KR20240007086A - Light irradiation device, light irradiation method, and component manufacturing method - Google Patents

Abstract

[Problem] To provide a light irradiation device, a light irradiation method, and a component manufacturing method that can improve the uniformity of the accumulated amount of irradiated light for a large object.
[Solution] The present light irradiation device divides the irradiation target area of an object conveyed along the first direction into a plurality of irradiation areas and irradiates each so that the illuminance intensity is the same. The plurality of irradiation areas are set so that the sum of the distances passing through the plurality of irradiation areas is equal at each position along the second direction orthogonal to the first direction of the irradiation target area. Additionally, each of the plurality of irradiation areas is set so that at least one other irradiation area and an overlap area that overlap each other in the second direction are generated at different positions in the first direction. Additionally, the plurality of irradiation areas are set so that when the overlap areas progress in the same direction in the second direction, the increase or decrease in size in the first direction has an inverse relationship.

Description

Light irradiation device, light irradiation method, and manufacturing method of parts {LIGHT IRRADIATION DEVICE, LIGHT IRRADIATION METHOD, AND COMPONENT MANUFACTURING METHOD}

The present invention relates to a light irradiation device, a light irradiation method, and a manufacturing method of a part.

Recently, regarding the alignment treatment of the alignment layer of a liquid crystal panel, the alignment layer of a viewing angle compensation film, etc., a technique called photo-alignment has been adopted in which alignment is performed by irradiating polarized light of a predetermined wavelength to the alignment layer. Hereinafter, an alignment film that performs alignment by light or a film on which an alignment layer is formed is collectively referred to as a photo-alignment film.

The photo-alignment film is becoming larger along with the size of the liquid crystal panel, and along with it, the polarization light irradiation device that irradiates the photo-alignment film with polarized light is also becoming larger.

In the photo-alignment film, for example, the viewing angle compensation film is a strip-shaped, long workpiece, and is used by cutting it to a desired length after alignment treatment. Recently, it has grown to match the size of the panel, and some have a width of 1500 mm or more.

To perform photo-alignment on such a large photo-alignment film, a device using a linear light source (rod-shaped lamp) tailored to the width of the alignment film, or a device using multiple irradiation heads to match the width of the alignment film. is being proposed.

Patent Document 1 discloses a polarized light irradiation device for photo-alignment that can irradiate polarized light with uniform energy distribution to a large photo-alignment film.

Japanese Patent Publication No. 2011-215639

In such irradiation of polarized light to a large photo-alignment film or exposure to a large substrate, there is a need for a technology that can improve the uniformity of the integrated amount of irradiation light.

In view of the above circumstances, the purpose of the present invention is to provide a light irradiation device, a light irradiation method, and a component manufacturing method capable of improving the uniformity of the integrated amount of irradiated light for a large object. .

In order to achieve the above object, a light irradiation device according to one embodiment of the present invention is a light irradiation device that irradiates light to an object conveyed along a first direction, and includes a light source unit and an irradiation unit.

The irradiation unit divides the light emitted from the light source unit into a plurality of irradiation areas with respect to the irradiation target area of the object and irradiates the light so that the illuminance of each of the plurality of irradiation areas is the same.

The plurality of irradiation areas are set so that the sum of the distances passing through the plurality of irradiation areas is equal at each position along the second direction orthogonal to the first direction of the irradiation target area.

In addition, if any radiation area among the plurality of radiation areas is taken as a first radiation area, the first radiation area is between at least one other radiation area among the plurality of radiation areas, and the first radiation area is the first radiation area. It is set so that at different positions in the direction, overlap areas that overlap each other in the second direction are generated.

In addition, if the other irradiation area where the overlap area occurs with respect to the first irradiation area is taken as a second irradiation area, the first overlap area, which is the overlap area of the first irradiation area, is the second irradiation area. is configured to increase in size in the first direction as it progresses in either direction, and the second overlap area, which is the overlap area of the second irradiation area, is the second overlap area. As the direction progresses in the same direction, the size in the first direction decreases.

This light irradiation device is configured so that the total distance passing through the plurality of irradiation areas is equal at each position along the second direction of the irradiation target area. Accordingly, it becomes possible to make the accumulated light amount uniform at each position along the second direction of the irradiation target area.

Additionally, each irradiation area is set so that an overlap area occurs between other irradiation areas. The overlap areas are set so that when the areas progress in the same direction in the second direction, the increase or decrease in size in the first direction has an opposite relationship. Accordingly, even when the position of the irradiation area is shifted in the second direction, it is possible to sufficiently suppress the influence on the accumulated light quantity at each position along the second direction.

In this way, in this light irradiation device, it is possible to improve the uniformity of the accumulated amount of irradiated light for a large object.

The plurality of irradiation areas may be set so that a irradiation area group consisting of two or more irradiation areas lined up along the second direction is arranged in multiple stages along the first direction.

The plurality of irradiation areas may be set so that the irradiation area group is arranged in two tiers.

The plurality of irradiation areas may have the same shape.

The shape of each of the plurality of irradiation areas may be a diamond shape in which two diagonal directions are set along the first direction and the second direction.

Each of the plurality of irradiation areas is divided into a first divided area on the first direction side in the second direction by a diagonal line parallel to the first direction, and the first divided area in the second direction. When divided into second divided areas in the second direction opposite to the first direction, each of the plurality of radiation areas has at least one of the first divided area and the second divided area being the overlap area. It may be set to this.

The shape of each of the plurality of irradiated areas may be a hexagon including a pair of opposite sides that face each other along the first direction and are parallel to the second direction.

Each of the plurality of irradiated areas is divided into a central area between the pair of opposite sides, a first divided area adjacent to the first direction in the second direction with respect to the central area, and the central area. In the case where the second direction is divided into second divided areas adjacent to the second direction opposite to the first direction, each of the plurality of irradiated areas is the first divided area or the At least one of the second divided areas may be set to be the overlap area.

The plurality of irradiation areas may be, when the first overlap area of the first irradiation area is the first division area, the second overlap area of the second irradiation area is the second division area. area, and when the first overlap area of the first irradiation area is the second divided area, the second overlap area of the second irradiation area is the first divided area. It may be set to this.

The irradiation unit may have a plurality of integrator lenses arranged corresponding to the plurality of irradiation areas and uniformizing the illuminance distribution in each of the plurality of irradiation areas. In this case, each of the plurality of integrator lenses may include a plurality of lenses whose emission surfaces have the same shape as the irradiation area.

The irradiation unit may have a plurality of rod lenses that are arranged corresponding to the plurality of irradiation areas and uniformize the illuminance distribution in each of the plurality of irradiation areas. In this case, each of the plurality of rod lenses may have a cross-sectional shape identical to that of the irradiation area.

The irradiation unit may include one or more light-shielding plates disposed corresponding to the plurality of irradiation areas and having a light-transmitting area of the same shape as the irradiation areas.

The light irradiation device may further include a plurality of light irradiation units arranged corresponding to each of the plurality of irradiation areas. In this case, the light source unit may have a plurality of light sources mounted on the plurality of light irradiation units. Additionally, the irradiation unit may have a plurality of optical components that are mounted on the plurality of light irradiation units and irradiate the light emitted from the light source to a corresponding irradiation area.

The optical component may include an integrator lens including a plurality of lenses whose emission surface has the same shape as the irradiation area, a rod lens whose cross-sectional shape has the same shape as the irradiation area, or an integrator lens whose shape is the same as the irradiation area. At least one light blocking plate having a light transmission area may be included.

A light irradiation method according to one embodiment of the present invention is a light irradiation method of irradiating light to an object transported along a first direction, comprising a step of emitting light from a light source unit, and directing the light emitted from the light source unit to the object. A step of dividing the irradiation target area into a plurality of irradiation areas and irradiating the plurality of irradiation areas so that each of the irradiation areas has the same illuminance.

The plurality of irradiation areas are set so that the sum of the distances passing through the plurality of irradiation areas is equal at each position along the second direction orthogonal to the first direction of the irradiation target area.

In addition, if any radiation area among the plurality of radiation areas is taken as a first radiation area, the first radiation area is between at least one other radiation area among the plurality of radiation areas, and the first radiation area is the first radiation area. It is set so that overlap areas that overlap each other in the second direction are generated at different positions in the direction.

Additionally, if the other irradiation area in which the overlap area occurs with respect to the first irradiation area is taken as a second irradiation area, the first overlap area, which is the overlap area of the first irradiation area, is the second irradiation area. is configured to increase in size in the first direction as it progresses in either direction, and the second overlap area, which is the overlap area of the second irradiation area, is the second overlap area. As the direction progresses in the same direction, the size in the first direction decreases.

A method of manufacturing a part according to one embodiment of the present invention includes a step of irradiating light to the part using the light irradiation device.

As described above, according to the present invention, it becomes possible to improve the uniformity of the accumulated amount of irradiated light for a large object. Additionally, the effects described here are not necessarily limited, and may be any of the effects described in the present disclosure.

1 is a schematic diagram for explaining the outline of a light irradiation device according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of a plurality of irradiation areas viewed from above the workpiece.
FIG. 3 is an enlarged view of a plurality of irradiation areas shown in FIG. 2.
Figure 4 is a schematic diagram showing another example of a plurality of irradiation areas that realize a uniform integrated light amount configuration.
FIG. 5 is an enlarged view of a plurality of irradiation areas shown in FIG. 4.
Figure 6 is a schematic diagram showing the configuration of a plurality of irradiation areas used as a comparative example.
FIG. 7 is a schematic diagram showing a case where deviation of the irradiation area occurs in the comparative example shown in FIG. 6.
FIG. 8 is a schematic diagram showing a case where deviation of the irradiation area occurs in the uniform integrated light amount configuration shown in FIG. 2.
FIG. 9 is a schematic diagram showing a case where deviation of the irradiation area occurs in the uniform integrated light amount configuration shown in FIG. 4.
Figure 10A is a schematic diagram showing another example of a uniform integrated light amount configuration.
Figure 10b is a schematic diagram showing another example of a uniform integrated light quantity configuration.
Figure 10C is a schematic diagram showing another example of a uniform integrated light amount configuration.
Figure 11A is a schematic diagram showing another example of a uniform integrated light quantity configuration.
Figure 11b is a schematic diagram showing another example of a uniform integrated light amount configuration.
Figure 11C is a schematic diagram showing another example of a uniform integrated light quantity configuration.
Fig. 12 is a schematic diagram showing a configuration example when a plurality of light irradiation units are used.
Fig. 13A is a schematic diagram showing an example of the internal configuration of a light irradiation unit.
Fig. 13B is a schematic diagram showing an example of the internal configuration of the light irradiation unit.
Figure 14 is a schematic diagram showing another configuration example of a light irradiation unit.
Fig. 15A is a schematic diagram showing a configuration example of the emission surface of the integrator lens shown in Figs. 13A and 13B.
FIG. 15B is a schematic diagram showing a configuration example of the emission surface of the integrator lens shown in FIGS. 13A and 13B.
Figure 16A is a schematic diagram showing another configuration example of a light irradiation unit.
Figure 16b is a schematic diagram showing another example of the configuration of a light irradiation unit.
Figure 17A is a schematic diagram showing an example of a light blocking plate.
Figure 17b is a schematic diagram showing an example of a light blocking plate.
Figure 18A is a schematic diagram showing an example of a light blocking plate.
Figure 18b is a schematic diagram showing an example of a light blocking plate.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment according to this invention will be described with reference to the drawings.

[Overview of light irradiation device]

1 is a schematic diagram for explaining the outline of a light irradiation device according to an embodiment of the present invention.

The light irradiation device 1 is configured to irradiate light L to the work W transported along a predetermined direction. As shown in FIG. 1, in this embodiment, the long, strip-shaped work W is pulled out from the delivery roller 2 and wound around the take-up roller 3.

The light irradiation device 1 irradiates light L to the work W conveyed from the delivery roller 2 toward the take-up roller 3. As indicated by the arrow T in the drawing, the conveyance direction of the work W is from the delivery roller 2 to the take-up roller 3.

Here, for convenience, the following XYZ coordinates are defined for the drawing.

X direction: Transport direction of the work (W) (the direction in which the work (W) moves is the positive direction)

Y direction: Width direction of the strip-shaped workpiece (W)

Z direction: Normal direction of work (W)

In addition, in the description of the present technology, the positive side of the X direction is referred to as the downstream side, and the negative side is referred to as the upstream side. Also, the positive side of the Y direction is set to the right, and the negative side is set to the left. Additionally, the positive side of the Z direction is referred to as the upper side, and the negative side is referred to as the downward side.

Of course, with regard to application of the present technology, the direction in which the light irradiation device 1 is used, the conveyance direction in which the work W is conveyed, etc. are not limited.

As shown in Fig. 1, the strip-shaped work W has a left edge 4 and a right edge 5 that face each other.

In this embodiment, light L is irradiated by the light irradiation device 1 over the entire width from the left edge 4 to the right edge 5. That is, in this embodiment, the entire width of the work W becomes the irradiation target area R. The irradiation target area R is also called an effective irradiation area.

For example, a photo-alignment film is formed on the work W, and polarized light of a predetermined wavelength is irradiated by the light irradiation device 1. It becomes possible to apply the present technology to such orientation processing.

The size (width) of the photo-alignment film in the Y direction may be the same as the work W or may be smaller than the work W. When the width of the photo-alignment film is smaller than the width of the work W, polarized light is irradiated using the entire width of the alignment film as the irradiation target area R (effective irradiation area).

Of course, application of the present technology is not limited to alignment treatment by irradiating polarized light to a photo-alignment film.

As shown in FIG. 1 , the light irradiation device 1 divides the irradiation target area R of the work W into a plurality of irradiation areas 6 and irradiates light L thereon. Additionally, the light irradiation device 1 irradiates light L so that the illuminance intensity of each of the plurality of irradiation areas 6 is the same.

As schematically shown in FIG. 1, the light irradiation device 1 has a light source unit 7 and an irradiation unit 8.

By the irradiation unit 8, the light L emitted from the light source unit 7 is divided into a plurality of irradiation areas 6 with respect to the irradiation target area R of the work W, thereby forming a plurality of irradiation areas 6. ) Each illuminance is irradiated to be the same.

In this disclosure, details of the plurality of irradiation areas 6 will first be described. Then, a specific configuration example of the light source unit 7 and the irradiation unit 8 for irradiating the light L to the plurality of irradiation areas 6 will be described.

In addition, in the example shown in FIG. 1, the X direction serving as the conveyance direction is one embodiment of the first direction. Additionally, the Y direction is an embodiment of the second direction orthogonal to the first direction.

Additionally, the work W serves as an embodiment of the object. Additionally, when a photo-alignment film is formed on the work W and alignment processing is performed, the photo-alignment film may serve as an embodiment of the object.

The work W is not limited, and the present technology can be applied to any device, such as a printed circuit board or a glass substrate for a liquid crystal panel, as the work W.

［Configuration of uniform integrated light intensity for multiple irradiation areas］

FIG. 2 is a schematic diagram when the plurality of irradiation areas 6 are viewed from the upper side of the work W.

Additionally, in FIG. 2, compared to FIG. 1, the size of the irradiation target area R, which is the entire width of the work W, is shown to be small. Additionally, the number of plural irradiation areas 6 is shown to be small.

By expanding the configuration of the plurality of irradiation areas 6 described below in the left and right direction (Y direction), it is possible to correspond to a form in which the width of the irradiation target area R is larger.

Regarding the configuration of the plurality of irradiation areas 6, the present inventor has calculated the accumulated light amount (energy distribution) of the irradiated light L for the irradiation target area R of the work W transported along the X direction. A new configuration was found to achieve uniformity.

Hereinafter, the newly devised configuration by the inventor will be described as the integrated light quantity uniform configuration and explained in detail.

(Feature A: Uniform sum of passing distance)

As shown in FIG. 2, the plurality of irradiation areas 6 have the same total distance passing through the plurality of irradiation areas 6 at each position along the Y direction (width direction) of the irradiation target area R. It is set to be

That is, when the work W is conveyed along the conveyance direction (X direction), the total distance passing through the plurality of irradiation areas 6 is the same at any position in the width direction of the irradiation target area R. A plurality of irradiation areas 6 are set so that they are equal.

In this embodiment, light L is irradiated so that the illuminance of each of the plurality of irradiation areas 6 is the same. Therefore, the distance passing through the irradiation area 6 at each position of the irradiation target area R becomes a parameter corresponding to the accumulated light amount at that position.

As the distance passing through the irradiation area 6 increases, the accumulated amount of light L irradiated to the position increases. As the distance passing through the irradiation area 6 decreases, the accumulated amount of light L irradiated to the position decreases.

FIG. 2 shows a graph showing the accumulated amount of light at each position along the width direction of the work W.

At each position along the width direction of the work W, the total distance passing through the plurality of irradiation areas 6 becomes the same. Therefore, as shown in FIG. 2, the accumulated amount of light L irradiated at each position along the width direction of the work W is uniform.

In the example shown in FIG. 2, the plurality of irradiation areas 6 are set to have the same shape. Specifically, the shape of each of the plurality of irradiation areas 6 is a square with two diagonal directions set along the conveyance direction (X direction) and the width direction (Y direction).

As shown in FIG. 2, the plurality of irradiation areas 6 is a irradiation area group 9 consisting of two or more irradiation areas 6 lined up along the width direction (Y direction) along the conveyance direction (X direction). It is set to be arranged in multiple stages.

In this embodiment, six irradiation areas 6 are arranged in a row along the width direction, forming a first irradiation area group 9a. Moreover, on the downstream side, five irradiation areas 6 are arranged in a row along the width direction, forming a second irradiation area group 9b.

That is, in this embodiment, the first irradiation area group 9a and the second irradiation area group 9b are arranged in two stages along the conveyance direction (X direction).

The first irradiation area group 9a and the second irradiation area group 9b are set in a positional relationship with each other in order to realize characteristic A of the integrated light quantity uniform configuration.

As shown in FIG. 2, the first irradiation area group 9a has a diagonal line extending in the conveyance direction (X direction) of the leftmost irradiation area 6 on the left edge 4 of the work W. It is set to be placed in . Additionally, the first irradiation area group 9a is set so that a diagonal line extending in the conveyance direction of the rightmost irradiation area 6 is disposed on the right edge 5 of the work W.

Also, as shown in FIG. 2, the conveyance direction ( diagonal lines extending in the same direction are aligned.

That is, in the width direction (Y direction), the second irradiation area group 9b is arranged to shift left and right by an amount equal to half the diagonal of the square with respect to the first irradiation area group 9a.

This is a diagonal line extending in the conveyance direction (X direction) of the irradiation areas 6 arranged as the first irradiation area group 9a at adjacent positions between the irradiation areas 6 arranged as the second irradiation area group 9b. It can be said that this matches.

The position P1 shown in FIG. 2 is a diagonal position extending in the conveyance direction (X direction) of the second irradiation area 6 from the left of the first irradiation area group 9a. The second irradiation area group 9b is set so that this position P1 is an adjacent position of the irradiation areas 6 that are adjacent to each other.

The position P2 shown in FIG. 2 is a diagonal position extending in the conveyance direction (X direction) of the second irradiation area 6 from the left of the second irradiation area group 9b. The first irradiation area group 9a is set so that this position P2 is an adjacent position of the irradiation areas 6 that are adjacent to each other.

The positions P3 and P4 shown in FIG. 2 are positions that deviate from either the diagonal positions extending in the conveyance direction (X direction) of the irradiation area 6 and the adjacent positions of the irradiation areas 6 adjacent to each other.

At positions P1 to P4 shown in FIG. 2 and other arbitrary positions, the total distance passing through the irradiation area 6 by conveyance is the length D1 of the diagonal line of the square. Therefore, the accumulated amount of light L to be irradiated becomes uniform at each position along the width direction (Y direction) of the irradiation target area R.

(Feature B: Configuration of overlap area)

Figure 3 is an enlarged view of a plurality of irradiation areas 6.

Referring to FIG. 3, feature B of the integrated light amount uniformity configuration according to the present technology will be described.

Each of the plurality of irradiation areas 6 is set so that an overlap area 10 is generated between at least one other irradiation area 6.

That is, an arbitrary irradiation area 6 among the plurality of irradiation areas 6 is set as the first irradiation area 11 . The first irradiation area 11 is set so that an overlap area 10 is generated between at least one other irradiation area 6.

Additionally, the overlap areas 10 are areas that overlap each other in the width direction (Y direction) at different positions in the conveyance direction (X direction). Additionally, in the integrated light quantity uniform configuration, different irradiation areas 6 may be adjacent, but the irradiation areas 6 do not overlap (overlap).

For each of the plurality of irradiation areas 6, a straight line extending in the X direction is assumed from each of the leftmost vertex and the rightmost vertex. It is arranged so that a part of at least one other irradiation area 6 is included within the area between these two straight lines. And the areas that overlap each other in the Y direction become the overlap area 10.

With respect to the first irradiation area 11 arbitrarily selected from the plurality of irradiation areas 6, the other irradiation area 6 in which the overlap area 10 occurs is set as the second irradiation area 12.

In the example shown in FIG. 3 , it is assumed that the central irradiation area 6 included in the first irradiation area group 9 is selected as the first irradiation area 11.

The first irradiation area 11 is located downstream and is set so that an overlap area 10 is formed between the irradiation area 6, which is arranged half-shifted to the left. In addition, the first irradiation area 11 is set so that an overlap area 10 is generated even between the irradiation area 6 located on the downstream side and shifted halfway to the right.

Accordingly, the irradiation area 6 located downstream and half shifted to the left with respect to the first irradiation area 11 becomes the second irradiation area 12a. In addition, the irradiation area 6 located downstream and half shifted to the right with respect to the first irradiation area 11 also becomes the second irradiation area 12b.

That is, the first irradiation area 11 has an overlap area 10 between the two irradiation areas 6 .

In the integrated light quantity uniform configuration, the first overlap area, which is the overlap area 10 of the first irradiation area 11, advances in either direction in the width direction (Y direction), and the conveyance direction (X direction) ) is configured to increase the size.

And, as the second overlap area, which is the overlap area 10 of the second irradiation area 12, progresses in the same direction in the width direction (Y direction), the size in the conveyance direction (X direction) increases. It is designed to decrease.

Refer to the relationship between the first irradiation area 11 and the second irradiation area 12a shown in FIG. 3.

As shown in FIG. 3, the square irradiation area 6 is divided into a left half area 14a and a right half area 14b by a diagonal line parallel to the conveyance direction (X direction).

In this case, the left half area 14a of the first irradiation area 11 becomes the first overlap area 10a1. The right half area 14b of the second irradiation area 12a becomes the second overlap area 10a2.

The first overlap area 10a1 of the first irradiated area 11 is configured to increase in size in the conveyance direction (X direction) as it progresses to the right in the width direction (Y direction). .

As the second overlap area 10a2 of the second irradiated area 12a advances in the same direction (right direction) in the width direction (Y direction), its size in the conveyance direction (X direction) increases. It is designed to decrease.

Refer to the relationship between the first irradiation area 11 and the second irradiation area 12b shown in FIG. 3.

The right half area 14b of the first irradiation area 11 becomes the first overlap area 10b1. The left half area 14a of the second irradiation area 12b becomes the second overlap area 10b2.

The first overlap area 10b1 of the first irradiated area 11 is configured to increase in size in the conveyance direction (X direction) as it progresses to the left in the width direction (Y direction). .

As the second overlap area 10b2 of the second irradiated area 12b progresses in the same direction (left direction) in the width direction (Y direction), its size in the conveyance direction (X direction) increases. It is designed to decrease.

In this integrated light quantity uniform configuration, each irradiation area 6 is set so that an overlap area 10 is generated between the other irradiation areas 6. And, when the overlap areas 10 advance in the same direction in the width direction (Y direction), the increase or decrease in size in the conveyance direction (X direction) is set to have an opposite relationship.

In this embodiment, in order to realize the above-described integrated light quantity uniformity configuration (Feature A: uniform sum of passing distances), the size of the first overlap area 10a1 (10b1) in the conveyance direction (X direction) The rate of increase and the rate of decrease in size of the second overlap area 10a2 (10b2) in the conveyance direction (X direction) become equal to each other.

As shown in FIGS. 2 and 3 , each of the plurality of irradiated areas 6 is set so that at least one of the right half area 14b or the left half area 14a becomes the overlap area 10.

Moreover, when the first overlap area of the arbitrarily selected first irradiation area 11 is the left half area 14a, the second overlap area of the second irradiation areas 12 that overlap each other is the right half area. This becomes area 14b.

When the first overlap area of the arbitrarily selected first irradiation area 11 is the right half area 14b, the second overlap area of the second irradiation areas 12 that overlap each other is the left half area ( 14a).

That is, the left half area 14a of each irradiation area 6 overlaps the right half area 14b of another irradiation area 6, or the right half area 14b overlaps the left half area 14b of the other irradiation area 6. It is set so that at least one of those overlapping with the half area 14a is established.

In the example shown in FIG. 2, among the 11 irradiation areas 6, other than the two irradiation areas 6 at the leftmost and rightmost ends of the first irradiation area group 9a, the left half area 14a and the right half Both sides of the area 14b become the overlap area 10.

As for the leftmost irradiation area 6 of the first irradiation area group 9a, the right half area 14b becomes the overlap area 10. The left half area 14a of the rightmost irradiation area 6 of the first irradiation area group 9a becomes the overlap area 10.

In addition, the left half area 14a and the right half area 14b of the radiation area 6 correspond to one embodiment of the first divided area and the second divided area according to the present technology.

The first divided area is an area on the first direction side in the width direction (Y direction) among two areas divided by a diagonal line parallel to the conveyance direction (X direction).

The second divided area is an area on the second direction side in the width direction (Y direction) among two areas divided by a diagonal line parallel to the conveyance direction (X direction).

Therefore, if the first direction is left and the second direction is right, the left half area 14a corresponds to the first divided area, and the right half area 14b corresponds to the second divided area.

On the other hand, if the first direction is to the right and the second direction is to the left, the right half area 14b corresponds to the first divided area, and the left half area 14a corresponds to the second divided area.

In either case, it is possible to apply the present technology.

In this way, the integrated light quantity uniform configuration has (Feature A: Total uniformity of passing distance) and (Feature B: Configuration of overlap area). These features can also be said to be conditions for realizing a uniform integrated light quantity configuration.

FIG. 4 is a schematic diagram showing another example of a plurality of irradiation areas 6 that realize a uniform integrated light amount configuration.

FIG. 5 is an enlarged view of the plurality of irradiation areas 6 shown in FIG. 4.

In the example shown in FIG. 4, the shape of each of the plurality of irradiated areas 6 has a pair of opposite sides 15a and 15b that face each other along the conveyance direction (X direction) and are parallel to the width direction (Y direction). It is a regular hexagon containing.

As shown in Fig. 4, five irradiation areas 6 are arranged in a row along the width direction (Y direction), forming a first irradiation area group 9a. Moreover, on the downstream side, four irradiation areas 6 are arranged in a row along the width direction (Y direction), forming a second irradiation area group 9b.

As shown in Fig. 4, in the first irradiation area group 9a, the left end of the pair of opposite sides 15a and 15b of the leftmost irradiation area 6 is the left edge 4 of the work W. It is set to be placed on the top. In addition, the first irradiation area group 9a is set so that the right ends of the pair of opposite sides 15a and 15b of the rightmost irradiation area 6 are disposed on the right edge 5 of the work W. .

Additionally, the first irradiation area group 9a is arranged along the width direction (Y direction) at intervals equal to the length of one side of a regular hexagon. That is, the irradiation areas 6 are set to line up along the width direction (Y direction) with the length of one side being the pitch.

As shown in Fig. 4, the second irradiation area group 9b has the position of the gap between adjacent irradiation areas 6 of the first irradiation area group 9a and a pair of opposite sides 15a and 15b. ) is set so that its position is correct.

Accordingly, the irradiation areas 6 of the second irradiation area group 9b are also set so that they are lined up along the width direction (Y direction) with the length of one side being the pitch.

In addition, the position of the pair of opposite sides 15a and 15b of the irradiation area 6 of the first irradiation area group 9a is between the adjacent irradiation areas 6 of the second irradiation area group 9b. It is adjusted to the position of the gap.

The position P1 shown in FIG. 4 is the position of the rightmost vertex of the second irradiation area 6 from the left of the first irradiation area group 9a. Position P2 is the position of the leftmost vertex of the third irradiation area 6 from the left of the first irradiation area group 9a. The position between the position P1 and the position P2 becomes the position of the gap between the adjacent irradiation areas 6.

In the second irradiation area group 9b, a pair of opposite sides 15a and 15b of the irradiation area 6 are positioned at a position between the position P1 and the position P2. That is, the second irradiation area group 9b is set so that the left end of the pair of opposite sides 15a and 15b is located on the position P1, and the right end of the pair of opposite sides 15a and 15b is located on the position P2. do.

Position P3 shown in FIG. 4 is the position of the center of the irradiation area 6.

The position P4 is a position between the vertex of the leftmost end of the second irradiation area 6 from the right of the first irradiation area group 9a to the left end of the pair of opposite sides 15a and 15b.

The position P5 is a position between the right end of the pair of opposite sides 15a and 15b of the second irradiation area 6 from the right of the first irradiation area group 9a to the vertex of the rightmost end.

At positions P1 to P5 shown in FIG. 4 and other arbitrary positions, the total distance passing through the irradiation area 6 by conveyance is the length D2 between a pair of opposite sides 15a and 15b of a regular hexagon. do.

Therefore, the accumulated amount of light L to be irradiated becomes uniform at each position along the width direction (Y direction) of the irradiation target area R. In other words, (Feature A: Total uniformity of passing distance) regarding the integrated light amount uniformity configuration is realized.

In the example shown in FIG. 5 , it is assumed that the central irradiation area 6 included in the first irradiation area group 9 is selected as the first irradiation area 11.

The first irradiation area 11 is set so that an overlap area 10 is generated between the irradiation area 6, which is located downstream and shifted to the left. In addition, the first irradiation area 11 is set so that an overlap area 10 is generated even between the irradiation area 6 located downstream and shifted to the right.

Accordingly, the irradiation area 6 located downstream and shifted to the left with respect to the first irradiation area 11 becomes the second irradiation area 12a. Additionally, the irradiation area 6 located downstream and shifted to the right with respect to the first irradiation area 11 also becomes the second irradiation area 12b.

Refer to the relationship between the first irradiation area 11 and the second irradiation area 12a shown in FIG. 5.

As shown in FIG. 5, each of the plurality of irradiation areas 6 is divided into a central area 17a between a pair of opposite sides 15a and 15b of the regular hexagonal irradiation area 6, and a central area 17a. It is divided into a left area 17b adjacent to the left and a right area 17c adjacent to the right of the center area 17a.

In this case, the left area 17b of the first irradiation area 11 becomes the first overlap area 10a1. The area 17c to the right of the second irradiation area 12a becomes the second overlap area 10a2.

The first overlap area 10a1 of the first irradiated area 11 is configured to increase in size in the conveyance direction (X direction) as it progresses to the right in the width direction (Y direction). .

As the second overlap area 10a2 of the second irradiated area 12a advances in the same direction (right direction) in the width direction (Y direction), its size in the conveyance direction (X direction) increases. It is designed to decrease.

Refer to the relationship between the first irradiation area 11 and the second irradiation area 12b shown in FIG. 5.

The area 17c on the right side of the first irradiation area 11 becomes the first overlap area 10b1. The left area 17b of the second irradiation area 12b becomes the second overlap area 10b2.

The first overlap area 10b1 of the first irradiated area 11 is configured to increase in size in the conveyance direction (X direction) as it progresses to the left in the width direction (Y direction). .

As the second overlap area 10b2 of the second irradiated area 12b progresses in the same direction (left direction) in the width direction (Y direction), its size in the conveyance direction (X direction) increases. It is designed to decrease.

The ratio of the increase in size of the first overlap area 10a1 (10b1) in the conveyance direction (X direction) and the size of the second overlap area 10a2 (10b2) in the conveyance direction (X direction) The rate of decrease becomes equal to each other.

In this way, the integrated light quantity uniform configuration (feature B: configuration of the overlap area) is also realized.

As shown in FIGS. 4 and 5 , each of the plurality of irradiated areas 6 is set so that at least one of the left area 17b or the right area 17c becomes the overlap area 10.

In addition, when the first overlap area of the arbitrarily selected first irradiation area 11 is the left area 17b, the second overlap area of the second irradiation areas 12 that overlap each other is the right area ( 17c).

When the first overlap area of the arbitrarily selected first irradiation area 11 is the right area 17c, the second overlap area of the second irradiation areas 12 that overlap each other is the left area 17b. This happens.

That is, in each irradiation area 6, the left area 17b overlaps the right area 17c of another irradiation area 6, or the right area 17c overlaps the left area 17b of another irradiation area 6. ) is set so that at least one of the overlaps is established.

In the example shown in FIG. 4, among the nine irradiation areas 6, other than the two irradiation areas 6 at the leftmost and rightmost ends of the first irradiation area group 9a, the left area 17b and the right area ( Both sides of 17c) become the overlap area 10.

As for the irradiation area 6 at the leftmost end of the first irradiation area group 9a, the right area 17c becomes the overlap area 10. As for the rightmost irradiation area 6 of the first irradiation area group 9a, the left area 17b becomes the overlap area 10.

In addition, the central area 17a, left area 17b, and right area 17c of the irradiated area 6 are one embodiment of the central area, first divided area, and second divided area according to the present technology. It corresponds to the shape.

Among these, the first divided area is an area adjacent to the central area 17a on the first direction side in the width direction (Y direction).

The second divided area is an area adjacent to the central area 17a on the second direction side in the width direction (Y direction).

Therefore, if the first direction is left and the second direction is right, the left area 17b corresponds to the first divided area, and the right area 17c corresponds to the second divided area.

On the other hand, if the first direction is to the right and the second direction is to the left, the right area 17c corresponds to the first divided area, and the left area 17b corresponds to the first divided area.

In either case, it is possible to apply the present technology.

［Effect of uniform integrated light amount configuration］

Figures 6 and 7 are schematic diagrams showing the configuration of a plurality of irradiation areas 96 used as comparative examples.

In the comparative example shown in FIG. 6, the shape of each of the plurality of irradiation areas 96 is a square with two side directions set along the conveyance direction (X direction) and the width direction (Y direction).

As shown in Fig. 6, five irradiation areas 96 are arranged in a row along the width direction, forming a first irradiation area group 98a. Additionally, on the downstream side, four irradiation areas 96 are arranged in a row along the width direction, forming a second irradiation area group 98b.

As shown in FIG. 6, the first irradiation area group 98a is arranged along the width direction (Y direction) at intervals equal to the length of one side of a square. That is, the irradiation areas 96 are set to line up along the width direction (Y direction), with the length of one side being the pitch.

The second irradiation area group 98b is set on the downstream side to fill the gap between the adjacent irradiation areas 96 of the first irradiation area group 98a.

Accordingly, the irradiation areas 96 of the second irradiation area group 98b are also set so that they are lined up along the width direction (Y direction) with the length of one side being the pitch.

The position P1 shown in FIG. 6 is a position on the right side of the second irradiation area 96 from the left of the first irradiation area group 98a. Position P2 is the position of the left side of the third irradiation area 96 from the left of the first irradiation area group 98a.

The irradiation area 96 of the second irradiation area group 98b is arranged to fill the space between the position P1 and the position P2. In addition, the irradiation area 96 of the second irradiation area group 98b is not located on the positions (positions P1 and P2) of the right and left sides of the irradiation area 96 of the first irradiation area group 98a. arranged so as not to

Therefore, in the width direction (Y direction), the left and right sides of the irradiation area 96 of the first irradiation area group 98a and the left and right sides of the irradiation area 96 of the second irradiation area group 98b Mutations never end up in the same position.

The positions P3 and P4 shown in FIG. 6 are the positions of the center of the radiation area 96.

At positions P1 to P4 shown in FIG. 6 and other arbitrary positions, the total distance passing through the irradiation area 96 by conveyance is the length D3 of one side of the square.

Therefore, the accumulated amount of light L to be irradiated becomes uniform at each position along the width direction (Y direction) of the irradiation target area R. That is, in the comparative example shown in FIG. 6, (Feature A: Total uniformity of passing distance) regarding the integrated light amount uniformity configuration is realized.

On the other hand, in the example shown in FIG. 6, (feature B: configuration of overlap area) regarding the uniform integrated light amount configuration is not realized.

Here, as shown in FIG. 7, a case where the position of the irradiated area 96 is shifted in the width direction (Y direction) will be considered.

In the example shown in Fig. 7, the second irradiation area 96a from the right of the second irradiation area group 98b is shifted to the right. As a result, a gap occurs between the position P5 on the right side of the irradiation area 96b, which is upstream and shifted to the left, and the position P6 on the left side of the irradiation area 96a.

Additionally, an overlap area is generated between the position P7 on the left side of the irradiation area 96c, which is upstream and shifted to the right, and the position P8 on the right side of the irradiation area 96a.

As a result, as shown in FIG. 7, the accumulated light amount between the positions P5 and P6 becomes zero. Additionally, between the positions P7 and P8, the integrated light amount increases by the amount of the overlap area.

That is, in the configuration of the irradiation area 96 in the comparative example, even if the irradiation area 96 is slightly shifted in the width direction, the uniformity of the accumulated light amount in the irradiation target area R is significantly increased. It deteriorates.

FIG. 8 is a schematic diagram showing a case where deviation of the irradiation area 6 occurs in the uniform integrated light amount configuration shown in FIG. 2.

In the example shown in FIG. 8, the second irradiation area 6a from the right of the second irradiation area group 9b is shifted to the right in the width direction (Y direction). Therefore, the positions are shifted with respect to the irradiation areas 6b and 6c, which are upstream and shifted to the left and right. Additionally, some areas overlap with the irradiation area 6d on the right side.

The change in the integrated light amount due to deviation of the irradiation area 6a to the right is as follows.

The integrated light amount decreases in the range from the center position P5 of the irradiation area 6b to the position P6 of the leftmost vertex of the irradiation area 6a.

In the range from the position P6 of the leftmost vertex of the irradiation area 6a to the position P7 of the rightmost vertex of the irradiation area 6b, the integrated light amount is maintained in a low state.

In the range from the position P7 of the rightmost vertex of the irradiation area 6b to the center position P8 of the irradiation area 6a, the integrated light amount increases (exceeding the target integrated light amount at the halfway point).

In the range from the center position P8 of the irradiation area 6a to the center position P9 of the irradiation area 6c, the accumulated light amount remains high.

In the range from the center position P9 of the irradiation area 6c to the position P10 of the rightmost vertex of the irradiation area 6a, the integrated light amount decreases (returns to the target integrated light amount at the position P10).

FIG. 9 is a schematic diagram showing a case where deviation of the irradiation area 6 occurs in the uniform integrated light amount configuration shown in FIG. 4.

In the example shown in Fig. 9, the second irradiation area 6a from the right of the second irradiation area group 9b is shifted to the right in the width direction (Y direction). Therefore, the positions are shifted with respect to the irradiation areas 6b and 6c, which are upstream and shifted to the left and right.

The change in the integrated light amount due to deviation of the irradiation area 6a to the right is as follows.

The integrated light amount decreases in the range from the position P6 of the right end of the pair of opposite sides 15a and 15b of the irradiation area 6b to the position P7 of the vertex of the leftmost end of the irradiation area 6a.

In the range from position P7 of the leftmost vertex of the irradiation area 6a to position P8 of the rightmost vertex of the irradiation area 6b, the integrated light amount is maintained in a low state.

In the range from the position P8 of the rightmost vertex of the irradiation area 6b to the position P9 of the left end of the pair of opposite sides 15a and 15b of the irradiation area 6a, the integrated light amount increases (targeted at position P9). (Returns to accumulated light amount)

The target integrated light amount is maintained in the range from the position P9 of the left end of the pair of opposite sides 15a and 15b of the irradiation area 6a to the position P10 of the vertex of the leftmost end of the irradiation area 6c.

In the range from position P10 at the leftmost end of the irradiation area 6c to position P11 at the right end of the pair of opposite sides 15a and 15b of the irradiation area 6a, the integrated light amount increases.

In the range from the position P11 of the right end of the pair of opposite sides 15a and 15b of the irradiation area 6a to the position P12 of the left end of the pair of opposite sides 15a and 15b of the irradiation area 6c, the integrated light amount is keep it high

In the range from the position P12 of the left end of the pair of opposite sides 15a and 15b of the irradiation area 6c to the position P13 of the vertex of the rightmost end of the irradiation area 6a, the integrated light amount decreases (target at position P13). (returns to the accumulated light amount)

As shown in FIGS. 8 and 9, in the integrated light amount uniform configuration, even when the position of the irradiation area 6 is shifted compared to the comparative example shown in FIG. 7 due to (feature B: configuration of the overlap area), the width It becomes possible to suppress the influence on the accumulated light amount at each position along the direction (Y direction).

Additionally, in FIGS. 8 and 9 , in order to easily explain the influence of the misalignment of the irradiated area 6, the misalignment of the irradiated area 6 is shown to be very large. As a result, even in the uniform integrated light quantity configuration shown in FIGS. 8 and 9, it appears that a large change in the accumulated light quantity occurs.

In reality, it is possible to suppress the deviation of the irradiation area 6 to a smaller range.

For example, for the irradiation area R with a width of about 3000 mm, the irradiation area 6 with a width of about 100 to 400 mm is set to realize a uniform integrated light amount configuration. At that time, it is possible to position the irradiation area 6 in units of 1 mm. That is, it is possible to suppress the deviation in the width direction of the irradiated area 6 to within 1 mm.

For example, when looking at the examples of FIGS. 8 and 9, it is possible to suppress the amount of deviation to about 1/100 to 1/400 of the width of the irradiation area 6. As a result, when the position of the irradiation area 6 is shifted, the influence on the accumulated light amount at each position along the width direction (Y direction) is sufficiently suppressed.

［Variations of uniform integrated light intensity configuration］

FIGS. 10A to 10C and FIGS. 11A to 11C are schematic diagrams showing another example of a uniform integrated light quantity configuration.

In the example shown in FIG. 10A, the shape of each of the plurality of irradiation areas 6 is a diamond shape with two diagonal directions set along the conveyance direction (X direction) and the width direction (Y direction).

With respect to the first irradiation area group 9a, the second irradiation area group 9b is set so that the left half area 14a and the right half area 14b overlap each other.

Accordingly, it is possible to realize a uniform integrated light amount configuration.

In addition, the example shown in FIG. 10A corresponds to a shape in which the diagonal length D1 along the conveyance direction (X direction) of the square irradiated area 6 shown in FIG. 2 is shortened.

The length of the diagonal along the conveyance direction (X direction) and the length of the diagonal along the width direction (Y direction) can each be designed arbitrarily. In other words, it is possible to realize a uniform integrated light amount configuration using diamonds of various shapes. Additionally, squares are included in diamonds.

In the example shown in FIG. 10B, the shapes of each of the plurality of irradiated areas 6 are a pair of opposite sides 15a and 15b that face each other along the conveyance direction (X direction) and are parallel to the width direction (Y direction). It is made of a hexagon containing .

With respect to the first irradiation area group 9a, the second irradiation area group 9b is set so that the left area 17b and the right area 17c overlap each other.

Accordingly, it is possible to realize a uniform integrated light amount configuration.

In addition, the example shown in FIG. 10B corresponds to a shape in which the size of the regular hexagonal irradiation area 6 shown in FIG. 4 in the conveyance direction (X direction) is reduced. That is, it corresponds to a shape in which the length D2 between a pair of opposite sides 15a and 15b is shortened.

The size along the hexagonal conveyance direction (X direction) and the size along the width direction (Y direction) can each be designed arbitrarily. In other words, it is possible to realize a uniform integrated light amount configuration using hexagons of various shapes.

In the example shown in FIG. 10C, the shape of each of the plurality of irradiation areas 6 is an equilateral triangle with one side direction along the width direction (Y direction).

The side set parallel to the width direction is referred to as the base 19, and the vertex opposite to the base is referred to as the vertex 20. The first irradiation area group 9a is arranged along the width direction (Y direction) so that the vertex 20 is located downstream of the base 19.

With respect to the first irradiation area group 9a, the second irradiation area group 9b is oriented along the width direction (Y direction) so that the vertex 20 is located upstream with respect to the base 19. It is laid out. In addition, the second irradiation area group 9b is an area where the left half area 21a of the first irradiation area group 9a and the right half area 22b of the second irradiation area group 9b overlap each other. To achieve this, the right half area 21b of the first irradiation area group 9a and the left half area 22a of the second irradiation area group 9b are set to overlap each other.

At each position along the width direction (Y direction) of the irradiation target area R, the sum of the distances passing through the irradiation area 6 is the length D4 of the perpendicular line from the vertex 20 to the base 19. .

Additionally, the position of the vertex 20 with respect to the base 19 may be changed to form the irradiation area 6 in the shape of an isosceles triangle. In addition, it is possible to realize a uniform integrated light amount configuration by using triangles of various shapes.

In the example shown in FIG. 11A , the plurality of irradiation areas 6 are composed of a four-stage irradiation area group 23 of irradiation area groups 23a to 23d.

In this way, the irradiation area group consisting of two or more irradiation areas 6 lined up along the width direction (Y direction) may be arranged in any number of stages along the conveyance direction (X direction).

In addition, in the example shown in FIG. 11A, the even-numbered irradiation area 6 counted from the left of the first irradiation area group 9a in the integrated light quantity uniform configuration shown in FIG. 2 is shifted to the upstream side to form the first irradiation area. It is grouped as (23a). And the odd-numbered irradiation area 6 is set as the second irradiation area group 23b.

In addition, the even-numbered irradiation area 6 counting from the left of the second irradiation area group 9b shown in FIG. 2 is shifted downstream to become the fourth irradiation area group 23d. And the odd-numbered irradiation area 6 is set as the third irradiation area group 23c.

Of course, it is not limited to this configuration, and any configuration consisting of a multi-stage irradiation area group may be adopted.

In the example shown in FIG. 11B, the plurality of irradiation areas 6 are set to line up along a straight line S that intersects diagonally with respect to the conveyance direction (X direction). Additionally, the irradiation area groups 24a and 24b arranged along the straight line S are arranged in multiple stages along the conveyance direction (X direction).

In addition, in the example shown in FIG. 11B, each of the irradiation areas 6 of the uniform integrated light amount configuration shown in FIG. 2 is shifted along the conveyance direction (X direction) so that the center is disposed on the straight line S.

Of course, it is not limited to this configuration, and any configuration along a straight line S that intersects diagonally with respect to the conveyance direction (X direction) may be adopted.

In the example shown in FIG. 11C, each of the irradiation areas 6 of the uniform integrated light quantity configuration shown in FIG. 2 is randomly shifted along the conveyance direction (X direction).

Even with this configuration, it is possible to realize a configuration with uniform integrated light amount.

As illustrated in FIGS. 10A to 10C and FIGS. 11A to 11C, various configurations can be considered as the integrated light quantity uniform configuration. Any configuration may be adopted as long as it satisfies the above-mentioned (Feature A: Uniform sum of passing distances) and (Feature B: Configuration of overlap area).

For example, as long as feature A and feature B are satisfied, each of the plurality of irradiation areas 6 may be set to include different shapes or sizes.

For example, the shape or position of the irradiation area 6 may be set so as to be advantageous in examining the specific configuration of the light source unit 7 and the irradiation unit 8 shown in FIG. 1.

Additionally, the integrated light amount uniformity configuration shown in FIG. 2 can also be said to be a configuration based on the Higaki shape. Additionally, the integrated light quantity uniform configuration shown in FIG. 4 can also be said to be a configuration based on the turtleback shape. In this way, it is also possible to realize a uniform integrated light amount configuration according to a pattern that develops regularly.

[Specific configuration of the light source unit (7) and the irradiation unit (8)]

As a specific configuration of the light source unit 7 and the irradiation unit 8, any configuration may be adopted as long as it is possible to realize the uniform integrated light amount configuration described above.

Hereinafter, a specific configuration example of the light source unit 7 and the irradiation unit 8 will be described.

[Multiple light irradiation units]

Figure 12 is a schematic diagram showing a configuration example when a plurality of light irradiation units are used.

As shown in FIG. 12 , a plurality of light irradiation units 25 are arranged corresponding to a plurality of irradiation areas 6 . In the light irradiation device 1 shown in FIG. 12, one light irradiation unit 25 is disposed for each of the plurality of irradiation areas 6.

In this embodiment, five light irradiation units 25 are arranged in the width direction (Y direction) corresponding to the five irradiation areas 6 of the first irradiation area group 9a, and It is configured as a light irradiation unit group 26a.

Additionally, four light irradiation units 25 are arranged in the width direction (Y direction) corresponding to the four irradiation areas 6 of the second irradiation area group 9b, It is composed of group 26a.

That is, in the example shown in FIG. 12, the light irradiation unit group 26 is arranged in two stages corresponding to the two-stage irradiation area group 9.

In this embodiment, supports 27 are installed on both left and right sides of the work W. Then, the plurality of light irradiation units 25 are held between the supports through holding members. The specific configuration for holding the plurality of light irradiation units 25 is not limited and may be designed arbitrarily.

13A and 13B are schematic diagrams showing an example of the internal configuration of the light irradiation unit 25.

FIG. 13A is a schematic diagram showing the internal configuration of the light irradiation unit 25 when viewed from the left side in the width direction (Y direction).

FIG. 13B is a schematic diagram showing the internal configuration of the light irradiation unit 25 when viewed from the downstream side in the conveyance direction (X direction).

12, the light irradiation unit 25 is schematically shown in the shape of a simple rectangular parallelepiped.

As shown in FIGS. 13A and 13B, the light irradiation unit 25 includes a lamp 29, a condensing mirror 30, a plane mirror 31, an integrator lens 32, and a collimator mirror 33. ) and a polarizing element (polarizing plate) 34.

In this embodiment, a short arc-type mercury lamp is used as the lamp 29. For example, ultraviolet light containing wavelengths of 254 nm, 313 nm, and 365 nm is emitted from the lamp 29.

The converging mirror 30 collects the light L emitted from the lamp 29 and emits it along the optical axis O toward the plane mirror 31. The plane mirror 31 reflects the light L emitted from the converging mirror 30 toward the integrator lens 32.

The integrator lens 32 is disposed on the optical path of the light L reflected by the plane mirror 31 and equalizes the illuminance distribution of the light L irradiated to the irradiation area 6. The integrator lens 32 is constructed by arranging a plurality of lens segments (a plurality of minute lenses), and is also called a fly's eye lens. The light L emitted from each lens segment overlaps on the irradiation area 6, thereby uniformizing the illuminance.

The collimator mirror 33 bends the light L emitted from the integrator lens 32 downward and emits it as parallel light. The light L reflected as parallel light by the collimator mirror 33 is irradiated to the irradiation area 6 through the polarizing plate 34.

The shape of the irradiation area 6 is similar to the shape of the lens segment constituting the integrator lens 32.

The specific configuration of the light irradiation unit 25 is not limited, and any configuration may be adopted.

For example, instead of the collimator mirror 33, a reflector (plane mirror) and a collimator lens are placed, the light path is bent by the reflector (plane mirror), the light path is made to enter the collimator lens, and parallel light is emitted from the collimator lens. do. Additionally, parallel light is irradiated in a range of approximately 0 to 70 degrees in a direction perpendicular to the surface of the work W.

In addition, in the case where the light irradiation device 1 is used for a purpose different from the alignment treatment for a photo alignment film, such as an alignment layer of a liquid crystal element or an alignment layer of a viewing angle compensation film, there is also a configuration in which the polarizing plate 34 is not disposed. There may be.

As shown in FIG. 12, by arranging a plurality of light irradiation units 25 in a row, it is possible to easily realize a uniform integrated configuration for a large workpiece W having a large size in the width direction (Y direction). possible. As a result, it becomes possible to improve the uniformity of the accumulated amount of irradiated light L for the large workpiece W.

Figure 14 is a schematic diagram showing another configuration example of a light irradiation unit.

In the example shown in FIG. 14 , one light irradiation unit 36a extending in the width direction (Y direction) is disposed in the first irradiation area group 9a. Additionally, one light irradiation unit 36b extending in the width direction (Y direction) is disposed in the second irradiation area group 9b.

In this way, one light irradiation unit 36 may be configured to correspond to each of the plurality of irradiation area groups 9 arranged in multiple stages.

For example, in the uniform integrated light amount configuration as illustrated in FIG. 2, when the irradiation areas 6 are adjacent to each other, the light irradiation unit 36 that irradiates the irradiation area group 9 in combination is advantageous. There are also many.

As an example of the internal configuration of the light irradiation unit 36, for example, it is possible to adopt the internal configuration illustrated in FIGS. 13A and 13B. For example, inside the light irradiation unit 36, a plurality of the internal structures illustrated in FIGS. 13A and 13B are arranged in a row corresponding to the irradiation area 6.

Accordingly, it becomes possible to realize a light irradiation unit 36 that can be irradiated by combining the irradiation area group 9.

Alternatively, in each irradiation area group 9, a configuration in which lamps etc. are commonly arranged for a plurality of adjacent irradiation areas 6 may be adopted.

For example, one integrator lens 32 is disposed in two irradiation areas 6 adjacent to each other. On the other hand, it is also possible to use a rod-shaped lamp extending in the width direction (Y direction) in common for the two irradiation areas 6.

Of course, it is also possible to use one lamp or the like for three or more irradiation areas 6. In addition, any configuration may be adopted.

In the light irradiation unit 25 illustrated in FIG. 12, a set of lamps 29 and condensing mirrors 30 mounted on each of the plurality of light irradiation units 25 functions as the light source unit 7 shown in FIG. 1. . Additionally, a plurality of sets of lamps 29 and condensing mirrors 30 arranged as many as the plurality of light irradiation units 25 constitute an embodiment of a plurality of light sources.

In addition, the flat mirror 31, the integrator lens 32, the collimator mirror 33, and the polarizing plate 34 mounted on each of the plurality of light irradiation units 25 serve as the irradiation unit 8 shown in FIG. 1. It functions. In addition, the flat mirror 31, the integrator lens 32, the collimator mirror 33, and the polarizer 34 are one embodiment of a plurality of optical components that irradiate the light emitted from the light source to the corresponding irradiation area. It becomes.

The light irradiation unit 36 illustrated in FIG. 14 is also similar, and the lamp mounted on each light irradiation unit 36 functions as the light source unit 7 shown in FIG. 1 . Additionally, the integrator lens 32 and the like arranged corresponding to the plurality of irradiation areas 6 function as the irradiation portion 8 shown in FIG. 1 .

As the light source unit 7, a light source other than a mercury lamp may be used. For example, a lamp that emits light in a different wavelength band from ultraviolet light may be used.

In addition, a solid light source such as LED (Light Emitting Diode) or LD (Laser Diode) may be used.

For example, in the light irradiation unit 25 shown in FIGS. 13A and 13B, it is possible to arrange an array light source of LED or LD instead of the set of lamp 29 and condensing mirror 30.

[Configuration of the integrator lens]

FIGS. 15A and 15B are schematic diagrams showing an example of the configuration of the exit surface 38 of the integrator lens 32 shown in FIGS. 13A and 13B. The emission surface 38 is a surface from which light L is emitted when the integrator lens 32 is viewed from the emission side along the optical axis O.

The integrator lens 32 includes a plurality of lens segments 39. 15A and 15B, when the emission surface 38 of the integrator lens 32 is viewed along the optical axis O, the emission surfaces 40 of each of the plurality of lens segments 39 are arranged densely. do.

The shape of the area where the light emitted from the integrator lens 32 is irradiated becomes the same as the shape of the emission surface 40 of each lens segment 39 when viewed along the optical axis O.

The lens segment 39 corresponds to one embodiment of a plurality of lenses according to the present technology.

In realizing a uniform integrated light amount configuration, the shape of the irradiation area 6 is very important.

As shown in FIG. 12, a plurality of integrator lenses 32 are disposed to equalize the illuminance distribution of each of the plurality of irradiation areas 6, corresponding to the plurality of irradiation areas 6. That is, one integrator lens 32 is disposed for each of the plurality of irradiation areas 6.

Then, the shape of the emission surface 40 of the lens segment 39 included in the integrator lens 32 is designed to be the same as the shape of the irradiation area 6. That is, a plurality of integrator lenses 32 arranged corresponding to the plurality of irradiation areas 6, and a plurality of lens segments 39 whose shape of the emission surface 40 is the same as that of the irradiation area 6. Place the integrator lens containing.

Accordingly, it is possible to easily shape the irradiation area 6 into the shape necessary to realize a uniform integrated light quantity configuration.

In the example shown in FIG. 15A, the shape of the emission surface 40 of each lens segment 39 is designed to be square. In addition, the direction of the emission surface 40 of each lens segment 39 is also set so that the two diagonal directions of the irradiation area 6 follow the conveyance direction (X direction) and the width direction (Y direction).

In the example shown in FIG. 15A, the direction of the integrator lens 32 is set so that the two diagonals of the square exit surface 40 follow the Z direction and the Y direction. Accordingly, the light L reflected downward by the collimator mirror 33 shown in FIGS. 13A and 13B is irradiated with the two diagonal directions set to follow the conveyance direction (X direction) and the width direction (Y direction). Area (6) is investigated.

By using the integrator lens 32 shown in Fig. 15A, it becomes possible to easily realize the uniform integrated light quantity configuration shown in Figs. 2 and 14.

In the example shown in FIG. 15B, the shape of the emission surface 40 of each lens segment 39 is designed to be a regular hexagon. Then, the emission of each lens segment 39 is performed so that the pair of opposite sides 15a and 15b of the irradiation area 6 face each other along the conveyance direction (X direction) and are parallel to the width direction (Y direction). The direction of the face 40 is also set.

In the example shown in FIG. 15B, the direction of the integrator lens 32 is such that a pair of opposite sides 41a and 41b of the regular hexagonal emission surface 40 face each other along the Z direction and are parallel to the Y direction. This is set. Accordingly, the light L reflected downward by the collimator mirror 33 shown in FIGS. 13A and 13B has a pair of opposite sides 15a and 15b opposing each other along the conveyance direction (X direction), It is irradiated to an irradiation area 6 set to be parallel to the width direction (Y direction).

By using the integrator lens 32 shown in FIG. 15B, it becomes possible to easily realize the uniform integrated light quantity configuration shown in FIG. 4 or FIG. 12.

Of course, this is not limited to the uniform integrated light quantity configuration illustrated in Figures 12 and 14.

When constructing the integrator lens 32 as shown in FIGS. 15A and 15B, it becomes possible to effectively utilize light by densely arranging the exit surface 40 of each lens segment 39. If a gap exists between the emission surfaces 40 of the lens segments 39, it will cause loss of light.

Therefore, when adopting a method of controlling the shape of the irradiation area 6 by controlling the shape of the emission surface 40 of the lens segment 39, the emission surface 40 of the lens segment 39 has the same shape. It is advantageous to have a shape that allows them to be arranged densely in the same direction.

As such shapes, the diamonds (including squares) shown in Figures 2 and 10A and the hexagons shown in Figures 4 and 10B are advantageous.

Of course, it is not limited to this shape, and other shapes that have the same shape and can be densely arranged in the same direction may be adopted.

In a triangle as illustrated in FIG. 10C, if the direction is reversed, it becomes possible to configure the integrator lens 32 by densely arranging it. However, in the example shown in FIG. 10C, the irradiation area 6 of the first irradiation area group 9a or the second irradiation area group 9b is set as a triangle with a defined direction.

In this case, since it is difficult to densely arrange the emission surfaces 40 made of triangles in the same direction, there is a high possibility that light loss will occur.

Of course, in order to realize the uniform integrated light amount configuration illustrated in FIG. 10C, a method of designing the shape of the exit surface 40 of the lens segment 39 into a triangle may be adopted.

Additionally, with reference to FIGS. 10A to 10C and FIGS. 11A to 11C, the irradiation area group 9 configured along the width direction (Y direction) is arranged in a small number of stages along the conveyance direction (X direction). Accordingly, it becomes possible to reduce the space required to irradiate the light L in the conveyance direction (X direction), which is advantageous for miniaturization of the device.

Depending on the configuration of the light irradiation unit 25 or the like, it may be difficult to continuously set adjacent irradiation areas 6 as shown in FIG. 10A along the width direction (Y direction). In such a case, for example, a four-stage configuration as shown in FIG. 11A, a configuration along the oblique direction as shown in FIG. 11B, and a random shift along the conveyance direction (X direction) as shown in FIG. 11C. By adopting a configuration, etc., it becomes possible to easily realize a configuration with uniform integrated light amount.

［Light irradiation method］

The light irradiation method using the light irradiation device 1 will be described.

This light irradiation method is a light irradiation method in which light L is irradiated to a work W conveyed along the conveyance direction (X direction), and light is applied to a plurality of irradiation areas 6 that realize a uniform integrated light amount configuration. This is a method of investigating (L).

Specifically, a step of emitting light from the light source unit 7 shown in FIG. 1 and a plurality of irradiation of the light L emitted from the light source unit 7 to the irradiation target area R of the work W A step of dividing into areas 6 and irradiating each of the plurality of irradiation areas 6 so that the illuminance is the same is provided.

It is possible to adopt the various configurations described above as the plurality of irradiation areas 6, light source section 7, and irradiation section 8 that realize a configuration of uniform integrated light amount.

As mentioned above, in the light irradiation device 1 according to the present embodiment, the total distance passing through the plurality of irradiation areas 6 is the same at each position along the width direction (Y direction) of the irradiation target area R. It is composed. Accordingly, it becomes possible to make the accumulated light amount uniform at each position along the width direction (Y direction) of the irradiation target area R.

Additionally, each irradiation area 6 is set so that an overlap area 10 is generated between the other irradiation areas 6. The overlap areas 10 are set so that when they advance in the same direction in the width direction (Y direction), the increase or decrease in size in the conveyance direction (X direction) has an opposite relationship. Accordingly, even when the position of the irradiated area is shifted in the width direction (Y direction), it becomes possible to sufficiently suppress the influence on the accumulated light amount at each position along the width direction (Y direction).

By using this light irradiation device 1, it becomes possible to improve the uniformity of the accumulated amount of irradiation light L for the large workpiece W.

The fields to which the light irradiation device 1 can be applied are not limited, and the light irradiation device 1 can be used for any purpose.

For example, as described above, it is possible to apply the present technology to alignment processing for photo-alignment films, such as the alignment film of a liquid crystal device or the alignment layers of a viewing angle compensation film.

In addition, the present technology can also be applied to applications where light is irradiated to the work W and the surface of the work W is modified through a photochemical reaction.

In addition, it is also possible to form a predetermined pattern by exposing a large substrate such as a printed circuit board or a glass substrate for a liquid crystal panel to light using the light irradiation device 1.

In addition, the present light irradiation device 1 can be used in any field or system that requires irradiation of light with a uniform integrated light amount.

［Part manufacturing method］

As a method of manufacturing a part according to the present technology, it is possible to implement any method including a step of irradiating light to the part using the light irradiation device 1.

For example, by performing alignment treatment using the light irradiation device 1, it is possible to manufacture various parts containing a photo-alignment film.

In addition, it is possible to manufacture various parts by performing surface modification, etc. using the light irradiation device 1.

Additionally, by performing exposure using the light irradiation device 1, it becomes possible to manufacture various substrates on which a predetermined pattern is formed as parts. For example, it is possible to manufacture electric circuit elements, optical elements, MEMS, recording elements, sensors, or forms as parts.

Electric circuit elements include volatile or non-volatile semiconductor memories such as DRAM, SRAM, flash memory, and MRAM, and semiconductor elements such as LSI, CCD, image sensors, and FPGA. Examples of the mold include a mold for imprinting.

<Other embodiments>

The present invention is not limited to the embodiments described above and can realize various other embodiments.

[Design of cross-sectional shape of rod lens]

In order to equalize the illuminance distribution in each of the plurality of irradiation areas 6, it is also possible to use a rod lens instead of the integrator lens 32 shown in FIGS. 13A and 13B. For example, the rod lens can be placed at almost the same position as the integrator lens 32 shown in FIGS. 13A and 13B, and the drawings are omitted.

The rod lens has a pillar shape extending in one direction, with one cross section serving as a light incident surface and the other cross section serving as a light exit surface. The light incident on the light incident surface is repeatedly reflected within the rod lens, making it possible to make the illuminance distribution of the light irradiated to the irradiation area 6 uniform, similar to the integrator lens 32.

For example, in correspondence with the plurality of irradiation areas 6, a plurality of rod lenses are arranged to equalize the illuminance distribution of each of the plurality of irradiation areas 6. That is, one rod lens is disposed in each of the plurality of irradiation areas 6.

Then, the shape of the cross section perpendicular to the optical axis direction (light emission direction) of the rod lens is designed to be the same as the shape of the irradiation area 6. That is, a plurality of rod lenses are arranged to correspond to the plurality of irradiation areas 6, and a cross-sectional shape perpendicular to the optical axis direction is the same as that of the irradiation areas 6.

Accordingly, it is possible to easily shape the irradiation area 6 into the shape necessary to realize a uniform integrated light quantity configuration.

For example, the cross-sectional shape perpendicular to the optical axis direction is designed to be diamond-shaped, and the direction in which the rod lens is placed is appropriately set. Accordingly, it becomes possible to easily realize the uniform integrated light amount configuration shown in Fig. 2 or Fig. 14.

Additionally, the cross-sectional shape perpendicular to the optical axis direction is designed to be hexagonal, and the direction in which the rod lens is placed is appropriately set. It becomes possible to easily realize the uniform integrated light amount configuration shown in Figures 4 and 12.

For example, the cross-sectional shape perpendicular to the optical axis direction is designed to be a triangle, and the direction in which the rod lens is placed is appropriately set. Accordingly, it becomes possible to easily realize the uniform integrated light amount configuration illustrated in FIG. 10C.

In addition, it is possible to apply it to the irradiation area 6 of any shape.

［Design of the shape of the light transmission area of the light blocking plate］

16A and 16B are schematic diagrams showing another example of the configuration of the light irradiation unit.

In the light irradiation unit 43 shown in FIGS. 16A and 16B, a light blocking plate 44 having a light transmission area of the same shape as the irradiation area 6 is disposed at the exit port of the light L.

As long as it is possible to emit a light flux of a size that includes the entire light transmission area, the internal configuration of the light irradiation unit 43 may be designed arbitrarily, and it is also possible to adopt a conventional configuration.

That is, in this embodiment, by disposing the light blocking plate 44 according to the present technology in a conventional light irradiation unit, it becomes possible to easily realize a uniform integrated light amount configuration.

For example, it is also possible to use a light irradiation unit comprised of an integrator lens whose emission surface of each lens segment 39 is circular, or a cylindrical or prismatic rod lens.

17A, 17B, 18A, and 18B are schematic diagrams showing an example of the light blocking plate 44.

In the light blocking plate 44a shown in FIG. 17A, one light transmission area 45 is formed in a square shape. Additionally, the light-transmitting area 45 may be formed of a through hole or a window portion made of a light-transmitting material such as glass.

For example, the light blocking plate 44a shown in FIG. 17A is mounted on the light irradiation unit 43 with its direction appropriately set. Then, light irradiation units 43 are arranged corresponding to the plurality of irradiation areas 6. Accordingly, it becomes possible to easily realize the uniform integrated light quantity configuration shown in, for example, FIGS. 11A to 11C.

In the light blocking plate 44b shown in FIG. 17B, one light transmission area 45 made of a regular hexagon is formed. This light blocking plate 44b is mounted on the light irradiation unit 43 with the direction appropriately set. Then, light irradiation units 43 are arranged corresponding to the plurality of irradiation areas 6. Accordingly, it becomes possible to easily realize, for example, the uniform integrated light amount configuration shown in Figure 12 and the like.

In the light blocking plates 44c and 44d shown in FIGS. 18A and 18B, a plurality of light transmission areas 45 corresponding to a plurality of irradiation areas 6 lined up along the width direction (Y direction) of the irradiation target area R are provided. It is formed. That is, the light blocking plates 44c and 44d are configured to correspond to each of the irradiation area groups 9.

In the light blocking plate 44c shown in FIG. 18A, a plurality of square light transmission areas 45 are formed to line up in one direction.

For example, the light blocking plate 44c is disposed at the exit port of the light irradiation unit 36, one of which is configured to correspond to each of the irradiation area groups 9 illustrated in FIG. 14 . Accordingly, it becomes possible to easily realize, for example, the uniform integrated light quantity configuration shown in Figure 14 and the like.

In the light blocking plate 44d shown in FIG. 18B, a plurality of hexagonal light transmission areas 45 are formed to line one direction at a predetermined pitch.

For example, as illustrated in FIG. 14 , a light blocking plate 44d is disposed at the exit port of the light irradiation unit 36, one of which is configured to correspond to each of the irradiation area groups 9. Accordingly, it becomes possible to easily realize, for example, the uniform integrated light amount configuration shown in FIG. 4 and the like.

In addition, for the plurality of irradiation areas 6, the number of light transmission areas 45 formed on one light blocking plate 44 is not limited and may be designed arbitrarily.

The light blocking plate 44 shown in FIGS. 17A, 17B, 18A and 18B is disposed corresponding to a plurality of irradiation areas 6 and is composed of one or more light blocking plates having a light transmission area of the same shape as the irradiation areas 6. It corresponds to one embodiment.

An optical component included in a plurality of light irradiation units 25 arranged corresponding to a plurality of irradiation areas 6, a plurality of lens segments ( an integrator lens 32 including 39), a rod lens whose cross-sectional shape is the same as that of the irradiation area 6, or a light blocking plate 44 having a light transmission area 45 of the same shape as the irradiation area 6. At least one of them is installed.

Accordingly, it is possible to easily shape the irradiation area 6 into the shape necessary to realize a uniform integrated light quantity configuration.

Each configuration such as light irradiation device, plural irradiation areas, integrated light quantity uniform configuration, light irradiation unit, integrator lens, light shielding plate, etc. described with reference to each drawing is an embodiment only and does not deviate from the spirit of the present technology. It can be modified arbitrarily. That is, any other configuration for implementing the present technology may be adopted.

In this disclosure, in order to facilitate understanding of the explanation, words such as “approximately,” “almost,” and “generally” are used appropriately. On the other hand, there is no clear difference between using and not using phrases such as “approximately,” “almost,” and “generally.”

That is, in the present disclosure, "center", "center", "uniform", "identical", "equal", "orthogonal", "parallel", "symmetrical", "extended", "axial direction", "cylindrical shape", "cylindrical shape", and "ring". Concepts that define shape, size, positional relationship, state, etc., such as “shape” or “ring shape,” include “substantially centered,” “substantially central,” “substantially uniform,” “substantially the same,” and “substantially the same.” “Substantially perpendicular,” “Substantially parallel,” “Substantially symmetrical,” “Substantially extended,” “Substantially axial,” “Substantially cylindrical,” “Substantially cylindrical,” “Substantially ring-shaped,” “Substantially toroidal.” It is a concept that includes etc.

For example, “completely centered,” “completely centered,” “completely uniform,” “completely identical,” “completely equal,” “completely perpendicular,” “completely parallel,” “completely symmetrical,” “completely extended,” Included within a certain range (for example, ±10% range) based on “completely axial”, “completely cylindrical shape”, “completely cylindrical shape”, “completely ring shape”, “completely toroidal shape”, etc. Status is also included.

Therefore, even when words such as “approximately,” “almost,” “generally,” etc. are not added, concepts that can be expressed by adding so-called “approximately,” “almost,” “generally,” etc. can be included. Conversely, states expressed by adding “approximately,” “almost,” “generally,” etc. do not necessarily exclude a complete state.

Therefore, in the present disclosure, the technical matter of “irradiating so that the illuminance of each of the plurality of irradiation areas is the same” includes irradiating so that the illuminance of each of the plurality of irradiation areas is substantially the same. For example, even if the illuminance of each of the plurality of irradiation areas is somewhat different, it is possible to improve the uniformity of the accumulated light amount by realizing the integrated light amount uniformity configuration newly designed by the present inventor.

In the present disclosure, expressions using “than” such as “larger than A” or “smaller than A” comprehensively include both concepts that include cases that are equivalent to A and concepts that do not include cases that are equivalent to A. It is an expression. For example, “greater than A” is not limited to the case where it does not include equal to A, but also includes “greater than A.” Additionally, “less than A” is not limited to “less than A” and also includes “less than A.”

When implementing the present technology, specific settings, etc. may be appropriately adopted in the concepts included in "larger than A" and "smaller than A" so that the effects described above are exhibited.

Among the feature parts according to the present technology described above, it is also possible to combine at least two feature parts. That is, the various features described in each embodiment may be arbitrarily combined without distinction between each embodiment. Additionally, the various effects described above are only examples and are not limited, and other effects may be exerted.

L: Light (irradiated light) O: Optical axis
P: Angular position along the width direction R: Survey target area
W: Work 1: Light irradiation device
6: Irradiation area 7: Light source section
8: Survey division 9, 23, 24, 98: Survey area group
10: Overlap area 11: First irradiation area
12: Second irradiation area 14b: Right half area
14a: left half area 15a, 15b: 1 pair of stools
17a: central area 17b: left area
17c: Right area 25, 36, 43: Light irradiation unit
29: Lamp 32: Integrator Lens
39: Lens segment 40: Exit surface of lens segment
44: light blocking plate 45: light transmission area

Claims (16)

A light irradiation device that irradiates light to an object transported along a first direction, comprising:
Light source unit,
An irradiation unit that divides the light emitted from the light source unit into a plurality of irradiation areas on the irradiation target area of the object and irradiates the light so that the illuminance of each of the plurality of irradiation areas is the same.
Equipped with
The plurality of irradiation areas are set so that the sum of distances passing through the plurality of irradiation areas is equal at each position along a second direction orthogonal to the first direction of the irradiation target area,
If any irradiation area among the plurality of irradiation areas is set as the first irradiation area,
The first irradiation area has an overlap area that overlaps with at least one other irradiation area among the plurality of irradiation areas at different positions in the first direction and overlaps each other in the second direction. is set to occur,
If the other irradiation area where the overlap area occurs with respect to the first irradiation area is considered a second irradiation area,
The first overlap area, which is the overlap area of the first irradiation area, is configured to increase in size in the first direction as it progresses in either direction in the second direction,
The second overlap area, which is the overlap area of the second irradiation area, is configured to decrease in size in the first direction as it progresses in the same direction in the second direction.
Light irradiation device. In claim 1,
The plurality of irradiation areas is set so that a irradiation area group consisting of two or more irradiation areas lined up along the second direction is arranged in multiple stages along the first direction,
Light irradiation device. In claim 2,
The plurality of irradiation areas are set so that the irradiation area group is arranged in two tiers,
Light irradiation device. The method according to any one of claims 1 to 3,
The plurality of irradiation areas have the same shape,
Light irradiation device. In claim 4,
The shape of each of the plurality of irradiation areas is a diamond shape with two diagonal directions set to follow the first direction and the second direction,
Light irradiation device. In claim 5,
Each of the plurality of irradiation areas is divided into a first divided area on the first direction side in the second direction by a diagonal line parallel to the first direction, and the first divided area in the second direction. When divided into a second division area in the second direction opposite to the first direction,
Each of the plurality of radiation areas is set so that at least one of the first divided area or the second divided area is the overlap area,
Light irradiation device. In claim 4,
The shape of each of the plurality of irradiated areas is a hexagon including a pair of opposite sides facing each other along the first direction and being parallel to the second direction.
Light irradiation device. In claim 7,
Each of the plurality of irradiated areas is divided into a central area between the pair of opposite sides, a first divided area adjacent to the first direction in the second direction with respect to the central area, and the central area. In the case where the second direction is divided into a second division area adjacent to the second direction opposite to the first direction,
Each of the plurality of radiation areas is set so that at least one of the first divided area or the second divided area is the overlap area,
Light irradiation device. In claim 6,
The plurality of irradiation areas are,
When the first overlap area of the first irradiation area is the first divided area, the second overlap area of the second irradiation area is set to be the second divided area,
When the first overlap area of the first radiation area is the second division area, the second overlap area of the second radiation area is set to be the first division area,
Light irradiation device. In claim 4,
The irradiation unit has a plurality of integrator lenses arranged corresponding to the plurality of irradiation areas and uniformizing the illuminance distribution of each of the plurality of irradiation areas,
Each of the plurality of integrator lenses includes a plurality of lenses whose emission surfaces have the same shape as the irradiation area,
Light irradiation device. In claim 4,
The irradiation unit has a plurality of rod lenses arranged corresponding to the plurality of irradiation areas and uniformizing the illuminance distribution of each of the plurality of irradiation areas,
Each of the plurality of rod lenses has a cross-sectional shape similar to that of the irradiation area,
Light irradiation device. In claim 4,
The irradiation unit includes one or more light blocking plates disposed corresponding to the plurality of irradiation areas and having a light transmission area of the same shape as the irradiation area.
Light irradiation device. The method of claim 1, further:
Provided with a plurality of light irradiation units disposed corresponding to each of the plurality of irradiation areas,
The light source unit has a plurality of light sources mounted on the plurality of light irradiation units,
The irradiation unit is mounted on the plurality of light irradiation units and has a plurality of optical components that irradiate the light emitted from the light source to a corresponding irradiation area,
Light irradiation device. In claim 13,
The optical component may include an integrator lens including a plurality of lenses whose emission surface has the same shape as the irradiation area, a rod lens whose cross-sectional shape has the same shape as the irradiation area, or an integrator lens whose shape is the same as the irradiation area. Comprising at least one light blocking plate having a light transmission area,
Light irradiation device. A light irradiation method of irradiating light to an object transported along a first direction, comprising:
A process of emitting light from a light source unit,
A process of dividing the light emitted from the light source into a plurality of irradiation areas on the irradiation target area of the object so that the illuminance of each of the plurality of irradiation areas is the same.
Including,
The plurality of irradiation areas are set so that the sum of distances passing through the plurality of irradiation areas is equal at each position along a second direction orthogonal to the first direction of the irradiation target area,
If any irradiation area among the plurality of irradiation areas is set as the first irradiation area,
The first irradiation area has an overlap area that overlaps with at least one other irradiation area among the plurality of irradiation areas at different positions in the first direction and overlaps each other in the second direction. is set to occur,
If the other irradiation area where the overlap area occurs with respect to the first irradiation area is considered a second irradiation area,
The first overlap area, which is the overlap area of the first irradiation area, is configured to increase in size in the first direction as it progresses in either direction in the second direction,
The second overlap area, which is the overlap area of the second irradiation area, is configured to decrease in size in the first direction as it progresses in the same direction in the second direction.
Light irradiation method. Comprising a process of irradiating light to a part using the light irradiation device according to claim 1,
Method of manufacturing the part.