KR20220142601A - 기판 이송 장치 및 기판 이송 장치의 수분 유입 방지 방법 - Google Patents
기판 이송 장치 및 기판 이송 장치의 수분 유입 방지 방법 Download PDFInfo
- Publication number
- KR20220142601A KR20220142601A KR1020210048763A KR20210048763A KR20220142601A KR 20220142601 A KR20220142601 A KR 20220142601A KR 1020210048763 A KR1020210048763 A KR 1020210048763A KR 20210048763 A KR20210048763 A KR 20210048763A KR 20220142601 A KR20220142601 A KR 20220142601A
- Authority
- KR
- South Korea
- Prior art keywords
- insulating layer
- substrate
- disposed
- holes
- electrodes
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 41
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Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020210048763A KR20220142601A (ko) | 2021-04-14 | 2021-04-14 | 기판 이송 장치 및 기판 이송 장치의 수분 유입 방지 방법 |
| CN202210368194.5A CN115206860A (zh) | 2021-04-14 | 2022-03-29 | 基板移送装置及基板移送装置的水分流入防止方法 |
| CN202220779286.8U CN217426709U (zh) | 2021-04-14 | 2022-03-29 | 基板移送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020210048763A KR20220142601A (ko) | 2021-04-14 | 2021-04-14 | 기판 이송 장치 및 기판 이송 장치의 수분 유입 방지 방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20220142601A true KR20220142601A (ko) | 2022-10-24 |
Family
ID=83181251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020210048763A KR20220142601A (ko) | 2021-04-14 | 2021-04-14 | 기판 이송 장치 및 기판 이송 장치의 수분 유입 방지 방법 |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR20220142601A (zh) |
| CN (2) | CN217426709U (zh) |
-
2021
- 2021-04-14 KR KR1020210048763A patent/KR20220142601A/ko active Search and Examination
-
2022
- 2022-03-29 CN CN202220779286.8U patent/CN217426709U/zh active Active
- 2022-03-29 CN CN202210368194.5A patent/CN115206860A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN217426709U (zh) | 2022-09-13 |
| CN115206860A (zh) | 2022-10-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination |