KR20220105448A - Apparatus for auto changing gas cylinder - Google Patents

Abstract

Disclosed is an automatic gas container replacement apparatus, having an upper cap detachable unit configured to enable unmanned operation by automating a series of operations of separating an upper cap covering an upper part of a gas container from the gas container and attaching the upper cap to the gas container. The automatic gas container replacement apparatus, in the automatic gas container replacement apparatus provided in a gas cabinet in which a gas piping section is installed and automatically replacing the gas container, comprises the upper cap detachable unit which grips the upper cap of the gas container and detaches the upper cap from the gas container.

Description

Gas container automatic replacement device {APPARATUS FOR AUTO CHANGING GAS CYLINDER}

The present invention relates to an automatic gas container replacement device, and more particularly, to a gas container automatic replacement device for automatically replacing a gas container for supply of various gases used in a semiconductor manufacturing process, etc. with respect to a cabinet.

In general, semiconductor manufacturing processes such as etching, cleaning, and deposition require various process gases, and a gas cylinder is used to supply the process gas. A gas container filled with high-pressure gas is loaded into the gas cabinet and connected to a pipe, and the used empty gas container is unloaded from the gas cabinet and replaced with a new filled gas container.

This series of gas container replacement work is generally performed manually, and the process is as follows. First, the operator moves the gas container to the gas cabinet using a cart or the like, rolls the gas container, and binds it to the gas cabinet. After that, the upper cap of the gas container is rotated to separate it, and the valve cap is rotated to separate the valve cap from the valve port, and then a gasket is mounted on the valve port and a pipe is connected to the valve port. Then, by rotating the handle, the valve is opened to supply gas from the gas container to the pipe.

The empty gas container, which is exhausted of gas, is separated in the reverse order. That is, after locking the valve by rotating the handle, the pipe is separated from the valve port. Thereafter, the valve cap is rotated to be coupled to the valve port, and the upper cap is rotated to be coupled to the gas container. Thereafter, the operator removes the empty gas container from the gas cabinet and loads a new gas container filled with gas into the gas cabinet as described above. In this case, the gas container has a height of about 160 cm, a diameter of about 30 cm, and a weight of about 100 kg to 120 kg.

This manual gas container replacement operation has a high degree of difficulty due to the high-load gas container characteristics and a high risk of safety accidents due to the harmfulness of the gas being handled. Accordingly, recently, attempts have been made to automate the gas container replacement operation, and as an example, a gas supply device for a gas cylinder has been disclosed in Korean Patent Registration No. 10-2132173 (2020.07.03), which was previously applied. However, the gas supply device of the conventional gas cylinder has several problems to be improved.

Patent Literature: Republic of Korea Patent Registration No. 10-2132173 (2020.07.03)

In the present invention, a gas container automatic replacement device having an upper cap detachable unit configured to enable unmanned operation by automating a series of operations of separating the upper cap covering the upper part of the gas container from the gas container and mounting the upper cap on the gas container. provides

In addition, in the present invention, the components are optimized and arranged on the side and front of the piping area so as not to infringe on the rear space of the upper space where the piping area in the gas cabinet is installed, and to reduce the number of parts of the component devices. At the same time, it provides a gas container automatic replacement device having a very compact and efficient structure.

In addition, in the present invention, the upper cap is configured to rotate relatively to the gas container without having a driving part for rotating the upper cap gripping part in the upper cap detachable part, so that the upper space of the gas cabinet is small, thereby interfering with the piping area. It provides a gas container automatic replacement device that prevents

The gas container automatic replacement device according to the present invention is provided in a gas cabinet in which a gas piping area is installed and automatically replaces the gas container. Includes a detachable upper cap detachable for.

In addition, a container gripper for rotatably gripping the outer circumferential surface of the gas container is provided, and the container gripper rotates the gas container about the axis of the gas container in a state in which the upper cap detachable part grips the upper cap to remove the upper cap from the gas. Detach to the container.

The upper cap detachable portion: a cap gripping module for gripping the upper cap; and a cap lifting cylinder for lifting and lowering the cap gripping module.

In addition, the cap detachable body coupled to the gas cabinet; and a cap elevating block slidably connected in the vertical direction with respect to the cap detachable body, wherein the cap gripping module is rotatably connected to the cap elevating block.

The cap detachable body is disposed on the side and front side of the upper part of the gas cabinet, and rotates the cap holding module with respect to the cap elevating block so that the cap holding module reciprocates between the side of the gas cabinet and the upper cap of the gas container. A rotary drive unit is provided.

The cap gripping module includes: a plurality of fingers that are in close contact with or released from the outer circumferential surface of the upper cap to grip or release the upper cap; a gripping block guiding the fingers to be retracted or opened by slidably inserting the fingers; and a gripping cylinder connected to the finger to slide and drive the finger according to the elevation of the rod.

The container holding unit: a driving roller for rotatably gripping the outer peripheral surface of the gas container; and a roller rotation motor for rotating the driving roller to rotate the gas container about the axis of the gas container.

In addition, it is provided in the lower portion of the gas cabinet and includes a container table on which the bottom surface of the gas container is seated, the container table has a seating pad for seating the gas container, and the seating pad can be moved in a horizontal direction and can be freely rotated. it is composed

The gas container automatic replacement device according to the present invention enables unmanned operation of a series of operations of separating the upper cap from the gas container and mounting the upper cap on the gas container, thereby reducing operating costs and achieving complete automation without operator input. This can dramatically improve safety and productivity.

In addition, as the upper cap detachable part is optimized and disposed on the side and front of the piping area, it is possible to secure the upper space where the piping area in the gas cabinet is installed, and it is possible to secure a view when viewed from the front, which is advantageous for operation and monitoring. Not only that, but the number of components of the components is reduced and at the same time, it has a very compact and efficient structure.

In addition, the upper cap is configured to rotate relative to the gas container without having a driving part for rotating the upper cap gripping part in the upper cap detachable part, thereby preventing interference with the piping area by occupying a small upper space of the gas cabinet. and the upper cap can be efficiently detached from the gas container.

1 is a plan view showing an autonomous vehicle and a gas cabinet according to an embodiment of the present invention;
2 and 3 are perspective views illustrating an autonomous vehicle according to an embodiment of the present invention;
4 is a plan view showing an autonomous vehicle according to an embodiment of the present invention;
5 is a side view showing an autonomous vehicle according to an embodiment of the present invention;
6 is a perspective view showing a gas cabinet according to an embodiment of the present invention;
7 is a plan view showing an automatic gas container replacement device according to an embodiment of the present invention;
8 is a front view showing an automatic gas container replacement device according to an embodiment of the present invention;
9 is a side view showing an automatic gas container replacement device according to an embodiment of the present invention;
10 is a perspective view showing an automatic gas container replacement device according to an embodiment of the present invention;
11 is a view showing a main body part holding the gas container from which the upper cap is separated according to an embodiment of the present invention;
12 to 14 are side cross-sectional views showing a container table according to an embodiment of the present invention,
15 to 17 are perspective views showing a detachable upper cap according to an embodiment of the present invention,
18 is a side view showing a detachable upper cap according to an embodiment of the present invention;
19 is a plan view showing a detachable upper cap according to an embodiment of the present invention,
20 is a perspective view showing a container holding unit according to an embodiment of the present invention,
21 is a bottom view showing a container holding unit according to an embodiment of the present invention,
22 is a front view showing a container holding unit according to an embodiment of the present invention,
23 is a rear view showing a container holding unit according to an embodiment of the present invention,
24 and 25 are perspective views showing a body part and a main driving part according to an embodiment of the present invention;
26 is a side view showing a body part and a main driving part according to an embodiment of the present invention;
27 is a front view showing a body part and a main driving part according to an embodiment of the present invention;
28 is a rear view showing a body part and a main driving part according to an embodiment of the present invention;
29 and 30 are perspective views illustrating a gasket replacement module according to an embodiment of the present invention;
31 is a plan view showing a gasket replacement module according to an embodiment of the present invention;
32 and 33 are side cross-sectional views showing a gasket replacement module according to an embodiment of the present invention;
34 is a cross-sectional view showing an operating state of the gasket replacement module according to an embodiment of the present invention;
35 is an enlarged front view of a collect cylinder according to an embodiment of the present invention;
36 is a front view showing a grip part according to an embodiment of the present invention;
37 to 48 show an operation process of the automatic gas container replacement device according to an embodiment of the present invention.

Hereinafter, the technical configuration of the gas container automatic replacement device will be described in detail according to the accompanying drawings. In the following description, the x-axis, y-axis, and z-axis are arbitrarily set directions for convenience of description and do not limit specific directions.

1 to 11, the gas container automatic replacement system according to an embodiment of the present invention can be applied and used in various industrial fields such as a semiconductor manufacturing process, and includes an automatic gas container replacement device 1 . The gas container automatic replacement device (1) is provided in the gas cabinet (90) in which the gas piping area is installed to automatically replace the gas container (9). The gas container 9 is filled with various kinds of gas, and the gas container 9 is connected to the piping area of the gas cabinet 90 to supply gas.

The gas container automatic replacement device (1) includes a means for holding the gas container (9), a means for detaching the upper cap (91) from the gas container (9), and a gas container (9) on the axis of the gas container (9). means for rotating around drive parts for driving the means. In addition, the piping section of the gas cabinet 90 is disposed in the rear space of the upper space of the gas cabinet (90).

In particular, the gas container automatic replacement device (1) is disposed below or on the side (side) or in front of the piping area so as not to interfere with the piping area. 7 to 9, the space (E) for the piping area must be secured in the rear space of the upper space of the gas cabinet 90 . That is, other components should not be installed in the space portion (E) for the piping area, which inevitably limits the installation space of the automatic gas container replacement device (1).

The gas container automatic replacement device (1) according to the present invention has all components disposed below, on the side or in front of the space (E) for the piping area, and means for holding the gas container (9) described above, and the upper cap ( Means for detaching the gas container (9) from the gas container (9), means for rotating the gas container (9) about the axis of the gas container (9), and a valve covering the valve port (94) of the gas container (9) The optimal structure so that the means for detaching the cap from the gas container 9, the means for connecting the valve port 94 to the piping area, and the driving parts for driving the means can be implemented, while enabling smooth installation without interference with the piping area is to provide

The gas container automatic replacement device (1) includes an autonomous vehicle (8), a container table (2), a container holding part (4), an upper cap detachable part (3), a main body part (5), and a main driving part (6) and a gasket replacement module (7). The gas cabinet 90 is made of a box structure having a substantially rectangular parallelepiped shape, and a plurality of gas cabinets 90 are installed in a row. A door 99 for opening and closing the inside is provided on the front side of the gas cabinet 90, and the door 99 is configured to be opened and closed automatically by a separate power source. The gas container automatic replacement device (1) is provided with two in one gas cabinet (90).

The self-driving vehicle 8 is manufactured by attaching the necessary parts to the automatic driving device (AGV) released on the market as a basis, and automatically transferring the gas container 9 to the gas cabinet 90 . . That is, the autonomous vehicle 8 transports the gas container 9 filled with gas from the specific place to the gas cabinet 90 , and transfers the empty gas container 9 , which has used up all of the gas, from the gas cabinet 90 to the specific place. Or move it to another desired location. At this time, the self-driving vehicle 8 may operate separately for the role of bringing the filled gas container 9 and the role of removing the empty gas container 9 .

The autonomous vehicle (8) includes a traveling unit body (81), a container handler (85), a single power source (83), and vertical and horizontal guide means.

The driving unit main body 81 is configured to be able to travel and steer and to rotate around a specific pivot axis, so that it can freely change direction forward and backward, left and right, and drive even in a narrow space. The plurality of driving wheels 816 are evenly disposed under the driving part main body 81 to uniformly distribute the load. In addition, the handler wheel 815 is disposed under the handler support portion 82 to support the load of the gas container 9 and the handler support portion 82 . The driving unit body 81 may be implemented by an operator directly operating the operation, performing an automatic operation according to an automatically programmed logic, autonomous driving through a sensor and a CPU, or a selective combination thereof.

The driving unit main body 81 is provided with a control panel 811 for controlling the autonomous vehicle 8, and the handler support unit 82 is coupled to one side of the driving unit main body 81 in the y-axis direction. The handler support 82 includes a seating plate 822 , and the seating plate 822 seats the bottom surface of the gas container 9 . The handler support part 82 is made of a pair of plate-shaped members spaced apart in the x-axis direction, and extends in parallel toward the front of the y-axis from the traveling part main body 81 . The seating plate 822 is provided to connect the lower ends of the plate-shaped members of the handler support part 82 .

The container handler 85 holds and releases the gas container 9, and includes a pair of handler grips 851 and a handler grip driving unit. The pair of handler grips 851 are closed to each other to closely grip the outer peripheral surface of the gas container 9, and release the gripping state of the gas container 9 by opening. The handler grip driving unit drives the pair of handler grips 851 to retract or open. The pair of handler grips 851 is slidable in the x-axis direction with respect to the z-axis movable body 852 to be described later.

The power source 83 is made of a single piece, and by driving the container handler 85 vertically and horizontally, the gas container 9 is loaded and unloaded into the gas cabinet 90 . Further, the autonomous vehicle 8 includes a y-axis movable body 84, a y-axis guide, a z-axis movable body 852, and a z-axis guide. The y-axis movable body 84 is slidable in the y-axis direction with respect to the traveling unit body 81 . The y-axis guide part is connected between the traveling part main body 81 and the y-axis movable body 84, and guides the container handler 85 to be slidable in the y-axis direction.

More specifically, a pair of LM guides 841 are formed long in the y-axis direction on the upper portion of the traveling unit body 81, and the slider 842 is slidably connected to the LM guides 841 in the y-axis direction. do. The y-axis movable body 84 is integrally formed with the slider 842 or is coupled to the slider 842 to slide together in the y-axis direction. One power source 83 is provided between a pair of LM guides 841 .

The power source 83 is composed of a driving motor 831 and is coupled to the upper portion of the driving unit body 81 . A reduction gear 832 is connected to the driving motor 831 , and the driving shaft 833 and the driven shaft 834 are connected by a belt 835 . A screw shaft 836 is coupled to the driven shaft 834 , and the screw shaft 836 is rotated by the rotation of the driving motor 831 . The screw shaft 836 is rotatably connected to the upper portion of the traveling unit body 81 with the y-axis direction as the longitudinal direction, and the y-axis movable body 84 is screw-coupled to the screw shaft 836 . When the driving motor 831 rotates, the y-axis movable body 84 moves forward or backward in the y-axis direction.

The z-axis movable body 852 is slidable in the vertical direction with respect to the y-axis movable body 84 . The z-axis guide portion is connected between the y-axis movable body 84 and the z-axis movable body 852, and guides the container handler 85 to be slidable in the z-axis direction. The container handler 85 is connected to the z-axis movable body 852 . More specifically, the bracket 844 is coupled to the y-axis movable body 84 and the slider 842 , and the plate member 845 is coupled to the front of the bracket 844 .

A slider 846 is coupled to the plate member 845 , and an LM guide 847 is formed on the z-axis movable body 852 to be elongated in the z-axis direction. A through hole 848 penetrating through the y-axis direction is formed in the plate member 845 so that the link member 858, which will be described later, can freely ascend and descend. In addition, the slider 846 coupled to the plate member 845 is connected to be slidably movable in the z-axis direction along the LM guide 847 coupled to the z-axis movable body 852 . That is, the z-axis movable body 852 receives a force to fall downward with respect to the plate member 845 by its own load.

A support bracket 854 is formed to extend in the y-axis direction in front of the z-axis movable body 852 , and a screw shaft 853 is formed to extend along the x-axis in the longitudinal direction to the support bracket 854 . The screw shaft 853 not only functions as a power transmission means for driving the handler grip 851 , but also spans the upper end of the handler support part 82 so that the z-axis movable body 852 is no longer lower with respect to the plate member 845 . It functions as a stopper to support it so that it does not fall.

In addition, a slide rod 843 is formed extending in the x-axis direction on the y-axis movable body 84 and the slider 842 . One side of the slide rod 843 is guided by being connected to a slot 821 to be described later. The other side of the slide rod 843 is connected to a long hole 849 formed long in the vertical direction in the guide bracket 859 . The link member 843 passes through the plate member 845 to connect the slide rod 843 and the z-axis movable body 852 .

The handler grip driving unit includes a handler grip motor 86 . The handler grip motor 86 is fixed to the plate member 845 coupled to the y-axis moving body 84 . The drive shaft 861 of the handler grip motor 86 is connected to a screw shaft 853 provided in the z-axis moving body 852 through a belt 862 . A pair of sliders 856 are screwed to the screw shaft 853 , and a handler grip 851 is coupled to each slider 856 . An LM guide 857 is formed to extend in the x-axis direction in front of the z-axis movable body 852 , and a pair of sliders 856 are slidably connected to the LM guide 857 in the x-axis direction.

When the handler grip motor 86 is rotated in one direction, the screw shaft 853 provided in the z-axis movable body 852 is rotated, and a pair of handler grips 851 come together by the rotation of the screw shaft 853. and hold the outer peripheral surface of the gas container (9). In addition, when the handler grip motor 86 is rotated in the other direction, the screw shaft 853 provided in the z-axis movable body 852 is rotated, and a pair of handler grips 851 is rotated by the rotation of the screw shaft 853 . They are separated from each other to release the holding state of the gas container (9).

The vertical and horizontal guide means guide both the vertical and horizontal driving of the container handler 85 with a single power source 83 . The vertical and horizontal guide means are provided with a slot 821 in the shape of a long hole for slidably guiding the slide rod 843 provided in the container handler 85 . Practically, the slide rod 843 is connected to the side of the y-axis movable body 84 connected to the container handler 85 .

In more detail, slots 821 are formed extending in the y-axis direction on both sides of the handler support 82 . The slot 821 includes an inclined section and a horizontal section 8211 . The inclined section is a section for vertically moving the container handler 85 , and the horizontal section 8211 is a section for horizontally moving the container handler 85 . The slope section is formed on both sides of the horizontal section 8211 and includes an ascending slope section 8213 and a descending slope section 8212 . The rising slope section 8213 is a section formed in the rear of the horizontal section 8211 in the y-axis direction to raise the container handler 85 . The descending slope section 8212 is formed in front of the horizontal section 8211 in the y-axis direction, and is a section for lowering the container handler 85 .

When the driving motor 831 is rotated, the screw shaft 836 is rotated and the y-axis movable body 84 is advanced in the y-axis direction. At this time, the slide rod 843 advances in the y-axis direction in the ascending slope section 8213 and rises in the z-axis direction, and the z-axis movable body 852 connected to the slide rod 843 through a link member 858 . ) rises with respect to the y-axis movable body (84). Thereafter, the slide rod 843 horizontally advances only in the y-axis direction in the horizontal section 8211 . Thereafter, the slide rod 843 advances in the y-axis direction in the descending slope section 8212 and descends in the z-axis direction, and the z-axis movable body 852 connected to the slide rod 843 through the link member 858. ) descends with respect to the y-axis movable body (84).

12 to 14 , the container table 2 is provided under the gas cabinet 90 , the bottom surface of the gas container 9 is seated, and a seating pad 29 is provided. The seating pad 29 is formed in a circular plate shape having a predetermined thickness, and the gas container 9 is mounted thereon. The seating pad 29 is freely movable in the horizontal direction and freely rotatable about the axis. In this case, the axis of the seating pad is the center in the left-right direction in FIG. 14 . The container table 2 aligns the center of the seating pad 29 so that the seating pad 29 is positioned in the correct position in the horizontal direction.

The container table 2 includes a table body 212 , a center piston 24 , a slide table 23 , and a load cell 25 . The table body 212 is fixedly installed at the lower portion of the gas cabinet 90 , and may be integrally formed with the gas cabinet 90 . In the upper surface of the table body 212, a circular elevating groove 213 is recessed to a predetermined depth. The center piston 24 is connected to the table body 212 so as to be elevating by a power source. That is, the center piston 24 is slidably connected to the elevating groove 213 , and an air port 214 for supplying air to the elevating groove 213 is formed.

The slide table 23 has a circular plate shape having a predetermined thickness, and a receiving groove 233 is formed in the center of the slide table 23 . The receiving groove 233 accommodates the center piston 24, and is formed to have a smaller diameter toward the upper portion. A ball or hemispherical plunger 241 is provided at the upper end of the center piston 24 . By controlling the air supply through the air port 214, the center piston 24 and the plunger 241 are raised and lowered integrally.

In addition, the seating pad 29 is coupled to the upper portion of the slide table 23 , and a center hole 232 is formed in the center of the seating pad 29 . In addition, a guide member 21 is provided on the edge of the table body 212 . A guide groove 211 for inserting the end 231 of the slide table 23 is formed in the guide member 21 . In this case, the inner diameter of the guide groove 211 is formed larger than the diameter of the slide table 23, so that it can freely move horizontally within the inner diameter range of the guide groove 211 of the slide table 23 and freely rotate around the axis. This is possible.

That is, the slide table 23 is disposed on the upper end of the table body 212 , and the seating pad 29 is disposed on the upper end of the slide table 23 . In addition, the slide table 23 and the seating pad 29 are coupled in the vertical direction to form an integral body, and a ball bearing 22 is provided between the table body 212 and the slide table 23 so that movement and rotation between each other are free. it's bad In addition, a ball bearing 22 is also provided at a connection portion between the guide member 21 and the slide table 23 . In this case, the ball bearing 22 may be replaced by other bearing means such as an air bearing.

When air is supplied into the elevating groove 213 through the air port 214 in the state shown in FIG. 12 , the center piston 24 and the plunger 241 rise as shown in FIG. 13 . When the plunger 241 rises, the slide table 23 and the seating pad 29 move to the right toward the center by the receiving groove 233 accommodating the plunger 241 . Thereafter, as shown in FIG. 14 , when the center piston 24 and the plunger 241 are fully raised, the slide table 23 and the seating pad 29 are aligned to the center. In addition, when the center piston 24 and the plunger 241 are lowered, the seating pad 29 can freely move horizontally and freely rotate in a state where the gas container 9 is placed (moved state). .

The load cell 25 is a sensor for detecting the load of the gas container 9 , and is provided under the seating pad 29 , that is, under the table body 212 . When the load of the gas container 9 sensed through the load cell 25 is less than or equal to the reference value, the control unit to be described later can automatically perform the replacement of the gas container 9 .

20 to 23 , the container holding part 4 holds and fixes the outer circumferential surface of the gas container 9, and includes a grip part 41, a grip driving part 44, and a gas container rotating part. . The grip part 41 includes a container gripper 411 , a driving roller 42 , and an idle roller 421 . The container gripper 411 is made of a pair, and is provided to be slidable in the x-axis direction with respect to the base 61 . The base 61 is fixed to the gas cabinet 90, the LM guide 461 is provided on the front side of the base 61 in the y-axis direction, and the LM guide 461 is formed long in the x-axis direction.

The container gripper 411 has a plate shape having a predetermined thickness, and an inner side is curved in a streamline shape. A plurality of container grippers 411 are formed to be spaced apart in the z-axis direction, and rear ends of the plurality of container grippers 411 are coupled to the gripper plate 412 . A slider 462 is coupled to the rear surface of the gripper plate 412 in the y-axis direction, and the slider 462 is slidably connected to the LM guide 461 coupled to the base 61 in the x-axis direction. In addition, a support bracket 413 is formed to extend on the rear surface of the gripper plate 412 in the y-axis direction.

The driving roller 42 is provided on one of the pair of container grippers 411 and rotatably grips the outer peripheral surface of the gas container 9 . That is, a driving roller 42 is rotatably connected to one container gripper 411 about an axis in the z-axis direction. Two driving rollers 42 are provided per layer in the z-axis direction, and at least one layer is formed, so that four driving rollers 42 are provided on one gripper plate 412 .

The idle roller 421 is provided on the other of the pair of container grippers 411 and rotatably grips the outer peripheral surface of the gas container 9 . An idle roller 421 is rotatably connected to the other container gripper 411 about the z-axis direction. Two idle rollers 421 are provided per layer in the z-axis direction, and at least one layer is formed, and thus, four idle rollers 421 are provided on the other gripper plate 412 . The outer peripheral surface of the gas container 9 is fixed in close contact between the driving roller 42 and the idle roller 421 .

The grip driving unit 44 includes a container holding cylinder 441 . The container gripping cylinder 441 provides power to close or open a pair of container grippers 411 from each other. The container gripping cylinder 441 is coupled to the base 61 side, and the rod 442 of the container gripping cylinder 441 is coupled to the support bracket 413 . That is, as the rod 442 of the container gripping cylinder 441 moves forward and backward, the support bracket 413 and the container gripper 411 together slide in the x-axis direction with respect to the base 61 .

The gas container rotating unit rotates the gas container 9 in place about the axis of the gas container 9 , and includes a roller rotation motor 43 . The roller rotation motor 43 is fixed to the container gripper 411 and rotates the driving roller 42 to rotate the gas container 9 around the axis of the gas container 9 . A reduction gear 431 is connected to the roller rotation motor 43 , the driving shaft 432 and the driven shaft 433 are connected to the belt 434 , and the driving roller 42 is connected to the driven shaft 433 .

When the driving shaft 432 of the roller rotation motor 43 rotates in a state where the gas container 9 is gripped between the driving roller 42 and the idle roller 421 , power is transmitted by the belt 434 and the driving roller 42 is rotated so that the gas container 90 is rotated about the axis. In this case, the idle roller 421 supports the rotation of the gas container 9 on the opposite side of the driving roller 42 and is rotated idle.

The container holding unit 4 further includes a gripper link 47 . The gripper link 47 is formed in the shape of a bar having a predetermined length, and the central portion thereof in the longitudinal direction is rotatably connected to the base 61 side about the pivot shaft 471 , directly or indirectly. In addition, both sides of the gripper link 47 are rotatably connected to the container gripper 411 side, respectively. That is, as shown in FIG. 22 , the fastening plate 473 is coupled to the gripper plate 412 on the left container gripper 411 side, and the fastening plate 476 is coupled to the gripper plate 412 on the right container gripper 411 side. ) are combined.

Both sides of the gripper link 47 are rotatably connected to the fastening plates 473 and 475 through connecting portions 474 and 476, respectively. Long hole-shaped clearance holes 472 are formed in both side connection portions 474 and 476 of the gripper link 47 , and pins connected to the clearance holes 472 are formed in each fastening plate 473 , 475 . When the pair of container grippers 411 are driven to retract or open from each other, the gripper link 47 synchronously moves the pair of container grippers 411 to stably grip the gas container 9 and The rotational motion of the gripper link 47 may be converted into a linear motion through the clearance of the clearance hole 472 .

15 to 19 , the upper cap detachable part 3 holds the upper cap 91 of the gas container 9 and detaches the upper cap 91 from the gas container 9 . The upper cap 91 is screw-coupled to the upper portion of the gas container 9 and is fastened when the upper cap 91 is rotated in one direction with respect to the gas container 9 and is separated when rotated in the other direction. In this case, the upper cap detachable part 3 rotates the gas container 9 about the axis of the gas container 9 in a state in which the upper cap 91 is gripped, and the upper cap 91 is rotated. ) is desorbed to the gas container (9).

The upper cap detachable part 3 includes a body part 31 , a cap gripping module 35 , and a rotation driving part 33 . The main body 31 includes a cap detachable body 311 , a cap elevating block 313 , and a cap elevating cylinder 32 . The cap detachable body 311 is coupled to the gas cabinet 90, and a fastening hole 312 for coupling to the gas cabinet 90 side is formed on one side. The slider 316 is coupled to one surface of the cap detachable body 311 in the x-axis direction. The cap lifting block 313 is slidably connected in the vertical direction with respect to the cap detachable body 311 .

The LM guide 315 is formed on one surface of the cap lifting block 313 facing the cap detachable body 311 in the x-axis direction. The LM guide 315 is formed long in the z-axis direction, and connects the slider 316 coupled to the cap detachable body 311 to be slidable in the z-axis direction. The block base 314 is coupled to the upper end of the cab elevating block 313 . The cap elevating cylinder 32 provides power for elevating and driving the cap gripping module 35 , and slidingly drives the cap elevating block 313 in the vertical direction with respect to the cap detachable body 311 .

The cap gripping module 35 holds the upper cap 91 and includes a plurality of fingers 352 , a gripping block 351 and a gripping cylinder 353 . The fingers 352 are in close contact with the outer circumferential surface of the upper cap 91 to grip or release the upper cap 91 to release the grip of the upper cap 91 . Although it is illustrated that two fingers 352 are provided, it may be formed of three or more fingers. A plurality of projections 356 are formed on the inner surface of the finger 352 to prevent slipping by increasing friction with the upper cap 91 when the gas container 9 is rotated.

The gripping block 351 guides the fingers 352 to be slidably inserted so that the fingers 352 are retracted or opened. On the other hand, a slide rib 354 having a slide protrusion 355 is provided at the upper end of the finger 352 . An oblique groove 358 connected to the rod of the gripping cylinder 353 is formed inside the slide rib 354 . In addition, a finger groove 357 is formed on the side of the gripping block 351 . The finger groove 357 slidably inserts the slide rib 354 of the finger 352, so that the fingers 352 are concave or spread apart.

The slide protrusions 355 protruding from both sides of the slide rib 354 guide the slide rib 354 to slide smoothly without departing from the lower side in a state in which the slide rib 354 is inserted into the finger groove 357 . The rod of the gripping cylinder 353 is slidably connected to the diagonal groove 358 formed in the slide rib 354 provided at the upper end of the finger 352 . The gripping cylinder 353 is connected to the finger 352 to slide the finger 352 with respect to the gripping block 351 according to the elevation of the rod.

The rotation driving unit 33 rotates the cap gripping module 35 with respect to the cap elevating block 313 so that the cap gripping module 35 is between the side of the gas cabinet 90 and the upper cap 91 of the gas container 9 . to reciprocate. The rotary driving unit 33 includes a rotary arm 334 and a rotary motor 339 , and the cap gripping module 35 is rotatably connected to the cap elevating block 313 . That is, one side of the rotary arm 334 is rotatably connected to the block base 314 coupled to the upper end of the cap elevating block 313 , and the cap gripping module 35 is provided on the other side.

The drive shaft 331 of the rotary motor 339 is rotatably connected to the block base 314, and the driven shaft 332 is connected to one side of the rotary arm 334 so that the drive shaft 331 and the driven shaft 332 are It is connected by a belt 333 . When the rotary motor 339 rotates, the rotary arm 334 rotates with respect to the block base 314 to be in close contact with the side of the gas cabinet 90 or located directly above the upper cap 91 . In addition, the cap detachable body 3 is disposed on the side and the front side of the upper portion of the gas cabinet (90). The cap detachable body 3 rotates the cap gripping module 35 so as to be in close contact with the side of the gas cabinet 90 while gripping the upper cap 91 to store the upper cap 91 .

Through this configuration, a series of operations of separating the upper cap 91 from the gas container 9 and mounting the upper cap 91 on the gas container 9 can be operated unmanned, thereby reducing manufacturing costs, Complete automation is possible without operator input, and productivity can be dramatically improved. In addition, the upper space is not provided with a driving part for rotating the upper cap gripping part in the upper cap detachable part 3 but is provided with a driving part for rotating the gas container 9 in the container gripping part 4 located at a relatively lower portion, the upper space Since the driving part can be omitted on the side, the upper space of the gas cabinet 90 is small, thereby preventing interference with the piping area, and the upper cap 91 can be efficiently detached from the gas container 9 .

In addition, as the upper cap detachable part 3 is optimized and disposed on the side and front of the piping area, interference between the piping areas is fundamentally prevented without infringing on the rear space of the upper space where the piping area in the gas cabinet 90 is installed. It is not only advantageous for monitoring as it can secure a field of view when viewed from the front, but also reduces the number of components and has a very compact and efficient structure. In particular, the cap gripping module 35 rotates the upper cap 91 so as to be in close contact with the side surface of the gas cabinet 90 and stores it, so that the front view of the gas cabinet 90 can be more smoothly secured.

24 to 28 , the body part 5 includes a body block 51 , a valve cap detachable part 53 , a valve connection part 54 , and a valve port alignment part 56 . The valve cap detachable part 53 detaches the valve cap covering the valve port 94 of the gas container 9 from the gas container 9 . The valve connection part 54 is spaced apart from the valve cap detachable part 53 in the x-axis direction, and connects the valve port 94 of the gas container 9 to the piping area. The valve port aligning unit 56 performs a function of mechanically aligning the valve port 94 with respect to the valve cap detachable unit 53 in a fixed position.

The body block 51 is configured to be moved in the x-axis, y-axis and z-axis directions by a main driving unit 6 to be described later. A valve cap detachable part 53, a valve connection part 54 and a valve port alignment part 56 are provided on the front side of the body block 51 in the y-axis direction. A cylinder for the body is provided inside the body block 51 , and the cylinder for the body is for advancing the valve cap detachable part 53 and the valve connection part 54 to the valve port 94 . That is, the cylinder for the body reciprocates in the y-axis direction with respect to the body block 51 with respect to the valve cap detachable part 53 and the valve connection part 54 .

The valve cap detachable part 53 and the valve connection part 54 are connected to each other through a connection block 535 and reciprocate together in the y-axis direction. The valve cap detachable part 53 and the valve connection part 54 are provided side by side in front of the y-axis in the connection block 535 , and maintain a state spaced apart by a predetermined distance in the x-axis direction through the connection block 535 . A rotation motor 55 for the body is provided at the rear of the body block 51 in the y-axis direction.

The rotating motor 55 for the main body rotates the valve cap detachable part 53 to detach the valve cap from the gas container 9, and rotates the valve connecting part 54 to connect or connect the valve port 94 to the piping area. release it That is, the reduction gear 551 is connected to the drive shaft of the rotation motor 55 for the main body, and the bevel gears 552 and 553 are connected to the output shaft of the reduction gear 551 . A pair of driven gears 554 and 555 are meshed on both sides of the vertical bevel gear 553 .

One driven gear 554 forms a coaxial 556 with the valve cap detachable part 53 to rotate the valve cap detachable part 53 . In addition, the other driven gear 555 rotates the valve connection part 54 and coaxial 557 with the valve connection part 54 . Through this configuration, when the rotating motor 55 for the main body is rotated, the valve cap detachable part 53 and the valve connection part 54 are rotated together to remove the valve cap from the gas container 9 or the valve port 94. connected or disconnected from the piping area.

The valve cap detachable portion 53 has a substantially circular tube shape, and a coupling hole is formed to accommodate the valve cap therein. The coupling port of the valve cap detachable part 53 is made to correspond to the shape of the valve cap. For example, when the valve cap has a hexagonal shape, the coupling part of the valve cap detachable part 53 also takes a hexagonal shape. In addition, the coupling port of the valve cap detachable portion 53 is rotated about the axis by the above-described rotating motor 55 for the main body.

When the valve cap detachable part 53 advances in the y-axis direction toward the gas container 9 , the coupling port of the valve cap detachable part 53 engages the valve cap coupled to the valve port 94 . When the rotating motor 55 for the main body rotates in one direction in a state where the coupling port of the valve cap detachable part 53 and the valve cap are engaged, the coupling port of the valve cap detachable part 53 rotates in one direction so that the valve cap is moved to the gas container ( After being separated from the valve port 94 of 9), it is stored until the gas supply of the gas container 9 is completed and the gas container 9 is replaced in a state where it is fixed to the coupling port of the valve cap detachable part 53. do. Thereafter, the valve cap detachable unit 53 performs reverse and other driving operations in the y-axis direction. The detailed operation sequence will be described in detail again later.

In addition, when all the gas is exhausted and the gas container 9 is replaced, the valve cap detachable part 53 having the valve cap moves forward in the y-axis direction toward the gas container 9 . When the rotating motor 55 for the body rotates in the other direction, the coupling port and the valve cap of the valve cap detachable part 53 are rotated in the other direction so that the valve cap is fastened to the valve port 94 of the gas container 9 and , the valve cap detachable part 53 is separated from the valve cap by moving backward in the y-axis direction.

The valve connection part 54 is composed of a circular tube 541 and a port fastener 543 . The circular tube 541 is made of a substantially circular tube shape, and the port fastener 543 is rotatably provided in front of the y-axis. The port fastening hole 543 has a shape corresponding to the valve cap, and a gasket mounting hole 542 in which the gasket 92 is mounted is formed on the front side. When the valve port 94 and the port fastener 543 are fastened, the internal flow path of the valve connection part 54 connected to the gas pipe 549 communicates with the inside of the gas container 9 . In addition, the gas pipe 549 is connected to the pipe section of the gas cabinet (90).

After the valve connection part 54 advances in the y-axis direction toward the gas container 9, when the rotation motor 55 for the main body rotates in one direction, the port fastener 543 is rotated in one direction and the port fastener 543 is rotated in one direction. is fastened to the valve port 94 of the gas container 9 . On the other hand, when all the gas is exhausted and the rotation motor 55 for the main body rotates in the other direction when the gas container 9 is replaced, the port fastener 543 is rotated in the other direction and then the valve connection part 54 rotates the y-axis. direction, the port fastener 543 is separated from the valve port 94 of the gas container 9 .

The valve port alignment unit 56 includes an alignment finger 561 and a finger driving unit 562 . The alignment fingers 561 are made of a pair spaced apart in the x-axis direction, and are configured to be slidable in the x-axis direction from both sides of the valve cap detachable part 53 in the x-axis direction. The finger driving unit 562 drives the alignment fingers 561 to retract or open, and may have a cylindrical structure.

A pair of aligning fingers 561 is provided in front of the valve cap detachable part 53 in the y-axis direction, and an annular groove 563 bent in a streamline shape is formed on the surfaces facing each other. When the pair of alignment fingers 561 are closed, the annular grooves 563 facing each other form a semicircular shape to align the valve port 94 of the gas container 9 . That is, when the pair of aligning fingers 561 are closed, the aligning fingers 561 rotate the gas container 9 about the axis of the gas container 9 to detach the valve port 94 from the valve cap. It is placed on the part (53).

As the body part 5 reciprocates in the x-axis direction, the valve port 94 of the gas container 9 faces the valve cap detachable part 53 or the valve connection part 54 faces. Meanwhile, the main body 5 further includes a handle operation unit 52 , a handle driving motor 57 , and a handle operation unit cylinder 58 . The handle operation part 52 is disposed on the upper part of the body part 5 to rotate the valve handle 93 of the gas container 9 . The handle driving motor 57 provides rotational power to the handle operating unit 52 , and the handle operating unit cylinder 58 moves the handle operating unit 52 in the y-axis direction.

More specifically, the handle operation unit cylinder 58 is fixedly coupled to the upper portion of the body block 51 . The rod 581 of the handle operation unit cylinder 58 is connected to the handle operation block 582 , so that the handle operation block 582 moves forward and backward with respect to the body block 51 in the y-axis direction. A handle driving motor 57 is fixedly coupled to the handle operation block 582 . The reducer 571 is connected to the drive shaft of the handle driving motor 57 , and the output shaft of the reducer 571 is connected to the handle operation unit 52 through the gear box 572 . The handle operation unit 52 is rotated by rotation of the handle driving motor 57 to rotate the handle 93 of the gas container 9 .

The main driving part 6 drives the body part 5 to move the valve cap detachable part 53 and the valve connection part 54 in the x-axis, y-axis and z-axis directions. The main driving unit 6 includes an x-axis driving unit 62 for moving the main body 5 along the x-axis, a y-axis driving unit 64 for moving the main body 5 along the y-axis, and the main body 5 . It includes a z-axis driving unit 66 for moving in the z-axis. The main driving unit 6 is disposed above the base 61 installed in the gas cabinet 90 .

More specifically, the LM guide 623 is coupled to the upper portion of the base 61 in the x-axis direction, and the slider 624 is slidably connected to the LM guide 623 in the x-axis direction. An x-axis block 63 is coupled to the upper portion of the slider 624 , and the x-axis block 63 is slidable in the x-axis direction with respect to the base 61 . The x-axis driving unit 62 includes x-axis cylinders 621 and 622 that provide power to drive the x-axis block 63 . The x-axis cylinders 621 and 622 may be configured as a rodless cylinder that can be installed in a relatively narrow space compared to the same stroke, and one cylinder 621 is coupled to the base 61 side and the other one The cylinder 622 is coupled to the x-axis block 63 .

A y-axis cylinder 641 is fixedly coupled to the upper portion of the x-axis block 63 . The y-axis bracket 642 is connected to the rod of the y-axis cylinder 641 , and the y-axis block 65 is coupled to the y-axis bracket 642 . The y-axis bracket 642 is slidably connected to the x-axis block 63 in the y-axis direction through the LM guide and the slider. As a result, the y-axis driving unit 64 includes a y-axis cylinder 641 that provides power to drive the y-axis block 65, and the y-axis block 65 is moved in the y-axis direction with respect to the x-axis block 63. is driven by sliding

The upper portion of the y-axis block 65 is fixedly coupled to the z-axis cylinder 661 . A z-axis block 67 is connected to the rod of the z-axis cylinder 661, and the z-axis block 67 is slidable in the z-axis direction with respect to the y-axis block 65 through the LM guide and slider 662. . As a result, the z-axis driving unit 66 includes a z-axis cylinder 661 that provides power to drive the z-axis block 67 so that the z-axis block 67 is moved in the z-axis direction with respect to the y-axis block 65 . is driven by sliding

29 to 36 , the gasket replacement module 7 removes the used gasket 92 from the valve connection part 54 and installs a new gasket 92 on the valve connection part 54 to perform the gasket replacement operation. It functions automatically. The gasket replacement module 7 includes a replacement module base 76 , a main block 77 , a main block cylinder 75 , a magazine 71 , and a grip portion 78 . The replacement module base 76 has a body 761 fixedly installed on the gas cabinet 90 side, and a main block cylinder 75 is coupled to one side of the body 761 .

The main block cylinder 75 provides power for moving the main block 77 forward and backward in the y-axis direction. The rod 751 of the main block cylinder 75 is connected to the slider 754 , and the slider 754 is slidably connected to the main block cylinder 75 in the y-axis direction. The fastening block 752 is coupled to the front of the slider 754 in the y-axis direction, and the fastening block 752 is integrally formed with the main block 77 or is coupled to the main block 77 . As a result, the main block 77 is driven back and forth in the y-axis direction by the operation of the main block cylinder 75 .

The main block 77 includes a vacuum piston 771 and a collector piston 772 . The vacuum piston 771 moves forward and backward in the y-axis direction and functions to adsorb and hold the gasket 92 in a vacuum. The collector piston 772 moves forward and backward in the y-axis direction and is inserted into the inner diameter of the gasket 92 to grip the gasket 92 . In addition, a vacuum cylinder chamber 798 for moving the vacuum piston 771 forward and backward and a collect cylinder chamber 797 for moving the collector piston 772 forward and backward are formed in the main block 77 . The collect cylinder chamber 797 is partitioned behind the vacuum cylinder chamber 798 .

The vacuum piston 771 is slidably provided in the vacuum cylinder chamber 798 in the y-axis direction, and a seal (Seal: O) such as an O-ring for sealing is provided at the contact portion. A first air port 775 for advancing the vacuum piston 771 and a second air port 776 for moving the vacuum piston 771 are formed on one side of the vacuum cylinder chamber 798 . The vacuum piston 771 is composed of a piston reciprocating in the vacuum cylinder chamber 798 and a rod integrally extended in the y-axis front from the piston. The rod of the vacuum piston 771 passes through the main block 77 and protrudes toward the front of the y-axis.

In addition, a vacuum line 754 is formed on the rod of the vacuum piston 771 . The vacuum line 754 is formed to extend to the rod end of the vacuum piston 771 . In addition, the vacuum line 754 is connected to the vacuum line 796 formed in the main block 77 , and the vacuum line 796 of the main block 77 is connected to the vacuum port 756 . Accordingly, when vacuum is applied to the vacuum lines 796 and 754 through the vacuum port 756 , the gasket 92 located at the rod end of the vacuum piston 771 is vacuum-adsorbed. The vacuum line 754 of the vacuum piston 771 is configured to be always connected to the vacuum line 796 of the main block 77 when the vacuum piston 771 moves forward and backward. To this end, the vacuum line 796 of the main block 77 is formed to extend in the sliding direction with a sufficient length in consideration of the sliding width of the vacuum piston 771 .

The collect piston 772 is provided to be slidable in the y-axis direction in the collect cylinder chamber 797, and a seal (O) such as an O-ring for sealing is provided at the contact portion. A first air port 773 for moving the collector piston 772 forward and a second air port 774 for moving the collector piston 772 backward are formed on one side of the collect cylinder chamber 797 . The collect piston 772 includes a piston reciprocating in the collect cylinder chamber 797 and a rod 778 integrally extended from the piston to the front of the y-axis.

In addition, the collector piston 772 is located on the same axis as the vacuum piston 771, and is made possible to move forward and backward through the vacuum piston 771. That is, the rod 778 of the collector piston 772 extends to the inside of the vacuum piston 771 , and the collector core 779 is coupled to the end of the rod 778 . The rod 778 and the collect core 779 of the collector piston 772 are integrally moved forward and backward through the vacuum piston 771 .

In addition, the collector piston 772 has a collector exterior 758 and a collector core 779 . The collect exterior 758 is coupled to the end of the vacuum piston 771 to protrude, and is inserted into the inner diameter of the gasket 92 . The collect core 779 is moved forward and backward through the collect exterior 758, and a taper 757 is formed on the outer circumferential surface so that the diameter increases toward the end. As the collect core 779 moves forward and backward, the end 759 of the collect core 779 is drawn in or drawn out to the inside of the collect exterior 758 in the forward and backward direction (y-axis direction). A driver groove 792 for assembly is formed in the center of the end 759 of the collect core 779 .

The collect exterior 758 is formed in a circular tube shape so that the collect core 779 is penetrated. In the y-axis direction, one end of the collector exterior 758 is provided with a block 795 for fixing the exterior appearance and is coupled with a screw 794 , and the other end is configured to protrude from the end of the vacuum piston 771 . The other end portion of the collector exterior 758 forms a fine gap 793 with the inner diameter of the vacuum piston 771 . In addition, a slit 789 in the shape of a slit is formed in the collector exterior 758 . The slit 789 is formed to a predetermined depth in the forward and backward direction of the collect core 779 and is radially disposed along the periphery of the collect exterior 758 . Accordingly, the outer diameter of the collect outer 758 is enlarged or contracted by the forward and backward movement of the collect core 779 .

Three slits 789 may be disposed at intervals of 120° as shown, and may be formed in plurality, such as two or four. Through the slit 789 and the fine gap 793, the collect appearance 758 can be expanded finely in the vacuum piston 771. That is, the collect exterior 758 is slightly opened when an external force is applied, and a force to return to its original state is applied by its own elastic restoring force. As a result, when the collect core 779 moves backward, the outer circumferential surface of the collect core 779 presses the inner circumferential surface of the collect outer 758 by the taper 757, so that the collect outer 758 is expanded to the inner diameter of the gasket 92. The gasket 92 is clamped by being in close contact.

The magazine 71 is disposed on the upper portion of the grip portion 78 and serves to supply the gasket 92 . The magazine 71 is fixedly coupled to the replacement module base 76 and includes a magazine housing 711 , a lower stopper 713 , an upper stopper 712 , and an escape cylinder. The magazine housing 711 is made so that a plurality of gaskets 92 can be stacked in a line therein. A gasket inlet is formed at the upper end of the magazine housing 711 and a gasket outlet is formed at the lower end. In this case, the magazine housing 711 in which the gasket 92 is loaded in advance may be prepared in advance, and the magazine housing 711 may be replaced with a cylindrical body if necessary.

The lower stopper 713 is provided at the lower end of the magazine housing 771 so as to be able to move forward or backward to prevent or drop the gasket 92 . The upper stopper 712 is provided on the upper side of the lower stopper 713 and is provided to be able to move forward or backward to prevent or drop the gasket 92 . The escape cylinder provides power to drive the lower stopper 713 and the upper stopper 712 .

The escape cylinder includes a first escape cylinder 73 for driving the upper stopper 712 and a second escape cylinder 74 for driving the lower stopper 713 . The rod 731 of the first escape cylinder 73 is connected to the upper stopper 712 , and the rod 741 of the second escape cylinder 74 is connected to the lower stopper 713 through a link 745 . Through the link 745, interference between escape cylinders and interference between other driving cylinders are prevented, and the size in the z-axis direction can be compactly configured.

45 , the lower stopper 713 moves forward and the upper stopper 712 moves backward, so that the gasket 92 falls to the lower stopper 713 . Thereafter, the upper stopper 712 advances to prevent the remaining gaskets 92 from falling except for the gasket 92 positioned between the upper stopper 712 and the lower stopper 713 . Thereafter, the lower stopper 713 moves backward and only the gasket 92 positioned between the upper stopper 712 and the lower stopper 713 falls.

The grip part 78 is disposed in front of the vacuum piston 771 and the collector piston 772 and below the magazine 71 . The grip part 78 grips the gasket 92 supplied from the magazine 71 and the gasket 92 collected from the valve connection part 54 . In addition, the grip portion 78 includes a grip cylinder 79 and a pair of guide grips 782 . In addition, the grip cylinder 79 is fixedly coupled to the replacement module base 76, and the rod 791 at the lower end is driven forward and backward in the z-axis direction.

The pair of guide grips 782 are rotated by the grip cylinder 79 to grip or release the gasket 92 by retracting or opening each other. The upper portion of the guide grip 782 is rotatable about the pivot shaft 717 through a pin and slot structure on the rod 791 of the grip cylinder 79 . The grip portion 78 includes a rotation induction block 715 coupled to the rod 791 of the grip cylinder 79 . The rotation guide block 715 has guide grooves 716 concave in a long hole shape on both sides thereof. In addition, a guide pin 783 inserted into the guide groove 716 is provided in the guide grip 782 .

Accordingly, when the rod 791 of the grip cylinder 79 descends, the rotation induction block 715 descends together and the guide pin 783 is guided to the guide groove 716 , and the guide grip 782 is the pivot shaft 717 . ) is rotated around the pair of guide grips 782 are opened. In addition, when the rod 791 rises, the rotation induction block 715 rises together, and the guide pin 783 is guided to the guide groove 716, and the guide grip 782 is rotated about the pivot shaft 717. The pair of guide grips 782 are closed. On the other hand, a collection box 781 for collecting the used gasket 92 is provided under the grip portion 78 .

On the other hand, the gas container automatic replacement device according to an embodiment of the present invention is provided with a control unit for controlling the operation of the gas container automatic replacement device. The control unit controls the center alignment driving of the seating pad 29 of the container table 2 . In addition, the control unit performs center alignment of the seating pad 29 before the container handler 85 puts the gas container 9 down on the seating pad 29 . In addition, the control unit may open the valve by rotating the handle 93 immediately after fastening the valve connection unit 54 to the valve port 94 , and it is also possible to separately set the opening time of the valve by a system signal.

In addition, the control unit sets the y-axis distance to the gas container 9 and the seating pad 29 based on the y-axis movement distance of the container handler 85 determined by the vertical and horizontal guide means to satisfy the error range. As described above, the seating pad 29 is configured to be movable and freely rotatable in the horizontal direction, so that an error in the y-axis distance can be effectively corrected. In addition, the control unit performs logic to compare the load of the gas container 9 sensed through the load cell 25 with a reference value, and if the detected load of the gas container 9 is less than or equal to the reference value, the gas container 9 is replaced transmits a control signal to perform

On the other hand, the automatic gas container replacement method according to an embodiment of the present invention includes the steps of automatically transferring the gas container 9 to be replaced by the self-driving vehicle 8 to the gas cabinet 90, and the container table 2 is Centering the seating pad 29, loading the gas container 9 by seating it on the container table 2, and allowing the seating pad 29 to move and freely rotate in the horizontal direction to give a degree of freedom A step of holding the outer peripheral surface of the gas container (9) by the container holding part (4), the step of the upper cap detaching part (3) gripping the upper cap (91) of the gas container (9), and a driving roller (42) is rotated to rotate the gas container (9) about the axis of the gas container (9) to separate the upper cap (91) from the gas container (9).

In addition, in the automatic gas container replacement method according to an embodiment of the present invention, after the step of removing the upper cap 91, the gas container 9 is rotated through the valve port alignment unit 56 to the valve port 94. aligning with the valve cap detachable part 53, and separating the valve cap covering the valve port 94 of the gas container 9 from the gas container 9 through the valve cap detachable part 53; , a gasket replacement step of removing the used gasket 92 from the valve connection part 54 and mounting a new gasket 92 on the valve connection part 54, and connecting the valve port 94 through the valve connection part 54 to the piping area and, rotating the valve handle 93 through the handle operation unit 52 to open the valve and supply gas.

On the other hand, in the automatic gas container replacement method according to an embodiment of the present invention, when all the gas charged in the gas container 9 is exhausted and the load sensed by the load cell 25 is less than or equal to the reference value, the valve through the handle operation unit 52 Closing the valve of the gas container 9 that has been used by rotating the handle 93, releasing the connection between the valve port 94 and the piping area through the valve connection part 54, and removing the valve cap The step of fastening the valve cap to the valve port 94 through 53, the step of fastening the upper cap 91 to the gas container 9 through the upper cap detachable part 3, and the gas container 9 and unloading the gas container 9 from the gas cabinet 90, and the self-driving vehicle 8 unloading the replaced gas container 9 from the gas cabinet 90 and then transferring the gas container 9 to a specific location.

Now, an operation example of an automatic gas container replacement device according to an embodiment of the present invention will be described with reference to FIGS. 37 to 48 .

The autonomous vehicle (8) is operated and moves to the front of the gas cabinet (90) to which the gas container (9) is to be mounted. When or before the self-driving vehicle 8 reaches the gas cabinet 90 , the door 99 of the gas cabinet 90 is automatically opened.

The container handler 85 of the autonomous vehicle 8 advances so that the gas container 9 advances toward the container table 2 of the gas cabinet 90 . At the same time, the container table 2 performs center alignment of the seating pad 29 .

The container handler (85) is fully advanced so that the gas container (9) is seated on the container table (2). After the gas container 9 is seated on the container table 2, the seating pad 29 of the container table 2 is horizontally moved and rotated freely. Thereafter, the grip part 41 of the container holding part 4 grips and grips the outer peripheral surface of the gas container 9 .

The cap gripping module 35 is in close contact with the side surface of the gas cabinet 90 as shown by a dotted line, and is rotated by approximately 90° to be positioned directly above the upper cap 91 of the gas container 9 . Thereafter, the cap gripping module 35 descends and the fingers 352 are closed to grip the upper cap 91 .

In a state in which the cap gripping module 35 holds the upper cap 91 , the driving roller 42 is rotated to rotate the gas container 9 , so that the upper cap 91 is separated from the gas container 9 . Thereafter, the cap gripping module 35 is raised and rotated by approximately 90° to return to the side of the gas cabinet 90, which is the original position. This is to secure the visibility of the piping area of the gas cabinet and to secure the accessibility of operation.

By rotating the driving roller 42 to rotate the gas container 9, the approximate position of the valve port 94 of the gas container 9 is adjusted so that the valve cap detachable portion 53 is located. Thereafter, the body portion 5 advances in the y-axis direction.

The body part 5 descends in the z-axis direction, and the valve port 94 of the gas container 9 is positioned between the pair of alignment fingers 561 . Thereafter, the alignment finger 561 is closed so that the valve port 94 is aligned to the original position of the valve cap detachable part 53 , and then the alignment finger 561 is opened again to its original position.

The valve cap detachable part 53 and the valve connection part 54 advance toward the valve port 94 in the y-axis direction. Thereafter, the used gasket 92 mounted on the valve connection 54 is replaced with a new gasket 92 .

Simultaneously with the gasket replacement operation of the valve connection part 54 , the valve cap detachable part 53 is rotated so that the valve cap coupled to the valve port 94 is separated from the gas container 9 and coupled to the valve cap detachable part 53 . do. After that, the valve cap detachable part 53 and the valve connection part 54 move backward in the y-axis direction, and then the body part 5 rises in the z-axis direction and then moves in the x-axis direction to form the valve port 94 and the valve. The connecting portions 54 face each other.

The handle operating unit 52 advances by the handle operating unit cylinder 58, and the main body 5 descends in the z-axis direction. Thereafter, the valve cap detachable portion 53 and the valve connection portion 54 advance toward the valve port 94 in the y-axis direction.

The port fastening port 543 of the valve connecting part 54 is rotated so that the valve connecting part 54 and the valve port 94 of the gas container 9 are fastened. Thereafter, the handle operation unit 52 is rotated to open the valve of the gas container 9, thereby supplying gas.

So far, the gas container automatic replacement device according to the present invention has been described with reference to the embodiment shown in the drawings, but this is merely an example, and it will be understood that various modifications and equivalent other embodiments are possible therefrom by anyone skilled in the art. . Accordingly, the true technical protection scope should be determined by the technical spirit of the appended claims.

1: Gas container automatic replacement device
2: container table 21: guide member
211: guide groove 212: table body
213: elevating groove 23: slide table
24: center piston 241: plunger
25: load cell 233: receiving groove
29: seating pad
3: upper cap detachable part 32: cap elevating cylinder
33: rotary drive unit 334: rotary arm
35: cap grip module 352: finger
313: cab lift block
4: container holding part 41: grip part
411: container gripper 42: drive roller
421: idle roller 43: roller rotation motor
44: grip driving unit 47: gripper link
5: body part 51: body block
52: handle operation part 53: valve cap detachable part
54: valve connection part 55: rotation motor for the body
56: valve port alignment part 561: alignment finger
57: handle drive motor 58: handle control unit cylinder
6: main driving part 61: base
62: x-axis driving unit 64: y-axis driving unit
66: z-axis driving unit
7: gasket replacement module 71: magazine
712: upper stopper 713: lower stopper
73: first escape cylinder
74: second escape cylinder
75: block cylinder 76: replacement module base
77: main block 771: vacuum piston
772: Collect Piston 757: Taper
758: Collect appearance 779: Collect core
78: grip portion 781: collection box
782: guide grip
8: self-driving vehicle 81: driving unit body
821: slot 85: container handler
9: gas container 90: gas cabinet
91: upper cap 92: gasket
93: handle 94: valve port

Claims (8)

In the gas container automatic replacement device which is provided in a gas cabinet in which a gas piping area is installed and automatically replaces the gas container,
A gas container automatic replacement device comprising an upper cap detachable part for holding the upper cap of the gas container and detaching the upper cap from the gas container. The method of claim 1,
and a container gripper for rotatably gripping the outer peripheral surface of the gas container,
A gas container automatic replacement device for detaching the upper cap from the gas container by rotating the gas container around the axis of the gas container while the upper cap detachable part grips the upper cap. 3. The method according to claim 1 or 2,
The upper cap detachable part:
a cap gripping module for gripping the upper cap; and
Gas container automatic replacement device having a cap lifting cylinder for driving the cap gripping module up and down. 4. The method of claim 3,
a cap detachable body coupled to the gas cabinet; and
and a cap elevating block that is slidably connected in the vertical direction with respect to the cap detachable body,
The cap gripping module is a gas container automatic replacement device that is rotatably connected to the cap elevating block. 5. The method of claim 4,
The cap detachable body is disposed on the side and front side of the upper part of the gas cabinet,
A gas container automatic replacement device having a rotational driving part for rotating the cap gripping module with respect to the cap elevating block so that the cap gripping module reciprocates between the side of the gas cabinet and the upper cap of the gas container. 4. The method of claim 3,
The cap gripping module includes:
a plurality of fingers that are in close contact with or released from the outer peripheral surface of the upper cap to grip or release the upper cap;
a gripping block guiding the fingers to be retracted or opened by slidably inserting the fingers; and
A gas container automatic replacement device having a gripping cylinder connected to the finger and sliding the finger according to the lifting and lowering of the rod. 3. The method of claim 2,
The container holding unit:
a driving roller for rotatably gripping the outer circumferential surface of the gas container; and
A gas container automatic replacement device comprising a roller rotation motor for rotating the driving roller to rotate the gas container about the axis of the gas container. 8. The method of claim 7,
It is provided in the lower portion of the gas cabinet and includes a container table on which the bottom surface of the gas container is seated, the container table having a seating pad for seating the gas container,
The seating pad is a gas container automatic replacement device configured to be movable and freely rotatable in the horizontal direction.

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