KR20230012795A - X-ray inspection apparatus equipped with large-diameter direct drive motor - Google Patents

Abstract

The present invention relates to an X-ray inspection apparatus equipped with a large-diameter direct drive motor, comprising: an X-ray tube; a stage into which an X-ray irradiated from the X-ray tube is incident, and in which an inspection target is settled on an upper side; a stage rotation motor installed on a lower side or an upper side of the stage and rotating the stage; and a detector installed on a lower side or an upper side of the stage and capturing an X-ray image passing through the stage and acquiring digital data based on the image. The stage rotation motor has a hollow part. As a rotation ring surrounding the hollow part rotates and makes the stage rotate, the stage is freely rotated so that the inspection target can be photographed from a variety of angles. However, the X-ray passing through the stage does not interfere with an instrument rotating the stage at all, but a high-resolution image can be provided to the detector.

Description

X-ray inspection apparatus equipped with large-diameter direct drive motor}

The present invention relates to an X-ray inspection apparatus using X-rays, and more particularly to an X-ray inspection apparatus in which a large-diameter direct drive motor is installed.

Recently, a technology in which X-ray inspection equipment is used in a semiconductor process to perform a total inspection of semiconductor devices is a trend that is widely used. This is because the property of X-rays penetrating objects is used to enable non-destructive inspection. Therefore, it becomes possible to inspect defects inside semiconductors that cannot be seen with an optical microscope.

However, as shown in FIG. 1, in the X-ray inspection device, X-rays that pass through the semiconductor device, which is an object to be inspected, are placed on the stage and the semiconductor device as an image on the detector, and the detector captures the image of the semiconductor device in the form of digital information. Higher resolution images can be obtained only when the interference of other objects between the detectors is excluded.

However, there are two difficulties with this. First, since a motor or moving unit for rotating or moving the stage must be installed at the lower part of the stage, if the X-rays have to pass through the motor or moving unit while passing through the stage, the resolution is reduced.

Second, in order to overcome the problem of resolution deterioration while passing through the motor, mechanisms such as a motor that changes the stage causing interference of X-rays as in the prior art shown in FIG. 1 are excluded, and the detector only follows three-dimensional coordinates. Since it must move freely, a lot of cost is inevitably required in that a mechanism for freely moving along three-dimensional coordinates must be installed.

Therefore, while the stage can be rotated or moved so that the inspection target can be photographed from various angles more freely, X-rays can reach the detector without any interference with the mechanism that changes the stage and obtain high-resolution images this is requested

Registered Patent Publication No. 10-2081594 (published date: 2019. 11. 07)

Therefore, the present invention has a means and structure capable of providing a high-resolution image to a detector without any interference with a mechanism that changes the stage, while the stage is variable so that the object to be inspected can be photographed from various angles. It is intended to provide an X-ray inspection device.

An X-ray inspection apparatus according to the present invention for achieving this object is an X-ray tube for generating X-rays with applied power and radiating them to the outside, and a stage on which an X-ray irradiated from the X-ray tube is incident and on which an object to be inspected is seated. And, a stage rotation motor installed below the stage to rotate the stage, and a detector installed on the opposite side of the X-ray tube around the stage to capture an X-ray image passing through the stage and obtain digital data, The stage rotation motor has a hollow, and rotates the stage while rotating a rotating ring surrounding the hollow.

There are two embodiments of mutual arrangement of the X-ray tube, stage, and detector as follows.

In the first embodiment, the X-ray tube is preferably installed on the upper part of the stage, the detector is installed on the lower part of the stage, and the X-rays emitted from the X-ray tube are connected to the object to be inspected seated on the upper part of the stage and the detector. This is an embodiment in which an image of an object to be inspected may be formed on the detector by passing through the hollow of the stage and the stage rotation motor installed below the stage.

In a second embodiment, the X-ray tube is installed on the lower part of the stage, the detector is installed on the upper part of the stage, and the X-rays emitted from the X-ray tube are connected to the object to be inspected seated on the upper part of the stage and the stage. This is an embodiment in which an image of an object to be inspected is formed on the detector by passing through the hollow of the stage rotation motor installed below the stage.

In both of the above embodiments, the detector includes a detector moving unit that moves the detector to capture an image of X-rays passing through an object to be inspected among a plurality of objects to be inspected seated on the stage. can be installed

At this time, the detector moving unit preferably includes a detector rail, which is a guide rail along which the detector is moved, a detector gliding motor that slides and moves the detector along the detector rail, and a motor installed below the detector rail to rotate the detector rail. It can be made of a rail rotation motor.

Here, the detector rail may be formed in a circular arc shape that is preferably curved toward the stage and convex in a direction opposite to the stage.

In addition, the size of the hollow may be formed such that all of the X-rays connecting the tube and the detector can be contained in the hollow within the moving range of the detector.

In the X-ray inspection apparatus according to the present invention, while a variable mechanism for rotating or moving the stage is installed so that the object to be inspected can be photographed at various angles, X-rays passing through the stage do not interfere with the mechanism for varying the stage, and the detector has a high resolution. There is an effect that the image of can be provided.

1 is a front cross-sectional view of an X-ray inspection device according to the prior art;
2a is a conceptual diagram of an X-ray inspection apparatus according to the present invention;
2B is a plan view showing an embodiment of the stage rotation motor of FIG. 2A;
3a and 3b are conceptual diagrams illustrating a further embodiment of FIG. 2a;
4a and 4b are configuration diagrams showing two embodiments of relative positions of the tube and the detector in FIG. 2a and an embodiment of the detector driving module;

Specific structural or functional descriptions presented in the embodiments of the present invention are merely exemplified for the purpose of explaining embodiments according to the concept of the present invention, and embodiments according to the concept of the present invention may be implemented in various forms. In addition, it should not be construed as being limited to the embodiments described in this specification, and should be understood to include all modifications, equivalents, or substitutes included in the spirit and scope of the present invention.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 2A, the X-ray inspection apparatus according to the present invention includes an X-ray tube 10 generating X-rays with applied power and radiating them to the outside, and X-rays R emitted from the X-ray tube 10 are incident. , the stage 50 on which the object G to be inspected is seated, the stage rotation motor 51 installed below the stage 50 to rotate the stage 50, and the X-ray with the stage 50 as a standard A detector 60 installed on the opposite side of the tube 10 captures an X-ray (R) image passing through the stage 50 and obtains digital data.

In particular, the stage rotation motor 51 has a hollow 512 formed therein, as shown in FIGS. 2A and 2B , and rotates the stage 50 while rotating a rotating ring 511 surrounding the hollow 512 .

Here, the stage rotation motor 51 in which the hollow 512 is formed may be a direct drive motor (DD motor) in which a large-diameter hollow is formed, as shown in the photo of FIG. 2B.

When such a large-diameter direct drive motor is installed, it is much easier to precisely maintain the stage 50 horizontally than a motor installed in general semiconductor inspection equipment that rotates with a central shaft, and in particular, the stage 50 Due to the motor installed to rotate, the X-rays R passing through the stage 50 interfere with the stage rotation motor 51 or the stage moving unit 52 before reaching the detector 60, so that the resolution of the X-rays R is reduced. degradation can be prevented.

In addition, conventionally, in order to eliminate the problem of deteriorating resolution by causing interference of X-rays (R), such as a stage rotation motor, x, y, A z-axis moving mechanism had to be installed, which inevitably requires considerable cost, but in the X-ray inspection device according to the present invention, a large-diameter direct drive motor is adopted so that the X-rays (R) can pass through the hollow and reach the detector 60 So these problems can be solved.

Here, in order to freely set the angle of the object to be inspected (G) and the X-ray (R) irradiated from the X-ray tube (10), the stage (50) is moved horizontally by a sliding or rotating motion as shown in FIG. 3A, or as shown in FIG. 3B Similarly, there may be two embodiments in which the stage 50 is moved up and down and the X-ray tube 10 is moved in a horizontal direction.

In this case, a tube moving unit 12 for moving the X-ray tube 10 in parallel may be installed in the X-ray tube 10 as shown in FIG. 3B. Since this tube moving unit 12 only needs to move horizontally, it can have a much simpler structure than a conventional mechanism for moving an X-ray tube three-dimensionally, and can be installed at low cost.

In both the embodiment of FIG. 3A or the embodiment of FIG. 3B , in the detector 60 , the X-rays (R ), detector moving units 61, 62, 63, 161, 162, 163 that move the detector 60 may be installed as shown in FIG. 4a or 4b to capture an image of ).

The detector moving units 61, 62, 63, 161, 162, and 163 are more specifically, as shown in FIG. 4A, the detector rail 61, which is a guide rail along which the detector 60 is moved, and the detector 60 along the detector rail 61. It may include a detector sliding motor 62 that slides and moves.

For reference, FIGS. 3A and 3B show a combination of a method of varying the stage 50, a method of varying the stage 50 and the stage rotation motor 51 together, and a method of varying the X-ray tube 10. Two examples are shown. In this case, the common point in FIGS. 3A and 3B is that the stage moving unit 52 is a mechanism that independently changes the stage 10 in a horizontal sliding form while the stage rotation motor 51 is stopped. The variable mechanism of the detector will be described later.

The first embodiment according to FIG. 3A is a type in which a mechanism for changing the stage 50 and the stage rotation motor 51 integrally along a three-dimensional coordinate axis is installed. In this embodiment, a separate variable mechanism is not installed in the X-ray tube 10, and the X-ray tube 10 remains stationary.

In the second embodiment according to FIG. 3B, the X-ray tube 10 is movable in the horizontal direction, and the stage 50 and the stage rotation motor 51 are variable only in the vertical direction.

In this case, the moving base 20 shown in FIG. 2A moves the stage 500 and the stage rotation motor 51 integrally up and down, that is, along the Z-axis, in FIG. 3B, and rotates the stage 50 and the stage in FIG. 3A. The motor 51 can move integrally in a three-dimensional space along the X, Y, and Z axes.

In addition, the detector moving unit to be described below is applied only to the embodiment of FIG. 3A, and in FIG. 3B, the detector 60 does not move in an arc shape, but only moves horizontally or may be fixed at a certain position.

According to the embodiment of FIG. 3A , as shown in FIG. 4A , a rail rotation motor 63 for rotating the detector rail 61 by 360 degrees may be installed at the lower center of the detector rail 61 .

At this time, the detector rail 61 may be formed in a shape curved toward the stage 50, that is, formed in a convex circular arc shape toward the bottom. As a result, the X-rays R passing through the object G and the stage 50 can be captured by the detector 60 in all directions, and since the detector rail 61 is formed in an arc shape, the distance between the tube and the detector is It is maintained constant so that the magnification can be stably maintained.

And, as shown in FIGS. 2A to 2C, the size of the hollow 512 formed in the large-diameter direct drive motor adopted as the stage rotation motor 51 is the size of all inspection objects G seated on the upper part of the stage 50. For this, all X-rays R simultaneously incident on the object G and the detector 60 may have a size that can be contained in the hollow 512 .

At this time, the detector 60 is also movable to virtually any point in the hemispherical shape as shown in FIG. 4A, and the stage moving unit 52 can horizontally slide the stage 52 between the stage 50 and the stage rotation motor 51. ) is provided and can be relatively variable, so even if the semiconductor element, which is the object G to be inspected, is located anywhere on the upper surface of the stage 50, the X-rays R can pass through the hollow 512, so that the stage rotation motor 51 The problem of X-ray (R) interference caused by the can be prevented.

In addition, the size of the hollow 512 should be formed such that all of the X-rays R connecting the X-ray tube 10 and the detector 60 can be contained in the hollow 512 within the moving range of the detector 60. ..

On the other hand, there may be two embodiments of the mutual arrangement relationship between the X-ray tube 10, the stage 50, and the detector 60.

As shown in FIG. 4A , the first embodiment is an embodiment in which the X-ray tube 10 is installed above the stage 50 and the detector 60 is installed below the stage 50 .

In the second embodiment, as shown in FIG. 4B, based on the stage 150, the X-ray tube 110 is installed below the stage 150 and the detector 160 is installed above the stage 150 Yes. However, even in this case, for reference, the stage rotation motor 151 is installed below the stage 150 .

In both of the above embodiments, a large-diameter direct drive motor, which is the stage rotation motor 151, is installed below the stage 150. The reason why these two embodiments are possible is that all of the X-rays (R) that can enter the detector 160 among the X-rays (R) passing through the object (G) of the size of the hollow (1512) can pass through the inside of the hollow (1512). to be.

In particular, based on the stage 50, when the X-ray tube 110 is installed at the bottom of the stage 150 and the detector 160 is installed at the top of the stage 150, the large-diameter direct drive motor operates at the bottom of the stage 150. By being installed in, the hollow 1512 and the X-ray tube 110 can approach more closely.

Therefore, in this case, there is a special effect that the angle at which the X-rays R emitted from the X-ray tube 10 can be incident to the object G and the detector 60 without interference can be further expanded.

The present invention described above is not limited by the foregoing embodiments and the accompanying drawings, and various substitutions, modifications, and changes are possible within a range that does not deviate from the technical spirit of the present invention. will be clear to those who have knowledge of

G: Object to be inspected R: X-ray
10,110: X-ray tube 12: tube moving unit
20: mobile base 50,150: stage
51,151: stage rotation motor 52,152: stage moving unit
60,160: detector 61,161: detector rail
62,162: detector sliding motor 63,163: rail rotation motor
77: inner frame 511, 1511: rotating ring
512,1512: hollow

Claims (5)

an X-ray tube generating X-rays with applied power and radiating them to the outside;
a stage on which X-rays irradiated from the X-ray tube are incident and on which an object to be inspected is seated;
a stage rotation motor installed under the stage to rotate the stage;
A detector installed on the opposite side of the X-ray tube centered on the stage to capture an X-ray image passing through the stage and obtain digital data,
The stage rotation motor is an X-ray inspection apparatus, characterized in that the hollow is formed, and the rotating ring surrounding the hollow rotates the stage while rotating. According to claim 1,
The X-ray tube is installed on the upper part of the stage, the detector is installed on the lower part of the stage, and the X-ray emitted from the X-ray tube is connected to the object to be inspected seated on the stage, the stage, and the stage installed on the lower part of the stage. An X-ray inspection apparatus, characterized in that the image of the object to be inspected is formed on the detector by passing through the hollow of the rotation motor. According to claim 1,
The X-ray tube is installed at the lower part of the stage, the detector is installed at the upper part of the stage, and the X-rays emitted from the X-ray tube are connected to the object to be inspected seated on the stage, the stage, and the stage installed below the stage. An X-ray inspection apparatus, characterized in that the image of the object to be inspected is formed on the detector by passing through the hollow of the rotation motor. According to claim 2 or 3,
X-ray inspection characterized in that the detector moving unit for moving the detector to capture the image of the X-rays passing through the object to be inspected among the plurality of objects to be inspected seated on the upper part of the stage is installed on the detector. Device. According to claim 4,
The size of the hollow is an X-ray inspection device, characterized in that formed in a size that can be contained in all of the X-rays connecting the tube and the detector within the movement range of the detector.

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