KR20220170635A - Prober having independent modular cell structure - Google Patents

Abstract

A prober having an independent modular cell structure is disclosed. The prober having an independent modular cell structure according to one embodiment of the present invention includes: a prober stage chamber module in which a probe card and a wafer are supplied and an inspection is performed; and an electrical module installed below the prober stage chamber module, supporting the load of the prober stage chamber module, and having electrical components for power, control, and communication installed thereon.

Description

Prober having independent modular cell structure {Prober having independent modular cell structure}

The present invention relates to a prober, which is a device for inspecting a wafer, and more particularly, to a prober having an independent modular cell structure.

In general, a wafer prober, which is a semiconductor inspection equipment, measures the electrical characteristics of semiconductor devices made on a wafer immediately before entering a post-process for a wafer that has completed all semiconductor pre-processes. It is a device that inspects and checks for defects.

BACKGROUND OF THE INVENTION In a semiconductor wafer on which a plurality of semiconductor elements are formed, a prober is used as a wafer inspection device to inspect electrical characteristics of each semiconductor element. The prober includes a disk-shaped probe card facing the wafer, and the probe card includes contact probes, which are a plurality of columnar contact terminals disposed to face each electrode pad or each solder bump of a semiconductor device of the wafer.

In the prober, each contact probe on the probe card contacts the electrode pad or solder bump of the semiconductor element, and a test signal flows from each contact probe to the electric circuit of the semiconductor element connected to each electrode pad or each solder bump, thereby ensuring the conduction of the electric circuit. check status, etc.

According to the prior art, a group prober equipped with individual cells to have a plurality of prober stages is being developed. Usually, electric fields are provided on both sides or one side, and power and communication are all provided in the integrated electric field. configured to control. In this prior art, when one integrated electric field maintenance equipment is electrically powered on the side of a group prober, when performing maintenance on one individual cell, there is a problem in that the entire group prober must be turned off and then maintenance performed.

Therefore, in the prior art, as the number of cells of the group prober increases, maintenance must be performed while the entire device is stopped during maintenance, which further damages the overall test execution time.

In addition, there is a case where the integrated electric field maintenance equipment is configured by utilizing the side or upper space of the loader, but this space utilization has a very disadvantageous problem in automation.

KR 2222827 B1

According to the present invention, an independent modular cell structure that enables independent maintenance, repair, and operation of individual probers constituting a cell in group prober equipment and can proceed without stopping the operation of the group prober during individual prober maintenance. We want to provide a prober with

A prober having an independent modular cell structure according to one aspect of the present invention includes a prober stage chamber module in which an inspection is performed by supplying a probe card and a wafer; and an electrical module installed below the prober stage chamber module, supporting a load of the prober stage chamber module, and having electrical components for power, control, and communication installed thereon. can include

In this case, a frame made of a plurality of cells may be further included so that the prober stage chamber module and the electrical module may be assembled into one cell to form a group prober.

In this case, a vibration isolation device may be provided inside the prober stage chamber module and the electrical module, respectively.

At this time, a space portion for supplying, separating, or controlling a work object is formed on the upper portion of the prober stage chamber module, and the space portion may be formed in an open or closed form.

In this case, an integrated electric unit installed on one side of the frame and connected to the electric module of each cell by a master cable having power and communication lines may be further included.

At this time, an electric maintenance door installed on one side of the prober stage chamber module to open and close the inside of the prober stage chamber module, wherein the electric maintenance door is inside the door body and inside the prober stage chamber module. A space capable of accommodating electrical components to control the electrical operation of the probe is formed, power lines and communication lines are introduced from the outside, and the power lines and communication lines are connected to the electrical components inside the prober stage chamber module. The burrs may be individually controllable.

In this case, a switch capable of individually turning on/off power of a prober stage of each cell may be provided at the electrical maintenance door.

At this time, the electrical maintenance door, in the closed state, the prober stage chamber module is in close contact with the first sealing member installed in the entrance to seal the inner case formed with an internal space to accommodate electrical components therein; A cover assembled to the inner case from an opposite side of the prober stage chamber module to open and close the inner space of the inner case may be included.

In this case, the electrical maintenance door may be assembled to be opened and closed to the prober stage chamber module by a hinge, and a cutout through which a master cable having a power line and a communication line passes may be formed in the inner case.

In this case, the cutout portion may be integrally formed across the front and side surfaces of the inner case so that the master cable does not interfere when the electric maintenance door is opened and closed.

In this case, the incision may be sealed by a second sealing member installed on the prober stage chamber module side in a closed state of the electrical maintenance door, and a passage hole through which a master cable passes may be formed in the second sealing member. .

In this case, a detection switch capable of physically detecting whether the door is open may be installed between the prober stage chamber module and the electrical maintenance door.

According to the above configuration, the prober having an independent modular cell structure according to the present invention can install a single prober in individual cell units and individually control and manage it, so that individual maintenance and repair for each cell in a group prober is possible. , the operation becomes possible.

In the prober having an independent modular cell structure according to the present invention, since the electric part is installed in the door of each cell, the design of the connection cable with the integrated electric part can be made very simple.

1 is a perspective view of a prober having an independent modular cell structure according to an embodiment of the present invention.
2 is a front view of a prober having an independent modular cell structure according to an embodiment of the present invention.
3 is an exploded perspective view of a prober having an independent modular cell structure according to an embodiment of the present invention.
4 is an assembled perspective view of a single prober applied to a prober having an independent modular cell structure according to an embodiment of the present invention.
5 is a perspective view of a state in which a door cover of a prober having an independent modular cell structure according to an embodiment of the present invention is separated.
6 is a perspective view of a prober having an independent modular cell structure according to an embodiment of the present invention in an open state.
7 is a front configuration view of an incision in a closed state of a door of a prober having an independent modular cell structure according to an embodiment of the present invention.

Words and terms used in this specification and claims are not construed as limited in their ordinary or dictionary meanings, but in accordance with the principle that the inventors can define terms and concepts in order to best describe their inventions. It should be interpreted as a meaning and concept that corresponds to the technical idea.

Therefore, the embodiments described in this specification and the configurations shown in the drawings correspond to a preferred embodiment of the present invention, and do not represent all the technical ideas of the present invention, so that the corresponding configurations are various to replace them at the time of filing of the present invention. There may be equivalents and variations.

In this specification, terms such as "include" or "have" are intended to describe the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but one or more other features It should be understood that the presence or addition of numbers, steps, operations, components, parts, or combinations thereof is not precluded.

A component being in the "front", "rear", "above" or "below" of another component means that it is in direct contact with another component, unless there are special circumstances, and is "in front", "rear", "above" or "below". It includes not only those disposed at the lower part, but also cases in which another component is disposed in the middle. In addition, the fact that certain components are “connected” to other components includes cases where they are not only directly connected to each other but also indirectly connected to each other unless there are special circumstances.

Hereinafter, the prober 10 having an independent modular cell structure according to the present invention will be described with reference to the drawings.

A prober 10 having an independent modular cell structure according to an embodiment of the present invention includes a prober stage chamber module 110 and an electrical module 140 .

Referring to FIGS. 1 to 4 , the prober stage chamber module 110 may be inspected by supplying a probe card and a wafer.

At this time, a dust removal device may be provided inside the prober stage chamber module 110 to filter foreign substances such as dust during air conditioning.

At this time, the prober stage chamber module 110 should be isolated from the external environment when the wafer is inspected inside, and the inspection must be performed in a suitable environment. Therefore, the prober stage chamber module 110 must be isolated and sealed in all directions during inspection.

At this time, the prober stage chamber module 110 may be provided with different wafers and probe cards for each cell, and may be operated individually. Therefore, in most cases, inspections do not start at the same time and finish at the same time. In other words, in most cases, the working time and situation may proceed differently. Therefore, it is very important that maintenance, repair, and operation are performed for each prober stage chamber module 110 of each cell.

At this time, a space 130 for supplying, separating, or controlling a work object is formed on the upper side of the prober stage chamber module 110, and the space 130 is opened using a partition wall member 131. Or it may be made in a closed form. A single prober entering one cell by the space part 130 can be composed of three layers. Of course, when assembling, the prober stage chamber module 110 and the electrical module 140 may be assembled into the cells 11a of the frame 11 in a state of being coupled, or may be assembled by inserting them into cells one by one in a separated state.

Referring to FIGS. 1 to 4 , the electrical module 140 is installed below the prober stage chamber module 110 and supports the load of the prober stage chamber module 140 on the upper side, while providing power and Electrical components for control and communication may be installed.

At this time, a vibration isolation device 141a may be provided inside the main body 141 of the electrical module.

At this time, when the prober stage chamber module 110 is placed on top of the electrical module 140, electrical terminals installed therein come into contact with each other, and electrical connection may be possible in that state. In addition, grooves and protrusions are formed on the contact surface of the prober stage chamber module 110 and the electrical module 140 at positions corresponding to each other. By fastening, physical and electrical assembly may be completed.

In the prober 10 having an independent modular cell structure according to an embodiment of the present invention, the prober stage chamber module 110 and the electrical module 140 are assembled into one cell to form a group prober. A frame 11 made of a plurality of cells may be further included.

The present invention has a structure applicable to the single prober 100 and the group prober 10, and when applied to the group prober, the frame 11 can be applied.

Of course, the frame 11 merely performs a physical role of supporting the single prober 100 described above. That is, the group prober 10 can be implemented by manufacturing the frame 11, which is a skeleton, according to design, and assembling the single prober 100 in response thereto and directly assembling the frame to the frame. Of course, each single prober can be operated and controlled independently.

The prober having an independent modular cell structure according to an embodiment of the present invention is installed on one side of the frame 11 and connected to the electrical module 140 of each cell by a master cable having power and communication lines. A tenon 12 may be further included.

At this time, referring to FIG. 2 , since the integrated electric unit 12 is equipped with a plurality of single probers 100, it is possible to operate individually, but is installed so that each of them can be collectively controlled from the outside again. That is, by placing the integrated electronic unit 12 on the left side of the frame 11, the operator can quickly monitor and simultaneously control all operations at one place.

Meanwhile, in the prober having an independent modular cell structure according to an embodiment of the present invention, the prober stage chamber module 110 maintains an electric field to facilitate maintenance individually in each single prober 100. A maintenance door 120 may be included.

Of course, the single prober 100 is entirely controlled by the electrical module 140, but the electrical maintenance door 120 can be installed for more convenient maintenance.

Referring to FIGS. 4 to 7 , the electrical maintenance door 120 is installed on one side of the prober stage chamber module 110 to open and close the inside of the prober stage chamber module 120 .

At this time, in the electrical maintenance door 120, a space is formed inside the door body to accommodate electrical components so as to control the electrical operation inside the prober stage chamber module 110, and a power line and The prober stage 100 installed in each cell can be individually controlled by introducing a communication line and connecting the power line and the communication line to electrical components inside the prober stage chamber module 110 .

At this time, the electrical maintenance door 120 may open and close the prober stage chamber module 110 while being rotated by the hinge 123 . Here, a sliding method may be considered in addition to a method in which the electrical maintenance door 120 rotates using the hinge 123, but due to the characteristics of the group prober 10 of FIG. 1, adjacent prober stages 100 interfere with each other Since this can be, a casement type using a hinge 123 would be preferable.

At this time, an on/off switch capable of individually turning on/off the power of the prober stage module 100 of each cell may be provided at the electrical maintenance door 120 .

At this time, the target prober stage 100 can be turned on and off using the on/off switch to perform maintenance, repair, and operation, and prober stages other than the target prober stage 100 can perform their own inspections without interference. can Therefore, individual maintenance, repair, and operation of the prober stage 100 of each cell are possible.

At this time, in the closed state, the electrical maintenance door 120 adheres closely to the first sealing member 114 installed at the entrance to seal the prober stage chamber module 110, and has an internal space to accommodate electrical components therein. may include an inner case 121 formed thereon, and a cover 122 assembled to the inner case 121 from the opposite side of the prober stage chamber 110 to open and close the inner space of the inner case 121. there is.

At this time, the inner case 121 has a border 124 and has an open front surface to form an internal space. Of course, the cover 122 can be easily assembled and separated by a piece on the open part of the front side. Therefore, during maintenance, repair, and operation, the cover 122 may be separated as necessary to maintain, repair, and operate electrical components inside the door 120 .

At this time, the electrical maintenance door 120 is assembled to be opened and closed to the prober stage chamber module 110 with a hinge 123, and the inner case 121 has a master cable 13 provided with a power line and a communication line ) may be formed through the cutout (121a).

In this case, the cutout 121a may be integrally formed over the front and side surfaces of the inner case 121 so that the master cable 13 does not interfere when the electrical maintenance door 120 is opened and closed.

At this time, the cutout 121a is sealed by the second sealing member 113 installed on the side of the prober stage chamber 110 when the electrical maintenance door 120 is closed, and the second sealing member ( 113 may have a through hole through which the master cable 13 passes.

At this time, a detection switch 111 capable of physically detecting whether or not it is opened may be installed between the prober stage chamber module 110 and the electrical maintenance door 120 . When the electrical maintenance door 120 is locked, the detection switch 111 installed on the side of the prober stage chamber 110 is bitten by the rim 124 of the inner case 121 to physically sense the locked state.

At this time, a locking part may be installed on the electrical maintenance door 120 and the prober stage chamber module 110 to maintain a locked state. The locking portion may be locked using a variety of locking mechanisms. Here, when the piece protruding from the prober stage chamber module 110 passes through the through hole 142a formed in the rim 124 of the inner case 121, it can be tightened and locked with the locking member 125. Of course, these mechanisms may also apply bolts and nuts. As another example, a lever-type locking mechanism for closing a large freezer or other warehouse may be applied. Various locking mechanisms can be applied, but since the prober stage chamber module 110 is maintained in a sealed state, it is better to apply a locking mechanism that can be sealed together with the first sealing member 114 rather than simply closing. desirable.

Referring to FIG. 1 , a perspective view of a prober 10 according to an embodiment of the present invention is shown. The prober 10 includes a frame 11 dividing each cell, a prober stage 100 installed in the frame 11, and an integrated electric unit 12. Here, it is a form in which four cells are formed in each layer in three layers. The prober stage chamber module 110 and the electrical module 140 may be assembled and installed in each cell. An integrated electrical unit 12 is installed on one side of the frame 11, and the integrated electrical unit 12 is connected to the electrical maintenance door 120 installed in each cell by a master cable 13. Therefore, the integrated electrical unit 12 does not directly control the prober stage 100 of each cell, but controls the electrical module 140 of each cell or the electrical components of the electrical maintenance door 120 or controls the overall situation by communicating. will do

Referring to FIG. 2 , a front view of a prober having an independent modular cell structure according to an embodiment of the present invention is shown. The prober stage chamber module 110 to be inspected is made in a substantially box shape and has an electrical maintenance door 120 installed on the front side. In addition, the electrical module 140, the prober stage chamber module 110, and the space unit 130 may be sequentially stacked to complete a single prober.

Referring to FIG. 3 , an assembly view of a prober stage chamber module 110 and an electrical module 140 of a prober having an independent modular cell structure according to an embodiment of the present invention is shown. The two components are assembled vertically, but as described above, they can be engaged at precise positions by grooves and protrusions, and in that state, they can be fastened to each other and to the frame by means of fastening members. Of course, after assembling, electrical and electronic contact with each other enables automatic electrical connection.

Referring to FIG. 4 , a single prober of a prober having an independent modular cell structure according to an embodiment of the present invention is shown assembled. From the bottom, it is composed of three layers: the electric module 140, the prober stage chamber module 110, and the space part 130. In this state or by being fastened to each cell of the frame 11 one by one, it may be fixed and supported.

Referring to FIG. 5 , it is a perspective view of the electrical maintenance door in a state in which the door cover 122 is separated. The cover 122 of the electrical maintenance door 120 is separated, and electrical components in the internal space are shown. The master cable 13 of the integrated electric unit 12 may pass through one side of the inner case 121 or the cover 122 and be connected to the inside of the door 120 . Even in the state of the illustrated door 120, the chamber 110 is sealed and only the cover 122 is separated. In this state, maintenance, repair, and operation of the prober stage 100 may be performed. The master cable 13 led inside the door 120 is not only connected to electrical components in the internal space, but also connected to the inside of the prober stage chamber module 110 through the cutout 121a to control power and communication. .

Referring to FIGS. 6 and 7 , a state in which the door 120 of the prober having an independent modular cell structure according to an embodiment of the present invention is opened is shown. The locking member 125 of the door 120 is released and the door 120 is rotated around the hinge 123 to open the inside of the chamber module 110 . At this time, the detection switch 111 pressed on the inner case 121 is released to detect that the door 120 is opened, and this can be transmitted to the integrated electronic unit 12 . In this state, repair or other maintenance, repair, and operation of the inside of the chamber 110 will be possible. The master cable 13 connecting the door 120 and the prober stage 100 may be connected through the cutout 121a. Here, although the master cable 13 is not shown, a part of the master cable 13 will be fixed to the second sealing member 113 by the sealing 13a for sealing. The master cable 13 is completely fixed inside the prober stage 100 at the second sealing member 113 and does not move at all, and there is a slight flow gap from the second sealing member 113 to the inside of the door 120. can have The cutout 121a is formed by integrally cutting a portion of the side surface and a portion of the front surface of the inner case 121 to minimize interference during hinge rotation of the door 120 . When the door 120 is closed, the cutout 121a on the side is sealed by being in close contact with the sealing member 112 installed on the side of the hinge 123, and the cutout on the front side is the second sealing member 113 as shown in FIG. Sealing will be done by When the door 120 is closed and sealed using the locking member 125, the inside of the prober stage chamber module 110 is completely sealed. Of course, the inspection work proceeds in that state.

At this time, when maintaining, repairing, or operating the prober stage 100 of one cell, the on/off switch of only the prober stage 100 of that cell can be turned off to perform repair, maintenance, and the like. Of course, the prober stage 100 of the other cell will continue to perform its work.

Although the embodiments of the present invention have been described, the spirit of the present invention is not limited by the embodiments presented herein, and those skilled in the art who understand the spirit of the present invention may add or change components within the scope of the same spirit. Other embodiments can be easily proposed by adding, deleting, adding, etc., but this will also be said to be within the scope of the present invention.

10 : group prober
11: frame 12: integrated electrical part
13: master cable 100: prober stage
110: prober stage chamber module 111: detection switch
120: electrical maintenance door 121: inner case
121a: cutout 122: cover
123: hinge 124: border
125: locking member 130: space
140: battlefield module

Claims (12)

a prober stage chamber module in which a probe card and a wafer are supplied and an inspection is performed;
an electrical module assembled under the prober stage chamber module and equipped with electrical components for power, control, and communication; A prober having an independent modular cell structure comprising a. According to claim 1,
The prober having an independent modular cell structure, further comprising a frame composed of a plurality of cells so that the prober stage chamber module and the electric module are assembled in one cell to form a group prober. According to claim 1,
A prober having an independent modular cell structure, wherein a vibration suppression device is provided inside the prober stage chamber module and the electric module, respectively. According to claim 1,
A prober having an independent modular cell structure, wherein a space portion for supplying, separating, or controlling a workpiece is formed in the upper portion of the prober stage chamber module, and the space portion is formed in an open or closed form. According to claim 2,
A prober having an independent modular cell structure, further comprising an integrated electric unit installed on one side of the frame and connected to the electric module of each cell by a master cable having power and communication lines. According to claim 1,
An electric maintenance door installed on one side of the prober stage chamber module to open and close the inside of the prober stage chamber module, wherein the electric maintenance door includes electricity inside the prober stage chamber module inside the door body. A space capable of accommodating electrical components is formed to control the proper operation, power lines and communication lines are introduced from the outside, and the power lines and communication lines are connected to electrical components inside the prober stage chamber module, so that the prober installed in each cell Prober with individually controllable, independent modular cell structure. According to claim 6,
A prober having an independent modular cell structure, wherein the electrical maintenance door is provided with a switch capable of individually turning on and off power of the prober stage of each cell. According to claim 6,
The electric field maintenance door,
an inner case in close contact with a first sealing member installed at an entrance to seal the prober stage chamber module in a closed state and having an internal space formed therein to accommodate electrical components;
A prober having an independent modular cell structure comprising: a cover assembled to the inner case from the opposite side of the prober stage chamber module to open and close the inner space of the inner case. According to claim 8,
The electrical maintenance door is assembled to be opened and closed to the prober stage chamber module by a hinge, and a cutout is formed in the inner case through which a master cable equipped with a power line and a communication line passes. A prober having an independent modular cell structure . According to claim 9,
The prober having an independent modular cell structure, wherein the cutout is integrally formed across the front and side surfaces of the inner case so that the master cable does not interfere when opening and closing the electrical maintenance door. According to claim 10,
The incision is sealed by a second sealing member installed on the prober stage chamber module side when the electrical maintenance door is closed, and a passage hole through which a master cable passes is formed in the second sealing member, an independent modular cell. A prober with a structure. According to claim 6,
A prober having an independent modular cell structure, wherein a detection switch capable of physically detecting whether it is opened is installed between the prober stage chamber module and the electrical maintenance door.

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