KR20230058613A - 광학 적층체의 검사 방법 - Google Patents
광학 적층체의 검사 방법 Download PDFInfo
- Publication number
- KR20230058613A KR20230058613A KR1020237004920A KR20237004920A KR20230058613A KR 20230058613 A KR20230058613 A KR 20230058613A KR 1020237004920 A KR1020237004920 A KR 1020237004920A KR 20237004920 A KR20237004920 A KR 20237004920A KR 20230058613 A KR20230058613 A KR 20230058613A
- Authority
- KR
- South Korea
- Prior art keywords
- inspection
- optical
- inspection step
- image
- detected
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8848—Polarisation of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8858—Flaw counting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8861—Determining coordinates of flaws
Landscapes
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020145766 | 2020-08-31 | ||
JPJP-P-2020-145766 | 2020-08-31 | ||
PCT/JP2021/008857 WO2022044390A1 (fr) | 2020-08-31 | 2021-03-08 | Procédé d'inspection de stratifié optique |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20230058613A true KR20230058613A (ko) | 2023-05-03 |
Family
ID=80354891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020237004920A KR20230058613A (ko) | 2020-08-31 | 2021-03-08 | 광학 적층체의 검사 방법 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPWO2022044390A1 (fr) |
KR (1) | KR20230058613A (fr) |
CN (1) | CN115989407A (fr) |
TW (1) | TW202210879A (fr) |
WO (1) | WO2022044390A1 (fr) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003329601A (ja) | 2002-05-10 | 2003-11-19 | Mitsubishi Rayon Co Ltd | 欠陥検査装置及び欠陥検査方法 |
JP4960161B2 (ja) | 2006-10-11 | 2012-06-27 | 日東電工株式会社 | 検査データ処理装置及び検査データ処理方法 |
JP2012167975A (ja) | 2011-02-14 | 2012-09-06 | Toray Advanced Film Co Ltd | 欠陥検査方法および欠陥検査装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07311160A (ja) * | 1994-05-19 | 1995-11-28 | Nitto Denko Corp | 外観検査方法および検査装置 |
KR100749954B1 (ko) * | 2004-12-27 | 2007-08-16 | 주식회사 넥스트아이 | 편광필름의 검사방법 및 이에 적용되는 편광필름의 검사장치 |
WO2009128115A1 (fr) * | 2008-04-15 | 2009-10-22 | 日東電工株式会社 | Rouleau stratifié de film optique, et son procédé et dispositif de fabrication |
KR101082699B1 (ko) * | 2008-08-27 | 2011-11-15 | 제일모직주식회사 | 광학필름용 검사장치 |
JP5825278B2 (ja) * | 2013-02-21 | 2015-12-02 | オムロン株式会社 | 欠陥検査装置および欠陥検査方法 |
KR102191414B1 (ko) * | 2013-11-12 | 2020-12-16 | 삼성디스플레이 주식회사 | 결함 검사 장치 및 이를 이용한 결함 검사 방법 |
KR20150070621A (ko) * | 2013-12-17 | 2015-06-25 | 동우 화인켐 주식회사 | 편광 필름 결함 검출 장치 및 방법 |
JP2015225041A (ja) * | 2014-05-29 | 2015-12-14 | 住友化学株式会社 | 積層偏光フィルムの欠陥検査方法 |
CN107024482B (zh) * | 2015-12-15 | 2020-11-20 | 住友化学株式会社 | 缺陷拍摄装置及方法、膜制造装置及方法、缺陷检查方法 |
JP2018009800A (ja) * | 2016-07-11 | 2018-01-18 | 住友化学株式会社 | 欠陥検査用撮像装置、欠陥検査システム、フィルム製造装置、欠陥検査用撮像方法、欠陥検査方法、及び、フィルム製造方法 |
-
2021
- 2021-03-08 WO PCT/JP2021/008857 patent/WO2022044390A1/fr active Application Filing
- 2021-03-08 CN CN202180053420.4A patent/CN115989407A/zh active Pending
- 2021-03-08 KR KR1020237004920A patent/KR20230058613A/ko unknown
- 2021-03-08 JP JP2022545287A patent/JPWO2022044390A1/ja active Pending
- 2021-03-15 TW TW110109151A patent/TW202210879A/zh unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003329601A (ja) | 2002-05-10 | 2003-11-19 | Mitsubishi Rayon Co Ltd | 欠陥検査装置及び欠陥検査方法 |
JP4960161B2 (ja) | 2006-10-11 | 2012-06-27 | 日東電工株式会社 | 検査データ処理装置及び検査データ処理方法 |
JP2012167975A (ja) | 2011-02-14 | 2012-09-06 | Toray Advanced Film Co Ltd | 欠陥検査方法および欠陥検査装置 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2022044390A1 (fr) | 2022-03-03 |
TW202210879A (zh) | 2022-03-16 |
WO2022044390A1 (fr) | 2022-03-03 |
CN115989407A (zh) | 2023-04-18 |
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