KR20220084830A - Substrate buffer module and substrate processing system having the same - Google Patents

Abstract

The present invention relates to substrate processing, and more particularly, to a substrate buffer module on which a plurality of substrates are temporarily loaded, and a substrate processing system including the same.
The present invention, the buffer chamber 100 forming an internal space (S) isolated from the outside; It is installed movably up and down in the inner space (S) and includes a cassette part 500 on which the substrates 10 are stacked up and down, and the cassette part 500 includes a plurality of substrates 10 spaced up and down. a plurality of substrate seating units 540 installed at intervals in the top and bottom so that they can be stacked with each other; a lower support part 510 coupled to the lower part of the lowermost substrate seating part 540 and having a plurality of entry/exit parts 511 so that an operator for maintenance of the cassette part 500 can enter and exit up and down; One or more opening and closing parts coupled to the bottom surface of the lower support part 510 to support the operator by closing the access part 511 after the operator passes through the inlet part 511 and moves to the upper side of the lower support part 510 . Disclosed is a substrate buffer module comprising (600).

Description

Substrate buffer module and substrate processing system having the same

The present invention relates to substrate processing, and more particularly, to a substrate buffer module on which a plurality of substrates are temporarily loaded, and a substrate processing system including the same.

Semiconductors such as memory and non-memory, liquid crystal display panels, OLED panels, and solar cell panels are manufactured through substrate processing processes such as etching and deposition.

In addition, the substrate processing process is performed by the substrate processing system including a process module for performing the substrate processing process, a load lock module for introducing and discharging a substrate to and from the process module, and an unload lock module.

Here, the load lock module and the unload lock module may be configured as one module or a separate independent module depending on the introduction and discharge positions of the substrate, and the load lock module and the unload lock module have substantially the same or similar configuration. For convenience, it is collectively referred to as a load lock module.

On the other hand, the substrate processing system has an inline type and a cluster type depending on whether a transfer module is provided for transferring the substrate to the process module, and the number and arrangement of process modules, and is composed of a process module, a transfer module, a load lock module, and the like.

In particular, in the case of a substrate processing system having a plurality of process modules to perform a series of substrate processing, the conventional substrate processing system has a deviation in the substrate processing speed of each process module, so as to facilitate the flow of substrate transfer. A board buffer module is provided.

In addition, the substrate buffer module is configured to include a buffer chamber coupled to a module such as a process module and/or a transfer module, and a cassette installed so as to be movable up and down in the buffer chamber and on which a plurality of substrates are stacked up and down.

On the other hand, the conventional substrate buffer module requires maintenance, such as replacing or checking some parts after a predetermined use cycle.

In particular, in the conventional substrate buffer module, when maintenance of the cassette installed in the buffer chamber is required, the top lid is opened or the door installed on the side wall is opened to take the cassette out and then maintenance is performed on the cassette.

However, there is a problem in that the conventional substrate buffer module, in particular, when the cassette is unloaded by opening the top lid for maintenance of the cassette, it is cumbersome to move the crane for unloading the cassette.

Furthermore, there is a problem in that the substrate buffer module is also enlarged for processing large substrates, so that it is impossible to take out the cassette using a crane after the top lid is opened due to the limitation of the height that can be withdrawn upwards.

And when the cassette is taken out through the door installed on the side wall for the maintenance of the conventional substrate buffer module, especially the cassette, the space use efficiency is reduced as much as it is necessary to secure a sufficient maintenance space to the side of the substrate buffer module for taking out the cassette There is a problem with making

An object of the present invention is to make maintenance of the substrate buffer module convenient by additionally including an auxiliary configuration so that an operator can work in the buffer chamber, and for the maintenance of the substrate buffer module in order to solve the above problems. An object of the present invention is to provide a substrate buffer module capable of maximizing space use efficiency and a substrate processing system including the same.

The present invention has been created to achieve the object of the present invention as described above, and the present invention includes: a buffer chamber 100 forming an internal space (S) isolated from the outside; It is installed movably up and down in the inner space (S) and includes a cassette part 500 in which substrates 10 are stacked up and down, and the cassette part 500 includes a plurality of substrates 10 spaced up and down. a plurality of substrate seating units 540 installed at intervals in the top and bottom so that they can be stacked with each other; a lower support portion 510 coupled to the lower portion of the lowermost substrate seating portion 540 and provided with a plurality of inlet portions 511 so that an operator for maintenance of the cassette portion 500 can enter and exit up and down; One or more opening and closing parts coupled to the lower surface of the lower support part 510 to support the operator by closing the access part 511 after the operator passes through the inlet part 511 and moves to the upper side of the lower support part 510 . Disclosed is a substrate buffer module comprising (600).

The substrate seating part 540 and the lower support part 510 have a rectangular shape in a plane shape, and the inlet part 511 is n×m (n and m are 2 or more), and the opening/closing unit 600 may be installed to be movable in any one of a width direction and a length direction of the lower support unit 510 .

The opening/closing unit 600 is coupled to the opening/closing member 610 having a shape corresponding to the planar shape of the entrance/exit unit 511 and the lower surface of the lower support unit 510 to guide the movement of the opening/closing member 610 . It may include a guide unit 620 that

The opening/closing unit 600 may further include a fixing unit 632 for fixing the opening/closing member 610 to the lower support unit 510 after the opening/closing unit 511 is closed.

The fixing part 632 may include an index plunger including a protruding pin 643 inserted into the through hole 512 formed in any one of the lower support part 510 and the opening and closing member 610 .

The buffer chamber 100 includes a cassette fixing part 690 for fixing the cassette part 500 to a preset height so that an operator can enter the buffer chamber 100 for maintenance of the cassette part 500 . ) may be additionally installed.

The cassette fixing part 690 includes a fixing rod 691 inserted into a fixing hole provided in the cassette part 500 when the cassette part 500 is fixed, and the fixing rod 691 in the fixing hole. It may include a fixed rod moving part 692 for moving the fixed rod 691 in the horizontal direction so as to be inserted or released.

The substrate seating part 540 includes: a plurality of vertical members 541 and a plurality of horizontal members 542 forming a grid structure corresponding to the arrangement of the inlet part 511; A plurality of support pins 543 installed on the vertical member 541 and the horizontal member 542 to support the substrate 10 may be included.

The present invention also includes one or more process modules 3 for performing substrate processing on the substrate 10; one or more transfer modules (2) coupled to the process module (3) to transfer or take out the substrate (10) to the process module (3); A substrate that is transferred to the process module 3 and temporarily loaded with respect to at least one substrate 10 among the substrate 10 before substrate processing and the substrate 10 that has been processed in the process module 3 . Disclosed is a substrate processing system including a buffer module (1), wherein the substrate buffer module (1) is a substrate buffer module having the above configuration.

The buffer chamber 100, for the maintenance of the cassette unit 500, a door 130 through which an operator can enter and exit may be installed on the side.

The buffer chamber 100 includes a cassette fixing part 690 for fixing the cassette part 500 to a preset height so that an operator can enter the buffer chamber 100 for maintenance of the cassette part 500 . ) may be additionally installed.

The substrate buffer module and the substrate processing system including the same according to the present invention further include an auxiliary configuration at the bottom of the cassette to support the operator so that the operator can work in the buffer chamber, so that the maintenance of the substrate buffer module is convenient In addition, there is an advantage of maximizing the space use efficiency for maintenance of the substrate buffer module.

Specifically, the substrate buffer module and the substrate processing system including the same according to the present invention form an inlet and a through opening at the lower end of the cassette so that the operator can enter and exit the cassette up and down, and after the operator moves the upper side By closing the entrance and exit to support the operator, there is an advantage that can maximize the operator's work convenience and safety.

Furthermore, the substrate buffer module and the substrate processing system including the same according to the present invention are capable of maintenance work within the chamber constituting the substrate buffer module, so that the cassette for maintenance is unnecessary, so maintenance work is easy. , there is an advantage of maximizing the space use efficiency of the substrate processing system because additional space for discharging the cassette is unnecessary.

1 is a conceptual diagram showing an example of a substrate processing system according to the present invention.
FIG. 2 is a conceptual diagram illustrating a side structure of an example of a substrate buffer module according to the present invention used in the substrate processing system shown in FIG. 1 .
3 is an exploded perspective view showing an example of a cassette part of the substrate buffer module of FIG. 2 .
FIG. 4 is an exploded perspective view showing the configuration of a substrate seating part and a lower support part of the cassette part of FIG. 3 .
FIG. 5 is a bottom view showing the configuration of a lower support part and an opening/closing part of the cassette part of FIG. 3 .
FIG. 6 is a cross-sectional view taken in a direction VI-VI in FIG. 5 .
7A and 7B are cross-sectional views taken in a direction VII-VII in FIG. 5 , and are conceptual views illustrating a working method of an operator using the lower support part and the opening/closing part shown in FIG. 5 .
8A and 8B are conceptual views illustrating an operation of the fixing unit for fixing the opening/closing unit in FIGS. 7A and 7B .

Hereinafter, a substrate buffer module according to the present invention and a substrate processing system including the same will be described with reference to the accompanying drawings.

First, the substrate buffer module 1 according to the present invention is provided in a substrate processing system for performing substrate processing and the substrate 10 is temporarily loaded, and various configurations are possible depending on the configuration of the substrate processing system.

The substrate processing system provided with the substrate buffer module 1 according to the present invention may have various configurations such as a cluster type, an in-line type, etc. depending on the arrangement and configuration of the process module 3 and the transfer module 2 for performing substrate processing. can

For example, a substrate processing system according to the present invention, as shown in FIG. 1 , includes: one or more process modules 3 for performing substrate processing on a substrate 10; one or more transfer modules 2 coupled to the process module 3 to transfer or unload the substrate 10 to the process module 3; The substrate buffer module is transferred to the process module 3 and temporarily loaded with respect to at least one substrate 10 among the substrate 10 before substrate processing and the substrate 10 that has been processed in the process module 3 . (1) may be included.

One or more process modules 3 are installed to perform substrate processing on the substrate 10, and various configurations are possible depending on the substrate processing to be performed.

For example, the process module 3 may have various configurations depending on the process, such as including a process chamber for forming a closed processing space, and a substrate support for supporting the substrate 10 in the process chamber.

Meanwhile, in the process module 3 , one or more gates for introducing and discharging a substrate to and from a transfer module 2 to be described later are formed, and the gates may be opened and closed by a gate valve 190 .

The transfer module 2 is a configuration that is installed in one or more and coupled to the process module 3 to transfer or take out the substrate 10 to the process module 3, and has various configurations depending on the transfer method of the substrate 10 This is possible.

For example, the transfer module 2 includes a transfer chamber that maintains a sealed state for substrate exchange of the process module 100 under a predetermined process pressure, and a transfer robot installed in the transfer chamber to introduce and discharge the substrate. may include

The substrate buffer module 1 is at least one substrate ( As a configuration temporarily loaded for 10), various configurations are possible.

In particular, the substrate buffer module 1 is a substrate buffer module according to the present invention, comprising: a buffer chamber 100 forming an internal space S isolated from the outside; It is installed movably up and down in the inner space (S) and may include a cassette unit 500 on which the substrate 10 is stacked up and down.

The buffer chamber 100 is a configuration that forms a loading space isolated from the outside, and various configurations are possible depending on the internal pressure.

For example, the buffer chamber 100 may include a chamber body 110 having an open upper side, and an upper lid 120 covering an upper opening of the chamber body 110 .

One or more gates 111 and 112 are formed on the side of the chamber body 110 according to the arrangement of the substrate processing system, and each of the gates 111 and 112 may be opened and closed by a gate valve 190 .

In addition, the buffer chamber 100, that is, the chamber body 110, for the maintenance of the cassette unit 500, a door 130 through which an operator can enter and exit may be installed on the side.

The door 130 is a door installed on the side so that an operator can enter and exit for maintenance of the cassette unit 500, and is coupled in a sealed state from the side of the chamber body 110 when the substrate processing system is operated. do.

In this case, the chamber body 110 has an entrance opening 118 that is opened and closed by the door 130 , and the door 130 can open and close the entrance opening 118 by rotating a hinge or the like.

And the formation height of the access opening 118 may be formed as low as possible so that the operator can easily enter and exit the chamber body 110 from the outside.

On the other hand, the chamber body 110, a vertical drive unit 680 for moving the cassette unit 500 up and down so that the substrate 10 can be stacked up and down on the cassette unit 500 to be described later is installed.

The vertical drive unit 680 is configured to move the cassette unit 500 up and down, and various configurations such as a screw jack are possible according to the lift drive method.

For example, the vertical drive unit 680, as shown in FIGS. 2 and 5, a screw member 682 for moving the moving block 681 coupled to the cassette unit 500 up and down by rotation, and, It may include a rotation driving unit 683 for rotating the screw member 682 to move the moving block 681 up and down.

And for the stable movement of the moving block 681 by the vertical driving unit 680, a guide rail 685 for guiding the vertical movement of the moving block 681 adjacent to the screw 682 may be additionally installed. have.

The guide rail 685 is a guide for guiding the vertical movement of the moving block 681 in order to stably move the moving block 681 by the vertical drive unit 680 by directly or indirectly coupled to the moving block 681 . As a rail, it may be installed adjacent to the screw part 682 .

Meanwhile, the vertical drive unit 680 may be controlled so that the operator moves the cassette unit 500 to a preset height during maintenance work on the cassette unit 500 .

At this time, the cassette unit 500 may further include a cassette fixing unit 690 for fixing the cassette unit 500 for stable support of the cassette unit 500 during maintenance of the cassette unit 500 . .

That is, the buffer chamber 100 is a cassette fixing part 690 for fixing the cassette part 500 to a preset height so that an operator can enter the buffer chamber 100 for maintenance of the cassette part 500 . may be additionally installed.

The cassette fixing unit 690 is a configuration for fixing the cassette unit 500 in order to stably support the cassette unit 500 during maintenance of the cassette unit 500, and various configurations are possible.

For example, the cassette fixing part 690 is, as shown in FIG. 5 , a fixing rod 691 inserted into a fixing hole (not shown) provided in the cassette part 500 when the cassette part 500 is fixed. and a fixed rod moving unit 692 for horizontally moving the fixed rod 691 to insert or release the fixed rod 691 into the fixed hole provided in the cassette unit 500. .

The fixing rod 691 is a member inserted into a fixing hole (not shown) provided in the cassette part 500 when the cassette part 500 is fixed, and a heavy object can stably support the cassette part 500 . Any configuration is possible.

Here, the fixing hole may be formed in place for stable support of the cassette unit 500, and in particular, to be formed in the moving block 681 constituting the vertical driving unit 680 for moving the cassette unit 500 up and down. can

The fixed rod moving part 692 is a configuration for horizontally moving the fixed rod 691 so as to insert or release the fixed rod 691 into the fixing hole provided in the cassette unit 500, and automatically Various configurations are possible depending on the movement method of the fixed rod 691, such as a method or a manual method.

On the other hand, the cassette fixing part 690 is preferably installed in plurality in the circumferential direction of the cassette part 500 in order to stably fix the cassette part 500 .

And in the state in which the cassette fixing part 690 is fixed to the cassette part 500, in order to prevent the operation of vertical driving of the cassette part 500 by the above-described vertical driving part 680, the cassette fixing part 690 is the cassette part. In a state in which the 500 is fixed, an operation preventing means for preventing the operation of the vertical driving unit 680 may be provided.

The operation preventing means may be variously configured, such as a physical switch that blocks the operation of the vertical drive unit 680 when the cassette fixing unit 690 is operated, or a logical switch by the control unit.

Meanwhile, inside the chamber body 110, one or more stairs (not shown) may be additionally installed so that the operator can climb to the cassette part 500 moved to a preset height during maintenance work.

The staircase is a configuration installed inside the chamber body 110 so that an operator can climb to the cassette unit 500 moved to a preset height during maintenance work, and is taken out after the maintenance work is completed.

The cassette unit 500 is installed movably up and down in the inner space (S) and the substrate 10 is stacked up and down, and various configurations are possible.

For example, as shown in FIGS. 3 and 4 , the cassette unit 500 includes a plurality of substrate seating units installed at intervals in the top and bottom so that a plurality of substrates 10 can be stacked at intervals in the top and bottom. (540) and; a lower support portion 510 coupled to the lower portion of the lowermost substrate seating portion 540 and provided with a plurality of inlet portions 511 so that an operator for maintenance of the cassette portion 500 can enter and exit up and down; At least one opening/closing unit coupled to the lower surface of the lower support unit 510 to support the operator by closing the access unit 511 after the operator passes through the access unit 511 and moves to the upper side of the lower support unit 510 ( 600) may be included.

The plurality of substrate seating units 540 are configured to be vertically spaced so that the plurality of substrates 10 can be stacked at intervals in the top and bottom, and various configurations are possible depending on the stacking structure and the substrate support structure. .

For example, the substrate seating part 540 may include a plurality of vertical members 541 and a plurality of horizontal members 542 ; A plurality of support pins 543 installed on the vertical member 541 and the horizontal member 542 to support the substrate 10 may be included.

The plurality of vertical members 541 and the plurality of horizontal members 542 are members constituting a lattice structure corresponding to the rectangular shape when the planar shape of the substrate 10 to be seated has a rectangular shape, and various configurations are possible.

Here, the plurality of vertical members 541 and the plurality of horizontal members 542 to be described later may form a lattice structure corresponding to the arrangement of the entry/exit portion 511 .

The plurality of support pins 543 are installed on the vertical member 541 and the horizontal member 542 to support the substrate 10 , and any structure capable of stably supporting the bottom surface of the substrate 10 . Configuration is also possible.

The substrate seating part 540 is to be installed with a vertical interval, and may include a vertical spacing maintaining member 543 to maintain the vertical interval.

The vertical spacing member 543 is to be installed with a vertical interval, as a configuration to maintain the vertical spacing, coupled to at least one of the vertical member 541 and the horizontal member 542 located at the outermost can be

The lower support part 510 is coupled to the lower part of the lowermost substrate seating part 540 and a plurality of entry parts 511 are formed so that an operator for maintenance of the cassette part 500 can enter and exit up and down. As such, various configurations are possible.

Here, the upper surface of the lower support part 510 may support the entire substrate seating part 540 in which the lowermost substrate seating part 540 is fixed and combined into one.

The lower support unit 510 may be formed of a play having sufficient strength in consideration of supporting the operator during maintenance of the cassette unit 500, or may be composed of a plurality of frame members.

The entry/exit part 511 is formed on the lower support part 510 so that an operator can enter and exit vertically, and any structure such as an opening or a slot can be used as long as the operator can enter and exit vertically.

On the other hand, when the substrate seating part 540 and the lower support part 510 have a rectangular shape in a plane shape, the inlet part 511 is n×m (n and m are 2) in the rectangular shape lower support part 510 . or more natural numbers).

In this case, the opening/closing unit 600 to be described later may be installed to be movable in any one of the width direction and the length direction of the lower support unit 510 .

For example, the entry/exit parts 511 may be formed in two rows, two each in the width direction as shown in FIG. 4 .

The opening located in the center in FIGS. 4 and 5 indicates an opening formed to reduce the self-weight of the lower support part 510 , but may be used as an additional installation of the opening/closing part 600 and the entry/exit part 511 .

The opening/closing part 600 is installed in one or more and is coupled to the bottom surface of the lower support part 510 so that the operator passes through the entry part 511 and moves to the upper side of the lower support part 510 and then opens the entry part 511. As a configuration for supporting the operator by closing, various configurations are possible depending on the moving structure and the coupling structure with the lower support part 510 .

For example, the opening and closing part 600 is coupled to the opening and closing member 610 having a shape corresponding to the planar shape of the inlet part 511 and the lower surface of the lower support part 510 to guide the movement of the opening and closing member 610 . It may include a guide unit 620 that

The opening/closing member 610 is a configuration having a shape corresponding to the planar shape of the entry/exit portion 511, and various configurations are possible.

For example, the opening/closing member 610 has a shape corresponding to the planar shape of the entrance 511 in consideration of opening and closing the entrance 511, for example, when the entrance 511 has a rectangular shape. Corresponding to the shape of the inlet 511 may form a rectangular shape.

And the opening and closing member 610, as shown in FIGS. 7A and 7B, any structure is possible as long as the structure can stably support the operator in the state in which the inlet 511 is closed, and a metal having sufficient emphasis It may be composed of a plate member of a material.

Meanwhile, the opening/closing member 610 may be moved automatically by a separate driving means or may be manually moved by a worker's manual operation.

At this time, it is generally impossible for the operator to move the opening/closing member 610 due to the complicated structure of the cassette unit 500 by moving into the cassette unit 500 through the entry/exit unit 511 .

Accordingly, it is preferable that the opening/closing member 610 is manually moved by an auxiliary operator other than the operator located inside the cassette unit 500, and at this time, the opening/closing member capable of moving the opening/closing member 610 by holding the auxiliary operator A handle 631 may be installed on the 610 .

And the opening and closing member 610, the opening and closing member 610 is fixed to the lower support portion 510 after closing the inlet 511 so as to stably support the operator located inside the cassette unit 500. It may further include a government 632 .

The fixing part 632 is a configuration in which the opening and closing member 610 closes the entrance 511 and then fixes it to the lower support part 510 so as to stably support the operator. The fixing structure of the opening and closing member 610 is Accordingly, various configurations are possible.

For example, the fixing part 632 is, as shown in FIGS. 8A and 8B , any one of the lower support part 510 and the opening/closing member 610 - the lower support part 510 in the embodiment of the present invention. It may include an index plunger including a protruding pin 643 inserted into the formed through-hole 512 .

The index plunger constituting the fixing part 632 is a component that protrudes or retracts the protruding pin 643 by an operator's operation, and a component referred to as an index plunger may be used.

Specifically, the index plunger, as shown in FIGS. 8A and 8B , a body 643 provided with a protruding pin 643 protruding upward and a spring protruding the protruding pin 643 upward, and a protruding pin It may include an operation handle 642 that is integrally connected with the 643 and maintains the protruding pin 643 in a lowered state by rotation after pulling the protruding pin 643 downward by the operator.

Meanwhile, the main body 643 may be installed through the opening/closing member 512 and then fixed by the nut member 641 .

The guide part 620 is coupled to the bottom surface of the lower support part 510 to guide the movement of the opening and closing member 610 , and various configurations are possible depending on the guide structure of the opening and closing member 610 .

For example, the guide part 620 is installed as a pair with the opening and closing member 610 interposed therebetween, and a guide groove is formed into which a plurality of guide blocks 611 protruding to the side of the opening and closing member 610 are inserted. It may consist of guide rails.

Here, the guide block 611 is configured to protrude to the side of the opening and closing member 610 and inserted into the guide groove formed in the guide rail, and various members such as rollers may be used.

In addition, the guide rail is a rail in which a guide groove into which the guide block 611 is inserted is formed, and various configurations are possible according to the guide structure of the guide block 611 .

7a and 7b, the access part 511 of the lower support part 510 is opened and closed by the movement of the opening and closing member 610 by an auxiliary operator, and the operator located inside the cassette part 500 is the entrance part ( 511) is a view showing a state supported by the opening and closing member 610 for closing.

Here, the inlet portions 511 are formed two each in a horizontal or vertical direction, and the opening and closing member 610 may be positioned to close any one of the two inlet portions 511 .

Specifically, the operator climbs up to the cassette unit 500 through the open entrance 511, closes the entrance 511 by the movement of the opening and closing member 610, and then the cassette in the supporting state of the opening and closing member 610. A maintenance operation of the unit 500 may be performed.

On the other hand, when the maintenance work in any one of the two entrances 511 is completed, the operator descends to the lower side of the cassette unit 500 and ascends to the cassette unit 500 through the other entrance 511, and the opening and closing member 610 ), after closing the entrance 511 by the movement, the maintenance work of the cassette unit 500 can be performed in the supporting state of the opening and closing member 610 .

On the other hand, the cassette unit 500 may further include an upper member 520 coupled to the uppermost substrate receiving unit 540 for structural reinforcement of the uppermost substrate receiving unit 540 . can

The upper member 520 is a configuration coupled to the uppermost substrate seating part 540 for structural reinforcement of the uppermost substrate seating part 540, and includes the previously described lower support part 510 and It may have a similar configuration.

Specifically, the upper member 520 may be formed of a plate member having a plurality of openings 521 formed therein.

The opening 521 is a configuration formed to reduce the weight of the upper member 520 , and may be formed to correspond to the opening formed in the lower support part 510 .

In particular, the upper member 520 may be formed of the same member as the lower support part 510 except for a coupling structure with the opening/closing part 600 .

Meanwhile, in the substrate processing system according to the present invention, one or more additional modules 4 for performing separate processes such as a process of inverting and aligning the substrate 10 in addition to the process module 3 and the transfer module 2 described above ) may be additionally included.

The additional module 4 is a module for performing separate processes such as inverting the substrate 10 and aligning the substrate 10 , and various configurations are possible according to the arrangement and function of the substrate processing system.

Since the above has only been described with respect to some of the preferred embodiments that can be implemented by the present invention, as noted, the scope of the present invention should not be construed as being limited to the above embodiments, and It will be said that the technical idea and the technical idea accompanying the fundamental are all included in the scope of the present invention.

100: buffer chamber 500: cassette part
540: substrate seating part 510: lower support part
600: opening and closing part

Claims (12)

a buffer chamber 100 forming an internal space (S) isolated from the outside;
It is installed movably up and down in the inner space (S) and includes a cassette part 500 on which the substrate 10 is stacked up and down,
The cassette unit 500,
a plurality of substrate seating units 540 installed at intervals in the top and bottom so that the plurality of substrates 10 can be stacked at intervals in the top and bottom;
a lower support part 510 coupled to the lower part of the lowermost substrate seating part 540 and having a plurality of entry/exit parts 511 so that an operator for maintenance of the cassette part 500 can enter and exit up and down;
One or more opening and closing parts coupled to the bottom surface of the lower support part 510 to support the operator by closing the access part 511 after the operator passes through the inlet part 511 and moves to the upper side of the lower support part 510 . (600) A substrate buffer module comprising: The method according to claim 1,
The substrate seating part 540 and the lower support part 510 have a rectangular shape in a plane shape,
The entrance 511 is formed in an arrangement of n × m (n and m are natural numbers greater than or equal to 2) on the lower support portion 510 of the rectangular shape,
The opening/closing part (600) is a substrate buffer module, characterized in that it is installed to be movable in any one of the width direction and the length direction of the lower support part (510). The method according to claim 1,
The opening and closing part 600 is,
an opening/closing member 610 having a shape corresponding to the planar shape of the entry/exit part 511;
and a guide part (620) coupled to the bottom surface of the lower support part (510) to guide the movement of the opening/closing member (610). 4. The method according to claim 3,
The opening/closing unit 600 may further include a fixing unit 632 for fixing the opening/closing member 610 to the lower support unit 510 after the opening/closing member 610 closes the entrance/exit unit 511. . 5. The method according to claim 4,
The fixing part 632,
and an index plunger including a protruding pin (643) inserted into a through hole (512) formed in any one of the lower support part (510) and the opening and closing member (610). The method according to claim 1,
The buffer chamber 100,
For maintenance of the cassette part 500, a cassette fixing part 690 for fixing the cassette part 500 to a preset height so that an operator can enter the buffer chamber 100 is additionally installed. substrate buffer module. 7. The method of claim 6,
The cassette fixing part 690 is,
When fixing the cassette part 500, the fixing rod 691 is inserted into the fixing hole provided in the cassette part 500, and the fixing rod 691 can be inserted into or released from the fixing hole. and a fixed rod moving part (692) for horizontally moving the fixed rod (691). 8. The method according to any one of claims 2 to 7,
The substrate seating part 540,
a plurality of vertical members 541 and a plurality of horizontal members 542 forming a lattice structure corresponding to the arrangement of the entry/exit portion 511;
and a plurality of support pins (543) installed on the vertical member (541) and the horizontal member (542) to support the substrate (10). one or more process modules 3 for performing substrate processing on the substrate 10;
one or more transfer modules (2) coupled to the process module (3) to transfer or take out the substrate (10) to the process module (3);
A substrate that is transferred to the process module 3 and is temporarily loaded with respect to at least one of the substrate 10 before substrate processing and the substrate 10 that has been processed in the process module 3 . A substrate processing system including a buffer module (1), comprising:
The substrate buffer module (1) is a substrate processing system, characterized in that the substrate buffer module according to any one of claims 1 to 7. 10. The method of claim 9,
The substrate seating part 540,
a plurality of vertical members 541 and a plurality of horizontal members 542 forming a lattice structure corresponding to the arrangement of the entry/exit portion 511;
and a plurality of support pins (543) installed on the vertical member (541) and the horizontal member (542) to support the substrate (10). 10. The method of claim 9,
The buffer chamber (100) is a substrate processing system, characterized in that for the maintenance of the cassette unit (500), a door (130) through which an operator can enter and exit is installed on the side. 10. The method of claim 9,
The buffer chamber 100 includes a cassette fixing part 690 for fixing the cassette part 500 to a preset height so that an operator can enter the buffer chamber 100 for maintenance of the cassette part 500 . ) Substrate processing system, characterized in that it is additionally installed.

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