KR20220067288A - Magnet plate assembly - Google Patents

Abstract

The present invention relates to a magnet plate assembly for an OLED evaporator and, specifically, to a magnet plate assembly which improves uniformity of adhesion of a mask to minimize a shadow effect by configuring a magnetic body to be disposed in an oblique direction with a mounting plate. Constituent elements constituting the magnet plate assembly of the present invention comprises: a mounting plate having a plurality of mounting grooves; and a plurality of magnetic bodies inserted in and mounted on the mounting grooves. The magnetic bodies are disposed in the oblique direction with respect to a longitudinal direction of a long side or a short side of the mounting plate.

Description

Magnet plate assembly {Magnet plate assembly}

The present invention relates to a magnet plate assembly for an OLED evaporator, and in particular, to a magnet plate assembly that can minimize a shadow effect by improving the uniformity of adhesion of a mask by configuring a magnetic material to be disposed in a diagonal direction with a mounting plate it's about

In general, an organic light emitting diode display (OLED), which is one of flat disk plays, is an active light emitting display device that has a wide viewing angle, excellent contrast, can be driven at a low voltage, and has the advantages of being lightweight, thin, and fast in response. Therefore, it is attracting attention as a next-generation display device.

These light emitting devices are divided into inorganic light emitting devices and organic light emitting devices according to the material forming the light emitting layer, and organic light emitting devices have superior characteristics such as luminance and response speed compared to inorganic light emitting devices and have the advantage of enabling color display. Its development has been actively carried out recently.

In an organic light emitting display device, an organic layer and/or an electrode is formed by a vacuum deposition method. However, as the organic light emitting diode display gradually increases in resolution, the width of the open slit of the mask used in the deposition process becomes narrower, and the dispersion thereof is also required to be reduced.

In addition, in order to manufacture a high-resolution organic light emitting diode display, it is necessary to reduce or eliminate a shadow effect. Accordingly, the deposition process is performed in a state in which the substrate and the mask are in close contact, and the development of a technique for improving the adhesion between the substrate and the mask is emerging.

As one method for improving the adhesion between the substrate and the mask, there is a method of disposing a yoke plate in which permanent magnets are arranged at regular intervals on the opposite surface of the surface of the substrate to the surface in close contact with the mask. In this way, the permanent magnets disposed on the yoke plate form a predetermined magnetic field. Before the full-scale deposition process starts, the yoke plate is approached toward the substrate and the mask, so that the mask is pulled toward the substrate so that the mask is evenly adhered to the substrate. do.

However, as technology advances, the mask is getting slimmer, and therefore, it is necessary to bring the mask closer to the substrate in order to reduce or eliminate the shadow effect. The structure of the yoke plate and the permanent magnet is not disclosed.

On the other hand, as the area of the organic light emitting diode display (OLED) increases, the area of the mask increases. As a result, a method for improving the adhesion of the mask to reduce or eliminate the shadow effect is required. It is a situation in which a method is required to achieve uniform adhesion (magnetic force) throughout, but a specific method has not been proposed so far.

In this regard, Korean Patent Application Laid-Open No. 10-2019-0077973 provides a magnet plate of a new configuration that can turn on/off the influence of a magnet provided in the magnet plate at a desired time, and an alignment system to which it is applied. However, it has disadvantages in that the related configuration is complicated and the operation is complicated.

Republic of Korea Patent Publication No. 10-2019-0077973 (published date: July 04, 2019, title of invention: magnet plate integrated with touch plate and having a switching magnet, and alignment system using the same)

The present invention has been devised to solve the problems of the prior art as described above, and by configuring the magnetic material to be disposed in a diagonal direction with the mounting plate, it is possible to improve the uniformity of adhesion of the mask to minimize the shadow effect. It is an object to provide a magnet plate assembly.

In addition, the present invention can increase the use efficiency of the mounting plate and generate a relatively more magnetic force by configuring the magnetic material to extend to the edge of the mounting plate, thereby further improving the adhesion and uniformity of the mask. An object of the present invention is to provide a magnet plate assembly that can be improved.

In addition, in the present invention, when the notch pattern portion is formed on the mask, the magnetic material is disposed so as to intersect the notch pattern portion in the vertical direction, thereby ensuring adhesion to the notch pattern portion, thereby providing a shadow effect ( It is an object of the present invention to provide a magnet plate assembly that can prevent the shadow effect) from occurring.

The constituent means constituting the magnet plate assembly of the present invention proposed in order to solve the above technical problems includes: a mounting plate having a plurality of mounting grooves; and a plurality of magnetic materials inserted and mounted in the mounting groove, wherein the magnetic materials are disposed in a diagonal direction with respect to a longitudinal direction of a long side or a short side of the mounting plate.

Here, the magnetic body is characterized in that it is disposed in a direction inclined by 45° with respect to the longitudinal direction of the long side or the short side of the mounting plate.

Here, the magnetic body is characterized in that it is arranged to extend to the edge portion of the mounting plate.

Here, the magnetic material is characterized in that it is arranged to cross the notch pattern portion of the mask in a vertical direction.

According to the magnet plate assembly of the present invention having the above problems and solutions, since the magnetic material is configured to be disposed in an oblique direction with the mounting plate, the uniformity of adhesion of the mask is improved to minimize the shadow effect advantages arise.

In addition, according to the present invention, since the magnetic body is configured to extend to the edge portion of the mounting plate and disposed, the use efficiency of the mounting plate can be increased and relatively more magnetic force can be generated, thereby increasing the adhesion of the mask and An effect of allowing the uniformity to be further improved occurs.

In addition, according to the present invention, when the notch pattern portion is formed on the mask, since the magnetic material is disposed so as to cross the notch pattern portion in a vertical direction, adhesion to the notch pattern portion can be ensured and, thereby, in the notch pattern portion An advantage arises in that it is possible to prevent a shadow effect from occurring.

1 is a conceptual diagram illustrating a schematic cross-section of a deposition apparatus including a magnet plate assembly according to an embodiment of the present invention.
2 is a schematic perspective view illustrating a state in which a magnet plate assembly, a cooling plate, a substrate, and a mask are combined according to an embodiment of the present invention.
3 is a plan view illustrating an arrangement structure of a magnet plate assembly and a mask according to an embodiment of the present invention.
FIG. 4 is a partially enlarged view of FIG. 3 .
5 is a schematic plan view of a conventional magnet plate assembly that can be compared with a magnet plate assembly according to an embodiment of the present invention, and FIG. 6 is a schematic cross-sectional view for explaining a problem that may occur in the magnet plate assembly of FIG. to be.
7 is a schematic cross-sectional view for explaining another problem that may occur in the magnet plate assembly of FIG. 5 .
8 to 10 show simulation conditions and distribution graphs of magnetic force values showing simulation results for the magnetic force distribution of the magnet plate assembly and the conventional magnet plate assembly according to an embodiment of the present invention;
11 and 12 show a simulation condition and a distribution graph of magnetic force values for showing another differentiated distribution of magnetic force values between the magnet plate assembly and the conventional magnet plate assembly according to an embodiment of the present invention.
13 and 14 are schematic plan views illustrating the notch pattern portion and arrangement of the magnet plate assembly according to the embodiment of the present invention and the conventional magnet plate assembly when the notch pattern portion is formed on the mask.

Hereinafter, a preferred embodiment of the present invention magnet plate assembly having the above problems, solutions and effects will be described in detail with reference to the accompanying drawings.

Since the present invention can apply various transformations and can have various embodiments, specific embodiments are illustrated in the drawings and described in detail in the detailed description. Effects and features of the present invention, and a method for achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various forms.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, and when described with reference to the drawings, the same or corresponding components are given the same reference numerals, and the overlapping description thereof will be omitted. .

In the following embodiments, terms such as include or have means that the features or components described in the specification are present, and the possibility that one or more other features or components will be added is not excluded in advance.

In the drawings, the size of the components may be exaggerated or reduced for convenience of description. For example, since the size and thickness of each component shown in the drawings are arbitrarily indicated for convenience of description, the present invention is not necessarily limited to the illustrated bar.

In cases where certain embodiments may be implemented differently, a specific order of operations may be performed differently from the described order. For example, two operations described in succession may be performed substantially simultaneously, or may be performed in an order opposite to the described order.

1 is a conceptual diagram illustrating a schematic cross-section of a deposition apparatus including a magnet plate assembly according to an embodiment of the present invention. 2 is a schematic perspective view illustrating a state in which a magnet plate assembly, a cooling plate, a substrate, and a mask are combined according to an embodiment of the present invention.

1 and 2, the usage aspect and arrangement structure of the magnet plate assembly 100 according to an embodiment of the present invention will be schematically described as follows.

In the deposition apparatus 200 including the magnet plate assembly 100 according to the embodiment of the present invention, the mask 130 is disposed on one surface of the substrate s in the chamber 170 , and then the mask 130 is disposed on the other surface of the substrate s. Place the magnet plate assembly 100 . Thereafter, the deposition material evaporated from the deposition source 150 provided in the chamber 170 is deposited on the substrate s through a slit (not shown) formed in the mask 130 .

In addition, between the steps of disposing the mask 130 on one surface of the substrate s in the chamber 170 and the steps of placing the magnet plate assembly 100 on the other surface of the substrate s, the cooling plate 110 is The method may further include pressing the substrate s by moving in the direction of the contact surface between the magnet plate assembly 100 and the substrate s.

As described above, when the magnet plate assembly 100 according to an embodiment of the present invention is used to adhere the mask 130 to the substrate s, the mask is applied to the magnetic field formed in the height direction of the mounting plate 10 . By disposing 130, it is possible to improve the lifting phenomenon between the mask 130 and the substrate s, thereby improving the shadow effect during the deposition process, thereby improving the display (OLED) defect caused by the deposition defect. can do. This will be described in detail later.

In addition, the deposition apparatus 200 may further include a cooling plate 100 interposed between the substrate s and the magnet plate assembly 100 to press the substrate s with its own weight. The cooling plate 110 serves to improve the adhesion between the substrate s and the mask 130 before the magnet plate assembly 100 moves toward the substrate s and applies a magnetic force to the mask 130 . .

3 is a plan view showing an arrangement structure of the magnet plate assembly 100 and the mask 130 according to an embodiment of the present invention, and FIG. 4 is a partially enlarged view of FIG. 3 .

The magnet plate assembly 100 according to the embodiment of the present invention is configured to include a mounting plate 10 having a plurality of mounting grooves and a plurality of magnetic bodies 30 inserted and mounted in the mounting grooves, the magnetic body 30 ) is disposed in a diagonal direction with respect to the longitudinal direction of the long side or the short side of the mounting plate 10 .

The mounting plate 10 has a flat plate shape formed of SUS material, and has a plurality of mounting grooves (not shown) formed on one surface. The mounting groove is formed by being removed from one surface of the mounting plate 10 by a predetermined depth. Each of the mounting grooves is not formed in one direction, specifically, in a direction parallel to or perpendicular to the long side or short side of the mounting plate 10, but is formed in an oblique direction. That is, the mounting groove is formed to be elongated in a diagonal direction of the mounting plate.

Although only one magnetic body 30 may be long inserted and mounted in each of the mounting grooves, in reality it is difficult to form a long magnetic body and it is not easy to handle, so a plurality of magnetic bodies having a certain size are inserted into each of the mounting grooves. is mounted That is, not only one magnetic body 30 is inserted and mounted in each mounting groove, but a plurality of magnetic bodies are inserted and mounted in a form in which they are continuously contacted. Of course, a single magnetic body 30 may be disposed in each of the mounting grooves in an oblique direction.

The magnetic body 30 is a component having a predetermined magnetic force, and may preferably be a permanent magnet, and may be any object capable of generating a magnetic force in addition to the permanent magnet. For example, an electromagnet that generates a magnetic force by flowing an electric current may be used.

When one side (upper side) of the magnetic material 30 has an N pole, the other side (lower side) has an S pole, and conversely, when one side (upper side) has an S pole, the other side (lower side) has an N pole is formed and may be disposed in each of a plurality of mounting grooves formed in the mounting plate 10 .

Here, the magnetic body 30 constituting the magnet plate assembly 100 according to the present invention is not arranged in a direction parallel or perpendicular to the longitudinal direction of the long side or the short side of the mounting plate 10, but in a direction inclined, that is, an oblique direction. is placed as That is, the magnetic body 30 is not arranged in a direction parallel or orthogonal to the longitudinal direction of the long side or short side of the mounting plate 10, like the arrangement structure of the conventional magnet plate assembly 100 shown in FIG. The magnetic body 30 is disposed in an oblique direction with respect to the longitudinal direction of the long side or the short side of the mounting plate.

As described above, according to the magnet plate assembly 100 of the present invention, since the magnetic body 30 is configured to be disposed in an oblique direction with the mounting plate 10 , the uniformity of the adhesion of the mask 130 is improved to achieve a shadow effect. The advantage is that it can be minimized. That is, as shown in FIG. 4 , the magnetic body 30 is disposed in a diagonal direction with respect to the longitudinal direction of the long side or short side of the mounting plate 10 , thereby intersecting all parts of the mask 130 in the vertical direction. placed so that

That is, the magnetic material 30 is arranged to intersect with all parts of the mask 130 in plan view. As a result, the mask 130 may receive the magnetic force of the magnetic material 30 as a whole in all parts to closely adhere the substrate, thereby preventing the shadow effect from occurring.

Since the mask 130 has a shape corresponding to a panel such as an OLED, it is composed of a plurality of mask cells. Specifically, the mask 130 is formed by cross-connecting a long-side rib 131 and a short-side rib 133 to each other, and each partitioned portion corresponds to each mask cell.

However, the size of each cell of the mask 130 may be changed to correspond to a panel such as an OLED, and as a result, the cell height 135 of the mask 130 may be changed. As such, even if the cell height 135 of the mask 130 is changed, in the magnet plate assembly 100 according to the present invention, since the magnetic body 30 is disposed in an oblique direction with respect to the mounting plate 10, always The mask 130 , specifically, the long-side lip 131 and the short-side lip 133 are in a state where they intersect the magnetic body 30 in the vertical direction. As a result, even if the size of the mask 130, particularly the cell height 135, is changed, a shadow effect does not occur.

As described above, in the magnet plate assembly 100 according to the embodiment of the present invention, the magnetic body 30 is disposed in a diagonally inclined state with respect to the longitudinal direction of the long side or the short side of the mounting plate 10 . Here, the inclined angle in the oblique direction of the magnetic body 30 , that is, the arrangement angle θ may be variously changed. That is, if the magnetic material 30 can maintain a state in which it can cross all parts of the mask 130 in the vertical direction as a whole, the arrangement angle θ may be variously changed.

However, in order to optimize the uniformity of the magnetic force distribution that the magnetic body 30 applied to the present invention exerts on the mask 130 and minimize the shadow effect, the magnetic body 30 has a long side or a short side of the mounting plate 10 . It is most preferable to be disposed in a direction inclined at 45° with respect to the longitudinal direction. Simulation results for this will be described later.

The magnet plate assembly 100 according to the present invention does not simply change the arrangement structure, but corresponds to a differentiated arrangement structure that can exert a differentiated effect from the existing magnet plate assembly.

Specifically, as shown in FIG. 5 , in the conventional magnet plate assembly, the magnetic body 30 is disposed parallel to or perpendicular to the long side or the short side of the mounting plate 10 . Accordingly, the magnetic body 30 is disposed parallel to or perpendicular to the mask 130 , specifically, the long-side lip 131 and the short-side lip 133 .

The occurrence of the shadow effect according to the arrangement structure of the magnetic body 30 and the long side lip 131 in the vertical direction in the conventional magnet plate assembly is as follows.

Referring to FIG. 6 corresponding to an enlarged cross-section of part "A" of FIG. 5, FIG. 6(a) shows a cross-section in the state shown in FIG. That is, the magnetic material 30 is disposed without intersecting the long side lip 131 of the mask in the vertical direction. As such, when the long-side lip 131 of the mask is disposed between adjacent magnetic bodies 30 when viewed in the vertical direction, it may be strongly pulled in the direction of one magnetic body or magnetic force depending on the relative strength of attraction by the magnetic bodies disposed on both sides. Since this may be weak, the mask cannot adhere uniformly to the substrate, which causes shadowing.

FIG. 6B illustrates that the long side lip 131 of the mask is disposed in a state in which it crosses and crosses one magnetic material in the vertical direction. Also in this case, the distribution of the magnetic force exerted by the mask on the long-side lip is not uniform, and furthermore, the magnetic force exerted on the mask is weak, so that the mask does not adhere to the substrate evenly, thereby causing a shadow phenomenon.

6C illustrates that the long-side lip 131 of the mask is disposed to overlap and intersect the magnetic body 30 in a vertical direction. In this case, since the attractive force of the magnetic material with respect to the mask is strong and uniform, the substrate can be stably adhered to each other, so that the shadow phenomenon does not occur. However, such an arrangement structure cannot always be applied. That is, as described above, if the size of the mask, specifically, the cell height 135 of the mask is changed, the arrangement structure of FIG. 6(c) cannot be expected, and as a result, a shadow phenomenon cannot be avoided.

On the other hand, in the magnet plate assembly 100 according to the embodiment of the present invention, as shown in FIG. 3 , since the magnetic body 30 is disposed in an oblique direction, it can be mounted on all surfaces of the mounting plate 10 . have. That is, the magnetic body 30 is preferably arranged to extend to the edge of the mounting plate 10 .

As such, in the magnet plate assembly 100 according to the present invention, since the magnetic body 30 is disposed in a diagonal direction, in particular, a 45° direction with respect to the longitudinal direction of the long side or short side of the mounting plate 10, the mounting plate ( 10) can be extended to the edge portion of the mounting arrangement.

In contrast, in the conventional magnet plate assembly 100 , as shown in FIG. 7 , the magnetic body 30 cannot be mounted on the edge portion 11 of the mounting plate 10 . In the existing magnet plate assembly 100, the magnetic body 30 is mounted in a parallel or perpendicular direction to the mounting plate 10, and since there is a width of the magnetic body, the magnetic body 30 on the edge 11 of the mounting plate 10. There is bound to be a part that cannot be mounted and placed.

As described above, according to the present invention, since the magnetic body 30 is configured to be extended to the edge portion 11 of the mounting plate 10 and disposed, the use efficiency of the mounting plate 10 is increased and relatively more A magnetic force can be generated, which has the effect of further improving the adhesion and uniformity of the mask.

On the other hand, in the magnet plate assembly 100 according to the present invention, the magnetic body 30 is disposed in an oblique direction with respect to the longitudinal direction of the long side or the short side of the mounting plate 10 , in particular, the magnetic body is the long side of the mounting plate 10 . Alternatively, it is preferable to be disposed in a direction inclined by 45° with respect to the longitudinal direction of the short side.

As described above, according to the present invention, when the magnetic body 30 is disposed in a direction inclined by 45° with respect to the longitudinal direction of the long side or short side of the mounting plate, the magnetic force distribution is the most uniform and a strong magnetic force can be generated, which causes a shadow phenomenon can be optimally minimized.

8 illustrates conditions for simulating the magnetic force distribution and the strength of the magnetic force value of the magnet plate assembly 100 according to the present invention and the conventional magnet plate assembly 100 .

The simulation condition is that the magnetic material is mounted on a mounting plate having a long side of 1550 mm, but the existing magnet plate assembly is mounted in parallel in the long side direction, and the magnet plate assembly according to the present invention is mounted and disposed so as to be inclined at 45° from the long side direction. . In a state in which the mask, specifically, the long side lip 131 of the mask is positioned so as to be spaced apart from the magnetic body 30 , the measurement direction is the long side direction of the mounting plate to measure the magnetic force value.

9 is a distribution graph of magnetic field strength showing a simulation result for an existing magnet plate assembly.

As can be seen from this, the magnetic field strength in the X and Y directions in the longitudinal direction is 0, and the magnetic field strength is generated only in the Z direction. That is, when the mask is positioned in the arrangement shown in FIG. 8 , the magnetic material pulls the mask only in the Z direction, and as a result, the mask is lifted and the shadow phenomenon cannot be avoided.

10 is a distribution graph of magnetic field strength showing simulation results for the magnet plate assembly according to the present invention.

As can be seen from this, a magnetic field is generated in all directions in X, Y, and Z, unlike the existing ones, and as a result, magnetic force is evenly generated in all directions and a pulling force can be generated, thereby preventing the shadow phenomenon. do. As described above, when the magnetic material is disposed to be inclined in the 45° direction with respect to the long side of the mounting plate 10 according to the present invention, the shadow phenomenon can be fundamentally prevented unlike in the prior art.

Meanwhile, FIGS. 11 and 12 show simulation conditions and a distribution graph of magnetic force values for showing another differentiated distribution of magnetic force values between the magnet plate assembly and the conventional magnet plate assembly according to an embodiment of the present invention.

In the conventional magnet plate assembly, when the magnetic force is measured only in the longitudinal direction, the uniformity of the magnetic force value only in the Y direction is good, whereas in the magnet plate assembly applied to the present invention, as shown in FIG. It can be seen that the magnetic force uniformity is good in all directions. As a result, it is possible to prevent the shadow phenomenon of the substrate.

Meanwhile, as shown in FIG. 14 , the magnetic material 30 applied to the present invention is disposed to cross the notch pattern portion 137 of the mask 130 in a vertical direction.

The mask may be changed according to the shape of the display, and the shape, thickness, width, etc. of the notch pattern part 137 are inevitably different according to the display shape of each customer. It is important to secure the influence of the magnetic force on the notch pattern portion 137 and prevent the shadow phenomenon.

However, as shown in FIG. 13 , in the conventional magnet plate assembly, the magnetic material may not be positioned in a direction perpendicular to the notch pattern part 137 , and this cannot be guaranteed. As a result, when the magnetic material is not positioned on the notch pattern part 137 in the vertical direction, a shadow phenomenon for the corresponding part cannot be avoided.

On the other hand, as shown in FIG. 14, in the magnet plate assembly 100 according to the present invention, since the magnetic body 30 is disposed in an oblique direction, preferably in a 45° direction, the size of the notch pattern part 137, Even if the shape or the like is changed, the notch pattern part 137 is always disposed in a state in which it can intersect in the vertical direction. As a result, the magnetic force to the notch pattern portion 137 may be uniformly applied, and as a result, a shadow phenomenon may be prevented in the corresponding portion.

As described above, according to the present invention, when the notch pattern portion is formed on the mask, since the magnetic material is disposed so as to cross the notch pattern portion in a vertical direction, adhesion to the notch pattern portion can be ensured, thereby ensuring the notch pattern portion There is an advantage in that it is possible to prevent a shadow effect from occurring.

Although the embodiments according to the present invention have been described above, these are merely exemplary, and those of ordinary skill in the art will understand that various modifications and equivalent ranges of embodiments are possible therefrom. Accordingly, the true technical protection scope of the present invention should be defined by the following claims.

s: substrate 10: mounting plate
11: border part 30: magnetic material
100: magnet plate assembly
110: cooling plate 130: mask
131: long side rib (rib) 133: short side rib (rib)
135: cell height 137: notch (notch) pattern part
150: evaporation source 170: chamber
200: deposition device

Claims (4)

a mounting plate having a plurality of mounting grooves; and a plurality of magnetic bodies inserted and mounted in the mounting groove,
The magnetic body is a magnet plate assembly, characterized in that disposed in a diagonal direction with respect to the longitudinal direction of the long side or the short side of the mounting plate.
The method according to claim 1,
The magnetic body is a magnet plate assembly, characterized in that disposed in a direction inclined 45° with respect to the longitudinal direction of the long side or the short side of the mounting plate.
The method according to claim 1,
The magnetic body is a magnet plate assembly, characterized in that it is arranged to extend to the edge portion of the mounting plate.
The method according to claim 1,
The magnetic material is a magnet plate assembly, characterized in that it is disposed to cross the notch pattern portion of the mask in a vertical direction.

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