KR20220080610A - Zinc oxide based partial discharge diagnosis sensor - Google Patents

Abstract

The present invention provides a sensor for detecting partial discharge, wherein the sensor for detecting partial discharge includes a support substrate, an electrode on the support substrate, a zinc oxide nanorod layer on the electrode, and the electrode on the zinc oxide nanorod layer It characterized in that it comprises a corresponding counter electrode and an upper substrate on the counter electrode.
The present invention is an invention developed through a basic research (R18XA02) "self-generation high-efficiency low-cost smart sensor and sensor data transmission technology research" between 2018 and 2021 by the Korea Electric Power Research Institute.

Description

ZINC OXIDE BASED PARTIAL DISCHARGE DIAGNOSIS SENSOR

The present invention relates to a sensor for diagnosing partial discharge, and more particularly, to a sensor for diagnosing partial discharge including a zinc oxide-based structure.

Recently, with the explosive increase in electricity demand, large-capacity and ultra-high voltage power facilities are being developed, and substations in each region are being developed in an unmanned and managed trend.

In particular, according to this trend, the electric power IoT-based facility management model requires a paradigm differentiated from the existing system, and among the existing facility management-related technologies, the diagnostic system also increases the PD (Partial Discharge) caused by the combination of facilities. trend to do

Partial discharge is a generic term for discharges that occur in one part without occurring between electrodes. Partial discharge such as partial surface discharge due to a high electric field on the surface of an insulator or internal discharge occurring in voids or bubbles existing inside the insulator is a common term. There are partial discharges such as corona discharges occurring near the tip of a sharp electrode in the gas, creepage discharges occurring along the surface of solid insulators, and void discharges occurring in voids in solid insulators.

Starting with this partial discharge, deterioration of the insulator due to voltage stress may progress. When the resistivity of the particle layer collected at the dust collecting electrode is very high in an electric dust collector, etc., reverse corona discharge (reverse ionization) occurs from the surface of the particle layer toward the discharge electrode. It neutralizes the electric charge and loses the dust collection function, which may cause the insulation to become dull.

Accordingly, the demand for a partial discharge detection system is also increasing, but most of these partial discharge detection systems are high-end and expensive products that measure and analyze minute PD signals (voltage generated by the amount of charge of pC, several μV). Therefore, instead of directly measuring the PD signal, diagnostic equipment that detects light, sound, vibration, ultraviolet, infrared ultrasonic wave, ozone, etc. generated by PD has been recently introduced, and ultimately IoT-based The facility management system is portable by replacing the existing high-spec equipment, and there is a need to apply a small, low-spec sensor.

The present invention is an invention developed through a basic research (R18XA02) "self-generation high-efficiency low-cost smart sensor and sensor data transmission technology research" between 2018 and 2021 by the Korea Electric Power Research Institute.

Korean Patent Application Laid-Open No. 10-2013-0047418, "Apparatus and method for partial discharge diagnosis of high voltage power equipment using a plurality of sensors" Korean Patent Publication No. 10-1303082, "Portable Partial Discharge Detection Device"

An embodiment of the present invention is to provide a zinc oxide-based nanorod structure in which the aspect ratio of zinc oxide (ZnO) nanorods is controlled.

In addition, an embodiment of the present invention is to provide a method of manufacturing a zinc oxide-based electrode device for controlling the aspect ratio of the zinc oxide nanorods of the zinc oxide-based nanorod structure.

In addition, an embodiment of the present invention is to provide a partial discharge detection sensor including a zinc oxide-based electrode element.

The sensor for detecting partial discharge according to an embodiment of the present invention includes an electrode formed on a support substrate, a zinc oxide nanorod layer that detects ultrasonic waves generated by partial discharge of a power facility on the electrode, and a zinc oxide nanorod layer on the electrode. and a counter electrode corresponding to the electrode, an upper substrate on the counter electrode, and a wire connecting the electrode and the counter electrode.

The support substrate is glass and polyethylene terephthalate (Polyethylene terephthalate, PET), polyethylene naphthalate (Polyethylene naphthalate, PEN), polyethersulfone (PES), polycarbonate (Polycarbonate, PC) selected from the group consisting of a polymer film characterized by being one.

The electrode is characterized in that one selected from the group consisting of indium tin oxide (ITO), carbon fiber, metal, conductive polymer, graphene, and carbon nanotube (CNT).

The zinc oxide nanorods of the zinc oxide nanorod layer have an aspect ratio of 5:1 to 40:1.

The counter electrode is one selected from the group consisting of silver (Ag), platinum (Pt), and palladium (Pd).

The upper substrate is one selected from the group consisting of polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), and polycarbonate (PC). do it with

The ultrasonic wave is characterized in that the ultrasonic wave in a band of 50 MHz to 700 MHz.

A method for manufacturing a sensor for detecting partial discharge according to another embodiment of the present invention includes preparing a substrate, forming a zinc oxide seed layer with a zinc oxide seed solution on the substrate, and the oxidation A step of growing a plurality of zinc oxide nanorods on a substrate on which a zinc seed layer is formed to form a zinc oxide nanorod layer, and bonding a substrate on which a counter electrode material is deposited on the zinc oxide nanorod layer. include

The method of growing a plurality of zinc oxide nanorods on the substrate on which the zinc oxide seed layer is formed is characterized in that it is a hydrothermal process.

The forming of the zinc oxide seed layer is characterized in that the zinc oxide seed solution is spin-coated on the substrate at 800 rpm to 1200 rpm for 40 to 80 seconds and dried at 80° C. to 120° C. for 1 minute to 3 minutes.

It is characterized in that the density of the seed layer is controlled by repeating the process of spin-coating the zinc oxide seed solution on the substrate and drying it 2 to 10 times.

The forming of the zinc oxide nanorod layer is characterized in that the substrate on which the zinc oxide seed layer is formed is placed in a zinc oxide growth solution and grown for 1 to 12 hours.

The forming of the zinc oxide nanorod layer is characterized in that the aspect ratio of the zinc oxide nanorods of the zinc oxide nanorod layer is 5:1 to 40:1.

The zinc oxide nanorod layer in the step of forming the zinc oxide nanorod layer is characterized in that it senses ultrasonic waves generated by partial discharge of power equipment.

The ultrasonic wave is characterized in that the ultrasonic wave in a band of 50 MHz to 700 MHz.

According to an embodiment of the present invention, it is possible to provide a structure of a zinc oxide-based nanorod capable of detecting ultrasonic waves generated by partial discharge.

In addition, according to an embodiment of the present invention, it is possible to provide a sensor for detecting partial discharge including a zinc oxide-based nanorod structure.

In addition, according to an embodiment of the present invention, it is possible to provide a miniaturized partial discharge detection device using a sensor for partial discharge detection.

1 shows a schematic diagram of a sensor for detecting partial discharge according to an embodiment of the present invention.
2 is a flowchart illustrating a method of manufacturing a sensor for detecting partial discharge according to an embodiment of the present invention.
3 shows an SEM image of a zinc oxide-based nanorod structure of a sensor for detecting partial discharge according to an embodiment of the present invention.
4 shows an apparatus used for characteristic evaluation of a sensor for detecting partial discharge according to an embodiment of the present invention.
5 shows the XRD analysis result of the substrate prepared according to Preparation Example 1 of the present invention.
6 illustrates a partial discharge (corona discharge) detection result of the sensor for detecting partial discharge according to Example 1 of the present invention.
7 illustrates a partial discharge (corona discharge) detection result of the sensor for detecting partial discharge according to Example 2 of the present invention.
8 shows a partial discharge (corona discharge) detection result of the sensor for detecting partial discharge according to Example 3 of the present invention.
9 shows a partial discharge (corona discharge) detection result of the sensor for detecting partial discharge according to Example 4 of the present invention.
10 shows a partial discharge (void discharge) detection result according to Example 2 of the present invention.
11 shows a partial discharge (void discharge) detection result according to Comparative Example 1 of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings and contents described in the accompanying drawings, but the present invention is not limited or limited by the embodiments.

The terminology used herein is for the purpose of describing the embodiments and is not intended to limit the present invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, "comprises" and/or "comprising" refers to the presence of one or more other components, steps, operations and/or elements mentioned. or addition is not excluded.

As used herein, “embodiment”, “example”, “aspect”, “exemplary”, etc. are to be construed as advantageous in any aspect or design described as being preferred or advantageous over other aspects or designs. is not doing

Also, the term 'or' means 'inclusive or' rather than 'exclusive or'. That is, unless stated otherwise or clear from context, the expression 'x employs a or b' means any of natural inclusive permutations.

Also, as used herein and in the claims, the singular expression "a" or "an" generally means "one or more," unless stated otherwise or clear from the context that it relates to the singular form. should be interpreted as

In addition, when a part such as a film, layer, region, configuration request, etc. is said to be “on” or “on” another part, it is not only in the case that it is directly on the other part, but also another film, layer, region, or component in the middle. It includes cases where etc. are interposed.

Hereinafter, a sensor for detecting partial discharge according to an embodiment of the present invention will be described with reference to the accompanying drawings.

Referring to FIG. 1 , the sensor for detecting partial discharge includes a substrate 110 including a support substrate 112 and an electrode 114 , a zinc oxide nanorod layer 120 and a zinc oxide nanorod layer on the substrate 110 . A counter electrode 130 corresponding to the electrode 114 is included on the 120 , an upper substrate 140 on the counter electrode 130 , and a wire 150 connecting the electrode 112 and the counter electrode 130 . do.

The support substrate 114 is a polymer film group made of glass and polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), and polycarbonate (PC). It may be one selected from

The electrode 112 may be indium tin oxide (ITO), carbon fiber, metal, conductive polymer, graphene, or carbon nanotube (CNT).

The zinc oxide nanorods of the zinc oxide nanorod layer 120 are characterized as having an aspect ratio of 5:1 to 40:1, preferably 11:1 to 35:1, more preferably 21:1. .

The aspect ratio refers to a ratio of an average diameter of a surface on which one zinc oxide nanorod is attached to a substrate and an average length of one zinc oxide nanorod.

The counter electrode 130 may be silver (Ag), platinum (Pt), palladium (Pd) (please indicate the types of electrodes that can be used in the present invention), and more specifically, silver (Ag).

The upper substrate 140 may be polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), or polycarbonate (PC), specifically, It may be a polyethylene naphthalate (PEN) film.

The zinc oxide nanorod layer 120 may detect ultrasonic waves generated by partial discharge of power equipment, and the ultrasonic waves may be in a band of 50 MHz to 700 MHz.

Referring to FIG. 2, the method for manufacturing a sensor for detecting partial discharge includes preparing a substrate;

forming a zinc oxide seed layer, forming a zinc oxide nanorod layer, and bonding with a counter electrode.

More specifically, preparing a substrate, forming a zinc oxide seed layer with a zinc oxide seed solution on the substrate, and a plurality of zinc oxide on the substrate on which the zinc oxide seed layer is formed Growing nanorods to form a zinc oxide nanorod layer and bonding a substrate on which a counter electrode material is deposited on the zinc oxide nanorod layer.

In the step of preparing the substrate, the substrate includes a support substrate and an electrode, and the support substrate includes glass, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polyethersulfone. , PES) or polycarbonate (PC). In addition, the electrode may be indium tin oxide (Indium Tin Oxide, ITO), carbon fiber, metal, conductive polymer, graphene, carbon nanotube (CNT), specifically, indium tin oxide (Indium Tin Oxide, ITO).

/□으로 표기할 수 있다. The substrate in the step of preparing the substrate may have a resistance of 50 ohm/sq to 500 ohm/sq. The unit of resistance is ohm/sq or Ω

It can be written as /□.

The method for growing a plurality of zinc oxide nanorods on the substrate on which the zinc oxide seed layer is formed is a hydrothermal process, a chemical vapor deposition method, an electro-deposition method, a sol- It may be a gel method (sol-gel method), a molecular beam deposition method, a sputtering method, a pulsed laser deposition method, and preferably a hydrothermal synthesis method.

The hydrothermal synthesis method is a method of artificially reproducing the natural crystallization process of minerals in an underground hydrothermal mine to crystallize as if specific metal particles grow. A general hydrothermal synthesis method is performed at high temperature and pressure, but the hydrothermal synthesis method of the present invention is characterized in that it is performed at a low temperature and atmospheric pressure of 50 to 100 °C.

In the forming of the zinc oxide seed layer, the zinc oxide seed solution may be spin-coated on the substrate at 800 rpm to 1200 rpm for 40 to 80 seconds, and dried at 80° C. to 120° C. for 1 minute to 3 minutes. Specifically, spin coating at 1000 rpm for 60 seconds and drying at 100° C. for 2 minutes.

The process of spin coating and drying the zinc oxide seed solution on the substrate may be repeated 2 to 10 times to adjust the density of the seed layer. Preferably, it is good to adjust the density of the seed layer by repeating 5 times.

The density of the seed layer affects the aspect ratio growth of the zinc oxide nanorods, and the zinc oxide nanorod layer formed under the influence of the density of the seed layer affects the ultrasonic detection effect by partial discharge.

The density of the seed layer can be confirmed by the peak size at a specific position in the XRD result, and when a peak at a specific position is confirmed, it can be determined that a seed layer having the same density distribution to some extent has been formed. It is advantageous for the growth of nanorods to use the seed layer identified as such.

In the forming of the zinc oxide nanorod layer, the substrate on which the zinc oxide seed layer is formed is placed in a zinc oxide growth solution and grown for 1 to 12 hours, preferably 3 to 9 hours.

In the step of forming the zinc oxide nanorod layer, the aspect ratio of the zinc oxide nanorod may be 5:1 to 40:1, preferably 5:1 to 35:1, and more preferably 11:1 to 21:1.

In the step of bonding the substrate on which the counter electrode material is deposited on the zinc oxide nanorod layer, the counter electrode material may be one selected from the group consisting of silver (Ag), platinum (Pt), and palladium (Pd).

In the bonding step, the zinc oxide nanorod layer and the electrode material deposition portion of the substrate on which the active material is deposited contact each other.

In the step of forming the zinc oxide nanorod layer, the zinc oxide nanorod layer can detect ultrasonic waves generated by partial discharge of power equipment such as a transformer, a power transmission facility, a power distribution facility, and a gas insulated switchgear (GIS). The ultrasound may be ultrasound in a band of 50 MHz to 700 MHz.

As described above, although the present invention has been described with reference to limited embodiments and drawings, the present invention is not limited to the above embodiments, and various modifications and variations from these descriptions are provided by those skilled in the art to which the present invention pertains. This is possible. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined by the following claims as well as the claims and equivalents.

Preparation Example 1.

In order to form ZnO nanorods (zinc oxide nanorods) on a substrate, a wet chemical method (hydrothermal process) that enables large-area growth at low temperature was used.

First, 0.02 M of zinc acetate dihydrate (Zn(CH3COO)2·2H2O, Aldrich) was dissolved in 50 ml of ethanol at room temperature using a stirrer for 30 min. Thereafter, the temperature was further increased to 90° C. to dissolve them, and the mixture was further stirred for 10 min. The ZnO seed solution prepared in this way is washed with IPA and Acetone and dried using ASM (Aqueous solution method) method to immerse the plasma (Ar)-treated ITO/Glass substrate in order to remove impurities and increase surface wettability. A seed layer was formed. In this case, as the ITO/Glass substrate, an ITO/Glass substrate having a sheet resistance of about 30 Ω/□ is used.

To form a ZnO seed layer, the ZnO seed solution was dropped on the ITO/Glass substrate, and then spin coating was performed at 1000 rpm for 60 s. The spin-coated substrate was dried for 2 min on a 100 hot-plate for seed adsorption and organic solvent removal. This process was repeated 5 times to control the density of the ZnO seed layer.

Example 1.

In Preparation Example 1, the ITO/Glass substrate on which the ZnO seed layer was formed was dissolved in 300 ml of distilled water with 0.025 M of Zinc nitrate hexahydrate (Zn(NO3)2·6H2O, Aldrich) and 0.025 M Hexamethylenetetramine (C6H12N4, Aldrich) at 75 ° C. It was put in a growth solution prepared by dissolving it using a stirrer in

In the same way as described above, a substrate on which a ZnO nanorod-based structure having an aspect ratio of 35:1 is formed is prepared.

As described above, a substrate (glass or film, 1 cm x 4 cm) on which a ZnO nanorod-based structure having an aspect ratio of 35:1 was formed was used as the lower plate, and a part of it was scraped off with a knife for bonding and then double-sided tape (Cat. 3215) , 3M) is attached. A PEN film (125 μm) on which Ag is deposited is cut to a size similar to that of the lower plate and bonded to the lower plate. And by fixing the wires to each electrode (ITO, Ag) with Kapton tape, a device for a sensor having a structure as shown in FIG. 1 is manufactured.

Example 2.

The same procedure as in Example 1 was performed, but the reaction time was performed for 6 hours to prepare a substrate on which a ZnO nanorod-based structure having an aspect ratio of 21:1 was formed.

Using a substrate on which a ZnO nanorod-based structure having an aspect ratio of the ZnO nanorod of 21:1 is formed, a sensor device is manufactured in the same manner as in Example 1.

Example 3.

The same procedure as in Example 1 was performed, but the reaction time was carried out for 3 hours to prepare a substrate on which a ZnO nanorod-based structure having an aspect ratio of 11:1 is formed.

Using the substrate on which the ZnO nanorod-based structure having an aspect ratio of the ZnO nanorod of 11:1 is formed, a sensor device is manufactured in the same manner as in Example 1.

Example 4.

The same procedure as in Example 1 was performed, but the reaction time was performed for 1 hour to prepare a substrate on which a ZnO nanorod-based structure having an aspect ratio of 5:1 was formed.

Using a substrate on which a ZnO nanorod-based structure having an aspect ratio of the ZnO nanorod of 5:1 is formed, a sensor device is manufactured in the same manner as in Example 1.

Comparative Example 1.

Prepare a commercially available HFCT (High Frequency Current Transformer) sensor.

Characteristic evaluation 1.

The substrate prepared according to Preparation Example 1 was subjected to XRD (X-ray diffraction) analysis using an X-ray diffraction analyzer. The analysis results are shown in FIG. 5 .

Referring to FIG. 5 , as a result of XRD analysis of the substrate prepared according to Preparation Example 1, it was confirmed that crystals of the (110) plane were well formed through the size of the peak at 2theta 15 degrees. Through this, it can be seen that the density of the seed layer of the substrate prepared according to Preparation Example 1 is easy to grow ZnO nanorods.

Characteristic evaluation 2.

In a partial discharge simulation experiment using corona discharge, a sensor detection test was conducted. The partial discharge was performed using the equipment shown in FIG. 4 .

A corona discharge with 10 pC (pico coulomb) was generated to confirm partial discharge detection. By mounting the sensor prepared in Example 1 on the pole next to the partial discharge, the voltage change was observed using an electrometer (Electrometer; 6514, Keithley) connected to the sensor to see if the signal changed when the partial discharge occurred.

The fact that partial discharge actually occurred was confirmed through an oscilloscope connected to the sensor prepared in Comparative Example 1, which is commercialized, and there is a voltage change when partial discharge occurs through the oscilloscope and no voltage change when partial discharge does not occur. confirmed that.

As described above, FFT (Fast Fourier Transform) conversion was performed on the results of a corona discharge simulation of 10 pC with Example 1 (a ZnO nanorod-based sensor having an aspect ratio of 35:1), and the results are shown in FIG. shown.

Referring to FIG. 6 , (a) is actual voltage data, FFT-converted is (b), and X-axis frequency is converted to log scale (log scale) (c) . As shown in the last (c), it was confirmed that partial discharge signals in the frequency bands of 70 MHz, 115 MHz, and 520 MHz were detected.

Characteristic evaluation 3.

It was confirmed by using the sensor prepared in Example 2 (a ZnO nanorod-based sensor having an aspect ratio of 21:1) instead of the sensor prepared in Example 1, except that the characteristic evaluation 2 was performed.

The confirmation result is shown in FIG. 7 .

Characteristic evaluation 4.

It was confirmed by using the sensor prepared in Example 3 (a ZnO nanorod-based sensor having an aspect ratio of 11:1) instead of the sensor prepared in Example 1, except that the characteristic evaluation 2 was performed.

The confirmation result is shown in FIG. 8 .

Characteristic evaluation 5.

It was confirmed by using the sensor prepared in Example 4 (a ZnO nanorod-based sensor having an aspect ratio of 5:1) instead of the sensor prepared in Example 1, except that the characteristic evaluation 2 was performed.

The confirmation result is shown in FIG. 9 .

7, 8, and 9 are results of FFT conversion of partial discharge test results of ZnO nanorod-based sensors having aspect ratios of 21:1, 11:1, and 5:1, respectively. 7 to 9, it can be confirmed that peaks are generated at frequencies of 70 MHz, 115 MHz, and 520 MHz, as in the result of characteristic evaluation 4.

In addition, it can be confirmed that the zinc oxide nanorod-based sensor with an aspect ratio of 21:1 has a sharper peak at the 520 MHz frequency, which effectively detects the high-frequency region under the same partial discharge condition. there was.

Characteristic evaluation 6.

It was carried out as in the characteristic evaluation 2, but a void discharge was used instead of a corona discharge.

A void discharge with 50 pC (pico coulomb) was generated for confirmation. By mounting the sensor prepared in Example 2 and Comparative Example 1 on the side pole where the partial discharge occurs, the voltage change using an electrometer (Electrometer; 6514, Keithley) connected to the sensor to see if the signal changes when the partial discharge occurs observed.

The fact that partial discharge actually occurred was confirmed through an oscilloscope connected to the sensor prepared in Comparative Example 1, which is commercially available, and a voltage change occurs when partial discharge occurs through an oscilloscope and voltage when partial discharge does not occur It was confirmed that there was no change.

The result confirmed using the sensor prepared in Example 2 is shown in FIG. 10, and the result confirmed using the sensor prepared in Comparative Example 1 is shown in FIG. 11 .

10 is a result of FFT conversion of the results of the 50 pC void discharge simulation test using Example 2 (a ZnO nanorod-based sensor having an aspect ratio of 21:1). As a result, a high peak at 15 MHz was confirmed.

The result of FIG. 10 was compared with the result of FIG. 11 , which is a result of a commercial partial discharge sensor. As a result, it can be seen that FIG. 11 shows a relatively high peak at 10 MHz compared to the result of FIG. 10 . This is a result of confirming that the sample prepared according to FIG. 10 can detect a different frequency region under the same discharge condition as that of FIG. 11 .

As described above, although the present invention has been described with reference to limited embodiments and drawings, the present invention is not limited to the above embodiments, and various modifications and variations from these descriptions are provided by those skilled in the art to which the present invention pertains. This is possible. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined by the following claims as well as the claims and equivalents.

100: sensor for detecting partial discharge
110: substrate
112: electrode 114: support substrate
120: zinc oxide nanorod layer
130: counter electrode
140: upper substrate
150: wire

Claims (15)

an electrode formed on a supporting substrate;
a zinc oxide nanorod layer on the electrode for detecting ultrasonic waves generated by partial discharge of power equipment;
a counter electrode corresponding to the electrode on the zinc oxide nanorod layer; and
A sensor for detecting partial discharge including an upper substrate on the counter electrode.
According to claim 1,
The support substrate is glass and polyethylene terephthalate (Polyethylene terephthalate, PET), polyethylene naphthalate (Polyethylene naphthalate, PEN), polyethersulfone (PES), polycarbonate (Polycarbonate, PC) selected from the group consisting of a polymer film Partial discharge detection sensor, characterized in that one.
According to claim 1,
The electrode is a sensor for detecting partial discharge, characterized in that one selected from the group consisting of indium tin oxide (ITO), carbon fiber, metal, conductive polymer, graphene, and carbon nanotube (CNT)
According to claim 1,
The zinc oxide nanorods of the zinc oxide nanorod layer have an aspect ratio of 5:1 to 40:1. A sensor for detecting partial discharge.
According to claim 1,
The counter electrode is a sensor for detecting partial discharge, characterized in that one selected from the group consisting of silver (Ag), platinum (Pt), and palladium (Pd).
According to claim 1,
The upper substrate is one selected from the group consisting of polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), and polycarbonate (PC). A sensor for detecting partial discharge.
According to claim 1,
The ultrasonic wave is a sensor for detecting partial discharge, characterized in that the ultrasonic wave in a band of 50 MHz to 700 MHz.
preparing a substrate;
forming a zinc oxide seed layer with a zinc oxide seed solution on the substrate;
forming a zinc oxide nanorod layer by growing a plurality of zinc oxide nanorods on the substrate on which the zinc oxide seed layer is formed; and
and bonding a substrate on which a counter electrode material is deposited on the zinc oxide nanorod layer.
9. The method of claim 8,
The method of growing a plurality of zinc oxide nanorods on the substrate on which the zinc oxide seed layer is formed is a hydrothermal process.
9. The method of claim 8,
The step of forming the zinc oxide seed layer includes spin-coating the zinc oxide seed solution on the substrate at 800 rpm to 1200 rpm for 40 to 80 seconds and drying at 80° C. to 120° C. for 1 minute to 3 minutes. Partial discharge detection sensor manufacturing method.
11. The method of claim 10,
The method for manufacturing a sensor for partial discharge detection, characterized in that the density of the seed layer is adjusted by repeating the process of spin-coating the zinc oxide seed solution on the substrate and drying it 2 to 10 times.
9. The method of claim 8,
The forming of the zinc oxide nanorod layer includes placing the substrate on which the zinc oxide seed layer is formed in a zinc oxide growth solution and growing the substrate for 1 to 12 hours.
9. The method of claim 8,
In the forming of the zinc oxide nanorod layer, an aspect ratio of the zinc oxide nanorod layer of the zinc oxide nanorod layer is 5:1 to 40:1.
9. The method of claim 8,
The method of manufacturing a sensor for partial discharge detection, characterized in that the zinc oxide nanorod layer in the forming of the zinc oxide nanorod layer senses ultrasonic waves generated by partial discharge of a power facility.
15. The method of claim 14,
The ultrasonic wave is a sensor manufacturing method for detecting partial discharge, characterized in that the ultrasonic wave in a band of 50 MHz to 700 MHz.

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