JP2023044257A - Processing device - Google Patents

Abstract

To reduce a degree of transmission of heat from a motor to an inclination adjustment mechanism and a chuck table and reduce a used amount of processing water.SOLUTION: A processing device includes: a holding unit which holds a workpiece; and a processing unit which processes the workpiece. The holding unit has: a chuck table having a holding surface which suctions and holds the workpiece; a motor for rotating the chuck table around a predetermined rotation axis; a housing in which the motor is disposed at an internal space; a first tube part for supplying air to the internal space of the housing; and a second tube part for discharging air from the internal space of the housing. Air supplied from the first tube part to the housing is utilized to cool the motor.SELECTED DRAWING: Figure 4

Description

The present invention relates to a processing apparatus including a holding unit that holds a workpiece and a processing unit that processes the workpiece.

As an example of a processing apparatus that processes a workpiece, a grinding apparatus that performs infeed grinding on the workpiece is known. The grinding device has a disc-shaped chuck table for holding the workpiece by suction. A motor for rotating the chuck table around a predetermined rotation axis is provided below the chuck table.

For example, a drive pulley is fixed to the output shaft of the motor, and the rotation of the drive pulley is transmitted to a driven pulley fixed to the rotation shaft of the chuck table via a belt. In a manual grinding apparatus, a motor and a chuck table are fixed to a moving plate that can move along a predetermined direction.

For example, the motor is fixed to the side of the moving plate via a motor bracket, and the chuck table is rotatably supported on this moving plate. When the moving plate moves in a predetermined direction, both the motor and the chuck table move in a predetermined direction (see, for example, Patent Document 1).

By the way, in a grinding apparatus that performs infeed grinding, the holding surface of the chuck table has a conical shape in which the central portion protrudes relative to the outer peripheral portion, and is arranged so that a portion of the holding surface is substantially parallel to the horizontal direction. The rotation axis of the chuck table is tilted with respect to the vertical direction.

The chuck table is rotatably supported by a cylindrical table base supported by a moving plate, and the inclination of the table base (that is, the inclination of the rotation axis of the chuck table) is adjusted by an inclination adjustment mechanism that supports the chuck table. adjusted.

The tilt adjustment mechanism has three support portions arranged to support three different points in the circumferential direction of the table base. The three support parts are one fixed support part that fixes the vertical position of the table base with respect to the moving plate, and two movable support parts that can change the vertical position of the table base with respect to the moving plate. and including.

During grinding, heat is generated due to the operation of the motor. This heat slightly changes the support position of the table base in the vertical direction by the movable support section. There is a problem that it changes from the tilt. Furthermore, there is also the problem that the generated heat is transferred to the chuck table, changing the shape of the holding surface.

If the rotation axis of the chuck table is tilted or the shape of the holding surface is changed, the in-plane uniformity of the finished thickness after grinding is reduced. Therefore, there has been proposed a grinding apparatus in which the mounting position of the motor is devised so that the grinding water such as pure water supplied to the contact area between the workpiece and the grinding wheel scatters during grinding and contributes to the cooling of the motor. (See, for example, Patent Document 2).

JP 2010-89234 A JP 2017-42875 A

However, when the motor is cooled by the grinding water (processing water) that scatters during grinding (processing), the processing water is supplied to cool the motor even during the warm-up operation before grinding the workpiece. The need to continue increases the use of process water and, as a result, increases production costs.

The present invention has been made in view of the above problems, and reduces the degree of heat transfer from the motor to the tilt adjustment mechanism and the chuck table. The purpose is to reduce the amount of

According to one aspect of the present invention, there is provided a processing apparatus including a holding unit that holds a workpiece and a processing unit that processes the workpiece, wherein the holding unit sucks and holds the workpiece. a motor for rotating the chuck table around a predetermined rotation axis; a housing in which the motor is arranged in an inner space; and a space inside the housing. It has a first tube part for supplying air and a second tube part for discharging air from the space, and uses the air supplied to the housing from the first tube part and cooling the motor.

Preferably, the housing has a heat insulating structure.

Also preferably, the insulating structure has an outer wall, an inner wall, and a vacuum layer in a vacuum state having a pressure lower than atmospheric pressure located in a space between the outer wall and the inner wall.

Preferably, the holding unit further has an annular cooling plate disposed in contact with the housing and having a through hole into which the output shaft of the motor is inserted, and the cooling is performed by cooling water. has a cooling water passage inside.

Preferably, the holding unit is wound around a drive pulley attached to the output shaft of the motor, a driven pulley attached to the rotating shaft of the chuck table, and the drive pulley and the driven pulley. and a belt.

A processing apparatus according to an aspect of the present invention cools a motor using air supplied to a space inside a housing in which the motor is arranged. This reduces the amount of heat generated by the operation of the motor that is transmitted to the tilt adjustment mechanism and chuck table, and also reduces the amount of machining water used compared to cooling the motor with the machining water that scatters during machining. can.

1 is a perspective view of a grinding device; FIG. FIG. 4 is a partial cross-sectional side view of a holding unit including a chuck table; FIG. 4 is a top view of the chuck table and grinding wheel; It is a perspective view of a holding unit. FIG. 5A is a perspective view of the holding unit with the housing and bracket removed, and FIG. 5B is an exploded perspective view of the housing and bracket. It is a BB sectional view of FIG. 5(B). 4 is an exploded perspective view of the bracket, cooling jacket and housing; FIG. FIG. 11 is a perspective view of a holding unit according to a second embodiment;

An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a grinding device (processing device) 2 for performing infeed grinding according to the first embodiment. The grinding apparatus 2 of this embodiment is of a so-called manual type, and loading and unloading of the workpiece 11 is performed by an operator.

The X-axis direction, Y-axis direction, and Z-axis direction (grinding feed direction) shown in FIG. 1 are orthogonal to each other. In this embodiment, the XY plane is substantially parallel to the horizontal direction, and the Z-axis direction is substantially parallel to the vertical direction.

The grinding device 2 has a substantially rectangular parallelepiped base 4 that supports the components of the grinding device 2 . A rectangular opening 4 a is formed in the upper surface of the base 4 . The opening 4a has its longitudinal portion arranged along the Y-axis direction. A rectangular table cover 6 is arranged in a part of the opening 4a.

On both sides of the table cover 6 in the Y-axis direction, bellows-like covers 6a and 6b that are extendable along the Y-axis direction are provided so as to partially cover the opening 4a. A disc-shaped chuck table 8 is provided on the table cover 6 .

Here, the structure of the chuck table 8 will be described with reference to FIGS. 2 and 3. FIG. 2 is a partial cross-sectional side view of holding unit 12 including chuck table 8, and FIG. 3 is a top view of chuck table 8 and grinding wheel 70 (described below).

As shown in FIG. 3, the chuck table 8 has a disk-shaped frame 14a made of non-porous ceramics. A disk-shaped recess (not shown) is formed in the frame 14a. A plurality of annular grooves (not shown) arranged concentrically are formed in the bottom surface of the recess.

Through holes (not shown) are formed in the frame body 14a so as to pass through the centers of the plurality of annular grooves. Furthermore, a plurality of linear grooves (not shown) are formed in the bottom surface of the recess so as to form a cross shape when viewed from above so as to connect the through hole and the plurality of annular grooves.

A pipe portion (not shown) for transmitting negative pressure from a suction source (not shown) such as an ejector or a vacuum pump is connected to the through hole of the frame 14a. A substantially disk-shaped porous plate 14b made of porous ceramics is fixed to the recess of the frame 14a.

The bottom surface of the porous plate 14b is substantially flat, but the top surface of the porous plate 14b has a conical shape in which the central portion protrudes slightly compared to the outer peripheral portion. Negative pressure generated by the suction source is transmitted to the upper surface of the porous plate 14b.

The upper surface of the porous plate 14b and the upper surface of the frame 14a are substantially flush with each other, and function as a holding surface 8a for holding the workpiece 11 by suction. The upper end of a cylindrical rotating shaft 16 is fixed to the bottom surface of the chuck table 8 .

The rotating shaft 16 is rotatably supported by a disk-shaped table base 18 via an air bearing (not shown) or the like. An annular flange portion 18 a is provided on the outer peripheral portion of the bottom portion of the table base 18 . The flange portion 18 a is supported by an inclination adjusting mechanism 20 .

The tilt adjustment mechanism 20 includes a fixed support portion 20a (see FIG. 3) and movable support portions 20b and 20c arranged to support three different circumferential locations of the flange portion 18a. As shown in FIG. 3, the fixed support portion 20a and the movable support portions 20b and 20c are arranged at approximately equal intervals along the circumferential direction of the flange portion 18a.

Upper ends of the fixed support portion 20a and the movable support portions 20b and 20c are fixed to the flange portion 18a (see FIG. 2). Further, each lower end portion of the fixed support portion 20a and the movable support portions 20b and 20c is supported by the moving plate 22. As shown in FIG.

The fixed support portion 20 a fixes the position of the table base 18 in the Z-axis direction with respect to the moving plate 22 . On the other hand, each of the movable support portions 20b and 20c can change the position of the table base 18 in the Z-axis direction with respect to the moving plate 22. FIG.

The movable support portions 20b and 20c have downwardly directed screw holes and rods (not shown) having male threads rotatably inserted into the screw holes. A drive unit (not shown) such as a pulse motor for rotating the rod is fixed to the lower end of the rod.

By adjusting the amount of insertion of the rod into the screw hole by the drive section, the support position of the table base 18 in the Z-axis direction by the movable support sections 20b and 20c is adjusted. By adjusting the support position of the table base 18 in the Z-axis direction, the tilt of the table base 18 (that is, the tilt of the rotating shaft 16) is adjusted.

For example, the inclination of the rotating shaft 16 is adjusted so that the upper end of the rotating shaft 16 is slightly inclined to the right side of the paper surface of FIG. In FIG. 2, the center line 16a of the rotating shaft 16 is indicated by a dashed line, and the protective tape 13 attached to the surface 11a is omitted.

When the workpiece 11 is sucked and held by the holding surface 8a so that the back surface 11b is exposed upward while the inclination of the rotating shaft 16 is adjusted, the holding surface 8a corresponds to the arc-shaped region 8b of the holding surface 8a shown in FIG. A portion of the back surface 11b side of the workpiece 11 is ground by a grinding wheel 70, which will be described later.

As shown in FIG. 2, the lower end of the rotary shaft 16 protrudes below the table base 18, and a disk-shaped driven pulley 24 made of stainless steel is attached to the lower end. . A rectangular parallelepiped housing 26 made of metal or the like is arranged in a concave portion 22a formed on the bottom side of the moving plate 22. As shown in FIG.

The housing 26 is fixed to the moving plate 22 via a bracket 28 with a male screw 28a. The housing 26 has a bottomed prismatic main body portion 26a. A rectangular opening 26b (see FIG. 5B) is formed in the upper end portion of the housing 26, and a flange portion 26c is provided around the opening 26b.

A space 26 d (see FIG. 5B) is formed inside the housing 26 . The space 26d of this embodiment has a length of 190 mm, a width of 216 mm, and a height of 200 mm. A motor 30 (see FIG. 5A) is arranged in the space 26d of the present embodiment so that the output shaft 30a faces upward.

The outer dimensions of the motor 30 in this embodiment are 176 mm long, 176 mm wide and 182 mm high, and the main body of the motor 30 excluding part of the output shaft 30a is accommodated in the space 26d. Also, the occupation rate of the motor 30 in the space 26d is approximately 69%.

The upper end of the output shaft 30a of the motor 30 passes through an opening 26b of the housing 26 and a circular opening 28b (see FIG. 5B) formed in the center of the bracket 28, It protrudes above the top surface.

A disk-shaped drive pulley 30b made of metal is attached to the upper end of the output shaft 30a. The drive pulley 30b is made of, for example, carbon steel containing 0.42% to 0.48% carbon (referred to as S45C in Japanese Industrial Standards).

An endless rubber belt 32 is wound around the drive pulley 30b and the driven pulley 24 described above. When the motor 30 is operated, the rotation of the output shaft 30a is transmitted to the rotating shaft 16 of the chuck table 8, and the chuck table 8 rotates around the rotating shaft 16 at a predetermined rotational speed of, for example, 100 rpm or more and 300 rpm or less.

As the motor 30 operates, heat is generated in the motor 30 . For example, although the coils of the motor 30 are made of copper, the coils have a predetermined electrical resistance, so the motor 30 generates heat due to the current flowing through the coils.

When the heat generated by the motor 30 is transferred to the movable support portion 20c, the position of the table base 18 supported by the movable support portion 20c in the Z-axis direction may slightly change. A subtle change in the position in the Z-axis direction causes the inclination of the rotating shaft 16 of the chuck table 8 to change from the preset inclination.

Furthermore, when the generated heat is transferred to the chuck table 8, the shape of the holding surface 8a may change. Therefore, in this embodiment, as shown in FIG. 4, the motor 30 is cooled using air 34 supplied to the housing 26 .

4 is a perspective view of the holding unit 12, FIG. 5A is a perspective view of the holding unit 12 with the housing 26 and the bracket 28 removed, and FIG. and an exploded perspective view of a bracket 28. FIG.

4 and 5A, the chuck table 8 is indicated by a two-dot chain line, and the tilt adjusting mechanism 20, the moving plate 22, and the like are omitted. 4 and 5B, only one male screw 28a is representatively shown among the four male screws 28a to be mounted.

One end of a first tube portion 36a that supplies air 34 to the space 26d is connected to one side surface of the housing 26. As shown in FIG. The other end of the first tube portion 36a is provided with an air supply source (not shown) such as a fan that takes in and blows external air. A dry air supply device having an air compressor, a temperature control mechanism, an air tank, etc. may be provided instead of the fan.

Air 34 at 23° C. is supplied from the first tube portion 36 a to the space 26 d of the housing 26 at a flow rate of, for example, 100 L/min. However, the flow rate and temperature are examples. One end of a second tube portion 36b for discharging the air 34 from the space 26d is connected to the other side surface of the housing 26. As shown in FIG.

The air 34 supplied from the first pipe portion 36a to the space 26d absorbs the heat of the motor 30, is discharged from the second pipe portion 36b to the outside of the space 26d, and is instead discharged from the first pipe portion 36a to the outside of the space 26d. Relatively cool air 34 is newly supplied to the space 26d.

Since the motor 30 can be cooled by the air 34 in this manner, the heat generated by the operation of the motor 30 can be reduced in transmission to the chuck table 8, the tilt adjusting mechanism 20, and the like. In addition, since the motor 30 can be cooled by the air 34 even during warm-up operation, the amount of grinding water used can be reduced compared to the case where the motor 30 is cooled by the grinding water (processing water) used during grinding (processing).

As shown in FIG. 6, the body portion 26a of the housing 26 of this embodiment has a heat insulating structure. FIG. 6 is a cross-sectional view taken along line BB of FIG. 5(B). Specifically, the heat insulating structure includes an outer wall 40 made of metal such as stainless steel, an inner wall 42 made of metal such as stainless steel and disposed inside the outer wall 40, and the outer wall 40 and the inner wall 42. and a vacuum layer 44 therebetween.

A vacuum layer 44 is located in the space between the outer wall 40 and the inner wall 42, the space being in a vacuum having a pressure less than atmospheric pressure. In this embodiment, the heat transfer from the space 26d inside the housing 26 to the outer wall 40 can be reduced compared to the case where the housing 26 does not have a heat insulating structure.

Therefore, the degree of transmission of heat generated by the operation of the motor 30 from the housing 26 to the tilt adjusting mechanism 20 via the moving plate 22 can be reduced compared to the case without the heat insulating structure. The heat insulating structure is not limited to the above example, and a metal foil made of silver or the like may be provided on the outer surface of the inner wall 42 (that is, the outer wall 40 side). Alternatively, the inner wall 42 may be made of glass.

Returning to FIG. 2, the Y-axis direction moving mechanism for moving the moving plate 22 along the Y-axis direction will be described. A pair of guide rails (not shown) are arranged along the Y-axis direction below the moving plate 22 . The moving plate 22 is slidably supported on a pair of guide rails.

A nut portion (not shown) is provided on the lower surface side of the moving plate 22 . A ball screw (not shown) disposed between a pair of guide rails along the Y-axis direction is rotatably connected to the nut portion. A drive source (not shown) such as a stepping motor is connected to one end of the ball screw.

When the driving source is operated, the moving plate 22 moves along the Y-axis direction. For example, when the workpiece 11 is loaded into the chuck table 8 and when the workpiece 11 is unloaded from the chuck table 8, the loading/unloading area A1 (see FIG. 1) located near one end of the opening 4a in the Y-axis direction. ), the chuck table 8 is arranged.

When performing infeed grinding on the workpiece 11 sucked and held by the holding surface 8a, the chuck table 8 is arranged in the grinding area A2 located near the other end of the opening 4a in the Y-axis direction. . Here, returning to FIG. 1, other components of the grinding device 2 will be described.

A rectangular parallelepiped column portion 46 is provided at the other end portion of the opening 4a in the Y-axis direction. A Z-axis direction moving unit 48 is provided on one surface (surface) of the column portion 46 on the opening 4a side. The Z-axis direction movement unit 48 has a pair of guide rails 50 arranged along the Z-axis direction.

A moving plate 52 is attached to the pair of guide rails 50 so as to be slidable along the Z-axis direction. A nut portion (not shown) is provided on the rear surface of the moving plate 52 . A ball screw 54 arranged between a pair of guide rails 50 along the Z-axis direction is rotatably connected to the nut portion.

A drive source 56 such as a stepping motor is provided at the upper end of the ball screw 54 . When the driving source 56 is operated, the moving plate 52 moves along the Z-axis direction. A grinding unit (processing unit) 60 is fixed to the surface of the moving plate 52 via a holding member 58 .

The position of the grinding unit 60 in the Z-axis direction is adjusted by moving the grinding unit 60 along the Z-axis direction by the Z-axis direction moving unit 48 . The grinding unit 60 has a cylindrical spindle housing 62 whose height direction is arranged along the Z-axis direction.

A portion of a cylindrical spindle 64 is rotatably accommodated within the spindle housing 62 . A rotational drive source 66 such as a motor is provided at the upper end of the spindle 64 . An annular grinding wheel 70 is attached to the lower end of the spindle 64 via a disk-shaped mount 68 .

The grinding wheel 70 has an annular wheel base 70a made of metal such as an aluminum alloy. A plurality of grinding wheels 70b are arranged at substantially equal intervals along the circumferential direction of the wheel base 70a on the lower surface side of the wheel base 70a.

The grinding wheel 70b is formed, for example, by mixing abrasive grains such as diamond, cBN (cubic boron nitride), etc. with a binding material such as metal, ceramics, resin, etc., and then molding and firing the mixture. By the way, the operation of the grinding device 2 is controlled by a control unit (not shown).

The control unit is, for example, a processor (processing device) represented by a CPU (Central Processing Unit), a main memory device such as a DRAM (Dynamic Random Access Memory), and an auxiliary memory device such as a flash memory. It is configured.

Software including a predetermined program is stored in the auxiliary storage device. The functions of the control unit are realized by operating the processor and the like according to this software.

A workpiece 11 to be ground by the grinding device 2 is, for example, a disk-shaped wafer made of silicon or the like. On the surface 11a side of the workpiece 11, a plurality of dividing lines (not shown) are set in a grid pattern.

A device (not shown) such as an IC (Integrated Circuit) is formed in each region partitioned by a plurality of planned dividing lines. When the workpiece 11 is ground, a protective tape 13 having substantially the same diameter as the workpiece 11 and made of resin is attached to the front surface 11a in order to reduce damage to the device.

When grinding the workpiece 11, first, the chuck table 8 is arranged in the carry-in/carry-out area A1, and the surface 11a side of the workpiece 11 is suction-held via the protective tape 13. FIG. Next, the chuck table 8 is moved to the grinding area A2.

Then, while rotating the chuck table 8 and the grinding wheel 70 in predetermined directions, the grinding unit 60 is lowered along the Z-axis direction at a predetermined grinding feed rate. Thereby, the back surface 11b side of the workpiece 11 is ground (infeed grinding).

During grinding, an internal nozzle (not shown) provided on the grinding wheel 70 or an external nozzle (not shown) arranged at the bottom of the grinding unit 60 is applied to the contact area between the workpiece 11 and the grinding wheel 70b. Grinding water such as pure water is supplied to the However, during the warm-up operation of the grinding device 2, no grinding water is supplied from the internal nozzle or the external nozzle.

After grinding for a predetermined time, the grinding unit 60 is lifted and the rotation of the chuck table 8 and grinding wheel 70 is stopped. Then, the chuck table 8 is moved from the grinding area A2 to the loading/unloading area A1, and the workpiece 11 after grinding is taken out from the chuck table 8. FIG.

In this embodiment, while the motor 30 that rotates the chuck table 8 is operating, the motor 30 is cooled using the air 34 that is supplied to the space 26d inside the housing 26 in which the motor 30 is arranged. do.

As a result, the heat generated by the operation of the motor 30 is less likely to be transmitted to the tilt adjustment mechanism 20 and the chuck table 8 . In addition, since the motor 30 can be cooled by the air 34 even during warm-up operation, the amount of grinding water used can be reduced compared to the case where the motor 30 is cooled by the grinding water that scatters during grinding.

In addition, compared to the case where the housing 26 does not have a heat insulating structure, the heat transfer from the space 26d to the outer wall 40 can be reduced. can be reduced.

Next, a second embodiment will be described. In the second embodiment, as shown in FIG. 7, a rectangular annular cooling jacket (cooling plate) is provided between the bracket 28 and the flange portion 26c of the housing 26 when viewed from above and in the shape of a thin plate when viewed from the side. 72 is placed.

FIG. 7 is an exploded perspective view of the bracket 28, cooling jacket 72 and housing 26 according to the second embodiment. As in FIG. 4, FIG. 7 representatively shows only one male screw 28a out of four attached male screws 28a.

The cooling jacket 72 is fixed to the moving plate 22 by four male screws 28a in such a manner that it is sandwiched between the bracket 28 and the flange portion 26c in the Z-axis direction. FIG. 8 is a perspective view of the holding unit 12 according to the second embodiment.

Also in FIG. 8, the chuck table 8 is indicated by a chain double-dashed line, and the inclination adjusting mechanism 20, the moving plate 22, etc. are omitted. shown in

As shown in FIG. 7, a rectangular through hole 72a for inserting the output shaft 30a is formed in the central portion of the cooling jacket 72. As shown in FIG. A cooling water passage 72b is formed inside the cooling jacket 72 so as to surround the four sides of the through hole 72a.

One end of a supply pipe 74 is connected to one side surface of the cooling jacket 72 . A constant water supply source (not shown) for supplying cooling water 76 cooled to a predetermined temperature is connected to the other end of the supply pipe 74 .

One end of a discharge pipe 78 is connected to the other side surface of the cooling jacket 72 . The other end of the discharge pipe 78 is connected to a constant temperature water supply source. Cooling water 76 supplied from a constant temperature water supply source passes through a supply pipe 74, a cooling water passage 72b and a discharge pipe 78, and returns to the constant temperature water supply source.

Since the cooling jacket 72 is in contact with the flange portion 26c, the heat transferred from the housing 26 to the bracket 28 is absorbed by the cooling water 76. As shown in FIG. The cooling water 76 that has absorbed the heat is discharged from the discharge pipe 78, and instead, relatively cold cooling water 76 is newly supplied from the supply pipe 74 to the cooling water passage 72b.

Thus, in the second embodiment, the motor 30 can be cooled by the cooling water 76 in addition to the air 34 supplied to the space 26 d inside the housing 26 . Therefore, since the motor 30 can be cooled more reliably than in the first embodiment, the heat generated by the operation of the motor 30 can be further reduced to the degree of transmission to the tilt adjustment mechanism 20 and the chuck table 8. .

In addition, since the cooling water 76 is circulated using a constant temperature supply device, it does not affect the consumption of grinding water. Therefore, as in the first embodiment, the amount of grinding water used can be reduced compared to the case where the motor 30 is cooled by the grinding water that scatters during grinding.

Furthermore, since the cooling water passage 72b is formed so as to circulate around the four sides of the through hole 72a, compared to the case where the cooling water passage 72b is formed only on two or three sides of the through hole 72a, the motor is more reliably cooled. 30 can be cooled.

Therefore, for example, compared to the case where the cooling water passage 72b is not formed on one side of the cooling jacket 72 on the side of the movable support 20c closest to the motor 30, the influence of heat on the movable support 20c can be effectively suppressed.

In addition, the structures, methods, and the like according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention. In the above-described embodiment, the air supply source is arranged at the other end of the first pipe portion 36a. may be aspirated.

Further, in the above-described embodiment, the manual grinding device 2 was described as the processing device. A holding unit 12 as described above may be applied.

For example, in an automatic grinding apparatus having a rough grinding unit and a finish grinding unit, three chuck tables 8 are arranged at approximately equal intervals along the circumferential direction of one disk-shaped turntable (not shown). be done.

One motor 30 or the like is provided for one chuck table 8 . However, each motor 30 is fixed not to the moving plate 22 but to the bottom side of the turntable via the bracket 28 or via the bracket 28 and the cooling jacket 72 .

By the way, as another aspect of the processing apparatus, a polishing apparatus having a polishing unit (processing unit) in which a disk-shaped polishing pad (not shown) is mounted on a mount 68 instead of the grinding wheel 70 is provided with the holding unit 12 described above. may apply.

As still another aspect of the processing apparatus, the above-described holding unit 12 may be applied to an automatic grinding and polishing apparatus having a rough grinding unit, a finish grinding unit, and a polishing unit.

Further, as still another aspect of the processing apparatus, a tool cutting apparatus (also called a surface planer) having a tool unit (processing unit) in which a cutting tool (not shown) such as a tool wheel (not shown) is attached to a mount 68 instead of the grinding wheel 70. ), the holding unit 12 described above may be applied.

2: Grinding device (processing device), 4: Base, 4a: Opening 6: Table cover, 6a, 6b: Accordion-shaped cover 8: Chuck table, 8a: Holding surface, 8b: Area 11: Workpiece, 11a: Front surface 11b: Back surface 13: Protective tape 12: Holding unit 14a: Frame body 14b: Porous plate 16: Rotating shaft 16a: Center line 18: Table base 18a: Flange 20: Tilt adjustment mechanism 20a: fixed support portion, 20b, 20c: movable support portion 22: moving plate, 22a: concave portion, 24: driven pulley 26: housing, 26a: body portion, 26b: opening, 26c: flange portion, 26d: space 28: Bracket 28a: Male screw 28b: Opening 30: Motor 30a: Output shaft 30b: Driving pulley 32: Endless belt 34: Air 36a: First tube 36b: Second tube 40: Outer wall 42: Inner wall, 44: Vacuum layer, 46: Column 48: Z-axis movement unit, 50: Guide rail, 52: Movement plate, 54: Ball screw 56: Drive source, 58: Holding member, 60: Grinding unit ( processing unit)
62: Spindle housing, 64: Spindle, 66: Rotation drive source, 68: Mount 70: Grinding wheel, 70a: Wheel base, 70b: Grinding wheel 72: Cooling jacket (cooling plate), 72a: Through hole, 72b: Cooling Water channel 74: supply pipe, 76: cooling water, 78: discharge pipe A1: loading/unloading area, A2: grinding area

Claims (5)

A processing apparatus comprising a holding unit that holds a workpiece and a processing unit that processes the workpiece,
The holding unit is
a chuck table having a holding surface for sucking and holding the workpiece;
a motor for rotating the chuck table around a predetermined rotation axis;
a housing in which the motor is arranged in an inner space;
a first tube for supplying air to the space inside the housing;
a second tube for exhausting air from the space;
has
A processing apparatus, wherein the motor is cooled using air supplied from the first pipe portion to the housing. 2. The processing apparatus according to claim 1, wherein said housing has a heat insulating structure. 3. The insulating structure of claim 2, wherein the insulating structure comprises an outer wall, an inner wall, and a vacuum layer in a vacuum state having a pressure lower than atmospheric pressure located in a space between the outer wall and the inner wall. processing equipment. the holding unit further has an annular cooling plate disposed in contact with the housing and having a through hole into which the output shaft of the motor is inserted;
4. The processing apparatus according to any one of claims 1 to 3, wherein the cooling plate has therein a cooling water passage through which cooling water passes. The holding unit is
The apparatus further comprises a drive pulley attached to the output shaft of the motor, a driven pulley attached to the rotating shaft of the chuck table, and a belt wound around the drive pulley and the driven pulley. The processing apparatus according to any one of claims 1 to 4.

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