KR20220057710A - Roll-to-roll vacuum evaporation device with optical inspection module - Google Patents

Abstract

The present invention relates to a roll-to-roll vacuum deposition device and, more specifically, to a roll-to-roll vacuum deposition device with an optical inspection module, wherein the optical inspection module is provided in a vacuum chamber in which a thin film deposition process is performed such that various measurements with respect to the thin film deposited on a substrate may be continuously performed in real time right after the thin film deposition process. Therefore, time, efforts and costs for the thin film deposition and inspection with respect to the substrate can be minimized to improve productivity, and the possibility of contamination of the substrate can be reduced. To this end, the present invention relates to the roll-to-roll vacuum deposition device with an optical inspection module, the roll-to-roll vacuum deposition device comprising: an unwinding roller unwinding a substrate; a deposition module which moves such that one surface of the substrate, which is delivered while maintaining tension from the unwinding roller, may be exposed, while performing a thin film deposition process with respect to one surface of the substrate; an optical inspection module performing an optical inspection with respect to the thin film of the substrate which is moved while maintaining tension from the deposition module; and a winding roller which rewinds the substrate delivered while maintaining tension from the optical inspection module.

Description

Roll-to-roll vacuum evaporation device with optical inspection module

The present invention relates to a roll-to-roll vacuum deposition apparatus, and in particular, by providing an optical inspection module in a vacuum chamber in which a thin film deposition process is performed, various measurements of a thin film deposited on a substrate can be continuously performed in real time immediately after the thin film deposition process. Roll-to-roll vacuum deposition apparatus equipped with an optical inspection module that can improve productivity by minimizing time, effort, and cost for thin film deposition and inspection on a substrate and reduce the possibility of contamination of the substrate is about

In general, a flexible polymer thin film film is used for the substrate covering the liquid crystal in the liquid crystal display, organic EL display, E-ink, etc. of the flexible display.

A transparent conductive film or a functional coating layer made of ITO, ZnO, SnO2, In2O3, Nb2O5, SiOx, etc. may be formed on such a polymer thin film by a roll-to-roll vacuum deposition apparatus.

In general, flexible displays provide flexibility to fold and unfold by replacing the glass substrate covering liquid crystal in liquid crystal displays, organic EL displays, and E-inks with flexible films. Since it can be manufactured in a shape, research on it has been actively conducted in recent years.

In this flexible technology field, it is true that there is a high demand for a vacuum deposition apparatus capable of a roll-to-roll process as equipment for forming a thin film.

Efforts have been made to manufacture such vacuum deposition equipment in a roll-to-roll manner. Republic of Korea Patent Registration No. 10-1273771 (hereinafter referred to as "prior art document 1") proposes a roll-to-roll sputtering system capable of continuously forming a film-type deposition target.

After depositing a thin film on a film through such a roll-to-roll sputtering system, various measurements and tests must be performed on the thin film. In the prior art, an inspection process of performing tests and measurements on a thin film on a film was additionally performed separately from a thin film deposition process on a film. As a result, the thin film deposition process on the film and the inspection process for performing various measurements and tests on the thin film deposited on the film are performed in separate devices, which requires more time, effort, and cost than necessary. .

In addition, after depositing a thin film on the film, if various measurements and tests are performed on the thin film on the film through a separate inspection device, oxidation may occur in the thin film on the film and contamination may occur over time and movement. problems that are likely to increase.

In addition, Korean Patent Laid-Open No. 10-2013-0125900 (hereinafter referred to as "Prior Art Document 2") discloses that flexible printed circuit board units are continuously formed in a film or tape form to automatically inspect the appearance of an object using an optical method. We propose an automatic optical inspection system that inspects.

However, since the prior art document 2 is also conducted using a separate device separately from the thin film deposition process of depositing a thin film on a film, time, effort, and cost for thin film deposition and inspection process for the film are more than necessary. inevitably it will take In addition, since the optical inspection in Prior Art Document 2 is based on the vision inspection, it is possible to detect only a simple defect of the thin film on the film, it is difficult to measure the thin film thickness, and as a result, it is not possible to analyze the thin film thickness deviation, The optical density distribution also has a problem that cannot be analyzed.

Prior Art Document 1: Republic of Korea Patent Publication No. 10-2011-0012182 (published date: February 09, 2011, title of invention: roll-to-roll sputtering apparatus and continuous sputtering method implementing continuous sputtering) Prior Art Document 2: Republic of Korea Patent Publication No. 10-2013-0125900 (published date: November 20, 2013, title of invention: roll-to-roll sputtering device)

The present invention was devised to solve the problems of the prior art as described above, and by providing an optical inspection module in a vacuum chamber in which the thin film deposition process is performed, various measurements of the thin film deposited on the substrate are continuously performed immediately after the thin film deposition process By configuring so that it can be performed in real time, it is possible to improve productivity by minimizing time, effort, and cost for thin film deposition and inspection on the substrate, and to reduce the possibility of contamination of the substrate. An object of the present invention is to provide a roll-to-roll vacuum deposition apparatus.

In addition, the present invention is configured such that the tension / guide roller is disposed between the unwinding roller and the winding roller so that both ends can freely move in response to external forces in various directions generated according to the contact transfer of the flexible substrate, whereby the flexible substrate is aligned An object of the present invention is to provide a roll-to-roll vacuum deposition apparatus equipped with an optical inspection module that allows the flexible substrate to be transported while being guided and transported in a state in which the tension is maintained without being wrinkled.

The constituent means constituting the roll-to-roll vacuum deposition apparatus provided with the optical inspection module of the present invention proposed to solve the above technical problems is, in the roll-to-roll vacuum deposition apparatus, an unwinding roller for unwinding the substrate; a deposition module that moves one surface of the substrate transferred from the unwinding roller in a state in which tension is maintained to be exposed, and performs a thin film deposition process on one surface of the substrate; an optical inspection module for performing an optical inspection on the thin film of the substrate moved from the deposition module in a state in which tension is maintained; It characterized in that it is configured to include a winding roller for rewinding the substrate transferred from the optical inspection module in a state in which the tension is maintained.

Here, the optical inspection module comprises a light source sensor module for irradiating light to the moving substrate, and a light receiving sensor module for receiving the light transmitted through the substrate and measuring at least one of an optical density and a thickness of the thin film do it with

In addition, the deposition module may include a drum rotating in one direction while in contact with the other surface of the substrate, and at least one target for performing sputtering on one surface of the substrate moving along the drum.

In addition, the deposition module rotates in one direction while in contact with the other surface of the substrate, and sputtering is performed on one surface of the substrate moving along at least one drum substitute roller and at least one drum substitute roller spaced apart from each other. at least one target to be performed and a barrier rib respectively disposed and formed between adjacent targets to spatially separate the at least one target, wherein each of the at least one drum substitute roller corresponds to the barrier rib It is characterized in that the arrangement is formed in a position.

In addition, it is disposed between the unwinding roller and the deposition module, between the deposition module and the optical inspection module, and between the optical inspection module and the winding roller so that the moving substrate can be guided and maintained in tension. It is characterized in that it comprises a tension / guide roller.

According to the roll-to-roll vacuum deposition apparatus equipped with an optical inspection module according to the present invention having the above problems and solutions, the optical inspection module is provided in a vacuum chamber in which a thin film deposition process is performed, and various measurements of thin films deposited on a substrate are provided. is configured to be continuously performed in real time immediately after the thin film deposition process, so it is possible to improve productivity and reduce the possibility of contamination of the substrate by minimizing the time, effort, and cost for thin film deposition and inspection on the substrate. There are advantages to allowing

In addition, according to the present invention, a tension / guide roller is disposed between the unwinding roller and the winding roller so that both ends can freely move in response to external forces in various directions generated according to the contact transfer of the flexible substrate. The effect of allowing the substrate to be guided and transported in an aligned state and to allow the flexible substrate to be transported in a state in which the tension is maintained without wrinkling occurs.

1 is a schematic cross-sectional configuration diagram of a roll-to-roll vacuum deposition apparatus equipped with an optical inspection module according to an embodiment of the present invention.
2 is a schematic cross-sectional configuration diagram of a roll-to-roll vacuum deposition apparatus having an optical inspection module according to another embodiment of the present invention.

Hereinafter, a preferred embodiment of a roll-to-roll vacuum deposition apparatus equipped with an optical inspection module according to the present invention having the above problems, solutions and effects will be described in detail with reference to the accompanying drawings.

Since the present invention can apply various transformations and can have various embodiments, specific embodiments are illustrated in the drawings and described in detail in the detailed description. Effects and features of the present invention, and a method for achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various forms.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, and when described with reference to the drawings, the same or corresponding components are given the same reference numerals, and the overlapping description thereof will be omitted. .

In the following embodiments, terms such as include or have means that the features or components described in the specification are present, and the possibility that one or more other features or components will be added is not excluded in advance.

In the drawings, the size of the components may be exaggerated or reduced for convenience of description. For example, since the size and thickness of each component shown in the drawings are arbitrarily indicated for convenience of description, the present invention is not necessarily limited to the illustrated bar.

1 is a schematic structural cross-sectional view of a roll-to-roll vacuum deposition apparatus equipped with an optical inspection module according to an embodiment of the present invention.

1, the roll-to-roll vacuum deposition apparatus 100 provided with an optical inspection module according to an embodiment of the present invention includes an unwinding roller 10, a deposition module 30, an optical inspection module 50, It is configured to include a winding roller 70 and a tension/guide roller 90 .

The unwinding roller 10 performs an operation of unwinding or rewinding a substrate s, specifically, a flexible substrate s such as a film by a mutual rotation motion between the winding roller 70 and the winding roller 70 . Specifically, the unwinding roller 10 performs an operation to unwind the flexible substrate (s), and the winding roller 70 is transferred from the optical inspection module 50 in a state in which the tension is maintained, as will be described later. The operation of rewinding the substrate (s) is performed.

The unwinding roller 10 and the winding roller 70 work together to wind or unwind the film-type vapor-deposited object, that is, the flexible substrate s, so that the substrate s is applied to the deposition area corresponding to the deposition module 30 and the substrate. It is transported along the optical inspection module 50 corresponding to the area of inspection, test, measurement, etc. for the thin film on the image. The substrate (s) wound on the unwinding roller 10 passes through the deposition module 30 and the optical inspection module 50 while the tension is maintained and guided through a plurality of tension/guide rollers 90 and the It is rewound on the winding roller (70).

A load cell (not shown) for detecting the tension of the transferred flexible substrate s may be installed on at least one of the unwinding roller 10 and the winding roller 70 . Since the flexible substrate (s) may be damaged when a tension of a certain size or more is applied to the flexible substrate (s), a load cell (not shown) prevents this by monitoring the tension of the flexible substrate (s). That is, in the load cell, when the tension applied to the flexible substrate s exceeds a certain level, the speed of the unwinding roller 10 and the winding roller 70 so that the flexible substrate s can be transported below the limit tension. It provides a signal that can be adjusted.

The rotation directions of the unwinding roller 10 and the winding roller 70 may be varied. That is, when it is necessary to perform a thin film deposition process again on the flexible substrate s on which a thin film is deposited while being unwound from the unwinding roller 10 and wound by the winding roller 70 , the unwinding roller 10 and the winding roller The direction of rotation of (70) is changed so that the flexible substrate (s) wound on the winding roller (70) is unwound and can be wound on the unwinding roller (10).

In this case, the optical inspection module 50 may be disposed between the unwinding roller 10 and the deposition module 30 . That is, the optical inspection module 50 according to the present invention is exemplified as being disposed between the deposition module 30 and the winding module 70 in FIGS. 1 and 2, but in some cases, the unwinding roller 10 and between the deposition module 30 and between the deposition module 30 and the winding roller 70 , it is preferably disposed at at least one position.

The flexible substrate, which is unwound and moved by the unwinding roller 10 , is transferred to the deposition module 30 and undergoes a thin film deposition process. The flexible substrate (s) delivered from the unwinding roller 10 is transferred to the deposition module 30 while being guided in a state in which the tension is maintained, and one surface is exposed while passing through the deposition module 30. A thin film is deposited by performing a thin film deposition process such as a sputtering process on one surface of the exposed substrate.

That is, the deposition module 30 is moved so that one surface of the substrate s transferred from the unwinding roller 10 in a state in which the tension is maintained is exposed, and the one surface of the substrate s is subjected to a sputtering process, etc. An operation of performing a thin film deposition process is performed.

One surface of the substrate (s) may be a front surface or a rear surface. When one surface of the substrate is the front surface, the other surface of the substrate corresponds to the rear surface, and when the one surface of the substrate is the rear surface, the other surface of the substrate corresponds to the front surface.

Since the substrate s passing through the deposition module 30 moves with one surface exposed, the other surface of the substrate is transported in contact with a drum 31 or a drum substitute roller 33 to be described later. , one surface of the substrate is transferred in an exposed state while facing at least one target 35 to be described later. Accordingly, one surface of the substrate (s) may be subjected to a thin film deposition process such as a sputtering process on one surface while passing through the deposition module 30 to form a thin film.

After being subjected to a thin film deposition process such as a sputtering process on one surface of the deposition module 30 , the flexible substrate s moved is continuously subjected to an optical inspection process while being transferred to the optical inspection module 50 . The flexible substrate (s) moved in the deposition module 30 is transferred to the optical inspection module 50 while being guided in a state in which the tension is maintained, and the optical inspection module 50 provides various Perform optical inspection for testing, measurement and inspection.

That is, the optical inspection module 50 performs various optical inspections for testing, measurement, and inspection on the thin film of the substrate s that is moved from the deposition module 30 in a state in which the tension is maintained. As a result, the flexible substrate s may be continuously subjected to a thin film deposition process and a thin film inspection process while passing through the deposition module 30 and the optical inspection module 50 . In particular, since the optical inspection of the thin film of the flexible substrate (s) is performed in the vacuum chamber 1 in a vacuum state, it is possible to prevent oxidation and contamination of the thin film of the substrate in advance.

The optical inspection module 50 is disposed in the inspection chamber 5 capable of maintaining a vacuum state, and performs various tests, measurements, and inspections on the moving substrate, specifically, the thin film of the substrate in a state where the airtightness is maintained. Perform an optical inspection to

The optical inspection module 50 according to the present invention is configured to include a light source sensor module 51 and a light receiving sensor module 53 . Specifically, the optical inspection module 50 includes a light source sensor module 51 that irradiates light to the moving substrate s, and receives light transmitted through the substrate s among the optical density and thickness of the thin film. It is configured to include a light receiving sensor module 53 for measuring at least one.

The light source sensor module 51 scans the thin film of the moving substrate while irradiating laser light toward the thin film. Specifically, the light source sensor module 51 is disposed on the moving substrate (s) to irradiate the scan light to the thin film of the substrate (s).

The light receiving sensor module 53 is disposed under the substrate that is moved corresponding to the light source sensor module 51 . The light receiving sensor module 53 basically receives and senses the light that is irradiated from the light source sensor module 51 and has passed through the substrate on which the thin film is formed.

Various measurements, tests, and inspections related to the thin film may be performed using the light sensed by the light receiving sensor module 53 and the intensity of light irradiated from the light source sensor module 51 . Such an operation may be performed with a separate measurement module (not shown), or may be performed together with the light receiving sensor module 53 without a separate measurement module.

In order to simplify the configuration of the optical inspection module 50 according to the present invention, it is preferable to configure the light receiving sensor module 53 to perform various measurements related to the thin film. Specifically, the light receiving sensor module 53 receives the light transmitted through the substrate (s) and performs an operation of measuring at least one of the optical density and the thickness of the thin film.

The light receiving sensor module 53 may detect the received intensity of transmitted light, receive intensity information of the irradiated light from the light source sensor module 51 , and measure and analyze the optical density of the thin film of the substrate. Since the light receiving sensor module 53 can sense and receive the intensity of the scan light, it is possible to measure and analyze the optical density through the contour method.

In addition, the light receiving sensor module 53 may measure and analyze the thickness of the thin film using the correlation with the optical density, thereby measuring and analyzing the thickness deviation of the thin film. The light receiving sensor module 53 can measure and analyze the thickness of the thin film using the correlation with the optical density, but separately from this, the detected intensity of transmitted light and the received light source sensor module 51 It is also possible to measure and analyze the thickness of the thin film using the intensity information of the light irradiated from the .

The light receiving sensor module 53 may analyze whether the thin film is defective, in particular whether a pinhole is generated, by using at least one piece of information among the optical density and thickness information of the thin film. However, this specific analysis is preferably analyzed by an external analysis device (not shown) that has received the optical density and thickness information of the thin film in order to ensure the simplification of the optical inspection module 50 and the accuracy of the analysis. .

Meanwhile, the optical density information and the thin film thickness information measured and analyzed by the light receiving sensor module 53 may be transmitted to an analysis device (not shown) separately provided outside. Then, the analysis device (not shown) may perform various measurements, tests, and inspections using the information and analyze it.

In addition, the light receiving sensor module 53 may only perform an operation of scanning and sensing the light passing through the substrate (s) and may not perform an operation of measuring the optical density and thickness of the thin film. In this case, the intensity information of the transmitted light detected by the light receiving sensor module 53 and the intensity information of the light irradiated by the light source sensor module 51 may be transmitted to an analysis device (not shown) separately provided outside. Then, the analysis device may perform various measurements, tests, and inspections using the information and analyze it.

The flexible substrate s that has undergone the optical inspection process while passing through the optical inspection module 50 is rewound on the winding roller 70 . Also, the flexible substrate (s) transferred from the optical inspection module 50 is rewound on the winding roller 70 in a state in which the tension is maintained. That is, the winding roller 70 performs an operation of rewinding the substrate transferred from the optical inspection module 50 in a state in which the tension is maintained.

The flexible substrate (s) moving from the unwinding roller 10 to the winding roller 70 needs to be transported in a state in which tension is maintained without wrinkling, and needs to be transported while being guided so as not to be separated laterally. there is To this end, between the unwinding roller 10 and the deposition module 30 , between the deposition module 30 and the optical inspection module 50 , and between the optical fiber module 50 and the winding module 70 , A plurality of tension/guide rollers 90 are respectively arranged so that the transferred substrate can be guided while maintaining the tension.

That is, the plurality of tension/guide rollers 90 are disposed between the unwinding roller 10 and the deposition module 30 , between the deposition module 30 and the optical inspection module 50 , and the optical inspection module (50) and the moving substrate (s) disposed between the winding roller 70 performs an operation to maintain the tension and to be guided.

Each of the tension/guide rollers 90 may be configured to perform both the tension maintenance operation and the guide operation, or may be configured to perform only the tension maintenance operation or only the guide operation.

According to the roll-to-roll vacuum deposition apparatus 100 equipped with the optical inspection module according to the present invention described above, the optical inspection module 50 is provided in the vacuum chamber 1 in which the thin film deposition process is performed to apply the optical inspection module 50 to the thin film deposited on the substrate. Since it is configured to perform various measurements in real time immediately after the thin film deposition process, it is possible to improve productivity by minimizing the time, effort and cost for thin film deposition and inspection on the substrate, and to reduce the possibility of contamination of the substrate. The advantage is that it can be reduced. That is, if the inspection of the thin film of the substrate is carried out in a process, time and space separate from the thin film deposition process, the possibility of exposure to particles or contamination is high and productivity is low, whereas the present invention provides a series of Since the thin film deposition process and the thin film inspection process can be performed on the substrate in a continuous process, the possibility of exposure to contamination can be minimized and productivity can be improved.

The deposition module 30 performs an operation of depositing a thin film on the moving flexible substrate s through various deposition methods. In the present invention, thin film deposition is exemplified by a sputtering method. In addition, the sputtering method may be performed through various configurations, in the present invention, the drum 31 or the drum substitute roller 33 and at least one target 35 are exemplified.

Specifically, as shown in FIG. 1 , the deposition module 30 applied to the roll-to-roll vacuum deposition apparatus 100 equipped with an optical inspection module according to an embodiment of the present invention includes the other surface of the substrate s and At least one for performing sputtering on one surface of the drum 31 and the substrate s moving along the drum 31 and rotating in one direction (counterclockwise in FIG. 1) in a contact state It is configured to include a target (35).

The drum 31 is transferred while rotating the substrate in one direction while in contact with the other surface of the substrate s transferred from the unwinding roller 10 in a state in which the tension is maintained. Accordingly, one surface of the substrate may be exposed in a state facing the at least one target 35 , whereby the substrate s is transferred while thin film sputtering is performed on one surface by the at least one target 35 . process can be performed.

The at least one target 35 is arranged to be spaced apart from the drum 31 by a predetermined distance along the side and the lower portion of the drum 31, and is spaced apart from each other by a predetermined distance to move along the drum 31 A sputtering thin film is deposited on one surface of the substrate (s). As a result, predetermined thin film layers may be deposited on one surface of the substrate s passing through the deposition module 30 .

Meanwhile, as shown in FIG. 1 , the deposition module 30 includes barrier ribs 37 disposed between adjacent targets 35 to spatially separate the at least one target 35 from each other. It may be configured to further include.

The partition wall 37 is adopted to prevent the target material sputtered by each of the at least one target 35 from flying to the other target 35 (especially an adjacent target). By adopting and applying the partition wall 37, it is possible to prevent the target material sputtered by each target 35 from flying to the adjacent target 35, thereby reducing the contamination of the adjacent target 35. By preventing it, the deposition quality can be maintained.

Meanwhile, the deposition module 30 includes at least one target, through which a thin film having a desired thickness can be deposited on the substrate s, and further, different materials can be deposited in multiple layers.

A thin film deposition process such as a sputtering process by the deposition module 30 is performed in the vacuum chamber 1 maintaining a vacuum state. In addition, the optical inspection by the optical inspection module 50 is also performed in the same vacuum chamber 1 , and the unwinding roller 10 and the winding roller 70 are also arranged in the same vacuum chamber 1 . Consequently, the unwinding roller 10 , the deposition module 30 , the optical inspection module 50 , and the winding module 70 are preferably arranged in one vacuum chamber 1 . However, the arrangement structure of the unwinding roller 10 , the deposition module 30 , the optical inspection module 50 and the winding module 70 disposed in one and the same vacuum chamber 1 is limited to FIGS. 1 and 2 . Without it, it can be varied in various ways.

As such, in principle, the unwinding roller 10, the deposition module 30, the optical inspection module 50, and the winding module 70 are arranged in various arrangement structures within the same vacuum chamber 1, but , as shown in FIGS. 1 and 2 , may be individually arranged in a separate vacuum chamber 1 in some cases.

In this case, the thin film deposition process such as the sputtering process by the deposition module 30 is preferably performed in a chamber maintaining a vacuum state, specifically, the process chamber. Accordingly, it is preferable that the unwinding roller 10 and the optical inspection module 50 disposed adjacent to each other are also arranged and operated in the unwinding chamber and the inspection chamber that can maintain a vacuum state, respectively. In addition, it is preferable that the winding roller 70 is also arranged and operated in a winding chamber capable of maintaining a vacuum state. In particular, the optical inspection module 50 prevents oxidation of the thin film, prevents the thin film from being contaminated, and is disposed in an inspection chamber that can maintain airtightness and maintain a vacuum state at the same time to ensure the precision of optical inspection. it is preferable

That is, the unwinding roller 10 is disposed and operated in the unwinding chamber, the deposition module 30 is disposed and operated in the process chamber, and the optical inspection module 50 is disposed and operated in the inspection chamber, The winding roller 70 is disposed in the winding chamber to operate. In addition, in the adjacent chambers, a slit through which the substrate (s) can pass is formed on an adjacent interface, but the respective chambers are operated so that a vacuum state can be maintained as a whole.

Meanwhile, the substrate s may be subjected to a pretreatment process before being subjected to a thin film deposition process such as a sputtering process. The pretreatment process includes an ion beam treatment or the like. The ion beam treatment cleans the surface of the substrate and improves the efficiency of thin film deposition in the sputtering process through surface treatment. Such an ion beam treatment is preferably performed before sputtering by the target 35 starts. Therefore, it is preferable that the ion beam processing module for the ion beam processing is disposed before the target 35 (arranged on the left side of the target 35 disposed on the leftmost side).

On the other hand, in some cases, instead of the drum 31 adopted and applied to the deposition module 30, at least one roller that is structurally simple and easier to install and replace, specifically, at least one drum substitute roller 33 It can be applied instead of adopted.

Specifically, as shown in FIG. 2 , the roll-to-roll vacuum deposition apparatus 100 provided with an optical inspection module according to another embodiment of the present invention is an optical inspection according to the embodiment of the present invention described above with reference to FIG. 1 . Most of the configuration is the same as that of the roll-to-roll vacuum deposition apparatus 100 having a module, except that a drum substitute roller 33 is adopted instead of the drum 31 of the deposition module 30 . Therefore, in the following, only the parts different from those of FIG. 1 will be described in detail and the remaining parts will be omitted. However, the omitted parts are applied in the same manner as the parts described with reference to FIG. 1 .

As shown in FIG. 2 , the deposition module 30 applied to the roll-to-roll vacuum deposition apparatus 100 provided with an optical inspection module according to another embodiment of the present invention is in contact with the other surface of the substrate (s). Rotating in one direction (counterclockwise in FIG. 2 is illustrated) in a state, at least one drum substitute roller 33 and at least one drum substitute roller 33 arranged to be spaced apart from each other of the substrate moving along At least one target 35 for performing sputtering on one surface and a barrier rib 37 disposed and formed between adjacent targets 35 to spatially separate the at least one target 35 from each other. and each of the at least one drum substitute roller 33 is configured to be disposed and formed at a position corresponding to the partition wall 37 .

The at least one drum substitute roller 33 is transferred while rotating in one direction while in contact with the other surface of the substrate s transferred from the unwinding roller 10 in a state in which the tension is maintained. The at least one drum substitute roller 33 is arranged to be spaced apart from each other by a predetermined distance, and is arranged to have a semicircular or elliptical shape as a whole. Accordingly, one surface of the substrate may be exposed in a state facing the at least one target 35 , whereby the substrate s is transferred while thin film sputtering is performed on one surface by the at least one target 35 . process can be performed.

The at least one target 35 is arranged to be spaced apart from the at least one drum substitute roller 33 by a predetermined distance along the side and the lower portion of the group of the at least one drum substitute roller 33, and spaced apart from each other by a predetermined distance A sputtering thin film is deposited on one surface of the substrate (s) which is disposed and moves along the at least one drum substitute roller (33). As a result, predetermined thin film layers may be deposited on one surface of the substrate s passing through the deposition module 30 .

Meanwhile, as shown in FIG. 2 , the deposition module 30 includes barrier ribs 37 disposed between adjacent targets 35 to spatially separate the at least one target 35 from each other. is comprised of

The partition wall 37 is adopted and applied to prevent the target material sputtered by each of the at least one target 35 from flying to another target 35 (especially an adjacent sputter). By adopting and applying the partition wall 37, it is possible to prevent the target material sputtered by each target 35 from flying to the adjacent target 35, thereby reducing the contamination of the adjacent target 35. By preventing it, the deposition quality can be maintained.

On the other hand, it is preferable for the deposition quality that the flexible substrate (s) transported along the at least one drum substitute roller 33 faces the target 35 facing it on a flat surface rather than a curved surface. To this end, each of the at least one drum substitute roller 33 is disposed and formed at a position corresponding to the partition wall 37 .

Specifically, each of the drum substitute rollers 33 is disposed to correspond to each of the partition walls 37, and when the corresponding partition wall 37 is extended, the upper surface (substrate) of the corresponding partition wall 37 (s) or the corresponding drum replacement roller 33 and the side corresponding to the opposite corner) to coincide with the meeting position, or to be located in contact with the upper surface or the lower surface of the corresponding partition wall 37 are placed As a result, the flexible substrate positioned between the adjacent partition walls 37 can be maintained in a taut state by the adjacent drum substitute roller 33, whereby the flexible substrate s facing each target 35 ) can maintain a flat state, so it is possible to improve the quality of thin film deposition on one surface of the substrate.

Although the embodiments according to the present invention have been described above, these are merely exemplary, and those of ordinary skill in the art will understand that various modifications and equivalent ranges of embodiments are possible therefrom. Accordingly, the true technical protection scope of the present invention should be defined by the following claims.

1: vacuum chamber 10: unwinding roller
30: deposition module 31: drum
33: drum substitute roller 35: target
37: bulkhead 50: optical inspection module
51: light source sensor module 53: light receiving sensor module
70: winding roller 90: tension / guide roller
100: roll-to-roll vacuum deposition apparatus equipped with an optical inspection module

Claims (5)

In the roll-to-roll vacuum deposition apparatus,
an unwinding roller for unwinding the substrate;
a deposition module that moves one surface of the substrate transferred from the unwinding roller in a state in which tension is maintained to be exposed, and performs a thin film deposition process on one surface of the substrate;
an optical inspection module for performing an optical inspection on the thin film of the substrate moved from the deposition module in a state in which tension is maintained;
Roll-to-roll vacuum deposition apparatus with an optical inspection module, characterized in that it comprises a winding roller for rewinding the substrate transferred from the optical inspection module in a state in which the tension is maintained.
The method according to claim 1,
The optical inspection module comprises a light source sensor module for irradiating light to the moving substrate, and a light receiving sensor module for receiving the light transmitted through the substrate and measuring at least one of an optical density and a thickness of the thin film A roll-to-roll vacuum deposition apparatus equipped with an optical inspection module.
The method according to claim 1,
The deposition module is an optical inspection module comprising a drum rotating in one direction while in contact with the other surface of the substrate and at least one target for performing sputtering on one surface of the substrate moving along the drum Equipped with roll-to-roll vacuum deposition apparatus.
The method according to claim 1,
The deposition module rotates in one direction while in contact with the other surface of the substrate, and sputtering is performed on one surface of the substrate moving along at least one drum substitute roller and at least one drum substitute roller spaced apart from each other. at least one target and a barrier rib disposed and formed between adjacent targets in order to spatially separate the at least one target from each other;
The roll-to-roll vacuum deposition apparatus with an optical inspection module, characterized in that each of the at least one drum substitute roller is disposed and formed at a position corresponding to the partition wall.
The method according to claim 1,
Tension / disposed between the unwinding roller and the deposition module, between the deposition module and the optical inspection module, and between the optical inspection module and the winding roller so that the moving substrate can be guided and maintained in tension A roll-to-roll vacuum deposition apparatus having an optical inspection module, characterized in that it includes a guide roller.

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