KR20220060767A - Reaction force suppression system - Google Patents

Abstract

A repulsive force reduction table system according to an embodiment of the present invention is a table system for linearly moving the table, comprising: a frame fixed to the bottom surface; a base located in an inner space formed by the frame and connected to the bottom surface of a vibration isolation stand attached to a lower part; a linear movement bar formed on both sides of an upper part of the base and linearly moving to one side; a magnet track formed in the longitudinal direction of the linear movement bar; and a slide that linearly moves to one side along the magnet track. An objective of the present invention is to provide the table system capable of attenuating a repulsive force that may occur while the table is moving.

Description

Reaction force suppression system {Reaction force suppression system}

The present invention relates to a repulsive force reduction table system, and more particularly, to a repulsive force reduction table system capable of minimizing the influence of vibration caused by movement of a mover and external vibration.

In general, the table device configured to be movable is configured to be able to move freely on the XY plane. The process of processing a semiconductor wafer placed on a table, an object of a laser process, etc. requires precise movements that do not allow even minute errors through table control.

A number of movable tables, such as Korean Patent Publication No. 2008-0083297, Korean Patent Publication No. 2000-0006149, and Japanese Patent Publication No. 2005-297189, have at least one movable table disposed at the lower part, and thereby The structure is getting bigger. In addition, since a separate design for reducing the vibration generated by the movement of the table is not made, there is a problem that a machining error due to the vibration may occur.

Korean Patent Registration No. 10-1395033 relates to an XY stage of a prefabricated structure composed of a separate or assembled type to respond to a display panel of a larger size, but does not propose a solution to reduce vibration that may occur on an actual stage, Japanese Patent Laid-Open Patent Application Laid-Open No. 5-126973 discloses an invention for a stage, but it is difficult to construct a large stage, and there is no solution for reducing vibration caused by the transfer of a table to be placed on the upper part.

Korean Patent Publication No. 2008-0083297 Korean Patent Publication No. 2000-0006149 Japanese Patent Laid-Open No. 2005-297189 Korean Patent Registration No. 10-1395033 Japanese Laid-Open Patent Application Laid-Open No. 5-126973

It is an object of the present invention to provide a table system capable of reducing the repulsive force that may occur while the table moves.

The technical problem to be solved by the present invention is not limited to the above.

The table system for reducing repulsion according to an embodiment of the present invention is a table system that linearly moves a table, a frame fixed to the floor, located in the inner space formed by the frame, and a base connected to the floor with a vibration damper attached to the lower part , A linear moving bar formed on both upper sides of the base to move linearly to one side, a magnet track formed in the longitudinal direction of the linear moving bar, and a slide linearly moving to one side along the magnet track.

In addition, the magnet track may be formed in the longitudinal direction on the upper surface of the linear moving bar.

In addition, the frame may include a post positioned at a corner and connected to the bottom surface, and a support part protruding between the posts to fix the base.

In addition, the repulsive force reduction table system according to an embodiment of the present invention further includes a stator formed on the upper portion of the post, and a bracket formed on the upper portion of the support portion, wherein the stator includes one end of the linear moving bar and a shock-up server (shock-up server) absorber), and the bracket may be fastened to a magnet unit attached to the outer surface of the linear moving bar.

In addition, it is formed in parallel with the shock absorber (shock absorber) may further include a coil spring for connecting one end of the stator and the linear moving bar.

In addition, further comprising a fixed piece formed between one end of the linear moving bar and the stator, one surface of the fixed piece is connected to the stator by the shock absorber, and the other surface of the fixed piece is a universal joint of the linear moving bar. It can be connected to once.

In addition, the shock absorber may have a damping force that is linearly proportional to the speed of the linear moving bar.

According to the table system according to the embodiment of the present invention, it is possible to effectively reduce the repulsive force that may occur according to the movement of the table.

In addition, it is possible to provide a table system that is not affected by the machining operation of the member because vibrations generated on the ground can be independently suppressed.

In addition, it is possible to precisely control the movement of the table through vibration suppression.

1 is a top perspective view of a table system according to an embodiment of the present invention.
2 is a bottom perspective view of a table system according to an embodiment of the present invention.
3 is an enlarged view of a corner area of a table system according to an embodiment of the present invention.
4 is a shock absorption test data of a table system according to an embodiment of the present invention.
5 is a dynamic modeling structural diagram of a table system according to an embodiment of the present invention.
6 is an experimental result showing the reaction force reduction rate when the slide is moved in the table system according to the embodiment of the present invention.
7 is a graph showing the experimental results of the reaction force reduction rate in the case of motion 1 in the table system according to the embodiment of the present invention.
8 is a graph showing the experimental results of the reaction force reduction rate in the case of motion 2 in the table system according to the embodiment of the present invention.
9 is a graph showing the experimental results of the reaction force reduction rate in the case of motion 3 in the table system according to the embodiment of the present invention.

Specific structural or functional descriptions of the embodiments according to the concept of the present invention disclosed in this specification are only exemplified for the purpose of explaining the embodiments according to the concept of the present invention, and the embodiments according to the concept of the present invention are It may be implemented in various forms and is not limited to the embodiments described herein.

Since the embodiments according to the concept of the present invention may have various changes and may have various forms, the embodiments will be illustrated in the drawings and described in detail herein. However, this is not intended to limit the embodiments according to the concept of the present invention to specific disclosed forms, and includes all changes, equivalents, or substitutes included in the spirit and scope of the present invention.

Terms such as first or second may be used to describe various elements, but the elements should not be limited by the terms. The above terms are used only for the purpose of distinguishing one component from another, for example without departing from the scope of the inventive concept, a first component may be termed a second component and similarly a second component A component may also be referred to as a first component.

When a component is referred to as being “connected” or “connected” to another component, it is understood that it may be directly connected or connected to the other component, but other components may exist in between. it should be On the other hand, when it is said that a certain element is "directly connected" or "directly connected" to another element, it should be understood that the other element does not exist in the middle. Other expressions describing the relationship between components, such as "between" and "immediately between" or "neighboring to" and "directly adjacent to", etc., should be interpreted similarly.

The terms used herein are used only to describe specific embodiments, and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly dictates otherwise. In this specification, terms such as "comprise" or "have" are intended to designate that a feature, number, step, operation, component, part, or combination thereof described herein exists, but one or more other features It should be understood that it does not preclude the possibility of the presence or addition of numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in a commonly used dictionary should be interpreted as having a meaning consistent with the meaning in the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in the present specification. does not

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the scope of the patent application is not limited or limited by these examples. Like reference numerals in each figure indicate like elements.

1 is a top perspective view of a table system according to an embodiment of the present invention.

2 is a bottom perspective view of a table system according to an embodiment of the present invention.

3 is an enlarged view of a corner area of a table system according to an embodiment of the present invention.

1 to 3 , the table system according to an embodiment of the present invention is a table system for linearly moving a table, and a frame 100 fixed to the floor surface, in the inner space formed by the frame 100 . A base 200 connected to the floor with a vibration isolation table 600 attached to the lower portion, a linear moving bar 300 formed on both upper sides of the base 200 and moving linearly to one side, the linear moving bar ( 300) a magnet track 400 formed on the upper surface in the longitudinal direction, and a slide 500 that linearly moves to one side along the magnet track 400 .

The frame 100 is a structure made of a high-strength material, and may be a steel beam that supports the edge region of the table system. The frame 100 may have a space formed therein with the center as a starting point, and the frame 100 is firmly fixed to the floor surface. The frame 100 may have a rectangular shape.

1 and 2, the frame 100 has a bottom surface fixed to the bottom surface by an attachment part 170, and includes a post 110 positioned at a corner of a rectangular shape, and the post 110 ) includes a support portion 120 that is formed to protrude between.

The post 110 is a partial region of the frame 100 for fixing the frame 100 to the bottom surface, and is positioned so as to be symmetrical to four corners of the rectangular shape. The lower surface of the post 110 is fixed to the bottom surface by the attachment part 170 as shown in FIG. 2 , but is not necessarily limited to this structure.

The support part 120 is formed at a position adjacent to the first direction among the four posts 110 positioned at the corners of the four places, and the support part 120 is formed to protrude in the opposite direction to the floor. The support 120 has a base 200 that will be described later in the inward direction, and four posts 110 and four support parts 120 are installed to surround the base 200 .

The base 200 is generally a stone plate having a heavy weight constituting the stage, and is located in the inner space of the frame 100 described above. A vibration isolation table 600 is positioned at a lower portion of the base 200 , and the vibration isolation table 600 prevents vibration from the floor from being transmitted to the base 200 .

A plurality of vibration isolation tables 600 may be located at the lower portion of the base 200, and are preferably installed at symmetrical positions to evenly distribute vibrations of the lower portion. That is, the base 200 is in a state of being floated by the vibration damping table 600 .

Since the base 200 is levitated by the vibration isolation table 600, it is placed in a state where it can move with 6 degrees of freedom considering not only the X, Y, and Z directions but also the rotational direction, so that the mechanism itself can be generated. It can absorb and reflect the movement as it is. For example, when the base 200 is fixed to the frame in a state where it does not move without freedom, the repulsive force is absorbed in the mechanism despite the movement of the slide 500 on which the table is placed, and the base ( 200), fatigue failure may occur.

The shape of the base 200 can be implemented in various ways, and there is no particular limitation, but it is located inside the frame 100 , and the overall shape may be a square shape, and the slide 500 slides on the upper part of the base 200 . Tracks may be formed on a flat surface to allow

On both upper side surfaces of the base 200 , the linear moving bar 300 is formed to be movable in the first direction or in a direction opposite to the first direction. The linear moving bar 300 may be made of the same material as the base 200 , but is not necessarily limited thereto. The linear moving bar 300 is the first direction in which the slide 500 moves or in order to reduce the repulsive force generated when the slide 500 moves in the opposite direction to the first direction in order to move the slide 500 above the base 200 It moves in the opposite direction to the direction of the force and returns to the center by the restoring force.

The magnet track 400 is a linear track in which a “c”-shaped magnetic force is formed. The cores 510 formed at both ends of the slide 500 are sandwiched between the “c”-shaped tracks to generate a thrust that allows the slide 500 to move in the first direction or in the opposite direction. The magnet track 400 and the core 510 are driven on the same principle as a general linear motor to linearly move the slide 500 .

The magnet track 400 may be formed on the upper surface of the linear moving bar 300 in the longitudinal direction. However, the magnet track 400 may be formed by being buried along the cross section of the linear moving bar 300 , but it is preferable to be formed on the upper surface of the linear moving bar 300 for convenience of design.

The stator 130 is formed on the top of the post 110 . The stator 130 has an “L” shape, and the lower surface is firmly fixed to the post 110 , and the upper surface of the stator 130 is a shock absorber 310 and one end of the coil spring 320 , which will be described later. this is fixed

As shown in FIG. 3 , the stator 130 is coupled to the upper portion of the post 110 , that is, the frame 100 .

In addition, the bracket 140 is formed on the upper portion of the support 120 described above. The bracket 140 coupled to the upper portion of the support 120 is inserted into the magnet unit 340 attached to the side of the linear moving bar 300 .

The magnet unit 340 is a track of a predetermined length that generates a magnetic force, and a coil is formed in the bracket 140 region coupled to the magnet unit 340 to generate a driving force to control the linear moving bar 300 or , can function as a damper for alleviating the impact generated during movement of the linear moving bar 300 by using the same type of metal as brass.

The other end of the shock-up server 310 and the coil spring 320, one end of which is connected to the stator 130, may be connected to one end of the linear moving bar 300, but a table system according to an embodiment of the present invention is shown in FIG. As described above, a fixing piece 350 is formed between one end of the stator 130 and the linear mover 300 .

The fixed piece 350 is implemented to move in the first direction along a linear movement track formed on the surface of the stator 130 coupled to the post 110 , and one surface of the fixed piece 350 is a shock-up server 310 . When the coil spring 320 and the coil spring 320 are connected, the other surface of the fixing piece 350 is connected to one end of the linear moving bar 300 and the universal joint 360 .

The shock-up server 310 is formed in parallel with the coil spring 320 as shown in FIG. 3 , and two or more coil springs 320 may be installed so as to be symmetrical with each other around the shock-up server 310 . The shock-up server 310 is a shock-up server 310 having a linear function increase characteristic (a constant increase in damping force compared to the speed increase) rather than using a general shock-up server having a characteristic in which the damping force increases exponentially compared to the speed. It is preferable to use

In more detail, according to the force of the shock-up server 310, the coil spring 320 to be performed below has a restoring force. In selecting the coil spring 320, the force of the shock-up server 310 is proportional to the speed. Force F (shock absorber) acting on the shock absorber = cv, (c is a proportional constant, v is the speed) x is the distance), and in selecting the shock-up server 310 and the matching coil spring 320, the spring can be selected by solving the second differential equation, when using a shock-up server having an exponential increase characteristic , it is necessary to solve an equation that is difficult to predict, and it is practically impossible to select a coil spring that matches the shock absorber server.

The coil spring 320 provides a restoring force to restore the linear moving bar 300 to its original position again after the repulsive force is reduced by the shock-up server 310 . The coil spring 320 is preferably at least two or more coil springs 320 are symmetrically disposed about the shock-up server 310 so as to evenly provide a restoring force to the cross section of the linear moving bar 300 . In addition, when the length of the coil spring 320 is increased, a self-vibration phenomenon may occur in providing the restoring force. It is preferable to use the coil spring 320 having a structure in which vibration does not occur regardless of the length.

In addition, the universal joint 360 connecting the other surface of the fixed piece 350 and one end of the linear moving bar 300 is in another direction (for example, It performs a function of reducing vibration or unnecessary movement in the second direction).

Above, the components of the repulsive force reduction table system according to the embodiment of the present invention have been looked at.

This repulsive force reduction table system is precisely machined while moving the machining member placed on the table through movement in the first direction of the slide 500 on which the actual table is placed and movement in the second direction of the table on the slide 500. can

In the mechanism for reducing the repulsive force in the table system according to the embodiment of the present invention, a force opposite to the driving force applied when the actual slide 500 starts to move in the first direction acts on the linear moving bar 300, and the linear The moving bar 300 reduces the repulsive force while sliding the upper portion of the base 200 in the opposite direction to the first direction. This movement of the linear moving bar 300 is gradually reduced by the shock-up server 310 connected to the stator 130 and the damping force by the magnet unit 340 attached to the outer surface of the linear moving bar 300 . and gradually decreases in proportion to the speed. In addition, when the length of the coil spring 320 is reduced at the same time and the elastic restoring force exceeds the damping force, the linear moving bar 300 is returned to its original position by the elastic restoring force. Vibration generated in the process of reducing the repulsive force is not directly accumulated in the base 200 but goes out through the frame 100 .

4 is a shock absorption test data of a table system according to an embodiment of the present invention.

When a predetermined impact is applied to the region of the frame 100 of the table system according to an embodiment of the present invention, it is an experimental result for the absorption rate of actual vibration through the vibration transmitted to the base 200 and detected.

In the table system according to the embodiment of the present invention, since the frame 100 and the base 200 are not directly connected, it is derived that the impact generated in the frame 100 through the floor is transmitted to the base 200 . and it was derived to have an impact attenuation rate of about 97%.

5 is a dynamic modeling structural diagram of a table system according to an embodiment of the present invention.

As shown in FIG. 5, the table system structure as in the embodiment of the present invention is derived by the physical dynamics principle as shown in Equation 1 below.

[Equation 1]

는 베이스의 가속도, kIS는 베이스의 강성계수, x_base는 베이스의 이동거리, c_IS는 베이스의 댐핑계수,

는 베이스의 속도, f_Fc2는 선형이동바(300)와 마그넷트랙(400)을 포함하는 더미(dummy)와 베이스간의 마찰력, f_Fc1은 슬라이드(500)와 베이스(200)간의 마찰력이다. where m _base is the mass of the base,

is the acceleration of the base, kIS is the stiffness coefficient of the base, x _base is the movement distance of the base, c _IS is the damping coefficient of the base,

is the speed of the base, f _Fc2 is the frictional force between the dummy and the base including the linear moving bar 300 and the magnet track 400, f _Fc1 is the frictional force between the slide 500 and the base (200).

는 더미의 가속도, k_MT는 더미의 강성계수, x_MT는 더미의 이동거리, c_MT는 더미의 댐핑계수

는 더미의 속도, f_T는 반발력이며, 반발력은 슬라이드의 질량 m_M과 슬라이드의 가속도

의 곱으로 표현될 수 있다.m _MT is the mass of the dummy combined with the linear moving bar 300 and the magnet track 400,

is the acceleration of the dummy, k _MT is the stiffness coefficient of the dummy, x _MT is the distance traveled by the dummy, c _MT is the damping factor of the dummy

is the speed of the dummy, f _T is the repulsive force, and the repulsive force is the mass m _M of the slide and the acceleration of the slide

It can be expressed as a product of

6 is an experimental result showing the reaction force reduction rate when the slide is moved in the table system according to the embodiment of the present invention.

7 is a graph showing the experimental results of the reaction force reduction rate in the case of motion 1 in the table system according to the embodiment of the present invention.

8 is a graph showing the experimental results of the reaction force reduction rate in the case of motion 2 in the table system according to the embodiment of the present invention.

9 is a graph showing the experimental results of the reaction force reduction rate in the case of motion 3 in the table system according to the embodiment of the present invention.

In order to test the repulsive force reduction rate, the mass of the slide (including the mass of the table that the slide is raised, 500) was 600Kg, and one slide 500 was used, including the mass of the linear movement bar and the mass of the magnet track 400 The mass of the pile is 1500Kg per shaft, the stroke is ±40mm, the effective stroke is ±32mm, the damping coefficient of the shock absorber 310 is 20,560Ns/m, and the spring coefficient of the coil spring 320 is 5000N/m .

In this case, motion ¹ among the experimental results shown in FIG. 6 is a frame ( 100) through the floor transmission rate, that is, the repulsive force attenuation rate is 87.5%, the repulsive force absorption rate by the linear moving bar 300 is 17.99%, the base 200 transmission rate by the linear motor friction is 7.36%, the maximum of the linear moving bar 300 The amount of movement was investigated to be ±6.51 mm, and it was investigated that the repulsive force attenuation rate due to the movement of the slide 500 was excellent.

In addition, as shown in Fig. 7, when commands for movement distance, speed, and acceleration are sent to the slide, the behavior and comparative example in the table system according to the embodiment of the present invention (the structure without the shock-up server and the coil spring) in case of comparing

It can be seen that the changes in the speed and acceleration of the base and the dummy shown at the bottom of FIG. 7 are significantly reduced compared to the comparative example.

In addition, motion 2 is a case where the moving distance and average acceleration of one slide 500 are set as in motion 1, and the maximum speed is changed to 0.4 m/s, and as shown in FIG. 5, the repulsive force attenuation rate is 89.1%, linear It was investigated that the absorption rate by the moving bar 300 was 18.4%, the transmission rate of the base 200 by the friction of the linear motor was 7.36%, and the maximum movement amount of the linear moving bar 300 was ±9.87mm.

In addition, as shown in FIG. 8, when commands for movement distance, speed, and acceleration are sent to the slide, the behavior and comparative example in the table system according to the embodiment of the present invention (the structure without the shock-up server and the coil spring) Similarly, it can be seen that the changes in the speed and acceleration of the base and the dummy shown at the bottom are significantly reduced compared to the comparative example.

Next, motion 3 moves one slide 500 so that the total moving distance is 1.6 m, the maximum speed is 1 m/s, and the average acceleration is 2 m/s ² , when the reaction force attenuation rate is 93.9%, as shown in FIG. The absorption rate by the linear moving bar 300 is 7.9%, the transmission rate of the base 200 by the linear motor friction is 1.472%, and the maximum movement amount of the linear moving bar 300 is 30.81mm. It was also investigated that the transmission rate to the base 200 also decreased.

In addition, as shown in FIG. 9, when commands for movement distance, speed, and acceleration are sent to the slide, the behavior and comparative example in the table system according to the embodiment of the present invention (the structure without the shock-up server and the coil spring) In the case of comparing the same, it can be seen that the changes in the speed and acceleration of the base and the dummy are reduced compared to the comparative example.

Although the present invention has been described with reference to the embodiment shown in the drawings, which is merely exemplary, those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. For example, the described techniques are performed in a different order than the described method, and/or the described components of the system, structure, apparatus, circuit, etc. are combined or combined in a different form than the described method, or other components Or substituted or substituted by equivalents may achieve an appropriate result. Accordingly, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

100 frames 110 posts
120 Support 130 Stator
140 Bracket 170 Attachment
200 Base 300 Linear Moving Bar
310 Shock Absorber 320 Coil Spring
340 magnet unit 350 fixed piece
400 magnet track 500 slides
510 core 600 vibration isolation table

Claims (7)

A table system for linearly moving a table, comprising:
frame fixed to the floor;
a base located in the inner space formed by the frame and connected to the floor surface with a vibration damper attached to the lower part;
a linear moving bar formed on both upper side surfaces of the base and moving linearly to one side;
a magnet track formed in the longitudinal direction of the linear moving bar; and
Table system comprising a slide that linearly moves to one side along the magnet track. According to claim 1,
The table system, characterized in that the magnet track is formed in the longitudinal direction on the upper surface of the linear moving bar. According to claim 1,
the frame is
Posts located at the corners and connected to the floor;
and a support part protruding between the posts to fix the base. 4. The method of claim 3,
a stator formed on an upper portion of the post;
Further comprising a bracket formed on the upper portion of the support,
The stator is connected to one end of the linear moving bar by a shock absorber,
The bracket is a table system, characterized in that fastened to a magnet unit attached to the outer surface of the linear movement bar. 5. The method of claim 4,
The table system according to claim 1, further comprising a coil spring formed side by side with the shock absorber to connect one end of the stator and the linear moving bar. 5. The method of claim 4,
Further comprising a fixed piece formed between one end of the linear moving bar and the stator, one side of the fixed piece is connected to the stator by the shock absorber, and the other surface of the fixed piece is a universal joint with one end of the linear moving bar and Table system characterized in that it is connected. 5. The method of claim 4,
The shock absorber is a table system, characterized in that it has a damping force that is linearly proportional to the speed of the linear moving bar.

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