CN115989407A - 光学层叠体的检查方法 - Google Patents

光学层叠体的检查方法 Download PDF

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Publication number
CN115989407A
CN115989407A CN202180053420.4A CN202180053420A CN115989407A CN 115989407 A CN115989407 A CN 115989407A CN 202180053420 A CN202180053420 A CN 202180053420A CN 115989407 A CN115989407 A CN 115989407A
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China
Prior art keywords
inspection
optical
inspection step
image
layered body
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Pending
Application number
CN202180053420.4A
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English (en)
Chinese (zh)
Inventor
木樽智也
山下裕司
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Nitto Denko Corp
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Nitto Denko Corp
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Publication of CN115989407A publication Critical patent/CN115989407A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8848—Polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8858—Flaw counting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws

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  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN202180053420.4A 2020-08-31 2021-03-08 光学层叠体的检查方法 Pending CN115989407A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020145766 2020-08-31
JP2020-145766 2020-08-31
PCT/JP2021/008857 WO2022044390A1 (fr) 2020-08-31 2021-03-08 Procédé d'inspection de stratifié optique

Publications (1)

Publication Number Publication Date
CN115989407A true CN115989407A (zh) 2023-04-18

Family

ID=80354891

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180053420.4A Pending CN115989407A (zh) 2020-08-31 2021-03-08 光学层叠体的检查方法

Country Status (5)

Country Link
JP (1) JPWO2022044390A1 (fr)
KR (1) KR20230058613A (fr)
CN (1) CN115989407A (fr)
TW (1) TW202210879A (fr)
WO (1) WO2022044390A1 (fr)

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07311160A (ja) * 1994-05-19 1995-11-28 Nitto Denko Corp 外観検査方法および検査装置
JP2003329601A (ja) 2002-05-10 2003-11-19 Mitsubishi Rayon Co Ltd 欠陥検査装置及び欠陥検査方法
KR100749954B1 (ko) * 2004-12-27 2007-08-16 주식회사 넥스트아이 편광필름의 검사방법 및 이에 적용되는 편광필름의 검사장치
JP4960161B2 (ja) * 2006-10-11 2012-06-27 日東電工株式会社 検査データ処理装置及び検査データ処理方法
WO2009128115A1 (fr) * 2008-04-15 2009-10-22 日東電工株式会社 Rouleau stratifié de film optique, et son procédé et dispositif de fabrication
KR101082699B1 (ko) * 2008-08-27 2011-11-15 제일모직주식회사 광학필름용 검사장치
JP2012167975A (ja) 2011-02-14 2012-09-06 Toray Advanced Film Co Ltd 欠陥検査方法および欠陥検査装置
JP5825278B2 (ja) * 2013-02-21 2015-12-02 オムロン株式会社 欠陥検査装置および欠陥検査方法
KR102191414B1 (ko) * 2013-11-12 2020-12-16 삼성디스플레이 주식회사 결함 검사 장치 및 이를 이용한 결함 검사 방법
KR20150070621A (ko) * 2013-12-17 2015-06-25 동우 화인켐 주식회사 편광 필름 결함 검출 장치 및 방법
JP2015225041A (ja) * 2014-05-29 2015-12-14 住友化学株式会社 積層偏光フィルムの欠陥検査方法
CN107024482B (zh) * 2015-12-15 2020-11-20 住友化学株式会社 缺陷拍摄装置及方法、膜制造装置及方法、缺陷检查方法
JP2018009800A (ja) * 2016-07-11 2018-01-18 住友化学株式会社 欠陥検査用撮像装置、欠陥検査システム、フィルム製造装置、欠陥検査用撮像方法、欠陥検査方法、及び、フィルム製造方法

Also Published As

Publication number Publication date
JPWO2022044390A1 (fr) 2022-03-03
TW202210879A (zh) 2022-03-16
WO2022044390A1 (fr) 2022-03-03
KR20230058613A (ko) 2023-05-03

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