KR20220137174A - Method for providing a low-k spacer - Google Patents

Method for providing a low-k spacer Download PDF

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KR20220137174A
KR20220137174A KR1020227033843A KR20227033843A KR20220137174A KR 20220137174 A KR20220137174 A KR 20220137174A KR 1020227033843 A KR1020227033843 A KR 1020227033843A KR 20227033843 A KR20227033843 A KR 20227033843A KR 20220137174 A KR20220137174 A KR 20220137174A
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South Korea
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sico
spacer
spacers
dielectric layer
protective
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KR1020227033843A
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Korean (ko)
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KR102610396B1 (en
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스트랫포드 에이. 와일드
브라이언 테시에
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램 리써치 코포레이션
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Abstract

스페이서들을 갖는 반도체 디바이스들을 형성하는 방법이 제공된다. 피처들의 측면들 상에 SiCO 스페이서들이 형성된다. SiCO 스페이서들의 제 1 부분들 위에 보호 커버링들 (protective coverings) 이 형성되고, SiCO 스페이서들의 측벽들의 제 2 부분들은 보호 커버링들에 의해 커버되지 않는다. 보호 커버링들에 의해 커버되지 않은 SiCO 스페이서들의 제 2 부분들에 전환 프로세스가 제공되고, 보호 커버링들에 의해 커버되지 않은 SiCO 스페이서들의 제 2 부분들의 물리적 속성을 변화시키고, 보호 커버링들은 전환 프로세스로부터 SiCO 스페이서들의 제 1 부분들을 보호한다.A method of forming semiconductor devices having spacers is provided. SiCO spacers are formed on the sides of the features. Protective coverings are formed over first portions of the SiCO spacers, and second portions of the sidewalls of the SiCO spacers are not covered by the protective coverings. A conversion process is provided to second portions of the SiCO spacers not covered by the protective coverings, changing a physical property of the second portions of the SiCO spacers not covered by the protective coverings, wherein the protective coverings are removed from the conversion process to SiCO Protect the first portions of the spacers.

Description

로우-k 스페이서를 제공하는 방법{METHOD FOR PROVIDING A LOW-K SPACER}METHOD FOR PROVIDING A LOW-K SPACER

관련 출원에 대한 교차 참조CROSS REFERENCE TO RELATED APPLICATIONS

본 출원은 모든 목적들을 위해 참조로서 본 명세서에 인용된 2016년 12월 16일 출원된 미국 특허 출원 번호 제 15/381,594 호의 우선권의 이익을 주장한다.This application claims the benefit of priority of U.S. Patent Application Serial No. 15/381,594, filed December 16, 2016, which is incorporated herein by reference for all purposes.

본 개시는 반도체 웨이퍼 상에 반도체 디바이스들을 형성하는 방법에 관한 것이다. 보다 구체적으로, 본 개시는 로우 유전 상수를 갖는 스페이서들을 제공하는 것에 관한 것이다.The present disclosure relates to a method of forming semiconductor devices on a semiconductor wafer. More particularly, the present disclosure relates to providing spacers having a low dielectric constant.

반도체 디바이스들을 형성할 때, 측벽 스페이서들이 피처들의 측면들 상에 형성된다. 측벽 스페이서들은 기생 커패시턴스를 유발할 수도 있다.When forming semiconductor devices, sidewall spacers are formed on the sides of the features. Sidewall spacers may introduce parasitic capacitance.

전술한 바를 달성하기 위해 그리고 본 개시의 목적에 따라, 스페이서들을 갖는 반도체 디바이스들을 형성하는 방법이 제공된다. 피처들의 측면들 상에 SiCO 스페이서들이 형성된다. SiCO 스페이서들의 제 1 부분들 위에 보호 커버링들 (protective coverings) 이 형성되고, SiCO 스페이서들의 측벽들의 제 2 부분들은 보호 커버링들에 의해 커버되지 않는다. 보호 커버링들에 의해 커버되지 않은 SiCO 스페이서들의 제 2 부분들에 전환 (conversion) 프로세스가 제공되고, 보호 커버링들에 의해 커버되지 않은 SiCO 스페이서들의 제 2 부분들의 물리적 속성을 변화시키고, 보호 커버링들은 전환 프로세스로부터 SiCO 스페이서들의 제 1 부분들을 보호한다. In order to achieve the foregoing and in accordance with the purposes of the present disclosure, a method of forming semiconductor devices having spacers is provided. SiCO spacers are formed on the sides of the features. Protective coverings are formed over first portions of the SiCO spacers, and second portions of the sidewalls of the SiCO spacers are not covered by the protective coverings. A conversion process is provided for second portions of the SiCO spacers not covered by the protective coverings, changing a physical property of the second portions of the SiCO spacers not covered by the protective coverings, wherein the protective coverings are converted Protects the first portions of the SiCO spacers from process.

또 다른 양상에서, 스페이서들을 갖는 반도체 디바이스들을 형성하는 방법이 제공된다. 피처들의 측면들 상에 SiCO 스페이서들이 형성된다. SiCO 스페이서들의 상단부들 및 측벽들의 부분 위에 보호 캡들이 형성되고, SiCO 스페이서들의 측벽들의 하단 부분들은 보호 캡들에 의해 커버되지 않는다. 보호 캡들에 의해 커버되지 않는 SiCO 스페이서들의 측벽들의 부분들에 전환 프로세스를 제공되고, 이는 보호 캡들에 의해 커버되지 않은 SiCO 스페이서들의 측벽들의 부분들의 k 값을 하강시키고, 보호 캡들은 전환 프로세스로부터 SiCO 스페이서들의 측벽들의 커버된 부분들을 보호한다.In another aspect, a method of forming semiconductor devices having spacers is provided. SiCO spacers are formed on the sides of the features. Protective caps are formed over portions of the sidewalls and upper ends of the SiCO spacers, and lower portions of the sidewalls of the SiCO spacers are not covered by the protective caps. A conversion process is provided to the portions of the sidewalls of the SiCO spacers not covered by the protective caps, which lowers the k value of the portions of the sidewalls of the SiCO spacers not covered by the protective caps, and the protective caps are removed from the conversion process to the SiCO spacer. protect the covered parts of their sidewalls.

본 발명의 이들 및 다른 피처들은 이하의 도면들과 함께 본 발명의 상세한 기술에 이하에 보다 상세히 기술될 것이다. These and other features of the present invention will be described in greater detail below in the Detailed Description of the Invention in conjunction with the following drawings.

본 개시는 유사한 참조 번호들이 유사한 엘리먼트들을 참조하는 첨부된 도면들의 도면들에, 제한이 아닌 예로서 예시된다.
도 1은 일 실시예의 고레벨 플로우 차트이다.
도 2a 내지 도 2h는 일 실시예에 따라 프로세싱된 스택의 개략적인 단면도들이다. The present disclosure is illustrated by way of example and not limitation in the drawings of the accompanying drawings in which like reference numerals refer to like elements.
1 is a high-level flow chart of one embodiment.
2A-2H are schematic cross-sectional views of a stack processed according to one embodiment.

본 발명은 이제 첨부된 도면들에 예시된 바와 같이 몇몇 바람직한 실시예들을 참조하여 상세히 기술될 것이다. 이하의 기술에서, 다수의 구체적인 상세들이 본 발명의 전체적인 이해를 제공하기 위해 진술된다. 그러나, 본 발명은 이들 구체적인 상세들 중 일부 또는 전부 없이 실시될 수도 있다는 것이 당업자에게 자명할 것이다. 다른 예들에서, 공지의 프로세스 단계들 및/또는 구조체들은 본 발명을 불필요하게 모호하게 하지 않도록 상세히 기술되지 않았다. The present invention will now be described in detail with reference to several preferred embodiments as illustrated in the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art, that the present invention may be practiced without some or all of these specific details. In other instances, well-known process steps and/or structures have not been described in detail so as not to unnecessarily obscure the present invention.

도 1은 일 실시예의 고레벨 플로우 차트이다. 이 실시예에서, SiCO (silicon carbon oxide) 스페이서들이 피처들의 측면들 상에 형성된다 (단계 104). 보호 캡들이 SiCO 스페이서들의 측벽들의 상단부들 및 부분들 위에 형성되고, SiCO 스페이서들의 측벽들의 하단 부분들이 보호 캡들에 의해 커버되지 않는다 (단계 108). 전환 프로세스가 보호 캡들에 의해 커버되지 않은 SiCO 스페이서들의 측벽들의 노출된 부분들에 제공되고, 이는 SiCO 스페이서들의 측벽들의 노출된 부분들의 k 값을 하강시키고, 보호 캡들은 전환 프로세스로부터 SiCO 스페이서들의 측벽들의 커버된 부분들을 보호한다 (단계 112). 보호 캡들은 제거된다 (단계 116). 보호 캡들에 의해 커버되지 않은 SiCO 스페이서들의 측벽들의 노출된 하단 부분들이 커버된다 (단계 120). SiCO 스페이서들의 상단부들은 에칭 또는 CMP 프로세스에 노출된다 (단계 124).1 is a high-level flow chart of one embodiment. In this embodiment, silicon carbon oxide (SiCO) spacers are formed on the sides of the features (step 104). Protective caps are formed over top portions and portions of the sidewalls of the SiCO spacers, and lower portions of the sidewalls of the SiCO spacers are not covered by the protective caps (step 108). A conversion process is provided to the exposed portions of the sidewalls of the SiCO spacers not covered by the protective caps, which lowers the k value of the exposed portions of the sidewalls of the SiCO spacers, and the protective caps are removed from the conversion process of the sidewalls of the SiCO spacers. Protect the covered parts (step 112). The protective caps are removed (step 116). The exposed bottom portions of the sidewalls of the SiCO spacers not covered by the protective caps are covered (step 120 ). The tops of the SiCO spacers are exposed to an etch or CMP process (step 124).

예Yes

이 예에서, SiCO 스페이서들이 피처들의 측면들 상에 형성된다 (단계 104). 도 2a는 피처들 (208) 을 갖는 기판 (204) 을 갖는 스택 (200) 의 개략적인 단면도이다. 이 예에서, 피처들은 폴리 게이트의 하단 부분 (212) 및 게이트 캡의 상단 부분 (216) 을 갖는다. SiCO 스페이서들 (220) 은 피처들 (208) 의 측면들 상에 형성된다. 상이한 방법들이 피처들 (208) 의 측면들 상에 SiCO 스페이서들 (220) 을 형성하기 위해 사용될 수도 있다. 일 예에서, 컨포멀 (conformal) SiCO 층이 피처들 (208) 및 기판 위에 형성될 수도 있다. 컨포멀 SiCO 층의 수평 표면들은 SiCO 스페이서들 (220) 을 남기면서 에칭될 수도 있다. SOH (spin on hardmask) (224) 는 피처들 (208) 및 스페이서들 (220) 위에 증착된다. SOH (224) 는 피처들 (208) 및 스페이서들 (220) 의 상단부들을 노출하기 위해 부분적으로 에칭된다. 도 2b는 SOH (224) 가 피처들 (208) 및 스페이서들 (220) 의 상단부들을 노출하기 위해 부분적으로 에칭된 후 스택의 개략적인 단면도이다.In this example, SiCO spacers are formed on the sides of the features (step 104). 2A is a schematic cross-sectional view of a stack 200 having a substrate 204 with features 208 . In this example, the features have a bottom portion 212 of the poly gate and a top portion 216 of the gate cap. SiCO spacers 220 are formed on the sides of features 208 . Different methods may be used to form SiCO spacers 220 on the sides of features 208 . In one example, a conformal SiCO layer may be formed over the features 208 and the substrate. The horizontal surfaces of the conformal SiCO layer may be etched leaving SiCO spacers 220 . A spin on hardmask (SOH) 224 is deposited over the features 208 and spacers 220 . SOH 224 is partially etched to expose tops of features 208 and spacers 220 . FIG. 2B is a schematic cross-sectional view of the stack after SOH 224 has been partially etched to expose tops of features 208 and spacers 220 .

보호 캡들이 SiCO 스페이서들 (220) 의 측벽들의 상단부들 및 부분들 위 그리고 피처들 (208) 의 상단부 위에 형성되고, SiCO 스페이서들의 측벽들의 하단 부분들은 보호 캡들에 의해 커버되지 않는다 (단계 108). 이 예에서, 캡들은 컨포멀 보호 층을 증착함으로써 형성된다. 일 예에서, 챔버 압력이 3 내지 5 mTorr로 유지되는 동안, 캡 형성 가스가 프로세싱 챔버를 통해 5 내지 30 sccm의 CH4 또는 CH3F 및 100 내지 200 sccm의 Ar을 흘림으로써 제공된다. 캡 형성 가스는 챔버로 100 내지 600 W의 RF 전력을 제공함으로써 플라즈마로 변환된다 (transform). 프로세스는 10 내지 30 초 동안 제공되고, 컨포멀 보호 층의 형성을 발생시킨다. 도 2c는 컨포멀 보호 층 (228) 이 SiCO 스페이서들 (220) 의 측벽들의 상단부들 및 부분들 위 그리고 피처들 (208) 의 상단부들 위에 형성된 후 스택 (200) 의 개략적인 단면도이다. 컨포멀 보호 층 (228) 은 SOH 층 (224) 의 상단부 상에 형성된다. SOH 층 (224) 및 SOH 층 (224) 의 상단부 상의 컨포멀 보호 층 (228) 의 부분들이 제거된다. SOH (224) 및 SOH 층 (224) 의 상단부 상의 컨포멀 보호 층 (228) 의 부분들을 제거하기 위한 레시피는 20 내지 60 mTorr의 압력을 유지하는 동안 50 내지 200 sccm의 N2 및 H2 또는 H2 및 CO2 또는 N2 및 O2의 제거 가스를 흘린다. 제거 가스는 챔버로 300 내지 1000 W의 RF 전력을 제공함으로써 플라즈마로 형성된다. 프로세스는 SOH (224) 및 컨포멀 보호 층 (228) 의 특정한 부분들이 제거될 때까지 30 내지 120 초 동안 제공된다. 도 2d는 SOH 층 및 보호 층의 일부가 제거된 후 스택 (200) 의 개략적인 단면도이다. 보호 층의 남아 있는 부분은 SiCO 스페이서들 (220) 의 측벽들의 상단부 및 부분들 피처들 (208) 의 상단부들 위에 보호 캡들 (232) 을 형성한다. SiCO 스페이서들의 측벽들의 하단 부분들 (224) 은 보호 캡들 (232) 에 의해 커버되지 않는다.Protective caps are formed over the upper ends and portions of the sidewalls of the SiCO spacers 220 and over the upper end of the features 208 , and the lower portions of the sidewalls of the SiCO spacers are not covered by the protective caps (step 108 ). In this example, the caps are formed by depositing a conformal protective layer. In one example, the cap-forming gas is provided by flowing 5-30 seem CH 4 or CH 3 F and 100-200 seem Ar through the processing chamber while the chamber pressure is maintained at 3-5 mTorr. The cap forming gas is transformed into a plasma by providing an RF power of 100 to 600 W to the chamber. The process is provided for 10 to 30 seconds, resulting in the formation of a conformal protective layer. 2C is a schematic cross-sectional view of stack 200 after conformal protective layer 228 is formed over tops and portions of sidewalls of SiCO spacers 220 and over tops of features 208 . A conformal protective layer 228 is formed on top of the SOH layer 224 . SOH layer 224 and portions of conformal protective layer 228 on top of SOH layer 224 are removed. The recipe for removing SOH 224 and portions of conformal protective layer 228 on top of SOH layer 224 is 50-200 sccm of N 2 and H 2 or H while maintaining a pressure of 20-60 mTorr. The removal gas of 2 and CO2 or N2 and O2 is flowed. The purge gas is formed into a plasma by providing an RF power of 300 to 1000 W to the chamber. The process is provided for 30 to 120 seconds until certain portions of the SOH 224 and conformal protective layer 228 are removed. 2D is a schematic cross-sectional view of the stack 200 after the SOH layer and a portion of the protective layer have been removed. The remaining portion of the protective layer forms protective caps 232 over the tops of the sidewalls of the SiCO spacers 220 and the tops of the portions features 208 . The bottom portions 224 of the sidewalls of the SiCO spacers are not covered by the protective caps 232 .

전환 프로세스가 보호 캡들로 커버되지 않은 SiCO 스페이서들의 측벽들의 노출된 부분들에 제공되고, SiCO 스페이서들의 측벽들의 노출된 부분들의 k 값을 하강시키고, 보호 캡들은 전환 프로세스로부터 SiCO 스페이서들의 측벽들의 커버된 부분들을 보호한다 (단계 112). 전환 프로세스를 제공하는 레시피의 일 예는 1 내지 2 Torr의 압력 및 200 ℃ 내지 300 ℃의 온도를 유지하는 동안, 2000 내지 4000 sccm의 O2 및 500 sccm의 N2 의 전환 가스를 프로세스 챔버 내로 흘린다. 전환 가스는 3000 내지 4000 W의 RF 전력을 챔버로 제공함으로써 플라즈마로 형성된다. 프로세스는 SiCO 스페이서들의 노출된 부분들의 k 값을 하강시킴으로써, 노출된 부분들이 전환될 때까지 30 내지 60 초 동안 제공된다. 도 2e는 전환 프로세스가 제공된 후 스택 (200) 의 개략적인 단면도이다. SiCO 스페이서들 (220) 의 측벽들의 하단 부분들 (236) 은 SiCO 스페이서들의 유전체 k 값을 하강시키도록 프로세싱된다. 이 예에서 k 값은 4.9 로부터 4.4로 하강된다.A conversion process is provided to the exposed portions of the sidewalls of the SiCO spacers not covered with the protective caps, lowering the k value of the exposed portions of the sidewalls of the SiCO spacers, and the protective caps are provided to the exposed portions of the sidewalls of the SiCO spacers from the conversion process. Protect the parts (step 112). One example of a recipe that provides a conversion process is a pressure of 1 to 2 Torr and 200 ℃ to 300 While maintaining the temperature of °C, a conversion gas of 2000 to 4000 sccm of O 2 and 500 sccm of N 2 is flowed into the process chamber. The conversion gas is formed into a plasma by providing an RF power of 3000 to 4000 W into the chamber. The process is provided by lowering the k value of the exposed portions of the SiCO spacers for 30 to 60 seconds until the exposed portions are converted. 2E is a schematic cross-sectional view of the stack 200 after a conversion process has been provided. The bottom portions 236 of the sidewalls of the SiCO spacers 220 are processed to lower the dielectric k value of the SiCO spacers. In this example, the value of k drops from 4.9 to 4.4.

보호 캡들이 제거된다 (단계 116). 보호 캡들을 제거하는 레시피의 일 예는 5 내지 30 mTorr의 압력을 유지하는 동안, 5 내지 20 sccm의 CF4 또는 SF6 및 150 sccm의 He의 캡 제거 가스를 흘린다. 캡 제거 가스는 300 내지 1000 W의 RF 전력을 챔버로 제공함으로써 플라즈마로 형성된다. 프로세스 시간은 보호 캡들의 두께에 기초한다. 도 2f는 보호 캡들이 제거된 후 스택 (200) 의 개략적인 단면도이다. The protective caps are removed (step 116). One example of a recipe for removing protective caps is to flow 5-20 sccm of CF 4 or SF 6 and 150 sccm of He cap removal gas while maintaining a pressure of 5-30 mTorr. The cap removal gas is formed into a plasma by providing an RF power of 300 to 1000 W to the chamber. The process time is based on the thickness of the protective caps. 2F is a schematic cross-sectional view of the stack 200 after the protective caps have been removed.

이들 단계들 전 또는 단계들 후 또는 단계들 사이에 스택을 더 프로세싱하기 위해 부가적인 단계들이 제공될 수도 있다. 예를 들어, SiCO 스페이서들이 형성된 후 그리고 보호 캡들이 형성되기 전에 소스 및 드레인 영역들이 피처들 사이에 형성될 수도 있다. 보호 캡들이 제거된 후 프로세스의 일 예에서, 유전체 층이 스페이서들 사이에 스페이스를 충진하도록 증착될 수도 있다. 증착된 유전체 층은 보호 캡들에 의해 커버되지 않은 SiCO 스페이서들의 측벽들의 노출된 하단 부분들로 하여금 커버되게 한다 (단계 120). 일 예에서, 증착된 유전체 층은 유동성 (flowable) 부압 (sub-atmospheric pressure) CVD (chemical vapor deposition) 또는 원자 층 증착된 옥사이드를 사용하여 증착될 수도 있다. 도 2g는 유전체 층 (240) 이 측벽 스페이서들 사이의 스페이스들을 충진하기 위해 증착된 후 스택 (200) 의 개략적인 단면도이다. SiCO 스페이서들의 상단부들은 에칭 또는 CMP (chemical mechanical polishing) 프로세스에 노출된다 (단계 124). 도 2h는 SiCO 스페이서들의 상단부들이 CMP 프로세스를 겪은 후 스택 (200) 의 개략적인 단면도이다. 자기 정렬된 (self aligned) 콘택트들이 피처의 상단부들에 전기적으로 접속될 수도 있다. Additional steps may be provided to further process the stack before or after or between these steps. For example, source and drain regions may be formed between the features after the SiCO spacers are formed and before the protective caps are formed. In one example of the process after the protective caps are removed, a dielectric layer may be deposited to fill the space between the spacers. The deposited dielectric layer causes the exposed bottom portions of the sidewalls of the SiCO spacers not covered by the protective caps to be covered (step 120 ). In one example, the deposited dielectric layer may be deposited using flowable sub-atmospheric pressure chemical vapor deposition (CVD) or atomic layer deposited oxide. 2G is a schematic cross-sectional view of the stack 200 after a dielectric layer 240 has been deposited to fill the spaces between the sidewall spacers. The tops of the SiCO spacers are exposed to an etching or chemical mechanical polishing (CMP) process (step 124). 2H is a schematic cross-sectional view of a stack 200 after the tops of the SiCO spacers have undergone a CMP process. Self aligned contacts may be electrically connected to the top ends of the feature.

이 예는 다양한 플라즈마 기반 화학물질들로의 노출에 의해 SPARC (Single Precursor Activated Radicals Chemistry) 막의 속성들을 개질, 예컨대 유전체 k 값을 하강시키는 동안, 이러한 막을 에칭 상호작용들 및 dHF (diluted hydrofluoric acid) 습식 세정들에 대해 보다 덜 견고하게 하는 능력을 활용한다.This example demonstrates modifying the properties of a Single Precursor Activated Radicals Chemistry (SPARC) film by exposure to various plasma-based chemicals, such as lowering the dielectric k value, while etch interactions and diluted hydrofluoric acid (dHF) wetted film. Take advantage of the ability to be less robust against washes.

이 예에서, 보호 캡은 전환 프로세스로부터 측벽 스페이서들의 상단 부분을 보호하고, 이는 보호되지 않은 측벽 스페이서들의 하단 부분의 k 값을 하강시킨다. 그 결과, 측벽 스페이서들의 상단 부분은 보다 높은 탄소 함량 및 에칭 내성을 유지한다. 이 예에서, 측벽의 하단 부분은 k 값을 하강시키고 측벽의 하단 부분의 에칭 내성이 보다 작게 하는 전환 프로세스에 노출될 수도 있고, 이는 측벽들의 하단 부분을 측벽들의 보호된 부분들보다 습식 HF 또는 플라즈마 에칭에 보다 덜 민감하게 한다. 측벽들의 하단 부분들의 에칭 내성이 보다 작기 때문에, 유전체 층이 측벽들의 하단 부분을 보호하고 추가 디바이스 형성을 위해 증착된다. In this example, the protective cap protects the top portion of the sidewall spacers from the conversion process, which lowers the k value of the bottom portion of the unprotected sidewall spacers. As a result, the top portion of the sidewall spacers maintains a higher carbon content and etch resistance. In this example, the bottom portion of the sidewall may be exposed to a conversion process that lowers the k value and renders the bottom portion of the sidewall less etch resistant, which causes the bottom portion of the sidewalls to be wetter than the protected portions of the sidewalls with wet HF or plasma. Make it less sensitive to etching. Because the lower portions of the sidewalls are less etch resistant, a dielectric layer is deposited to protect the lower portions of the sidewalls and for further device formation.

CA, Fremont 소재의 Lam Research Corp.에 의해 제조된 Striker 챔버가 SiCO 측벽들을 증착하도록 사용될 수도 있다. A Striker chamber manufactured by Lam Research Corp. of Fremont, CA may be used to deposit the SiCO sidewalls.

바람직하게, SiCO 측벽 스페이서들은 처음에 4.7 로부터 4.9 사이의 유전 상수 k를 갖는다. 전환 프로세스는 유전 상수 k를 적어도 0.4만큼 하강시킨다. 그 결과, 전환된 SiCO 측벽들은 4.5보다 작은 유전 상수를 갖는다. 그 결과, 유전 상수는 약 8 ％ 내지 10 ％만큼 하강된다. 따라서, 기생 커패시턴스는 약 8 ％ 내지 10 ％만큼 하강된다.Preferably, the SiCO sidewall spacers initially have a dielectric constant k between 4.7 and 4.9. The conversion process lowers the dielectric constant k by at least 0.4. As a result, the converted SiCO sidewalls have a dielectric constant less than 4.5. As a result, the dielectric constant is lowered by about 8% to 10%. Thus, the parasitic capacitance drops by about 8% to 10%.

다른 실시예들에서, 측벽 스페이서들의 상단부 대신, 다른 부분들이 전환 프로세스로부터 보호될 수도 있는 한편, 측벽 스페이서들의 하단부 대신, 다른 부분들이 전환 프로세스에 노출될 수도 있다. 이러한 실시예들이 다중 집적 설계들을 해결하기 위해 사용될 수도 있다. 다른 실시예들은 측벽 스페이서들의 k 값을 하강시키도록 다른 전환 프로세스 단계들을 사용할 수도 있다. 예를 들어, O2 기판 애싱 (ashing) 을 사용하는 대신, 형성 가스 기반 애싱이 사용될 수도 있다. 형성 가스는 수소 및 질소 가스이다. 이러한 가스는 N2 및 H2 또는 NH3 또는 NH4OH 또는 이러한 가스들의 조합들로부터 형성될 수도 있다. 다른 실시예들에서, 다른 전환 프로세스들이 k 값을 하강시키는 대신 측벽 스페이서들의 다른 물리적 속성들을 변화시키도록 사용될 수도 있다.In other embodiments, instead of the top of the sidewall spacers, other portions may be protected from the conversion process, while instead of the bottom of the sidewall spacers, other portions may be exposed to the conversion process. Such embodiments may be used to solve multiple integration designs. Other embodiments may use other conversion process steps to lower the k value of the sidewall spacers. For example, instead of using O 2 substrate ashing, forming gas based ashing may be used. The forming gases are hydrogen and nitrogen gases. Such gases may be formed from N 2 and H 2 or NH 3 or NH 4 OH or combinations of such gases. In other embodiments, other conversion processes may be used to change other physical properties of the sidewall spacers instead of lowering the value of k.

기생 커패시턴스는 발전된 finfet 디바이스들에서 핵심 성능 리미터 (limiter) 이다. 게이트 대 콘택트 커패시턴스는 7 ㎚ 노드 및 그 이상에서 총 유효 커패시턴스의 주 동인 (driver) 이다. 7 ㎚ 노드, 기생 커패시턴스는 약 40 ％의 유효 커패시턴스를 형성한다. 따라서, 기생 커패시턴스의 상당한 감소가 유효 커패시턴스에서 상당한 감소를 발생시킨다. Parasitic capacitance is a key performance limiter in advanced finfet devices. Gate-to-contact capacitance is the main driver of total effective capacitance at the 7 nm node and beyond. At the 7 nm node, the parasitic capacitance forms an effective capacitance of about 40%. Thus, a significant reduction in parasitic capacitance results in a significant reduction in effective capacitance.

본 발명이 몇몇 바람직한 실시예들의 면에서 기술되었지만, 이 발명의 범위 내에 있는, 교환, 변경, 치환 및 다양한 대체 등가물들이 있다. 본 발명의 방법들 및 장치들을 구현하는 많은 다양한 방식들이 있다는 것을 또한 주의해야 한다. 따라서, 이하에 첨부된 청구항들은 본 발명의 진정한 정신 및 범위 내에 속하는 한, 이러한 모든 교환, 변경, 치환 및 다양한 대체 등가물들을 포함하는 것으로 해석되도록 의도된다. While the present invention has been described in terms of several preferred embodiments, there are interchanges, modifications, substitutions, and various alternative equivalents that fall within the scope of this invention. It should also be noted that there are many different ways of implementing the methods and apparatus of the present invention. Accordingly, the claims appended hereto are intended to be construed to cover all such exchanges, modifications, substitutions and various alternative equivalents provided they fall within the true spirit and scope of the present invention.

Claims (20)

반도체 디바이스를 형성하는 방법에 있어서,
피처의 측면 상에 SiCO 스페이서를 형성하는 단계;
상기 SiCO 스페이서의 제 1 부분 위에 보호 커버링 (protective covering) 을 형성하고, 상기 SiCO 스페이서의 제 2 부분은 상기 보호 커버링에 의해 커버되지 않는, 상기 보호 커버링을 형성하는 단계;
상기 SiCO 스페이서의 상기 제 2 부분의 유전 상수 (k) 값을 낮추기 위해 상기 SiCO 스페이서의 상기 제 2 부분에 전환 프로세스를 제공하는 단계; 및
상기 전환 프로세스를 제공한 후 상기 SiCO 스페이서의 상기 제 2 부분을 유전체 층으로 커버하는 단계를 포함하는, 반도체 디바이스 형성 방법.A method of forming a semiconductor device, comprising:
forming SiCO spacers on the sides of the features;
forming a protective covering over the first portion of the SiCO spacer, wherein the second portion of the SiCO spacer is not covered by the protective covering;
providing a conversion process to the second portion of the SiCO spacer to lower a dielectric constant (k) value of the second portion of the SiCO spacer; and
and covering the second portion of the SiCO spacer with a dielectric layer after providing the conversion process. 제 1 항에 있어서,
상기 유전체 층으로 상기 SiCO 스페이서의 상기 제 2 부분을 커버하는 단계는 상기 SiCO 스페이서와 또 다른 SiCO 스페이서 사이의 공간을 유전체 재료로 충진하는 단계를 포함하는, 반도체 디바이스 형성 방법.The method of claim 1,
and covering the second portion of the SiCO spacer with the dielectric layer comprises filling a space between the SiCO spacer and another SiCO spacer with a dielectric material. 제 1 항에 있어서,
상기 유전체 층으로 상기 SiCO 스페이서의 상기 제 2 부분을 커버한 후 상기 SiCO 스페이서의 상단부를 CMP (chemical mechanical planarization) 프로세스에 노출하는 단계를 더 포함하는, 반도체 디바이스 형성 방법.The method of claim 1,
and exposing a top end of the SiCO spacer to a chemical mechanical planarization (CMP) process after covering the second portion of the SiCO spacer with the dielectric layer. 제 1 항에 있어서,
상기 유전체 층으로 상기 SiCO 스페이서의 상기 제 2 부분을 커버한 후 상기 SiCO 스페이서의 상단부를 에칭에 노출하는 단계를 더 포함하는, 반도체 디바이스 형성 방법.The method of claim 1,
and exposing a top end of the SiCO spacer to etching after covering the second portion of the SiCO spacer with the dielectric layer. 제 1 항에 있어서,
상기 유전체 층으로 상기 SiCO 스페이서의 상기 제 2 부분을 커버하는 단계는 상기 유전체 층을 증착하기 위해 화학적 기상 증착 (chemical vapor deposition) 을 사용하는 단계를 포함하는, 반도체 디바이스 형성 방법.The method of claim 1,
and covering the second portion of the SiCO spacer with the dielectric layer comprises using chemical vapor deposition to deposit the dielectric layer. 제 1 항에 있어서,
상기 유전체 층으로 상기 SiCO 스페이서의 상기 제 2 부분을 커버하는 단계는 상기 유전체 층을 증착하기 위해 원자 층 증착 (atomic layer deposition) 을 사용하는 단계를 포함하는, 반도체 디바이스 형성 방법.The method of claim 1,
and covering the second portion of the SiCO spacer with the dielectric layer comprises using atomic layer deposition to deposit the dielectric layer. 제 6 항에 있어서,
상기 유전체 층을 증착하기 위해 원자 층 증착을 사용하는 단계는 옥사이드 유전체 층을 증착하는 단계를 포함하는, 반도체 디바이스 형성 방법.7. The method of claim 6,
wherein using atomic layer deposition to deposit the dielectric layer comprises depositing an oxide dielectric layer. 제 1 항에 있어서,
상기 피처는 게이트를 포함하고, 그리고 상기 방법은 자기 정렬된 콘택트를 상기 게이트에 전기적으로 접속하는 단계를 더 포함하는, 반도체 디바이스 형성 방법.The method of claim 1,
wherein the feature comprises a gate, and the method further comprises electrically connecting a self-aligned contact to the gate. 제 8 항에 있어서,
상기 게이트는 finfet 디바이스의 일부인, 반도체 디바이스 형성 방법.9. The method of claim 8,
wherein the gate is part of a finfet device. 제 9 항에 있어서,
상기 finfet 디바이스는 7 ㎚ 이하의 노드를 포함하는, 반도체 디바이스 형성 방법.10. The method of claim 9,
wherein the finfet device comprises a node of 7 nm or less. 제 1 항에 있어서,
상기 SiCO 스페이서의 상기 제 1 부분은 상기 SiCO 스페이서의 상단부 및 상기 SiCO 스페이서의 측벽의 상단 부분을 포함하고, 그리고 상기 SiCO 스페이서의 상기 제 2 부분은 상기 SiCO 스페이서의 상기 측벽의 하단 부분을 포함하는, 반도체 디바이스 형성 방법.The method of claim 1,
wherein the first portion of the SiCO spacer includes a top portion of the SiCO spacer and a top portion of a sidewall of the SiCO spacer, and the second portion of the SiCO spacer includes a bottom portion of the sidewall of the SiCO spacer. A method of forming a semiconductor device. 제 1 항에 있어서,
상기 전환 프로세스는 상기 SiCO 스페이서의 상기 제 2 부분의 상기 k 값을 적어도 0.4만큼 낮추는, 반도체 디바이스 형성 방법.The method of claim 1,
and the conversion process lowers the k value of the second portion of the SiCO spacer by at least 0.4. 제 1 항에 있어서,
상기 전환 프로세스를 제공한 후 상기 보호 커버링을 제거하는 단계를 더 포함하는, 반도체 디바이스 형성 방법.The method of claim 1,
and removing the protective covering after providing the switching process. 제 1 항에 있어서,
상기 전환 프로세스를 제공하는 단계는 산소를 포함하는 가스 또는 형성 가스로부터 형성된 플라즈마에 상기 SiCO 스페이서의 상기 제 2 부분을 노출하는 단계를 포함하는, 반도체 디바이스 형성 방법.The method of claim 1,
wherein providing the conversion process comprises exposing the second portion of the SiCO spacer to a plasma formed from a forming gas or a gas comprising oxygen. 제 1 항에 있어서,
상기 보호 커버링을 형성하는 단계는,
상기 SiCO 스페이서 위에 하드 마스크를 증착하는 단계;
상기 SiCO 스페이서의 상기 제 1 부분을 노출하도록 상기 하드 마스크를 에칭하는 단계;
상기 SiCO 스페이서의 상기 제 1 부분 위에 그리고 상기 하드 마스크 위에 보호 층을 증착하는 단계;
상기 하드 마스크 및 상기 하드 마스크 위의 상기 보호 층의 일부를 제거하여, 상기 보호 층의 제거되지 않은 부분으로부터 상기 보호 커버링을 형성하는 단계를 포함하는, 반도체 디바이스 형성 방법.The method of claim 1,
Forming the protective covering comprises:
depositing a hard mask over the SiCO spacer;
etching the hard mask to expose the first portion of the SiCO spacer;
depositing a protective layer over the first portion of the SiCO spacer and over the hard mask;
removing the hard mask and a portion of the protective layer over the hard mask to form the protective covering from the unremoved portion of the protective layer. 제 1 항에 있어서,
상기 전환 프로세스는 산소를 포함하는 가스 또는 형성 가스로부터 형성된 플라즈마에 상기 SiCO 스페이서의 상기 제 2 부분을 노출하는 단계를 포함하는, 반도체 디바이스 형성 방법.The method of claim 1,
wherein the diverting process comprises exposing the second portion of the SiCO spacer to a plasma formed from a forming gas or a gas comprising oxygen. 반도체 디바이스를 형성하는 방법에 있어서,
피처들의 측면들 상에 SiCO 스페이서들을 형성하는 단계;
상기 SiCO 스페이서들의 측벽들의 상단부들 및 부분들 위에 보호 커버링들을 형성하는 단계로서, 상기 SiCO 스페이서들의 측벽들의 하단 부분들은 상기 보호 커버링들에 의해 커버되지 않는, 상기 보호 커버링들을 형성하는 단계;
상기 보호 커버링들로 커버되지 않은 상기 SiCO 스페이서들의 상기 측벽들의 상기 부분들에 전환 프로세스를 제공하는 단계로서, 이는 상기 보호 커버링들로 커버되지 않은 상기 SiCO 스페이서들의 상기 측벽들의 상기 부분들의 유전 상수 (k) 값을 낮추고, 상기 보호 커버링들은 상기 전환 프로세스로부터 상기 SiCO 스페이서들의 상기 측벽들의 커버된 부분들을 보호하는, 상기 전환 프로세스를 제공하는 단계; 및
상기 전환 프로세스를 제공한 후 상기 보호 커버링들에 의해 커버되지 않은 상기 SiCO 스페이서들의 상기 부분들을 유전체 층으로 커버하는 단계를 포함하는, 반도체 디바이스 형성 방법.A method of forming a semiconductor device, comprising:
forming SiCO spacers on sides of the features;
forming protective coverings over upper ends and portions of sidewalls of the SiCO spacers, wherein lower portions of the sidewalls of the SiCO spacers are not covered by the protective coverings;
providing a conversion process to the portions of the sidewalls of the SiCO spacers not covered with the protective coverings, wherein the dielectric constant (k) of the portions of the sidewalls of the SiCO spacers not covered with the protective coverings ) value, and wherein the protective coverings protect the covered portions of the sidewalls of the SiCO spacers from the conversion process; and
and covering said portions of said SiCO spacers not covered by said protective coverings with a dielectric layer after providing said conversion process. 제 17 항에 있어서,
상기 전환 프로세스를 제공한 후 상기 보호 커버링들에 의해 커버되지 않은 상기 SiCO 스페이서들의 상기 부분들을 상기 유전체 층으로 커버하는 단계는 상기 SiCO 스페이서들 사이의 공간들을 유전체 재료로 충진하는 단계를 포함하는, 반도체 디바이스 형성 방법.18. The method of claim 17,
and covering the portions of the SiCO spacers not covered by the protective coverings with the dielectric layer after providing the conversion process comprises filling the spaces between the SiCO spacers with a dielectric material. A method of forming a device. 제 18 항에 있어서,
상기 유전체 층으로 상기 SiCO 스페이서들 사이의 상기 공간들을 충진한 후 상기 SiCO 스페이서들의 상기 상단부들을 CMP (chemical mechanical planarization) 프로세스에 노출하는 단계를 더 포함하는, 반도체 디바이스 형성 방법.19. The method of claim 18,
and exposing the top ends of the SiCO spacers to a chemical mechanical planarization (CMP) process after filling the spaces between the SiCO spacers with the dielectric layer. 제 18 항에 있어서,
상기 유전체 층으로 상기 SiCO 스페이서들 사이의 상기 공간들을 충진한 후 상기 SiCO 스페이서들의 상기 상단부들을 에칭에 노출하는 단계를 더 포함하는, 반도체 디바이스 형성 방법.19. The method of claim 18,
and exposing the tops of the SiCO spacers to etching after filling the spaces between the SiCO spacers with the dielectric layer.
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