquid.

At this time, it is preferable that the base plate 41 is formed with a cleaning hole 413 through which the cleaning solution passes so that the cleaning solution sprayed through the manifold 50 is supplied to the bottom of the cleaning object placed on the table 10. In another embodiment, a spray nozzle connected to the manifold 50 to receive the cleaning liquid and spray it to the outside may be arranged to face the bottom of the cleaning object placed there.

The present invention made as described above can reduce the volume of the device itself compared to the conventional device that cleans the object to be cleaned while the bowl including drainage and exhaust through which the cleaning liquid and air circulates rises or falls, and in particular, the volume of the device itself can be reduced. By configuring the rotating spin motor to raise or lower, the space required for lifting can be minimized, and the horizontality of the spin motor and its combination can be maintained when rising or lowering, thereby maximizing cleaning efficiency.

As described above, the present invention has been described with specific details such as specific components and limited embodiments and drawings, but this is only provided to facilitate a more general understanding of the present invention, and the present invention is not limited to the above embodiments. , those skilled in the art can make various modifications and variations from this description.

Therefore, the spirit of the present invention should not be limited to the described embodiments, and the scope of the patent claims described later as well as all things that are equivalent or equivalent to the scope of this patent claim shall fall within the scope of the spirit of the present invention. .

1: Board cleaning device
10: table
11: spin chuck
20: spin motor
30: Elevating module
31: lifting bar 32: guide block
40: Eastern part of the elevator shaft
41: base plate 42: driving means
43: lifting means 44: screw
45: circular belt 46: bottom plate
50: manifold

Claims (6)

A table (10) on which the cleaning object is placed;
A spin motor 20 coupled above the table 10 and rotating the table 10 while operating by applied power and signals;
An elevating module (30) coupled to the spin motor (20);
Includes a lifting drive unit 40 that raises or lowers the lifting module 30,
The lifting module 30 is,
A lifting bar 31 is formed in the form of a bar extending in the longitudinal direction, and one end in the longitudinal direction is coupled to the spin motor 20,
A substrate cleaning device comprising a guide block (32) coupled to the lifting drive unit (40) and guiding the raising or lowering of the lifting bar (31). The method of claim 1, wherein the lifting mechanism 40 is,
A base plate 41 having a lifting hole 411 through which the lifting bar 31 is inserted and a coupling groove 412 through which the guide block 32 is coupled,
Drive means 42 disposed on the base plate 41,
Elevating means (43) connected to the driving means (42) and receiving power, and
A substrate cleaning device comprising a bottom plate (46) disposed below the base plate (41) and coupled to the other longitudinal end of the lifting bar (31). The method of claim 2, wherein the lifting means (43) is,
It extends in the longitudinal direction and consists of a screw 44 with an elevating thread formed on the outer peripheral surface,
The screw 44 has one longitudinal end rotatably coupled to the spin motor 20 and the longitudinal other end rotatably coupled to the bottom plate 46, so that the spin motor 20 operates according to the rotation direction. ) A substrate cleaning device characterized in that it raises and lowers. The method of claim 2, wherein the lifting means (43) is,
It consists of a circular belt (45) that extends in the longitudinal direction and is of an endless type.
The annular belt 45 is coupled to the spin motor 20 and the bottom plate 46, respectively, and rotates through the driving force transmitted through the driving means 42 to raise and lower the spin motor 20. A substrate cleaning device that uses The method of claim 2, wherein the bottom plate (46) includes:
A substrate cleaning device, characterized in that a manifold (50) is disposed to supply a cleaning liquid for cleaning the bottom surface of the cleaning object placed on the table (10). The method of claim 1 or 2, wherein the lifting bar 31 is,
A pair is placed symmetrically to each other,
A substrate cleaning device, characterized in that one end in the longitudinal direction is coupled to either the outer peripheral surface or the bottom surface of the spin motor (20).

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