KR20230031510A - Roll-to-roll vacuum deposition monitoring system using optical inspection module - Google Patents

Abstract

The present invention relates to an artificial intelligence-based monitoring system of roll-to-roll vacuum deposition using an optical inspection module, and more specifically, to an artificial intelligence-based monitoring system of roll-to-roll vacuum deposition using an optical inspection module, wherein an optical inspection module is provided in a vacuum chamber of a roll-to-roll vacuum deposition device where a thin film deposition process is performed using a roll-to-roll method, to perform various measurements and inspections on a thin film deposited on a substrate, and wherein an artificial intelligence-based monitoring device arranged outside the vacuum chamber is configured to receive inspection data from the optical inspection module and to monitor the state of thin film deposition in real time using analysis and processing based on artificial intelligence, thereby enabling swift response when a defect occurs on the thin film, minimizing time, efforts and costs for depositing a thin film on a substrate and inspecting the thin film to improve productivity and reducing the possibility of the substrate being contaminated. The artificial intelligence-based monitoring system of roll-to-roll vacuum deposition using an optical inspection module according to the present invention comprises: a roll-to-roll vacuum deposition device including an optical inspection module, which performs a thin film deposition process on a substrate using a roll-to-roll method in a vacuum chamber and performs an optical inspection on a thin film on the substrate in the vacuum chamber; and an artificial intelligence-based monitoring device arranged outside the roll-to-roll vacuum deposition device to monitor the state of thin film deposition in real time using the analysis and processing of the inspection data, which have been transferred from the optical inspection module, based on artificial intelligence.

Description

Roll-to-roll vacuum deposition monitoring system using optical inspection module

The present invention relates to an artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module. Various measurements and inspections are performed on the thin film deposited on the film, and the artificial intelligence-based monitoring device placed outside the vacuum chamber receives inspection data from the optical inspection module, and then analyzes and processes based on artificial intelligence in real time. By configuring the thin film deposition state to be monitored, it is possible to quickly respond when a thin film defect occurs, improve productivity by minimizing time, effort, and cost for thin film deposition and inspection on the substrate, and reduce the possibility of contamination of the substrate. It relates to an artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module that can reduce

In general, a liquid crystal display of a flexible display, an organic EL display, an E-ink, etc., uses a polymer thin film having good flexibility as a substrate covering liquid crystal.

A transparent conductive film or a functional coating layer made of ITO, ZnO, SnO 2 , In 2 O 3 , Nb 2 O 5 , SiOx, or the like may be formed on such a polymer thin film by a roll-to-roll vacuum deposition apparatus.

In general, a flexible display is a liquid crystal display, organic EL display, E-ink, etc., in which a glass substrate enclosing a liquid crystal is replaced with a flexible film, giving flexibility to fold and unfold. Since it can be produced in a form, research on it has been actively conducted in recent years.

In such a flexible technology field, it is true that there is a high demand for a vacuum deposition apparatus capable of performing a roll-to-roll process as an equipment for forming a thin film.

Efforts have been made to manufacture such vacuum deposition equipment in a roll-to-roll manner. Republic of Korea Patent Registration No. 10-1273771 (hereinafter, referred to as "Prior Art Document 1") proposes a roll-to-roll sputtering system capable of continuously forming a film-type deposited object.

After depositing a thin film on a film through such a roll-to-roll sputtering system, various measurements and tests on the thin film should be performed. Conventionally, an inspection process of performing tests and measurements on a thin film on a film was additionally performed separately from the thin film deposition process for the film. As a result, the thin film deposition process on the film and the inspection process for performing various measurements and tests on the thin film deposited on the film are performed in separate devices, resulting in problems that require more time, effort, and cost than necessary. .

In addition, after depositing a thin film on the film, when various measurements and tests are performed on the thin film on the film through a separate inspection device, oxidation and contamination of the thin film on the film may occur over time and movement. problems that are likely to arise.

In addition, Korean Patent Laid-open Publication No. 10-2013-0125900 (hereinafter referred to as "Prior Art Document 2") discloses a film or tape-type inspection object in which flexible printed circuit board units are continuously formed by using an optical method to automatically We propose an automatic optical inspection system for inspection.

However, since Prior Art Document 2 is also carried out using a separate device from the thin film deposition process for depositing a thin film on the film, the time, effort and cost for the thin film deposition and inspection process for the film are more than necessary. it's bound to take In addition, since the optical inspection in Prior Art Document 2 is based on vision inspection, it is possible to detect only simple defects in the thin film on the film, and it is difficult to measure the thickness of the thin film, and as a result, it is not possible to analyze the thin film thickness deviation, The optical density distribution also has the problem of not being able to analyze.

In addition, prior art document 1 and prior art document 2 simply present technical configurations for a deposition device and an inspection device, but do not suggest a technical configuration for monitoring a thin film deposition state in real time. In particular, it does not suggest anything about the configuration and operation monitored through analysis and processing based on artificial intelligence.

Prior art document 1: Republic of Korea Patent Publication No. 10-2011-0012182 (published date: February 09, 2011, title of invention: roll-to-roll sputtering device and continuous sputtering method implementing continuous sputtering) Prior art document 2: Republic of Korea Patent Publication No. 10-2013-0125900 (published date: November 20, 2013, title of invention: roll-to-roll sputtering device)

The present invention was invented to solve the problems of the prior art as described above, and a thin film deposited on a substrate is provided with an optical inspection module in a vacuum chamber of a roll-to-roll vacuum deposition apparatus in which a thin film deposition process is performed by a roll-to-roll method. After the artificial intelligence-based monitoring device placed outside the vacuum chamber receives inspection data from the optical inspection module, the thin film deposition state is monitored in real time through analysis and processing based on artificial intelligence. By configuring it to be so, it is possible to quickly cope with the occurrence of thin film defects, minimize time, effort and cost for thin film deposition and inspection on the substrate, thereby improving productivity, and reducing the possibility of contamination of the substrate. Its purpose is to provide an artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module.

In order to solve the above technical problem, the present invention, which is a component of the artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module, is a component of the artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module. In the present invention, a roll-to-roll vacuum deposition apparatus having an optical inspection module that performs a thin film deposition process on a substrate by a roll-to-roll method in a vacuum chamber and performs an optical inspection on the thin film of the substrate in the vacuum chamber; It is configured to include an artificial intelligence-based monitoring device disposed outside the roll-to-roll vacuum deposition device and monitoring the thin film deposition state in real time through artificial intelligence-based analysis and processing of the inspection data transmitted from the optical inspection module. to be

Here, the artificial intelligence-based monitoring device may include: a data collection module for collecting inspection data transmitted from the optical inspection module; a data processing module that stores and manages the test data collected by the data collection module, and collects, stores, and manages diagnostic auxiliary data; It is characterized in that it is configured to include a diagnosis module for performing diagnosis on the thin film deposition state through an analysis and simulation process of applying the diagnosis basic information data input from the data processing module to at least one model.

Here, the artificial intelligence-based monitoring device may further include a digital twin model processing module that processes the diagnosis result information data input from the diagnosis module in conjunction with a digital twin 3D model and provides it through visualization.

Here, the data processing module includes a database for storing and managing diagnostic basic information data including inspection data collected by the data collection module and existing defect history information data, and the diagnostic module stores the diagnostic basic information data at least. An analysis unit that performs an operation of detecting the occurrence and type of a defect in a thin film by applying and analyzing one model, applying the diagnostic basic information data to at least one model and simulating to predict the state change of the roll-to-roll vacuum deposition apparatus Consists of a simulation unit that performs operations and an integrated diagnosis unit that comprehensively analyzes the performance results of the analysis unit and the simulation unit to perform defect diagnosis, defect type diagnosis, defect cause diagnosis, defect location identification, and defect prediction characterized by being

According to the AI-based monitoring system for roll-to-roll vacuum deposition using the optical inspection module of the present invention having the above problems and solutions, the roll-to-roll vacuum deposition process is carried out by the optical inspection module in the vacuum chamber of the roll-to-roll vacuum deposition device. An inspection module is provided so that various measurements and inspections are performed on the thin film deposited on the substrate, and an artificial intelligence-based monitoring device placed outside the vacuum chamber receives inspection data from the optical inspection module and performs analysis based on artificial intelligence. Since the thin film deposition state is monitored in real time through processing and processing, it is possible to quickly cope with thin film defects and minimize time, effort, and cost for thin film deposition and inspection on the substrate to improve productivity. And, the advantage of being able to reduce the possibility of contamination of the substrate is generated.

1 is a configuration block diagram of an artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module according to an embodiment of the present invention.
2 is a block diagram of an artificial intelligence-based monitoring device constituting an artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module according to an embodiment of the present invention.
3 is a block diagram of a diagnostic module constituting an artificial intelligence-based monitoring device applied to the present invention.
4 is a block diagram of a digital twin model processing module constituting an artificial intelligence-based monitoring device applied to the present invention.
5 is a schematic cross-sectional view of a first form of a roll-to-roll vacuum deposition apparatus constituting an artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module according to an embodiment of the present invention.
6 is a schematic cross-sectional view of a second form of a roll-to-roll vacuum deposition apparatus constituting an artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module according to an embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings, a preferred embodiment of an artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module according to the present invention having the above problems, solutions, and effects will be described in detail.

Since the present invention can apply various transformations and have various embodiments, specific embodiments will be illustrated in the drawings and described in detail in the detailed description. Effects and features of the present invention, and methods for achieving them will become clear with reference to the embodiments described later in detail together with the drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various forms.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, and when describing with reference to the drawings, the same or corresponding components are assigned the same reference numerals, and overlapping descriptions thereof will be omitted. .

In the following embodiments, terms such as include or have mean that features or components described in the specification exist, and do not preclude the possibility that one or more other features or components may be added.

In the drawings, the size of components may be exaggerated or reduced for convenience of description. For example, since the size and thickness of each component shown in the drawings are arbitrarily shown for convenience of description, the present invention is not necessarily limited to the illustrated bar.

1 is a configuration block diagram of an artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module according to an embodiment of the present invention, and FIG. 2 is a roll-to-roll vacuum deposition using an optical inspection module according to an embodiment of the present invention. It is a block diagram of an artificial intelligence-based monitoring device constituting an artificial intelligence-based monitoring system of, Figure 3 is a block diagram of a diagnostic module constituting an artificial intelligence-based monitoring device applied to the present invention, Figure 4 is a block diagram of the present invention It is a block diagram of the digital twin model processing module constituting the applied AI-based monitoring device.

As shown in FIG. 1, the AI-based monitoring system 300 for roll-to-roll vacuum deposition using an optical inspection module according to an embodiment of the present invention is a roll-to-roll vacuum deposition apparatus 100 having an optical inspection module 50. ) And an artificial intelligence-based monitoring device 200 that is connected to the optical inspection module 50 by wire or wirelessly, receives inspection data, analyzes and processes it based on artificial intelligence, and monitors the thin film deposition state in real time. consists of including

The roll-to-roll vacuum deposition apparatus 100 performs a thin film deposition process on a substrate by a roll-to-roll method in a vacuum chamber 1, but as shown in FIGS. 5 and 6, in the vacuum chamber 1 An optical inspection module 50 performing an optical inspection on the thin film of the substrate is provided.

As shown in FIGS. 5 and 6 , the optical inspection module 50 applied to the present invention is not disposed outside the vacuum chamber 1 in which the thin film deposition process is performed, but is applied to the substrate by a roll-to-roll method. It is placed in the vacuum chamber 1 where the thin film deposition process is performed, continuously inspects the thin film deposited on the substrate in real time to generate inspection data, and then transmits it to the AI-based monitoring device 200.

Conventionally, only a thin film deposition process is performed in the vacuum chamber 1, and a thin film inspection process is performed individually using a separate inspection device. In contrast, the AI-based monitoring system for roll-to-roll vacuum deposition according to the present invention performs an optical inspection of the thin film on the substrate in the vacuum chamber 1 as a series of processes with the thin film deposition process on the substrate. As a result, time, effort and cost for performing thin film deposition and inspection processes on substrates can be reduced.

Result information of the optical inspection performed by the optical inspection module 50, that is, inspection data is transmitted to the AI-based monitoring device 200. Then, the artificial intelligence-based monitoring device 200 performs an operation of monitoring the thin film deposition state in real time through artificial intelligence-based analysis and processing of the inspection data. That is, the AI-based monitoring device 200 is disposed outside the roll-to-roll vacuum deposition device 100 and analyzes and processes the inspection data transmitted from the optical inspection module 50 in real time through AI-based analysis and processing. An operation of monitoring the thin film deposition state is performed.

The artificial intelligence-based monitoring device 200 diagnoses and monitors the thin film deposition state in real time by applying various artificial intelligence methods such as deep learning in the process of diagnosing through analysis and processing of the inspection data.

As shown in FIG. 2, the artificial intelligence-based monitoring device 200 according to the present invention performing such an operation includes a data collection module 110 that collects inspection data transmitted from the optical inspection module 50, the A data processing module 130 that stores and manages the data collected by the data collection module 110 and collects, stores, and manages various diagnostic auxiliary data, and includes diagnostic basic information data input from the data processing module 130 and at least one It is configured to include a diagnosis module 150 that performs diagnosis related to the thin film deposition state using a model, and the diagnosis result information data input from the diagnosis module 150 is linked to a digital twin 3D model and processed through visualization processing. It is configured to further include a digital twin model processing module 170 to provide.

The data collection module 110 collects inspection data transmitted from the optical inspection module 50 in real time during a deposition process. The data collection module 110 may collect inspection data related to only one optical inspection module 50, but when a plurality of optical inspection modules 50 are disposed in the vacuum chamber 1, a plurality of optical inspection modules 50 may be collected. Inspection data related to module 50 is collected.

Inspection data collected by the data collection module 110, specifically inspection data related to the optical inspection module 50 collected in real time, and furthermore, existing diagnosis-related data applicable to diagnosing the deposition state are stored in the data processing module. Forward to (130).

The data processing module 130 stores and manages the examination data collected by the data collection module 110, and further performs an operation of collecting, storing, and managing diagnosis auxiliary data. The data processing module 130 includes a database 131 (indicated by reference numeral 131 in FIG. 3 ) for storing and managing the inspection data collected by the data collection module 110 .

The data processing module 130 performs data communication with a nearby associated server (not shown) or a transmission medium to provide necessary information, for example, various information data used for diagnosing and monitoring the deposition state, that is, diagnosis auxiliary data. They can be received or acquired and stored in the database 131 for management. The linked server may include a big data management server that stores and manages big data information data related to diagnosing the deposition state.

The database 131 includes not only the inspection data collected in real time, but also data additionally transferred from the data collection module 110, that is, data related to previously constructed diagnosis of a deposition state or/and the data. The processing module 130 stores and manages diagnosis basic information data including existing defect history information data included in various information data related to the deposition state diagnosis received from the connection server.

That is, the data processing module 130 includes a database 131 for storing and managing diagnostic basic information data including inspection data collected by the data collection module 110 and existing defect history information data.

Diagnostic basic information data including inspection data collected by the data collection module 110 stored and managed in the database 131 and existing defect history information data are input to the diagnosis module 150 for analysis and simulation. It is used as basic information data.

The existing defect history information data refers to information data related to the existing defect history related to the thin film deposition. These data are requested for the diagnosis module 150 to diagnose the deposition state of the thin film and various defects of the thin film through various models.

The diagnosis module 150 performs an operation of diagnosing the thin film deposition state through an analysis and simulation process of applying the diagnosis basic information data input from the data processing module 130 to at least one model.

The diagnosis module 150 analyzes and simulates the diagnosis basic information data composed of the various information data using at least one model built in advance and stored and managed to diagnose the thin film deposition state.

As shown in FIG. 3, the diagnostic module 150 for this purpose includes an analysis unit 151 that analyzes the diagnostic basic information data input from the database 131 through at least one model, the database ( A simulation unit 153 simulating the diagnostic basic information data input from 131) through at least one model, and an integrated diagnosis unit 155 performing an operation of diagnosing the thin film deposition state in an integrated manner through the analysis and simulation results. ) is composed of.

Specifically, the diagnostic module 150 includes an analysis unit 151 that performs an operation of detecting the occurrence and type of a defect in a thin film by applying and analyzing the diagnostic basic information data to at least one model, and the diagnostic basic information data. The simulation unit 153, which performs an operation of predicting the state change of the roll-to-roll vacuum deposition apparatus by applying and simulating at least one model, and comprehensively analyzing the performance results of the analysis unit 151 and the simulation unit 153 It is configured to include an integrated diagnosis unit 155 that performs defect occurrence diagnosis, defect type diagnosis, defect cause diagnosis, defect location identification, and defect occurrence prediction.

Models applied by the analysis unit 151 include a data-based diagnosis model, a machine learning diagnosis model, a rule-based diagnosis model, and a statistical analysis model. The analyzer 151 analyzes the diagnostic basic information data by applying at least one of these models to detect whether or not a defect has occurred in the thin film, and furthermore, the type of defect that has occurred, for example, a pinhole. , it performs an operation to detect the type of defects such as scratches and stains.

Models applied by the simulation unit 153 include data models, physical models, hybrid models, and the like. The simulation unit 153 analyzes the diagnostic basic information data by applying at least one of these models to track and predict a state change of the roll-to-roll vacuum deposition apparatus 100 . Through this, it is possible to predict the occurrence and cause of defects in the thin film.

The analysis result through at least one model of the analysis unit 151 and the simulation execution result through at least one model of the simulation unit 153 are transferred to the integrated diagnosis unit 155, and the integrated diagnosis unit ( 155) comprehensively analyzes the execution results and performs various diagnoses related to the final defect.

That is, the integrated diagnosis unit 155 comprehensively analyzes the performance results of the analysis unit 151 and the simulation unit 153 to diagnose the occurrence of defects, diagnose the type of defect, diagnose the cause of the defect, identify the location of the defect, and determine the occurrence of the defect. make predictions

The integrated diagnosis unit 155 may generate and apply an integrated diagnosis model based on artificial intelligence. The integrated diagnostic model corresponds to a comprehensive diagnostic model that comprehensively analyzes the execution results of the above-described various models to diagnose the occurrence and type of defects at an early stage and finally identifies the cause and occurrence location of the defects. Any one of various models can be applied to the integrated diagnostic model, and in the present invention, an ensemble technique is adopted and applied. The ensemble technique is an excellent technique for making a final decision by synthesizing the results of a plurality of diagnostic models. Of course, other similar models are applicable.

The integrated diagnosis unit 155 comprehensively analyzes the performance results of the analysis unit 151 and the simulation unit 153, and diagnoses the occurrence of defects corresponding to the results performed, diagnoses the defect type, diagnoses the cause of the defect, and locates the defect. Identification, defect occurrence prediction, that is, diagnosis result information data are transmitted to the digital twin model processing module 170. Then, the digital twin model processing module 170 applies these data to a specific digital twin 3D model and visualizes the data. Perform the action provided to the administrator.

That is, the digital twin model processing module 170 processes the diagnosis result information data input from the diagnosis module 150 in connection with the digital twin 3D model and provides it through visualization.

The digital twin model processing module 170 selects one of a plurality of digital twin 3D models, creates a digital object by linking the diagnosis result information data, and performs an operation of providing visualization as a digital twin 3D model. . The information data visualized and provided as the digital twin 3D model includes not only the diagnosis result information data but also test data collected in real time and test data transmitted and collected from the optical test module 50 . Accordingly, the diagnosis module 150 transmits the diagnosis result information data and the examination data together to the digital twin model processing module 170 .

The digital twin 3D model diagnoses the current state of the device with a combination of data and information representing the structure and operation of the physical device of the roll-to-roll vacuum deposition device 100, predicts the occurrence of defects and the optimal operation or operating state of the device, and It is a digital object that can be diagnosed.

As shown in FIG. 4, the digital twin model processing module 170 includes a digital twin control unit 171, a model/content storage unit 173, a digital object creation unit 175, and an HMI/visualization processing unit 177. consists of including

The digital twin controller 171 receives the diagnosis result information data and the inspection data, and further receives information data of the roll-to-roll vacuum deposition apparatus related to these data.

Then, the digital twin control unit 171 selects at least one of a plurality of digital twin 3D models stored and managed in the model/content storage unit 173 and at least one of a plurality of visualization contents based on the input information data, It is transmitted to the digital object creation unit 175. And, the digital twin control unit 171 transfers the received diagnosis result information data and the examination data to the digital object creation unit 175 .

The model/content storage unit 173 stores and manages various digital twin 3D models and various visualization contents so that the diagnosis result information data and the examination data can be visualized through a 3D model. The model/content storage unit 173 may store and manage at least one digital twin 3D model corresponding to diagnosis regarding the operation and operation of the roll-to-roll vacuum deposition apparatus, the diagnosis result information data and the inspection data. At least one visualization content corresponding to each may be stored and managed.

The digital twin controller 171 may select a corresponding digital twin 3D model and at least one visualization content by analyzing data including information data transmitted from the diagnosis module 150. The digital twin control unit 171 controls the selected digital twin 3D model and at least one visualization content to be transferred from the model/content storage unit 173 to the digital object creation unit 175.

The digital object creation unit 175 links the data received from the digital twin control unit 171, that is, the diagnosis result information data and the examination data, to the received digital twin 3D model and at least one visualization content. and performs an operation of providing it to the HMI/visualization processing unit 177.

The HMI/visualization processing unit 177 performs an operation of providing the user with at least one visualization content provided in the digital twin 3D model. The HMI/visualization processing unit 177 visualizes and provides 3D model-based operation and defect early diagnosis information of the roll-to-roll vacuum deposition apparatus, visualizes and provides 3D model-based simulation information of the roll-to-roll vacuum deposition apparatus, and provides 3D It visualizes and provides structural analysis of roll-to-roll vacuum deposition equipment through model-based manipulation and control, and further provides a function to track the cause of failure by providing a user data analysis screen.

The digital twin model processing module 170 can dramatically improve the limitations of providing information of existing monitoring devices that provide only simple graphs and numerical information. In particular, by providing 3D model information on the roll-to-roll vacuum deposition apparatus to enable operation and control, the operator can easily recognize the structure and operating state information of the roll-to-roll vacuum deposition apparatus, and understand the phenomenon when an abnormal state occurs. It has the advantage of minimizing analysis time.

According to the artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using the optical inspection module of the present invention, the optical inspection module is provided in the vacuum chamber of the roll-to-roll vacuum deposition apparatus in which the thin film deposition process is performed by the roll-to-roll method, and After the AI-based monitoring device placed outside the vacuum chamber receives inspection data from the optical inspection module, it analyzes and processes the thin film in real time through AI-based analysis and processing. Since the deposition state is configured to be monitored, it is possible to quickly respond to thin film defects and improve productivity by minimizing time, effort, and cost for thin film deposition and inspection on the substrate, and the possibility of contamination of the substrate is minimized. The advantage of being able to reduce is generated.

Meanwhile, the roll-to-roll vacuum deposition apparatus 100 constituting the artificial intelligence-based monitoring system 300 for roll-to-roll vacuum deposition using the optical inspection module according to the present invention may be configured in various ways. However, the optical inspection module 50 is necessarily disposed within the vacuum chamber 1 in which thin film deposition is performed.

5 is a schematic configuration cross-sectional view according to a first form of a roll-to-roll vacuum deposition apparatus constituting an artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module according to an embodiment of the present invention.

As shown in FIG. 5, the roll-to-roll vacuum deposition apparatus 100 applied to the present invention includes an unwinding roller 10, a deposition module 30, an optical inspection module 50, a winding roller 70, and a tension / It is configured to include a guide roller 90.

The unwinding roller 10 performs an operation of unwinding or rewinding a substrate (s), specifically, a flexible substrate (s) such as a film, by mutual rotation with the winding roller 70 . Specifically, the unwinding roller 10 performs an operation of unwinding the flexible substrate s, and the winding roller 70, which will be described later, is delivered in a state in which tension is maintained from the optical inspection module 50 An operation of rewinding the substrate s is performed.

The unwinding roller 10 and the winding roller 70 interlock with each other to wind or unwrap the film-type deposited object, that is, the flexible substrate s, to transfer the substrate s to the deposition module 30 corresponding to the deposition area and the substrate. It is transported along the optical inspection module 50 corresponding to the area of inspection, test, measurement, etc. for the thin film of the image. The substrate s wound around the unwinding roller 10 passes through the deposition module 30 and the optical inspection module 50 while maintaining tension and being guided through a plurality of tension/guide rollers 90, It is rewound on the winding roller 70.

A load cell (not shown) may be installed on at least one of the unwinding roller 10 and the winding roller 70 to detect the tension of the flexible substrate s being transferred. Since the flexible substrate (s) may be damaged if a tension of a certain size or more is applied to the flexible substrate (s), a load cell (not shown) monitors the tension of the flexible substrate (s) to prevent this. That is, the load cell controls the speed of the unwinding roller 10 and the winding roller 70 so that the flexible substrate s can be transferred below the limit tension when the tension applied to the flexible substrate s exceeds a certain level. provides a signal that can control

Rotational directions of the unwinding roller 10 and the winding roller 70 may be varied. That is, when it is necessary to perform a thin film deposition process again on the flexible substrate (s) on which a thin film is deposited while being unwound from the unwinding roller 10 and wound around the winding roller 70, the unwinding roller 10 and the winding roller The rotation direction of the 70 is changed so that the flexible substrate s wound around the winding roller 70 can be unwound and wound around the unwinding roller 10 .

In this case, the optical inspection module 50 may be disposed between the unwinding roller 10 and the deposition module 30 . That is, the optical inspection module 50 applied to the present invention is illustrated as being disposed between the deposition module 30 and the winding module 70 in FIGS. 5 and 6, but in some cases the unwinding roller 10 ) and the deposition module 30 or between the deposition module 30 and the winding roller 70.

The flexible substrate that is unwound and moved by the unwinding roller 10 is transferred to the deposition module 30 and subjected to a thin film deposition process. The flexible substrate (s) transferred from the unwinding roller 10 is guided in a state in which tension is maintained and transferred to the deposition module 30, and while passing through the deposition module 30, one surface is exposed. and a thin film deposition process such as a sputtering process is performed on one surface of the exposed substrate to deposit a thin film.

That is, the deposition module 30 moves the unwinding roller 10 to expose one surface of the substrate s transferred in a state in which tension is maintained, and performs a sputtering process on one surface of the substrate s. An operation of performing a thin film deposition process is performed.

One side of the substrate (s) may be a front side or a back side. When one surface of the substrate is the front surface, the other surface of the substrate corresponds to the rear surface, and when one surface of the substrate is the rear surface, the other surface of the substrate corresponds to the front surface.

Since the substrate s passing through the deposition module 30 moves with one surface exposed, the other surface of the substrate is transported in a state of being in contact with a drum 31 or a drum replacement roller 33 to be described later, and , One surface of the substrate is transferred in an exposed state while facing at least one target 35 to be described later. Accordingly, while passing through the deposition module 30, one side of the substrate s is subjected to a thin film deposition process such as a sputtering process, so that a thin film can be formed.

After being subjected to a thin film deposition process such as a sputtering process on one surface of the deposition module 30, the flexible substrate s being moved is transferred to the optical inspection module 50 and continuously subjected to an optical inspection process. The flexible substrate (s) moved in the deposition module 30 is guided while maintaining tension and transferred to the optical inspection module 50, and the optical inspection module 50 performs various tests on the thin film of the substrate. Performs optical inspection for test, measurement and inspection.

That is, the optical inspection module 50 performs various optical inspections for tests, measurements, and inspections on the thin film of the substrate s being moved from the deposition module 30 in a tension maintained state. As a result, the flexible substrate s can be continuously subjected to a thin film deposition process and a thin film inspection process while passing through the deposition module 30 and the optical inspection module 50 . In particular, since the optical inspection of the thin film of the flexible substrate s is performed in the vacuum chamber 1 in a vacuum state, oxidation and contamination of the thin film of the substrate can be prevented in advance.

The optical inspection module 50 is necessarily disposed in the inspection chamber 5 capable of maintaining a vacuum state, and performs various tests, measurements, and inspections on the moving substrate, specifically, the thin film of the substrate in an airtight state. Perform an optical inspection to

The optical inspection module 50 applied to the present invention includes a light source sensor module 51 and a light receiving sensor module 53. Specifically, the optical inspection module 50 receives the light transmitted through the substrate s and the light source sensor module 51 for irradiating light to the moving substrate s, and determines the optical density and thickness of the thin film. It is configured to include a light receiving sensor module 53 that measures at least one.

The light source sensor module 51 performs an operation of irradiating laser light toward the thin film while scanning the thin film of the moving substrate. Specifically, the light source sensor module 51 is disposed above the moving substrate s and irradiates scan light to the thin film of the substrate s.

Corresponding to the light source sensor module 51, the light receiving sensor module 53 is disposed below the moving substrate. The light receiving sensor module 53 basically receives and senses the light irradiated from the light source sensor module 51 and transmitted through the substrate on which the thin film is formed.

Various measurements, tests, and inspections related to the thin film may be performed using the light detected by the light receiving sensor module 53 and the intensity of the light emitted from the light source sensor module 51 . This operation may be performed with a separate measurement module (not shown) or may be performed together in the light receiving sensor module 53 without a separate measurement module.

In order to simplify the configuration of the optical inspection module 50 applied to the present invention, it is preferable to configure the light receiving sensor module 53 to perform various measurements related to the thin film. Specifically, the light receiving sensor module 53 receives light transmitted through the substrate s and measures at least one of optical density and thickness of the thin film.

The light receiving sensor module 53 detects the intensity of the transmitted light and receives the intensity information of the light irradiated from the light source sensor module 51 to measure and analyze the optical density of the thin film of the substrate. Since the light receiving sensor module 53 can sense and receive the intensity of the scan light, it can measure and analyze the optical density through a contour method.

In addition, the light receiving sensor module 53 can measure and analyze the thickness of the thin film using the correlation with the optical density, and through this, measure and analyze the thickness deviation of the thin film. The light receiving sensor module 53 can measure and analyze the thickness of the thin film using the correlation with the optical density, but separately from this, the intensity of the detected transmitted light and the received light source sensor module 51 The thickness of the thin film may be measured and analyzed using intensity information of light irradiated from the light source.

The light-receiving sensor module 53 may analyze whether the thin film is defective, in particular, whether a pinhole is generated, by using at least one test data of optical density and thickness information of the thin film. However, this specific analysis is performed by the above-described artificial intelligence-based monitoring device 200 that receives inspection data corresponding to the optical density and thickness information of the thin film in order to simplify the optical inspection module 50 and ensure accuracy of analysis. It is preferable to be analyzed by

Meanwhile, inspection data corresponding to the optical density information of the thin film and the thickness information of the thin film measured and analyzed by the light receiving sensor module 53 may be transmitted to the artificial intelligence-based monitoring device 200 provided separately externally. Then, the artificial intelligence-based monitoring device 200 may monitor the thin film deposition state in real time by performing and analyzing various measurements, tests, and inspections using the inspection data.

In addition, the light receiving sensor module 53 may only perform an operation of scanning and sensing the light transmitted through the substrate s, and may not perform an operation of measuring the optical density and thickness of the thin film. In this case, information on the intensity of transmitted light detected by the light receiving sensor module 53 and information on the intensity of light irradiated by the light source sensor module 51 may be transmitted to the artificial intelligence-based monitoring device 200 separately provided externally. . Then, the AI-based monitoring device 200 may perform and analyze various measurements, tests, and inspections using the information.

The flexible substrate s that has undergone the optical inspection process while passing through the optical inspection module 50 is wound around the winding roller 70 . Also, the flexible substrate s delivered from the optical inspection module 50 is wound around the winding roller 70 while maintaining tension. That is, the winding roller 70 performs an operation of rewinding the substrate transferred from the optical inspection module 50 in a state in which tension is maintained.

The flexible substrate (s) moving from the unwinding roller 10 to the winding roller 70 needs to be transported without wrinkles and maintained in tension, and needs to be guided and transported so as not to deviate sideways there is To this end, between the unwinding roller 10 and the deposition module 30, between the deposition module 30 and the optical inspection module 50, and between the optical filament module 50 and the winding module 70 A plurality of tension/guide rollers 90 are respectively disposed so that the conveyed substrate can maintain tension and be guided at the same time.

That is, the plurality of tension/guide rollers 90 are provided between the unwinding roller 10 and the deposition module 30, between the deposition module 30 and the optical inspection module 50, and between the optical inspection module It is disposed between the 50 and the winding roller 70 and performs an operation so that the moving substrate s can maintain tension and be guided.

Each of the tension/guide rollers 90 may be configured to perform both a tension maintaining operation and a guide operation, or may be configured to perform only a tension maintaining operation or only a guide operation.

According to the roll-to-roll vacuum deposition apparatus 100 applied to the present invention described above, the optical inspection module 50 is provided in the vacuum chamber 1 in which the thin film deposition process is performed, and various measurements are performed on the thin film deposited on the substrate. can be performed continuously and in real time immediately after the thin film deposition process, it is possible to improve productivity by minimizing time, effort and cost for thin film deposition and inspection on the substrate, and to reduce the possibility of contamination of the substrate. There are advantages that make it happen. That is, if the inspection of the thin film on the substrate is performed in a process, time point, and space separate from the thin film deposition process, the possibility of exposure to particles or contamination is high and productivity is low. Since the thin film deposition process and the thin film inspection process can be performed on the substrate in a continuous process, the possibility of exposure to contamination can be minimized and productivity can be improved.

The deposition module 30 performs an operation of depositing a thin film on the moved flexible substrate (s) through various deposition methods. In the present invention, it is exemplified that thin film deposition is performed by a sputtering method. In addition, the sputtering method may be performed through various configurations, and in the present invention, it is exemplified that it is configured through a drum 31 or a drum substitute roller 33 and at least one target 35.

Specifically, as shown in FIG. 5, the deposition module 30 applied to the roll-to-roll vacuum deposition apparatus 100 applied to the present invention is in contact with the other surface of the substrate (s) in one direction (FIG. 5 At least one target 35 for performing sputtering with respect to one surface of the substrate (s) moving along the drum (31) rotating in a counterclockwise direction) and the drum (31) do.

The drum 31 rotates and transfers the substrate s in one direction in a state of being in contact with the other surface of the substrate s transferred in a state where tension is maintained from the unwinding roller 10 . Therefore, one surface of the substrate may be exposed in a state facing the at least one target 35, whereby the substrate s is transported while thin film sputtering is performed on one surface by the at least one target 35. process can be carried out.

The at least one target 35 is disposed at a predetermined distance from the drum 31 along the side and bottom of the drum 31, and is spaced apart from each other at a predetermined interval to move along the drum 31 A sputtering thin film is deposited on one surface of the substrate (s). As a result, predetermined thin film layers may be deposited on one surface of the substrate s passing through the deposition module 30 .

Meanwhile, as shown in FIG. 5 , the deposition module 30 includes barrier ribs 37 disposed between adjacent targets 35 to spatially separate the at least one target 35 from each other. It may be further included.

The barrier rib 37 is adopted and applied to prevent the target material sputtered by each of the at least one target 35 from flying to another target 35 (particularly, an adjacent target). By adopting and applying the barrier rib 37, target materials sputtered by each target 35 can be prevented from flying to other adjacent targets 35, thereby preventing contamination of other adjacent targets 35. It is possible to maintain the deposition quality by preventing

Meanwhile, the deposition module 30 includes at least one target, through which a thin film having a desired thickness may be deposited on the substrate s, and further, different materials may be deposited in multiple layers.

A thin film deposition process such as a sputtering process by the deposition module 30 is performed in the vacuum chamber 1 maintaining a vacuum state. In addition, the optical inspection by the optical inspection module 50 is also performed in the same vacuum chamber 1, and the unwinding roller 10 and the winding roller 70 are also disposed in the same vacuum chamber 1. Consequently, the unwinding roller 10, the deposition module 30, the optical inspection module 50, and the winding module 70 are preferably arranged in one vacuum chamber 1. However, the arrangement structure of the unwinding roller 10, the deposition module 30, the optical inspection module 50, and the winding module 70 disposed in one and the same vacuum chamber 1 is limited to FIGS. 3 and 4 It can be varied in various ways without doing so.

In this way, in principle, the unwinding roller 10, the deposition module 30, the optical inspection module 50, and the winding module 70 are arranged in various arrangement structures within one and the same vacuum chamber 1. , As shown in FIGS. 5 and 6, in some cases, they may be individually disposed in a separate vacuum chamber 1.

In this case, the thin film deposition process such as the sputtering process by the deposition module 30 is preferably performed in a chamber maintaining a vacuum state, specifically a process chamber. Therefore, it is preferable that the unwinding roller 10 and the optical inspection module 50, which are disposed adjacent to each other, are disposed and operated in an unwinding chamber and an inspection chamber capable of maintaining a vacuum state, respectively. In addition, it is preferable that the winding roller 70 is also disposed and operated in a winding chamber capable of maintaining a vacuum state. In particular, the optical inspection module 50 prevents oxidation of the thin film, prevents contamination of the thin film, and is disposed in an inspection chamber capable of maintaining a vacuum state while maintaining airtightness in order to ensure the precision of the optical inspection. it is desirable

That is, the unwinding roller 10 is disposed and operated in the unwinding chamber, the deposition module 30 is disposed and operated in the process chamber, and the optical inspection module 50 is disposed and operated in the inspection chamber; The winding roller 70 is disposed in the winding chamber and operates. In addition, although a slit through which the substrate s can pass is formed on the adjacent boundary surface of the chambers adjacent to each other, each of the chambers is operated so that a vacuum state can be maintained as a whole.

Meanwhile, the substrate s may be subjected to a pretreatment process before performing a thin film deposition process such as a sputtering process. The pretreatment process includes ion beam treatment and the like. The ion beam treatment cleans the surface of the substrate and simultaneously improves the efficiency of thin film deposition in a sputtering process through surface treatment. It is preferable that such an ion beam treatment is performed before sputtering by the target 35 starts. Therefore, it is preferable that the ion beam processing module for the ion beam processing is disposed ahead of the target 35 (disposed to the left of the target 35 disposed at the far left).

On the other hand, in some cases, instead of the drum 31 adopted and applied to the deposition module 30, at least one roller that is structurally simple and easier to install and replace, specifically at least one drum substitute roller 33, is provided. It may be applied as an alternative.

Specifically, as shown in FIG. 6, the second type of roll-to-roll vacuum deposition apparatus 100 constituting the artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module according to an embodiment of the present invention is shown in FIG. Most of the configuration is the same as the roll-to-roll vacuum deposition apparatus 100 applied to the present invention described above with reference to 5, but instead of the drum 31 of the deposition module 30, the drum substitute roller 33 is adopted and applied Only the points are different. Therefore, in the following, only parts different from those of FIG. 5 will be described in detail, and the remaining parts will be omitted. However, omitted parts are applied in the same manner as the parts described with reference to FIG. 5 .

As shown in FIG. 6, the deposition module 30 applied to the roll-to-roll vacuum deposition apparatus 100 of the second type applied to the present invention is in contact with the other surface of the substrate (s) in one direction (Fig. In 6, sputtering is performed on one surface of the substrate moving along at least one drum substitute roller 33 and at least one drum substitute roller 33 that are rotated in a counterclockwise direction) but spaced apart from each other. It is configured to include at least one target 35 that performs the target 35 and a partition wall 37 disposed between adjacent targets 35 to spatially separate the at least one target 35 from each other, and the at least one target 35 is formed. Each of the drum replacement rollers 33 is configured to be disposed and formed at a position corresponding to the partition wall 37 .

The at least one drum substitute roller 33 is in contact with the other surface of the substrate s transferred in a state in which tension is maintained from the unwinding roller 10 so that the substrate is rotated in one direction and transferred. The at least one drum substitute roller 33 is spaced apart from each other at a predetermined interval, and is disposed so as to have a semicircular or elliptical shape as a whole. Therefore, one surface of the substrate may be exposed in a state facing the at least one target 35, whereby the substrate s is transported while thin film sputtering is performed on one surface by the at least one target 35. process can be carried out.

The at least one target 35 is disposed at a predetermined distance from the at least one drum substitute roller 33 along the side and bottom of the at least one drum substitute roller 33 group, spaced apart at a predetermined interval from each other. A sputtering thin film is deposited on one surface of the substrate (s) that is disposed and moves along the at least one drum substitute roller (33). As a result, predetermined thin film layers may be deposited on one surface of the substrate s passing through the deposition module 30 .

Meanwhile, as shown in FIG. 6 , the deposition module 30 includes barrier ribs 37 disposed between adjacent targets 35 to spatially separate the at least one target 35 from each other. composed of

The barrier rib 37 is adopted and applied to prevent the target material sputtered by each of the at least one target 35 from flying to another target 35 (particularly, an adjacent target). By adopting the barrier rib 37, target materials sputtered by each target 35 can be prevented from flying to other adjacent targets 35, thereby preventing contamination of other adjacent targets 35. It is possible to maintain the deposition quality by preventing

On the other hand, it is preferable for deposition quality that the flexible substrate (s) transported along the at least one drum replacement roller 33 faces the target 35 in a flat surface rather than a curved surface. To this end, each of the at least one drum replacement roller 33 is disposed at a position corresponding to the partition wall 37 .

Specifically, each of the drum replacement rollers 33 is disposed to correspond to each of the barrier ribs 37, and when extending the correspondingly disposed barrier rib 37, the upper side surface (substrate) of the corresponding barrier rib 37 (s) or the side corresponding to the corner opposite to the corresponding drum substitute roller 33), or disposed in a position to meet, or to be positioned in contact with the upper or lower surface of the corresponding partition wall 37 are placed As a result, the flexible substrate located between the adjacent barrier ribs 37 can be maintained in a taut state by the adjacent drum substitute roller 33, and thereby the flexible substrate s facing each target 35 ) can maintain a flat state, so the quality of thin film deposition on one side of the substrate can be improved.

Embodiments according to the present invention have been described above, but these are merely examples, and those skilled in the art will understand that various modifications and embodiments of equivalent range are possible therefrom. Therefore, the true technical protection scope of the present invention should be defined by the following claims.

1: vacuum chamber 10: unwinding roller
30: deposition module 31: drum
33: drum replacement roller 35: target
37: bulkhead 50: optical inspection module
51: light source sensor module 53: light receiving sensor module
70: winding roller 90: tension/guide roller
100: roll-to-roll vacuum deposition device
200: AI-based monitoring device
110: data collection module 130: data processing module
150: diagnostic module 170: digital twin model processing module
171: digital twin control unit 173: model/content storage unit
175: digital object creation unit 177: HMI/visualization processing unit
300: AI-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module

Claims (4)

In the artificial intelligence-based monitoring system of roll-to-roll vacuum deposition using an optical inspection module,
A roll-to-roll vacuum deposition apparatus having an optical inspection module that performs a thin film deposition process on a substrate by a roll-to-roll method in a vacuum chamber and performs an optical inspection on the thin film of the substrate in the vacuum chamber;
It is configured to include an artificial intelligence-based monitoring device disposed outside the roll-to-roll vacuum deposition device and monitoring the thin film deposition state in real time through artificial intelligence-based analysis and processing of the inspection data transmitted from the optical inspection module. An AI-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module.
The method of claim 1,
The artificial intelligence-based monitoring device,
a data collection module that collects inspection data transmitted from the optical inspection module;
a data processing module that stores and manages the test data collected by the data collection module, and collects, stores, and manages diagnostic auxiliary data;
Using an optical inspection module, characterized in that it comprises a diagnosis module for diagnosing the thin film deposition state through an analysis and simulation process of applying the diagnostic basic information data input from the data processing module to at least one model AI-based monitoring system for roll-to-roll vacuum deposition.
The method of claim 2,
The artificial intelligence-based monitoring device further comprises a digital twin model processing module for linking and processing the diagnosis result information data input from the diagnosis module to the digital twin 3D model and providing it through visualization Roll using an optical inspection module, characterized in that An AI-based monitoring system for two-roll vacuum deposition.
According to claim 2 or claim 3,
The data processing module includes a database for storing and managing diagnostic basic information data including inspection data collected by the data collection module and existing defect history information data;
The diagnosis module applies the diagnosis basic information data to at least one model and analyzes the analysis unit to perform an operation of detecting the occurrence and type of a defect in the thin film, and applies the diagnosis basic information data to at least one model and simulates The simulation unit that predicts the state change of the roll-to-roll vacuum deposition apparatus and the results of the analysis unit and the simulation unit are comprehensively analyzed to diagnose the occurrence of defects, diagnose the type of defect, diagnose the cause of the defect, identify the location of the defect, and An artificial intelligence-based monitoring system for roll-to-roll vacuum deposition using an optical inspection module, characterized in that it comprises an integrated diagnosis unit that performs occurrence prediction.

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