KR20230041612A - Processing apparatus - Google Patents

Abstract

A processing apparatus of the present invention reduces a degree of heat transfer from a motor to an inclination adjustment mechanism or a chuck table, and an amount of processing water used. The processing apparatus comprises a holding unit for holding a workpiece, and a processing unit for processing the workpiece, wherein the holding unit includes: a chuck table having a holding surface for sucking and holding a workpiece; a motor for rotating the chuck table around a predetermined axis of rotation; a housing in which the motor is disposed in an inner space; a first pipe part for supplying air to the inner space of the housing; and a second pipe for discharging air from the space inside the housing. The processing apparatus cools the motor using air supplied from the first pipe to the housing.

Description

Processing device {PROCESSING APPARATUS}

The present invention relates to a processing apparatus including a holding unit for holding a workpiece and a processing unit for processing the workpiece.

As an example of a processing device that processes a workpiece, a grinding device that performs in-feed grinding on a workpiece is known. The grinding device has a disk-shaped chuck table for suction-holding a workpiece. Below the chuck table, a motor for rotating the chuck table around a predetermined axis of rotation is installed.

For example, a drive pulley is fixed to the output shaft of the motor, and rotation of the drive pulley is transmitted to a driven pulley fixed to the rotation shaft of the chuck table through a belt. In the manual type grinding device, a motor and a chuck table are fixed to a moving plate that can move along a predetermined direction.

For example, the motor is fixed to the side of the moving plate via a motor bracket, and the chuck table is rotatably supported on the moving plate. When the moving plate moves in the predetermined direction, both the motor and the chuck table move in the predetermined direction (see Patent Literature 1, for example).

By the way, in a grinding device that performs in-feed grinding, the holding surface of the chuck table has a conical shape in which the central portion protrudes from the outer peripheral portion, and a part of the holding surface is substantially parallel to the horizontal direction, so that the rotation axis of the chuck table is It is inclined with respect to the vertical direction.

The chuck table is rotatably supported by a cylindrical table base supported by a moving plate, and the inclination of the table base (that is, the inclination of the rotary shaft of the chuck table) is adjusted by an inclination adjusting mechanism supporting the chuck table. .

The inclination adjustment mechanism has three supporting parts arranged so as to support three different places in the circumferential direction of the table base. The three supporting parts include one fixed supporting part for fixing the vertical position of the table base with respect to the moving plate, and two movable supporting parts for changing the vertical position of the table base with respect to the moving plate.

During grinding, heat is generated due to the operation of the motor, but this heat subtly changes the support position of the table base in the vertical direction by the movable support part, so that the inclination of the rotary shaft of the chuck table changes from the preset inclination. there is a problem. In addition, there is also a problem that the generated heat is transmitted to the chuck table and the shape of the holding surface is changed.

If the inclination of the axis of rotation of the chuck table or the shape of the holding surface changes, the uniformity of the finished thickness after grinding is reduced. Therefore, a grinding device has been proposed in which the mounting position of the motor is devised so that grinding water such as pure water supplied to the contact area between the workpiece and the grinding stone is scattered during grinding and contributes to cooling of the motor (for example, patented see Literature 2).

Patent Document 1: Japanese Unexamined Patent Publication No. 2010-89234 Patent Document 2: Japanese Unexamined Patent Publication No. 2017-42875

However, when the motor is cooled by the grinding water (processing water) scattered during grinding (processing), even during the warm-up operation before grinding the workpiece, it is necessary to continuously supply the processing water to cool the motor. The amount of use increases, and as a result, the production cost increases.

The present invention has been made in view of these problems, and reduces the degree of heat transfer from the motor to the tilt adjustment mechanism or chuck table, and reduces the amount of processing water used compared to the case of cooling the motor with used processing water. aims to

According to one aspect of the present invention, a processing apparatus including a holding unit for holding a workpiece and a processing unit for processing the workpiece, wherein the holding unit includes a chuck table having a holding surface for sucking and holding the workpiece And, a motor for rotating the chuck table around a predetermined axis of rotation, a housing in which the motor is disposed in a space inside, a first pipe part for supplying air to the space inside the housing, and the space A processing apparatus having a second pipe for discharging air from the first pipe and using air supplied to the housing from the first pipe to cool the motor is provided.

Preferably, the housing has an insulating structure.

Also, preferably, the heat insulating structure has an outer wall, an inner wall, and a vacuum layer in a vacuum state that is located in a space between the outer wall and the inner wall and has a pressure lower than atmospheric pressure.

Preferably, the holding unit further includes an annular cooling plate disposed in contact with the housing and having a through hole into which an output shaft of the motor is inserted, the cooling plate cooling water through which cooling water passes. It has water channels inside.

Preferably, the holding unit further has a driving pulley mounted on an output shaft of the motor, a driven pulley mounted on the rotary shaft of the chuck table, and a belt wound around the driving pulley and the driven pulley.

In the processing apparatus according to one aspect of the present invention, the motor is cooled using air supplied to a space inside a housing in which the motor is disposed. As a result, it is possible to reduce the degree to which heat generated by the operation of the motor is transferred to the tilt adjusting mechanism or the chuck table, and to reduce the amount of processing water used compared to the case where the motor is cooled with processing water scattered during processing. there is.

1 is a perspective view of a grinding device.
2 is a partial cross-sectional side view of a holding unit including a chuck table.
3 is a top view of a chuck table and a grinding wheel.
4 is a perspective view of a holding unit.
Fig. 5(A) is a perspective view of the holding unit in a state where the housing and the bracket are separated, and Fig. 5(B) is an exploded perspective view of the housing and the bracket.
Fig. 6 is a BB cross-sectional view of Fig. 5(B).
7 is an exploded perspective view of the bracket, cooling jacket and housing.
8 is a perspective view of a holding unit according to a second embodiment.

EMBODIMENT OF THE INVENTION With reference to accompanying drawing, embodiment concerning one aspect of this invention is described. 1 is a perspective view of a grinding device (processing device) 2 for performing in-feed grinding according to a first embodiment. The grinding device 2 of the present embodiment is a so-called manual type, and the carrying in and carrying out of the workpiece 11 are performed by an operator.

1, the X-axis direction, the Y-axis direction, and the Z-axis direction (grinding feed direction) are orthogonal to each other. In this embodiment, the X-Y plane is substantially parallel to the horizontal direction, and the Z-axis direction is substantially parallel to the vertical direction.

The grinding device 2 has a substantially rectangular parallelepiped base 4 that supports the components of the grinding device 2 . On the upper surface of the base 4, a rectangular opening 4a is formed. The length of the opening 4a is arranged along the Y-axis direction. A rectangular table cover 6 is disposed in a part of the opening 4a.

On both sides of the table cover 6 in the Y-axis direction, bellows-shaped covers 6a and 6b, which can be stretched along the Y-axis direction, are provided so as to cover a part of the opening 4a. Further, on the table cover 6, a disk-shaped chuck table 8 is installed.

Here, the structure of the chuck table 8 will be described with reference to FIGS. 2 and 3 . 2 is a partial sectional side view of the holding unit 12 including the chuck table 8, and FIG. 3 is a top view of the chuck table 8 and the grinding wheel 70 (described later).

As shown in Fig. 3, the chuck table 8 has a disk-shaped frame 14a made of non-porous ceramics. A disk-shaped concave portion (not shown) is formed in the frame 14a. On the bottom surface of the concave portion, a plurality of annular grooves (not shown) arranged concentrically are formed.

Further, through holes (not shown) are formed in the frame 14a so as to pass through the centers of the plurality of annular grooves. In addition, a plurality of straight grooves (not shown) are formed on the bottom surface of the concave portion so as to form a cross shape when viewed from above, so as to connect the through hole and the plurality of annular grooves.

A pipe portion (not shown) for transmitting negative pressure from a suction source (not shown) such as an ejector or a vacuum pump is connected to the through hole of the frame 14a. Further, a substantially disk-shaped porous plate 14b made of porous ceramics is fixed to the concave portion of the frame 14a.

The bottom surface of the porous plate 14b is substantially flat, but the upper surface of the porous plate 14b has a conical shape with a central portion protruding slightly compared to the outer peripheral portion. The negative pressure generated by the suction source is transmitted to the upper surface of the porous plate 14b.

The upper surface of the porous plate 14b and the upper surface of the frame 14a are substantially the same plane, and function as a holding surface 8a for holding the workpiece 11 by suction. On the bottom surface of the chuck table 8, the upper end of the cylindrical rotary shaft 16 is fixed.

The rotating shaft 16 is rotatably supported by a disk-shaped table base 18 via an air bearing (not shown) or the like. An annular flange portion 18a is provided on the outer periphery of the bottom of the table base 18. The flange portion 18a is supported by the inclination adjustment mechanism 20 .

The inclination adjusting mechanism 20 includes a fixed support portion 20a (see Fig. 3) arranged to support three different locations in the circumferential direction of the flange portion 18a, and movable support portions 20b and 20c. As shown in Fig. 3, the fixed support portion 20a and the movable support portions 20b and 20c are arranged at substantially equal intervals along the circumferential direction of the flange portion 18a.

Each upper end of the fixed support part 20a and the movable support parts 20b and 20c is fixed to the flange part 18a (refer FIG. 2). Further, each lower end of the fixed support portion 20a and the movable support portions 20b and 20c is supported by the moving plate 22 .

The fixed support portion 20a fixes the position of the table base 18 in the Z-axis direction with respect to the moving plate 22 . In contrast, each of the movable support portions 20b and 20c can change the position of the table base 18 in the Z-axis direction with respect to the moving plate 22 .

The movable supports 20b and 20c have a screw hole disposed downward and a rod (not shown) having a male screw rotatably inserted into the screw hole. At the lower end of the rod, a driving unit (not shown) such as a pulse motor that rotates the rod is fixed.

By adjusting the insertion amount of the rod into the screw hole with the drive unit, the support position of the table base 18 in the Z-axis direction by the movable support units 20b and 20c is adjusted. By adjusting the support position of the table base 18 in the Z-axis direction, the inclination of the table base 18 (ie, the inclination of the rotating shaft 16) is adjusted.

For example, the inclination of the rotation shaft 16 is adjusted such that the upper end of the rotation shaft 16 slightly tilts to the right side of the paper in FIG. 2 . In addition, in FIG. 2, the center line 16a of the rotating shaft 16 is shown by the dashed-dot line, and the protective tape 13 attached to the surface 11a side is abbreviate|omitted.

When the workpiece 11 is suction-held on the holding surface 8a so that the back surface 11b is exposed upward in a state where the inclination of the rotating shaft 16 is adjusted, the circular arc shape of the holding surface 8a shown in FIG. A part of the back surface 11b side of the workpiece 11 corresponding to the area 8b of is ground with a grinding wheel 70 described later.

As shown in Fig. 2, the lower end of the rotary shaft 16 protrudes downward from the table base 18, and a disk-shaped driven pulley 24 made of stainless steel is attached to this lower end. Further, in the concave portion 22a formed on the bottom surface side of the moving plate 22, a rectangular parallelepiped housing 26 made of metal or the like is disposed.

The housing 26 is fixed to the movable plate 22 via a bracket 28 with external screws 28a. The housing 26 has a body portion 26a of a rectangular cylinder shape having a bottom portion. A rectangular opening 26b (see Fig. 5(B)) is formed in the upper end of the housing 26, and a flange portion 26c is provided around the opening 26b.

Inside the housing 26, a space 26d (see Fig. 5(B)) is formed. The space 26d of this embodiment has a length of 190 mm, a width of 216 mm, and a height of 200 mm. In the space 26d of this embodiment, the motor 30 (refer to FIG. 5(A)) is disposed so that the output shaft 30a is directed upward.

The outer dimensions of the motor 30 in this embodiment are 176 mm long, 176 mm wide, and 182 mm high, and the main body of the motor 30 excluding a part of the output shaft 30a is accommodated in the space 26d. In addition, the occupancy rate of the motor 30 in the space 26d is about 69%.

The upper end of the output shaft 30a of the motor 30 passes through the opening 26b of the housing 26 and the circular opening 28b formed in the central portion of the bracket 28 (see FIG. 5(B)), It protrudes upward from the upper surface of the moving plate 22 .

A disk-shaped drive pulley 30b made of metal is attached to the upper end of the output shaft 30a. The driving pulley 30b is formed of, for example, carbon steel containing 0.42% to 0.48% of carbon (referred to as S45C in Japanese Industrial Standards).

A rubber endless belt 32 is wound around the drive pulley 30b and the driven pulley 24 described above. When the motor 30 is operated, the rotation of the output shaft 30a is transmitted to the rotary shaft 16 of the chuck table 8, and the chuck table 8 rotates the rotary shaft 16 at a predetermined rotational speed of, for example, 100 rpm or more and 300 rpm or less. ) rotates around

As the motor 30 operates, heat is generated in the motor 30 . For example, although the coil of the motor 30 is made of copper, since the coil has a predetermined electrical resistance, heat is generated in the motor 30 by current passing through the coil.

When heat generated by the motor 30 is transferred to the movable support 20c, the position of the table base 18 supported by the movable support 20c in the Z-axis direction may be subtly changed. The inclination of the rotary shaft 16 of the chuck table 8 changes from the preset inclination by the subtle change of the position in the Z-axis direction.

Also, when the generated heat is transmitted to the chuck table 8, the shape of the holding surface 8a may change. Therefore, in this embodiment, as shown in FIG. 4 , the motor 30 is cooled using air (air) 34 supplied to the housing 26 .

Fig. 4 is a perspective view of the holding unit 12, Fig. 5 (A) is a perspective view of the holding unit 12 in a state where the housing 26 and the bracket 28 are separated, Fig. 5 (B) is, It is an exploded perspective view of the housing 26 and the bracket 28.

In Fig. 4 and Fig. 5 (A), the chuck table 8 is indicated by dashed-dotted lines, and the inclination adjustment mechanism 20, the moving plate 22, and the like are omitted. In addition, in FIG. 4 and FIG. 5(B), only one external screw 28a is shown representatively among the four external screws 28a attached.

To one side of the housing 26, one end of a first pipe portion 36a for supplying air 34 to the space 26d is connected. An air supply source (not shown) such as a fan for taking in and blowing external air is provided at the other end of the first pipe portion 36a. Further, instead of the fan, a dry air supply device having an air compressor, a temperature control mechanism, an air tank, and the like may be provided.

23 degreeC air 34 is supplied from the 1st pipe part 36a to the space 26d of the housing 26 at the flow rate of 100 L/min, for example. However, the flow rate and temperature are examples. To the other side of the housing 26, one end of a second pipe portion 36b for discharging the air 34 from the space 26d is connected.

The air 34 supplied from the first pipe portion 36a to the space 26d absorbs the heat of the motor 30 and then is discharged from the second pipe portion 36b to the outside of the space 26d. A relatively cool air 34 is newly supplied to the space 26d from one pipe portion 36a.

In this way, since the motor 30 can be cooled with the air 34, the extent to which heat generated by the operation of the motor 30 is transferred to the chuck table 8, the tilt adjustment mechanism 20, etc. can be reduced Further, since the motor 30 can be cooled by the air 34 even during the warm-up operation, compared to the case where the motor 30 is cooled by the grinding water (processing water) used during grinding (processing), the grinding water usage can be reduced.

As shown in Fig. 6, the body portion 26a of the housing 26 of this embodiment has a heat insulation structure. Fig. 6 is a B-B sectional view of Fig. 5(B). Specifically, the heat insulating structure includes an outer wall 40 formed of metal such as stainless steel, an inner wall 42 formed of metal such as stainless steel and disposed inside the outer wall 40, and an outer wall 40 It has a vacuum layer (44) between the inner walls (42).

The vacuum layer 44 is located in the space between the outer wall 40 and the inner wall 42, and the space is in a vacuum state with a pressure lower than atmospheric pressure. In this embodiment, the transfer of heat from the inner space 26d of the housing 26 to the outer wall 40 can be reduced compared to the case where the housing 26 does not have a heat insulating structure.

Therefore, the degree to which the heat generated by the operation of the motor 30 is transferred from the housing 26 through the moving plate 22 to the tilt adjustment mechanism 20 can be reduced compared to the case without a thermal insulation structure. . In addition, the heat insulating structure is not limited to the above example, and a metal foil made of silver or the like may be formed on the surface of the outer side of the inner wall 42 (ie, the outer wall 40 side). Alternatively, the inner wall 42 may be made of glass.

Returning to FIG. 2, the Y-axis direction movement mechanism which moves the moving plate 22 along the Y-axis direction is demonstrated. Under the moving plate 22, a pair of guide rails (not shown) are disposed along the Y-axis direction. The moving plate 22 is slidably supported on a pair of guide rails.

A nut portion (not shown) is provided on the lower surface side of the moving plate 22 . A ball screw (not shown) disposed between a pair of guide rails along the Y-axis direction is rotatably connected to the nut portion. A drive source (not shown) such as a stepping motor is connected to one end of the ball screw.

When the driving source is operated, the moving plate 22 moves along the Y-axis direction. For example, when the workpiece 11 is loaded into the chuck table 8 and when the workpiece 11 is taken out of the chuck table 8, it is located near one end of the opening 4a in the Y-axis direction. The chuck table 8 is arrange|positioned in carry-in/out area A1 (refer FIG. 1).

In addition, when performing in-feed grinding with respect to the workpiece 11 held by suction on the holding surface 8a, the chuck table ( 8) is placed. Here, returning to FIG. 1, other components of the grinding device 2 will be described.

At the other end of the opening 4a in the Y-axis direction, a rectangular parallelepiped pillar portion 46 is provided. A Z-axis direction moving unit 48 is installed on one surface (surface) of the pillar portion 46 on the side of the opening 4a. The Z-axis direction moving unit 48 has a pair of guide rails 50 disposed along the Z-axis direction.

A moving plate 52 is attached to the pair of guide rails 50 so as to be slidable along the Z-axis direction. On the back surface of the moving plate 52, a nut portion (not shown) is provided. A ball screw 54 disposed between a pair of guide rails 50 along the Z-axis direction is rotatably connected to the nut portion.

A drive source 56 such as a stepping motor is provided at the upper end of the ball screw 54 . When the drive source 56 is operated, the moving plate 52 moves along the Z-axis direction. A grinding unit (processing unit) 60 is fixed to the surface of the moving plate 52 via a holding member 58 .

When the Z-axis direction moving unit 48 moves the grinding unit 60 along the Z-axis direction, the position of the grinding unit 60 in the Z-axis direction is adjusted. The grinding unit 60 has a cylindrical spindle housing 62 whose height direction is disposed along the Z-axis direction.

In the spindle housing 62, a part of the cylindrical spindle 64 is accommodated rotatably. At the upper end of the spindle 64, a rotation drive source 66 such as a motor is provided. At the lower end of the spindle 64, an annular grinding wheel 70 is mounted via a disc-shaped mount 68.

The grinding wheel 70 has an annular wheel base 70a made of metal such as aluminum alloy. On the lower surface side of the wheel base 70a, a plurality of grinding stones 70b are arranged at substantially equal intervals along the circumferential direction of the wheel base 70a.

The grinding stone 70b is formed by mixing abrasive grains such as diamond and cBN (cubic boron nitride) with a binding material such as metal, ceramics, and resin, and then molding and firing. By the way, the operation of the grinding device 2 is controlled by a control unit (not shown).

The control unit is constituted by a computer including, for example, a processor (processing unit) represented by a CPU (Central Processing Unit), a main memory device such as DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as flash memory. there is.

The auxiliary storage device stores software including a predetermined program. By operating the processing device or the like in accordance with this software, the functions of the control unit are realized.

The workpiece 11 to be ground by the grinding device 2 is, for example, a disk-shaped wafer made of silicon or the like. On the surface 11a side of the workpiece 11, a plurality of division lines (not shown) are set in a grid pattern.

A device (not shown) such as an IC (Integrated Circuit) is formed in each area partitioned by a plurality of lines to be divided. When grinding the workpiece 11, in order to reduce damage to the device, a protective tape 13 made of resin with substantially the same diameter as the workpiece 11 is attached to the surface 11a side.

When grinding the workpiece 11, first, the chuck table 8 is placed in the carry-in/out area A1, and the surface 11a side of the workpiece 11 is suction-held via the protective tape 13. do. Subsequently, the chuck table 8 is moved to the grinding area A2.

Then, while rotating the chuck table 8 and the grinding wheel 70 in a predetermined direction, the grinding unit 60 is lowered along the Z-axis direction at a predetermined grinding feed rate. In this way, the back surface 11b side of the workpiece 11 is ground (infeed grinding).

In the case of grinding, the workpiece 11 and the grinding wheel are separated from an internal nozzle (not shown) installed on the grinding wheel 70 or an external nozzle (not shown) disposed below the grinding unit 60. Grinding water such as deionized water is supplied to the contact area of (70b). However, during the warm-up operation of the grinding device 2, grinding water is not supplied from the inner nozzle or the outer nozzle.

After grinding for a predetermined time, the grinding unit 60 is raised, and the rotation of the chuck table 8 and the grinding wheel 70 is stopped. Then, the chuck table 8 is moved from the grinding area A2 to the carry-in/out area A1, and the ground workpiece 11 is taken out of the chuck table 8.

In this embodiment, while the motor 30 for rotating the chuck table 8 is operating, the air 34 supplied to the space 26d inside the housing 26 in which the motor 30 is disposed is is used to cool the motor 30.

Accordingly, the degree to which heat generated when the motor 30 operates is transmitted to the tilt adjusting mechanism 20 or the chuck table 8 can be reduced. Also, since the motor 30 can be cooled with the air 34 even during the warm-up operation, the amount of grinding water used can be reduced compared to the case where the motor 30 is cooled with the grinding water scattered during grinding. .

In addition, since the transfer of heat from the space 26d to the outer wall 40 can be reduced compared to the case where the housing 26 does not have a heat insulating structure, the heat generated by the operation of the motor 30 is transferred to the tilt adjustment mechanism ( 20) can be reduced.

Next, a second embodiment will be described. In the second embodiment, as shown in FIG. 7 , between the bracket 28 and the flange portion 26c of the housing 26, a cooling jacket (cooling plate) 72 is placed.

7 is an exploded perspective view of the bracket 28, the cooling jacket 72, and the housing 26 of the second embodiment. In FIG. 7, as in FIG. 4, only one external screw 28a among the four external screws 28a to be attached is representatively shown.

The cooling jacket 72 is fixed to the moving plate 22 by means of four external screws 28a to be fitted to the bracket 28 and the flange portion 26c in the Z-axis direction. 8 is a perspective view of the holding unit 12 according to the second embodiment.

Also in FIG. 8 , the chuck table 8 is indicated by a chain dotted line, the tilt adjustment mechanism 20, the moving plate 22 and the like are omitted, and one external screw ( 28a) is shown representatively.

As shown in Fig. 7, a rectangular through hole 72a for inserting the output shaft 30a is formed in the center of the cooling jacket 72. Inside the cooling jacket 72, cooling water channels 72b are formed so as to go around the four sides of the through hole 72a.

To one side of the cooling jacket 72, one end of a supply pipe 74 is connected. The other end of the supply pipe 74 is connected to a constant temperature water supply source (not shown) for supplying cooling water 76 cooled to a predetermined temperature.

In addition, one end of the discharge pipe 78 is connected to the other side of the cooling jacket 72 . The other end of the discharge pipe 78 is connected to a constant temperature water supply source. The cooling water 76 supplied from the constant temperature water supply source passes through the supply pipe 74, the cooling water passage 72b and the discharge pipe 78, and returns to the constant temperature water supply source.

Since the cooling jacket 72 is in contact with the flange portion 26c, the heat transferred from the housing 26 to the bracket 28 is absorbed by the cooling water 76. Cooling water 76 that has absorbed heat is discharged from the discharge pipe 78, and instead, relatively cold cooling water 76 is newly supplied to the cooling water passage 72b from the supply pipe 74.

In this way, in the second embodiment, the motor 30 can be cooled with the cooling water 76 in addition to the air 34 supplied to the space 26d inside the housing 26 . Therefore, compared to the first embodiment, since the motor 30 can be cooled more reliably, the heat generated when the motor 30 operates is transmitted to the tilt adjustment mechanism 20 and the chuck table 8 It is possible to further reduce the amount of

In addition, since the cooling water 76 is circulated using a constant temperature supply device, the consumption amount of the grinding water is not affected. Therefore, similarly to the first embodiment, the amount of grinding water used can be reduced compared to the case where the motor 30 is cooled with the grinding water scattered at the time of grinding.

In addition, since the cooling water passage 72b is formed to go around the circumference of the four sides of the through hole 72a, the motor ( 30) can be cooled.

Therefore, compared to the case where the cooling water passage 72b is not formed on one side of the cooling jacket 72 on the side of the movable support 20c closest to the motor 30, for example, the heat to the movable support 20c is reduced. influence can be effectively suppressed.

In addition, the structure, method, etc. according to the above-described embodiment can be appropriately changed and implemented without departing from the scope of the object of the present invention. In the embodiment described above, the air supply source is disposed at the other end of the first pipe portion 36a, but a suction mechanism such as a fan is additionally installed at the other end of the second pipe portion 36b to suck the air 34. You can do it.

In the above-described embodiment, the manual type grinding device 2 has been described as the processing device, but an automatic type grinding device (not shown) in which carrying in, carrying out, cleaning, etc. of the workpiece 11 is automatically performed. ), the holding unit 12 described above may be applied.

For example, in an automatic type grinding machine having a rough grinding unit and a finish grinding unit, three chuck tables 8 are spaced at substantially equal intervals along the circumferential direction of one disk-shaped turn table (not shown). are placed as

For one chuck table 8, one motor 30 or the like is installed. However, each motor 30 is fixed not to the moving plate 22, but to the bottom side of the turntable through the bracket 28 or through the bracket 28 and the cooling jacket 72.

By the way, as another aspect of the processing device, in a polishing device having a polishing unit (processing unit) in which a disk-shaped polishing pad (not shown) is mounted on a mount 68 instead of the grinding wheel 70, the above-described holding unit (12) may be applied.

Further, as another aspect of the processing apparatus, the holding unit 12 described above may be applied to an automatic grinding and polishing apparatus having a rough grinding unit, a finish grinding unit, and a polishing unit.

In addition, as another aspect of the processing device, a bite cutting device (surface planer Also referred to as), the above-described holding unit 12 may be applied.

2: grinding device (processing device), 4: base, 4a: opening
6: table cover, 6a, 6b: bellows shape cover
8: chuck table, 8a: holding surface, 8b: area
11: Workpiece, 11a: Front, 11b: Back, 13: Protection tape
12: holding unit, 14a: frame, 14b: perforated plate, 16: rotary shaft, 16a: center line, 18: table base, 18a: flange portion
20: tilt adjustment mechanism, 20a: fixed support, 20b, 20c: movable support
22: moving plate, 22a: concave portion, 24: driven pulley
26: housing, 26a: main body, 26b: opening, 26c: flange, 26d: space
28: bracket, 28a: male thread, 28b: opening
30: motor, 30a: output shaft, 30b: driving pulley, 32: endless belt
34: air, 36a: first pipe, 36b: second pipe
40: outer wall, 42: inner wall, 44: vacuum layer, 46: column part
48: Z-axis direction moving unit, 50: guide rail, 52: moving plate, 54: ball screw
56: drive source, 58: holding member, 60: grinding unit (processing unit)
62: spindle housing, 64: spindle, 66: rotation drive source, 68: mount
70: grinding wheel, 70a: wheel base, 70b: grinding stone
72: cooling jacket (cooling plate), 72a: through hole, 72b: cooling water path
74: supply pipe, 76: cooling water, 78: discharge pipe
A1: Import/Export Area, A2: Grinding Area

Claims (5)

A processing device comprising a holding unit for holding a workpiece and a processing unit for processing the workpiece, comprising:
The maintenance unit,
a chuck table having a holding surface for sucking and holding the workpiece;
a motor for rotating the chuck table around a predetermined axis of rotation;
A housing in which the motor is disposed in an inner space;
A first pipe for supplying air to the space inside the housing;
A second pipe for discharging air from the space
have,
Characterized in that, the motor is cooled using air supplied to the housing from the first pipe. According to claim 1,
The processing apparatus, characterized in that the housing has a heat insulating structure. According to claim 2,
The processing apparatus according to claim 1 , wherein the heat insulating structure has an outer wall, an inner wall, and a vacuum layer in a vacuum state located in a space between the outer wall and the inner wall and having a pressure lower than atmospheric pressure. According to any one of claims 1 to 3,
the holding unit further has an annular cooling plate disposed in contact with the housing and having a through hole into which an output shaft of the motor is inserted;
The cooling plate is characterized in that it has a cooling water passage through which the cooling water passes, the processing device. According to any one of claims 1 to 3,
The maintenance unit,
The processing apparatus characterized by further comprising a driving pulley mounted on an output shaft of the motor, a driven pulley mounted on the rotation shaft of the chuck table, and a belt wound around the driving pulley and the driven pulley.

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