KR102081594B1 - X-ray inspection apparatus - Google Patents

Abstract

An industrial x-ray inspection apparatus is disclosed. The disclosed x-ray inspection apparatus includes an x-ray tube; A detector arranged to be movable in the X-, Y-, and Z-axis directions and having an angle change; And an inspection table disposed between the X-ray tube and the detector to be movable in the X-axis and Y-axis directions.

Description

X-ray inspection apparatus

The present invention relates to an x-ray inspection apparatus, and more particularly, to an x-ray inspection apparatus that can improve the inspection convenience of the user by increasing the degree of freedom of the position and angle change of the detector.

In general, a small electronic component such as a ball grid array (BGA) or a chip scale package (CSP) is mounted on an inspected object, that is, a printed circuit board (PCB), which is embedded as a main component of an electrical and electronic product such as a home appliance or a computer. do. Therefore, the printed circuit board is subjected to a process of inspecting the soldering state of the mounted electronic components in the process of being embedded in the set of electrical and electronic products. In this way, the non-destructive inspection of the soldering state of the printed circuit board, X-ray inspection apparatus is mainly used in recent years.

Such a conventional X-ray inspection apparatus radiates an X-ray onto an inspected object set at an inspection position, and captures the projected image with a detector, and inspects the state of each part of the inspected object through the image information output to the monitor. Allow for inspection.

By the way, the conventional X-ray inspection apparatus is formed so that the inspection table can move on the X-axis and Y-axis, and is configured to rotate the inspection table at the same time. The user inspects each part while moving and rotating the test object fixed to the test table, and when the test table is rotated, the test object is also displayed on the monitor while being rotated. This causes the subject to be confused or unidentifiable due to the problem that the subject is inclined or out of position on the monitor when trying to check another part next to the part currently being tested. There was.

The present invention is to provide an X-ray inspection apparatus that can form the inspection table to be movable in the X-axis and Y-axis direction, but can change the position and angle of the detector with a high degree of freedom.

The present invention to achieve the above object is an X-ray tube; A detector arranged to be movable in the X-, Y-, and Z-axis directions and having an angle change; And an inspection table disposed between the X-ray tube and the detector so as to be movable in the X-axis and Y-axis directions. It provides an x-ray inspection apparatus comprising a.

The detector is pivotally connected to the Z axis by the first to third shaft members, and the connection points of the second and third shaft members are disposed at 90 degrees with respect to the connection points of the first shaft members. Can be.

The first joint part connecting the second shaft member and the detector is slidably disposed in one direction to the detector, and the second joint part connecting the third shaft member and the detector is connected to the detector. It can be slidably arranged along the same moving direction as the part and at right angles to the moving direction.

The first joint part is slidably coupled to a first guide rail disposed on the rear surface of the detector, and the second joint part is slidably coupled to a second guide rail disposed parallel to the first guide rail. The second guide rail may be slidably coupled to a third guide rail disposed at a right angle to the first guide rail at a rear surface of the detector.

The second and third shaft members may be coupled to the lifting unit so as to be movable in the Z-axis direction, and the first and second driving units driving the second and third shaft members may be disposed in the lifting units, respectively.

The lifting unit includes a movable member disposed to be movable in the X-axis direction and the Y-axis direction; A lifting member disposed below the movable member and connected to the first to third shaft members; A link unit connecting the movable member and the elevating member to change a distance between the movable member and the elevating member; And a lift driver for driving the lift member in the Z-axis direction.

The lifting drive unit, a drive motor disposed on the movable member; A power switching unit for converting the rotational force of the drive motor into linear motion; A first sliding block slidably coupled to the movable member and hinged to one side of the link unit; And a second sliding block slidably coupled to the lifting member in the same direction as the first sliding block and hinged to the other side of the link part, wherein the link part includes the first and second sliding blocks in the same direction. As the linear reciprocating movement is stretched to elevate the elevating member.

The link unit may include a plurality of hinged links.

The detector may change its position and angle in real time in response to the movement of the inspection table.

As described above, according to the embodiment of the present invention, the user can monitor each part of the inspected object in a constant direction as it secures a high degree of freedom in position shifting and angle setting of the detector, thereby improving user convenience of the test. As the detector is changed to the optimal position and angle in real time in response to the movement of the inspection table, an optimal focal spot size may be maintained to obtain a high resolution image (video).

1 is a front view showing an x-ray inspection apparatus according to an embodiment of the present invention.
FIG. 2 is an enlarged view of part II shown in FIG. 1.
FIG. 3 is an enlarged view illustrating part III shown in FIG. 1.
Figure 4 is a front view showing the lifting drive unit of the x-ray inspection apparatus according to an embodiment of the present invention.
5 is a side view of the elevating driving unit viewed from the direction V shown in FIG. 4.
FIG. 6 is a plan view of the lift driving unit viewed from the VI direction shown in FIG. 4.
7 is a perspective view illustrating an angle adjusting structure of the detector of the x-ray inspection apparatus according to the exemplary embodiment of the present invention.
8A to 8C are diagrams illustrating examples in which the detector illustrated in FIG. 7 is changed into a horizontal state, a state inclined to the left, and a state inclined to the right.
(A) and (b) of FIG. 9 are views showing examples in which the detector shown in FIG. 7 is changed to a state inclined rearward and a state inclined forward.
10 and 11 are views illustrating an example in which the detectors are inclined to the left and the right while the X-ray inspection apparatus according to the exemplary embodiment is viewed from the front.
12 and 13 are views illustrating examples in which the detectors are inclined to the left and the right in a state where the x-ray inspection apparatus according to an embodiment of the present invention is viewed from the side.

Hereinafter, various embodiments will be described in more detail with reference to the accompanying drawings. Embodiments described herein may be variously modified. Specific embodiments may be depicted in the drawings and described in detail in the detailed description. However, the specific embodiments disclosed in the accompanying drawings are only for easily understanding the various embodiments. Therefore, the technical spirit is not limited by the specific embodiments disclosed in the accompanying drawings, and it should be understood to include all equivalents or substitutes included in the spirit and scope of the invention.

Terms including ordinal numbers such as first and second may be used to describe various components, but these components are not limited by the terms described above. The terms described above are used only for the purpose of distinguishing one component from another.

As used herein, the terms "comprises" or "having" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described on the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, components, or a combination thereof. When a component is said to be "connected" or "connected" to another component, it may be directly connected to or connected to that other component, but it may be understood that another component may be present in the middle. Should be. On the other hand, when a component is said to be "directly connected" or "directly connected" to another component, it should be understood that there is no other component in between.

On the other hand, "module" or "unit" for the components used in the present specification performs at least one function or operation. In addition, the "module" or "unit" may perform a function or an operation by hardware, software, or a combination of hardware and software. In addition, a plurality of “modules” or a plurality of “parts” other than “modules” or “parts” to be executed in specific hardware or executed in at least one processor may be integrated into at least one module. Singular expressions include plural expressions unless the context clearly indicates otherwise.

In addition, in describing the present invention, when it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be abbreviated or omitted.

FIG. 1 is a front view illustrating an X-ray inspection apparatus according to an exemplary embodiment of the present invention, FIG. 2 is an enlarged view of part II shown in FIG. 1, and FIG. 3 is an enlarged view of part III shown in FIG. 1.

Referring to Figure 1, the x-ray inspection apparatus 1 according to an embodiment of the present invention is arranged to be movable in the X-axis and Y-axis direction on the upper portion of the frame portion 3, X-ray tube 10, X-ray tube The inspection table 30 and the detector 50 may be disposed on the upper side of the inspection table so as to be movable in the X-axis, Y-axis, and Z-axis directions, and the angle of the inspection table may be changed.

The frame unit 3 may be coupled to a housing (not shown) for the exterior, and an X-ray tube 10, an inspection table 30, and a detector 50 may be disposed inside.

The X-ray tube 10 is disposed at the bottom of the frame part 3 so that the X-ray emitter is directed toward the test bench 30 side to emit the X-ray toward the test subject set on the test bench 30. The X-ray tube 10 applied in the present embodiment may be a transmissive open tube having excellent focusing ability.

The test table 30 may be disposed on the first support frame 5 of the frame unit 3 on which an inspected object (semiconductor device, printed circuit board, etc.) is seated. The inspection table 30 may be provided with a clamp member 31 for fixing the inspection object to be stably fixed to the inspection object.

The X-ray divergence portion of the X-ray tube 10 is positioned at a lower side of the test table 30 at predetermined intervals. Accordingly, the X-rays emitted from the X-ray radiating unit are detected by the detector 50 located in the upper side of the examination table by passing through the object of the examination table 30.

The inspection table 30 is provided with an X-axis guide rail 42 and a Y-axis guide rail 47 to move in the X-axis direction and the Y-axis direction from the upper side of the X-ray tube 10.

1 and 2, the X-axis guide rails 42 are arranged in pairs in parallel in the X-axis direction on the first fixing plate 41 disposed on the first support frame 5. A sliding block 43 is movably coupled to the pair of X-axis guide rails 42, respectively.

The Y-axis guide rails 47 are arranged in pairs on the first moving plate 45 in parallel in the Y-axis direction. The first moving plate 45 is connected to the sliding block 43 and is driven by a ball screw (not shown) to move along the X axis guide rail 42 in the X axis direction. A sliding block 49 is movably coupled to the pair of Y-axis guide rails 47, respectively.

The inspection table 30 may be connected to the sliding block 49 and may receive power by another ball screw (not shown) to move along the Y-axis guide rail 47 in the Y-axis direction. In this case, the test table 30 may also move in the X-axis direction as it is indirectly connected to the first moving plate 45. Therefore, the test table 30 can move the inspected object in the X-axis and Y-axis directions above the X-ray tube 10.

The X-axis guide rail 42 and the sliding block 43 may be made of a conventional LM guide structure, and the Y-axis guide rail 47 and the sliding block 49 may also be made of a conventional LM guide structure.

The first moving plate 45 and the test table 30 may be driven by different ball screws, respectively, but are not limited thereto and may be linearly reciprocated by a general driving structure (for example, a cable chain). have.

The detector 50 is installed to be movable along the X-axis, Y-axis, and Z-axis directions at intervals above the inspection table 30.

The detector 50 is connected to a pair of X-axis guide rails 61 located above the frame part 3 and the X-axis by a plurality of sliding blocks 63 movably coupled to each X-axis guide rail 61. It can move along a direction, and can move along a Y-axis direction by the pair of Y-axis guide rails 65 and the several sliding block 67 couple | bonded with each Y-axis guide rail 65 so that movement is possible.

1 and 3, an X-axis guide rail 61 is disposed on one side of the second fixing plate 62 in the X-axis direction to guide the X-axis movement of the detector 50. The second fixing plate 62 may be disposed on the second support frame 7 forming the upper portion of the frame portion.

In order to guide the movement of the detector 50 in the Y-axis direction, the Y-axis guide rail 6 is disposed parallel to the other side of the second moving plate 66 in the Y-axis direction.

The second moving plate 66 is connected to the plurality of sliding blocks 63 and is moved in the X-axis direction by receiving power by a ball screw (not shown).

The plurality of sliding blocks 67 are connected to one side of the connecting plate 69 connected to the upper portion of the elevating driving part 70. Accordingly, as the detector 50 is indirectly connected to the connecting plate 69 through the lifting driver 90, the detector 50 may move in the Y-axis direction. In addition, the detector 50 may move in the X-axis direction as the detector 50 is indirectly connected to the second moving plate 66 through the connecting plate 69.

FIG. 4 is a front view showing a lift driver of the X-ray inspection apparatus according to an exemplary embodiment of the present invention, FIG. 5 is a side view of the lift driver, as seen from the direction V in FIG. 4, and FIG. 6 is a view from the direction VI shown in FIG. 4. This is a plan view of the elevating drive unit.

4 to 6, the lifting driving unit 70 supports the detector 50 to move along the Z-axis direction. The elevating driver 70 elevates the movable member 71, the elevating member 72 which is disposed on the lower side of the movable member so as to elevate, the link portion 73 which interconnects the movable member and the elevating member, and the elevating member. It includes a drive motor (75a) for providing power to make.

Referring to FIG. 4, the movable member 71 has a connecting plate 69 coupled to one side thereof, and a driving motor 75a, a support bracket 75c, and a pair of upper guide rails 76b respectively coupled to one side thereof. Is placed.

The driving motor 75a is connected to the ball screw 75d through the coupler 75b to rotate the ball screw in one direction and in the opposite direction. The support bracket 75c rotatably supports the ball screw 75d.

The movable nut 75e is screwed to the ball screw 75d so as to be movable in the longitudinal direction of the ball screw.

The movable nut 75e is coupled to the first sliding block 76a and moves along the length direction of the ball screw together with the first sliding block.

5 and 6, the first sliding block 76a is slidably coupled to the pair of upper guide rails 76b through a pair of sliding blocks 76c coupled to the first sliding block at intervals. Combined. Accordingly, the first sliding block 76a is guided by the pair of upper guide rails 76b when the first sliding block 76a moves along the longitudinal direction of the ball screw together with the movable nut 75e.

Since both ends of the first sliding block 76a are connected to a portion of the upper end of the link portion 73, the link portion 73 moves when the first sliding block 76a moves away from the direction in which the first sliding block 76a is close to the driving motor 75a. The length of the variable and the lifting member 72 moves up or down in the Z-axis direction.

Referring to FIG. 5, the elevating member 72 is positioned below the movable member 72 at a predetermined distance from the movable member 72 through the link portion 73 so as to elevate the detector 50 disposed below. Is placed.

The elevating member 72 has a pair of lower guide rails 78b disposed in parallel with the pair of upper guide rails 76b on a surface facing the movable member 71. Sliding blocks 78c are slidably coupled to the pair of lower guide rails 78b, respectively.

As the second sliding block 78a having both ends connected to a lower portion of the link portion 73 is connected to each sliding block 78c, the second sliding block 78a is guided to the pair of lower guide rails 78b during movement.

Referring to FIG. 4, the link unit 73 may include a plurality of collapsible links 73a, 73b, 73c, and 73d. The number of links can be appropriately adjusted according to the size or height of the x-ray inspection apparatus 1.

The link portion 73 may be shortened or extended in length, thereby raising and lowering the detector 50 in the Z-axis direction.

Specifically, the link unit 73 is reduced in length as shown in FIG. 1 when the movable nut 75e moves away from the driving motor 75a as the driving motor 75a rotates in one direction, thereby detecting the detector 50. Raise to a predetermined height. In addition, the link unit 73 is reduced in length as shown in FIG. 10 when the movable nut 75e moves in a direction adjacent to the driving motor 75a as the driving motor 75a rotates in the reverse direction, thereby detecting the detector 50. Lower to a predetermined height.

The detector 50 may move in the X-axis, Y-axis, and Z-axis directions as described above, and may be set at various angles toward the inspected object. X-ray inspection apparatus 1 according to the present embodiment is a FOD (Focal spot to Detector Distance) and FOD (Focal spot to) changed by the control unit (not shown) in accordance with the movement of the X-axis and Y-axis direction of the inspection table 30 Considering the object distance, the position and angle of the detector 50 can be changed in real time. Accordingly, the x-ray inspection apparatus 1 according to the present embodiment may always obtain a high resolution image by maintaining an accurate focal spot size.

Hereinafter, the structure for changing the angle of the detector 50 is demonstrated. 7 is a perspective view illustrating an angle adjusting structure of the detector of the x-ray inspection apparatus according to the exemplary embodiment of the present invention.

Referring to FIG. 7, the fixing plate 81 is disposed at a lower portion of the elevating member 72 at intervals through a plurality of connecting bars 82 (see FIG. 1). The driving plate, that is, the first screw jack motor 85a and the second screw jack motor 87a is fixed to the fixing plate 81.

The detector 50 is connected by a first shaft member 83a having an upper end fixed to the fixing plate 81. In this case, the first shaft member 83a is pivotally connected to the first joint housing 83b having a lower end disposed on the rear surface of the detector 50. The first shaft member 83a connects the detector 50 to maintain a predetermined distance with respect to the fixing plate 81, and becomes a rotation center when the detector is inclined at a predetermined angle.

The detector 50 may be connected to the fixing plate 81 through the second shaft member 85b and the third shaft member 87b together with the first shaft member 83a.

The second shaft member 85b is a lifting screw connected to the first screw jack motor 85a to drive in the Z-axis direction, and the third shaft member 87b is connected to the second screw jack motor 87a to the Z axis. Lifting screw to drive in the direction. In this case, the first and second shaft members 85b and 87b may be disposed parallel to the first shaft member 83a, and lower ends of the respective shaft members 85b and 87b may be disposed on the rear surface of the detector 50, respectively. Pivotally connected to the disposed second and third joint housings 85c and 87c.

Each pivot connection point of the second and third shaft members 85b and 87b is positioned at an angle of 90 degrees with respect to the rear surface of the detector with respect to the pivot connection point of the first shaft member 83a. That is, each pivot connection point of the second and third shaft members 85b and 87b intersects the pivot connection point of the first shaft member 83a and is located on two virtual lines perpendicular to each other at the same time.

The second shaft member 85b is slidably connected to the first guide rail 85e disposed on the rear surface of the detector 50 in the longitudinal direction of one of the two virtual lines by the sliding block 85d.

The third shaft member 87b is slidably connected to the second guide rail 87e disposed in parallel with the first guide rail 85e by the sliding block 87d. In this case, the second guide rail 87e is slidably connected to the third guide rail 87h by the support plate 87f. The third guide rail 87h is disposed along the length direction of the remaining lines of the two virtual lines.

According to this structure, the detector 50 may be set at various angles when the second and third shaft members 85b and 87b are lifted in the same direction or in different directions.

8 (a) to (c) are views showing an example in which the detector shown in FIG. 7 is changed to a horizontal state, a state inclined to the left, and a state inclined to the right, respectively, and FIGS. 9A and 9B are FIGS. ) Is a view showing an example in which the detector shown in FIG. 7 is changed to a state inclined backward and a state inclined forward.

Referring to FIG. 8A, the detector 50 may be maintained approximately horizontal as in the case where the second and third shaft members 85b and 87b are in the initial position.

Referring to FIG. 8B, when the third shaft member 87b is in the initial position and the second shaft member 85b is lifted by a predetermined distance by the operation of the first screw jack motor 85a, the second shaft member 87b is moved. The second joint housing 85c of the shaft member 85b is slidably moved to one side (right in the drawing) so that the detector 50 is changed to an angle inclined to the left with respect to the connection point of the first shaft member 83a. Can be.

Referring to FIG. 8C, when the third shaft member 87b is in the initial position, and the second shaft member 85b is lowered by a predetermined distance by the operation of the first screw jack motor 85a, the second shaft member 87b is second. As the second joint housing 85c of the shaft member 85b slides to the other side (left side in the drawing), the detector 50 may be changed to an angle inclined to the right side.

Although not shown in the drawings, when the second shaft member 85b is set to an initial position and the third shaft member 87b is raised or lowered, the detector 50 may be changed to be inclined at a predetermined angle in the front / rear direction. .

Meanwhile, referring to FIG. 9A, when the second and third shaft members 85b and 87b are simultaneously raised by a predetermined distance, the detector 50 may be changed to an inclined angle in the direction in which the sensing surface is visible. Can be.

In addition, referring to FIG. 9B, when the second and third shaft members 85b and 87b are simultaneously lowered by a predetermined distance, the detector 50 may be changed to an inclined angle so that an upper surface thereof is visible. .

As such, the detector 50 may be disposed to be inclined at various angles as the second and third shaft members 85b and 87b are driven to move up and down.

10 and 11 are views illustrating an example in which the detectors are inclined to the left and the right in a state of viewing the X-ray inspection apparatus according to an embodiment of the present invention, and FIGS. 12 and 13 are examples of the present invention. Figure 2 is a view showing an example in which the detector is inclined to the left and right in the state of viewing the x-ray inspection apparatus according to the side.

Referring to FIG. 10, the detector 50 may move to the left along the X-axis direction and at the same time descend along the Z-axis to maintain the inclined angle to the left. In this state, the detector 50 receives the X-rays emitted from the X-ray tube 10 and sequentially transmitted through the test table 30 and the object under test.

In this case, the control unit of the X-ray inspection apparatus 1 according to the present embodiment tracks the point where the examination table 30 moves on the X-axis and / or Y-axis according to a preset program, thereby real-time the position and angle of the detector 50. Can be changed.

In addition, the detector 50 may move to the right along the X-axis direction as shown in FIG. 11 and at the same time maintain the angle inclined to the right while descending along the Z-axis direction, as shown in FIGS. 12 and 13. It can be moved to the right or left along the left and at the same time descending along the Z-axis can maintain the angle to the right or left.

Accordingly, the user can check each part of the object under a constant direction through the monitor. In addition, the detector ensures the freedom of position movement along the X, Y, and Z axis directions, and simultaneously corrects the degrees of freedom of various angles, thereby maintaining an optimal focal spot size to obtain a high resolution image.

Although the above has been shown and described with respect to preferred embodiments of the present invention, the present invention is not limited to the specific embodiments described above, it is usually in the art to which the invention belongs without departing from the spirit of the invention claimed in the claims. Various modifications can be made by those skilled in the art, and these modifications should not be individually understood from the technical spirit or prospect of the present invention.

3: frame portion 10: X-ray tube
30: inspection table 50: detector
70: lifting drive 71: movable member
72: lifting member 73: link portion

Claims (9)

X-ray tube;
A detector arranged to be movable in the X-, Y-, and Z-axis directions and having an angle change; And
And an inspection table disposed between the X-ray tube and the detector to be movable in the X-axis and Y-axis directions.
The detectors are pivotally connected by the first shaft member while maintaining a predetermined distance with respect to the fixed plate, and are respectively pivotally connected by the second and third shaft members to be movable in the Z-axis direction.
Each connecting point of the second and third shaft members is disposed on an imaginary two line perpendicular to each other while crossing the pivot connecting points of the first shaft member as the connecting points of the second and third shaft members are disposed at 90 degrees with respect to the connecting points of the first shaft members. Become,
The first joint portion connecting the second shaft member and the detector is slidably disposed in the direction in the detector,
The second joint portion connecting the third shaft member and the detector is slidably disposed in the detector along the same movement direction as the first joint portion and at right angles to the movement direction.
The first joint part is slidably coupled to a first guide rail disposed on the rear surface of the detector along a length direction of one of the two virtual wires,
The second joint part is slidably coupled to a second guide rail disposed parallel to the first guide rail,
The second guide rail is slidably coupled to a third guide rail disposed in a direction perpendicular to the first guide rail on the rear surface of the detector by a support plate,
The third guide rail is disposed along the length direction of the remaining lines of the virtual two lines,
The second shaft member is connected to the first screw jack motor of the lifting unit is driven in the Z-axis direction,
The third shaft member is connected to the second screw jack motor of the lifting unit is driven in the Z-axis direction,
The lifting unit,
A movable member disposed to be movable in the X-axis direction and the Y-axis direction; A lifting member disposed below the movable member and connected to the first to third shaft members; A link unit connecting the movable member and the elevating member to change a distance between the movable member and the elevating member; And a lifting driving part for driving the lifting member in the Z-axis direction.
The lifting drive unit,
A drive motor disposed on the movable member; A power conversion unit converting the rotational force of the drive motor into a linear motion; A first sliding block slidably coupled to the movable member and hinged to one side of the link unit; And a second sliding block slidably coupled to the elevating member in the same direction as the first sliding block and hinged to the other side of the link unit.
And the link unit is stretched as the first and second sliding blocks linearly reciprocate in the same direction to elevate the elevating member. delete delete delete delete delete delete The method of claim 1,
The link unit is an x-ray inspection apparatus, characterized in that consisting of a plurality of hinged links. The method of claim 1,
The detector is x-ray inspection apparatus, characterized in that the position and angle is changed in real time corresponding to the movement of the inspection table.

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