KR20220054588A - Stage position control device, and stage position control method - Google Patents

Abstract

In the gantry mechanism, motion of the stage in the yaw direction is suppressed. In the gantry mechanism 100 , as the stage position control device 1 for controlling the position of the stage, the Y-axis center that outputs a first Y-axis central thrust command that commands the central thrust of the Y1-axis drive system and the Y2-axis drive system The thrust command output unit 30, the Y-axis differential thrust command output unit 20 that outputs a first Y-axis differential thrust command that commands the differential thrust between the Y1-axis drive system and the Y2-axis drive system, and the X-axis position The first Y-axis differential thrust command (F2) feeds forward the X-axis position command (x) and the Y-axis center position command (Y1), which instructs the center positions of the Y1-axis position and the Y2-axis position, to The feed forward unit 11 that outputs the Y-axis differential thrust command F2' of 2, the first Y-axis central thrust command, and the second Y-axis differential thrust command to control the position of the stage A thrust conversion unit (50) is provided.

Description

Stage position control device, and stage position control method

The present invention relates to a stage position control apparatus for controlling the position of a stage, and a stage position control method.

Conventionally, a gantry mechanism for moving a stage in a plane defined by two axes orthogonal to each other is known.

For example, Patent Document 1 discloses a method for controlling a stage position in which a movement of the stage in the yaw direction in a gantry mechanism is suppressed.

The stage position control method disclosed in Patent Document 1 is a control method in which the position of the stage is detected, and information on the detected stage position is fed back to a command to move the stage. For this reason, in this control method, the position of a stage can be controlled so that the motion in the yaw direction of the generated stage may be suppressed. However, it is difficult to suppress the generation of motion in the yaw direction of the stage itself at a point in time when the motion in the yaw direction of the stage does not occur.

Japanese Patent Laid-Open No. 2001-22448

Then, an object of this indication is to provide the stage position control apparatus which can suppress the motion in the yaw direction of a stage in a gantry mechanism compared with the prior art, and a stage position control method.

A stage position control device according to an aspect of the present disclosure includes a Y1-axis and Y2-axis parallel to each other, an X-axis perpendicular to the Y1-axis and Y2-axis, and a Y1-axis position that is a driving position in a Y1-axis drive system on the Y1-axis. A position of a stage in a gantry mechanism having a stage positioned on the Y2-axis by a Y2-axis position that is a driving position in the Y2-axis drive system and an X-axis position that is a driving position in the X-axis driving system on the X-axis. A stage position control device for controlling A Y-axis differential thrust command output unit that outputs a first Y-axis differential thrust command that commands the differential thrust of the shaft drive system, an X-axis position command that instructs the X-axis position, and the center position of the Y1-axis position and Y2-axis position a feedforward unit that feeds forward the Y-axis center position command for commanding to the first Y-axis differential thrust command, and outputs a second Y-axis differential thrust command; a first Y-axis center thrust command; A thrust converter for controlling the position of the stage is provided by using the Y-axis differential thrust command of 2.

A stage position control method according to an aspect of the present disclosure provides a Y1-axis and Y2-axis parallel to each other, an X-axis perpendicular to the Y1-axis and Y2-axis, and a Y1-axis position that is a driving position in a Y1-axis drive system on the Y1-axis. In a gantry mechanism having a stage whose position is determined by the Y2-axis position on the Y2-axis, which is the driving position in the Y2-axis drive system, and the X-axis position, which is the driving position of the X-axis in the X-axis drive system, the position of the stage is determined As a stage position control method to control, a first Y-axis central thrust command for instructing the central thrust of a Y1-axis drive system and a Y2-axis drive system is calculated, and a first Y command for differential thrust between the Y1-axis drive system and the Y2-axis drive system is calculated. Calculating the axial differential thrust command and feeding the X-axis position command to instruct the X-axis position and the Y-axis central position command to instruct the center positions of the Y1-axis position and Y2-axis position to the first Y-axis differential thrust command It forwards, calculates a second Y-axis differential thrust command, and controls the position of the stage using the first Y-axis center thrust command and the second Y-axis differential thrust command.

According to the stage position control apparatus and the stage position control method which concern on one aspect of this indication, the motion in the yaw direction of a stage in a gantry mechanism can be suppressed compared with the prior art.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows the structure of the gantry mechanism which concerns on Embodiment 1. As shown in FIG.
Fig. 2 is a block diagram showing the configuration of the stage position control device according to the first embodiment.
3 is a schematic diagram showing an example of an inertia function calculated by the inertia function calculating unit according to the first embodiment.
4 is a flowchart of an inertia function calculation process according to the first embodiment.
5 is a flowchart of stage position control processing according to the first embodiment.
6 is a block diagram showing the configuration of the stage position control device according to the second embodiment.

(The process leading to obtaining an aspect of the present disclosure)

As described above, in the method for controlling the stage position disclosed in Patent Document 1, in the gantry mechanism, it is difficult to suppress the occurrence of the movement in the yaw direction of the stage itself at a point in time when the movement in the yaw direction of the stage does not occur. .

For this reason, in the gantry mechanism, the inventor earnestly examined and experimented so that generation|occurrence|production itself of the motion in the yaw direction of a stage could be suppressed when the motion in the yaw direction of a stage did not generate|occur|produce. The inventor feeds forward the position command for instructing the position of the stage to the thrust command for moving the stage, and by reducing in advance the component that generates the motion in the yaw direction of the stage from the thrust command, the yaw direction of the stage At the point in time when the motion of the yaw did not occur, the knowledge that the generation of motion in the yaw direction of the stage itself could be suppressed was obtained.

Based on this knowledge, the inventor further earnestly examined and experimented, and derived|leads-out the stage position detection apparatus and stage position detection method which concern on one aspect of this indication below.

A stage position control device according to an aspect of the present disclosure includes a Y1-axis and Y2-axis parallel to each other, an X-axis perpendicular to the Y1-axis and Y2-axis, and a Y1-axis position that is a driving position in a Y1-axis drive system on the Y1-axis. A position of a stage in a gantry mechanism having a stage positioned on the Y2-axis by a Y2-axis position that is a driving position in the Y2-axis drive system and an X-axis position that is a driving position in the X-axis driving system on the X-axis. A stage position control device for controlling A Y-axis differential thrust command output unit that outputs a first Y-axis differential thrust command that commands a differential thrust, an X-axis position command that commands an X-axis position, and a center position of the Y1-axis position and Y2-axis position A feed-forward unit that feeds forward the Y-axis central position command to the first Y-axis differential thrust command and outputs a second Y-axis differential thrust command, the first Y-axis central thrust command, and the second Y A thrust converting unit for controlling the position of the stage by using the axial differential thrust command is provided.

According to the stage position control device having the above configuration, an X-axis position command and a Y-axis center position for instructing the position of the stage to the first Y-axis differential thrust command that may include a component for generating motion in the yaw direction of the stage. By feedforwarding the command, it is possible to generate a second Y-axis differential thrust command with a reduced component causing motion in the yaw direction of the stage. The position of the stage is controlled using the generated second Y-axis differential thrust command. Therefore, according to the stage position control apparatus of the said structure, the motion in the yaw direction of the stage in a gantry mechanism can be suppressed compared with the prior art.

In addition, the feed forward unit stores the inertia difference that is the difference between the inertia of the Y1-axis drive system and the inertia of the Y2-axis drive system, and the inertia function indicating the relationship between the X-axis position, and X commanded by the X-axis position command The inertia difference may be calculated from the axial position and the inertia function, and the feedforward value fed forward to the first Y-axis differential thrust command may be calculated from the calculated inertia difference and the Y-axis center position command.

In addition, the Y-axis center thrust command output unit may output the first Y-axis center thrust command based on the Y-axis center position command.

Further, a Y1-axis position detection unit for detecting the Y1-axis position and a Y2-axis position detection unit for detecting the Y2-axis position are further provided, and the Y-axis central thrust command output unit includes: , by receiving as a feedback value the Y-axis central position indicating the central position of the Y2-axis position detected by the Y2-axis position detection unit, outputting a first Y-axis central thrust command, and the first Y-axis differential thrust command outputting unit , by receiving as a feedback value a Y-axis differential position indicating a differential position between the Y1-axis position detected by the Y1-axis position detection unit and the Y2-axis position detected by the Y2-axis position detection unit as a feedback value, the first Y-axis differential thrust It may be said that the command is output.

In addition, the thrust converting unit commands a Y1-axis drive system thrust command for instructing a thrust of the Y1-axis drive system and a thrust of the Y2-axis drive system based on the first Y-axis central thrust command and the second Y-axis differential thrust command. The position of the stage may be controlled by calculating the Y2-axis drive system thrust command to be used, driving the Y1-axis drive system using the Y1-axis drive system thrust command, and driving the Y2-axis drive system using the Y2-axis drive system thrust command.

Further, the X-axis position detection unit for detecting the X-axis position, the X-axis position detected by the X-axis position detection unit, and the difference position are fed back to the first Y-axis central thrust command, and the second Y-axis central thrust A feedback unit for outputting a command may be further provided, and the thrust converting unit may control the position of the stage by using the second Y-axis center thrust command.

In addition, the feedback unit stores the inertia function, calculates the inertia difference from the X-axis position and the inertia function detected by the X-axis position detection unit, and from the calculated inertia difference and the difference position, the first Y-axis center The feedback value fed back to the thrust command may be calculated.

In addition, the thrust converting unit commands a Y1-axis drive system thrust command for instructing the thrust of the Y1-axis drive system and a thrust of the Y2-axis drive system based on the second Y-axis central thrust command and the second Y-axis differential thrust command. The position of the stage may be controlled by calculating the Y2-axis drive system thrust command to be used, driving the Y1-axis drive system using the Y1-axis drive system thrust command, and driving the Y2-axis drive system using the Y2-axis drive system thrust command.

In addition, a Y1-axis position detection unit for detecting the Y1-axis position, a Y2-axis position detection unit for detecting the Y2-axis position, a Y1-axis drive system thrust command that instructs the thrust of the Y1-axis drive system, and Y2 that commands a thrust of the Y2-axis drive system A shaft drive system thrust command is output, (a) the Y1-axis drive system thrust command and Y2-axis drive system thrust command output when the stage position is determined by the first X-axis position, and (b) the stage position is In the case determined by the first X-axis position, the Y1-axis position detected by the Y1-axis position detection unit and the Y2-axis position detected by the Y2-axis position detection unit, and (c) the position of the stage is the second X-axis The Y1-axis drive system thrust command and Y2-axis drive system thrust command output when determined by the position, and (d) detected by the Y1-axis position detection unit when the stage position is determined by the second X-axis position Based on the Y1-axis position and the Y2-axis position detected by the Y2-axis position detection part, you may further provide the inertia function calculation part which calculates an inertia function.

A stage position control method according to an aspect of the present disclosure provides a Y1-axis and Y2-axis parallel to each other, an X-axis perpendicular to the Y1-axis and Y2-axis, and a Y1-axis position that is a driving position in a Y1-axis drive system on the Y1-axis. In a gantry mechanism having a stage whose position is determined by the Y2-axis position on the Y2-axis, which is the driving position in the Y2-axis drive system, and the X-axis position, which is the driving position of the X-axis in the X-axis drive system, the position of the stage is determined As a stage position control method to control, a first Y-axis central thrust command for instructing the central thrust of a Y1-axis drive system and a Y2-axis drive system is calculated, and a first Y command for differential thrust between the Y1-axis drive system and the Y2-axis drive system is calculated. Calculating the axial differential thrust command and feeding the X-axis position command to instruct the X-axis position and the Y-axis central position command to instruct the center positions of the Y1-axis position and Y2-axis position to the first Y-axis differential thrust command It forwards, calculates a second Y-axis differential thrust command, and controls the position of the stage using the first Y-axis center thrust command and the second Y-axis differential thrust command.

According to the stage position control method having the above configuration, the first Y-axis differential thrust command that may contain a component that generates motion in the yaw direction of the stage, the X-axis position command and the Y-axis for commanding the position of the stage By feeding forward the center position command, it is possible to generate a second Y-axis differential thrust command with a reduced component causing motion in the yaw direction of the stage. The position of the stage is controlled using the generated second Y-axis differential thrust command. Therefore, according to the stage position control method of the said structure, the motion in the yaw direction of the stage in a gantry mechanism can be suppressed compared with the prior art.

EMBODIMENT OF THE INVENTION Hereinafter, the specific example of the stage position control apparatus which concerns on an aspect of this indication is demonstrated, referring drawings. In addition, all embodiment described below shows a generic or specific example. Numerical values, shapes, materials, constituent elements, arrangement positions of constituent elements, connection forms, etc. shown in the following embodiments are examples and are not intended to limit the present disclosure. In addition, among the components in the following embodiment, the components which are not described in the independent claim which show the highest concept are demonstrated as arbitrary components.

In addition, each drawing is a schematic diagram, and is not necessarily shown strictly. In each drawing, the same reference numerals are attached to substantially the same components, and overlapping descriptions may be omitted or simplified.

In the drawings used for explanation in the following embodiments, the coordinate system may be shown. The z-direction in the coordinate system is a direction perpendicular to the paper plane. The x-direction and the y-direction are directions orthogonal to each other in a plane perpendicular to the z-direction.

(Embodiment 1)

Hereinafter, the stage position control apparatus which concerns on Embodiment 1 is demonstrated, referring drawings. This stage position control apparatus is an apparatus which controls the position of the stage of a gantry mechanism.

1 : is a schematic diagram which shows the structure of the gantry mechanism 100 which concerns on Embodiment 1. As shown in FIG. The gantry mechanism 100 has a stage which the stage position control apparatus makes the target of position control.

As shown in FIG. 1 , the gantry mechanism 100 includes a Y1-axis 110 , a Y2-axis 120 , an X-axis 130 , a stage 140 , and a first X-axis support part 135 . and a second X-axis support 136 , a Y1-axis drive system 111 , a Y2-axis drive system 121 , and an X-axis drive system 131 .

The Y1 axis 110 and the Y2 axis 120 are axes extending in the y direction shown in FIG. 1 , respectively. That is, the Y1-axis 110 and the Y2-axis 120 are mutually parallel axes. The Y1 axis 110 and the Y2 axis 120 are realized by, for example, a metal rectangular column extending in the y direction shown in FIG. 1 .

The X-axis 130 is an axis extending in the x-direction shown in FIG. 1 . That is, the X axis 130 is an axis perpendicular to the Y1 axis 110 and the Y2 axis 120 . The X-axis 130 is realized by, for example, a rectangular metal column extending in the x-direction shown in FIG. 1 .

The first X-axis support 135 is a support member that supports the X-axis 130 at one end of the X-axis 130 . The first X-axis support portion 135 is realized by, for example, metal.

The second X-axis support portion 136 is a support member that supports the X-axis 130 at the other end of the X-axis 130 . The second X-axis support portion 136 is realized by, for example, metal.

The Y1-axis drive system 111 is a drive system which is arrange|positioned on the Y1-axis 110 and drives the 1st X-axis support part 135 so that it can go straight in the y direction shown in FIG. The Y1-axis drive system 111 is realized by, for example, a linear motor movable along the y-direction shown in FIG. 1 . Alternatively, the Y1-axis drive system 111 is realized by, for example, a rotary motor and a pole screw extending along the y-direction shown in FIG. 1 .

The Y2-axis drive system 121 is a drive system which is arrange|positioned on the Y2-axis 120 and drives the 2nd X-axis support part 136 so that it can go straight in the y-direction shown in FIG. The Y2-axis drive system 121 is realized by, for example, a linear motor movable along the y-direction shown in FIG. 1 . Alternatively, the Y2-axis drive system 121 is realized by, for example, a rotary motor and a pole screw extending along the y-direction shown in FIG. 1 .

The stage 140 is a flat plate. The stage 140 is realized by, for example, a metal plate.

The X-axis drive system 131 is arrange|positioned on the X-axis 130, and is a drive system which drives the stage 140 linearly in the x direction shown in FIG. The X-axis drive system 131 is realized by, for example, a linear motor movable along the x-direction shown in FIG. 1 . Alternatively, the X-axis drive system 131 is realized by, for example, a rotary motor and a pole screw extending along the x-direction shown in FIG. 1 .

The Y1-axis drive system 111 and the Y2-axis drive system 121 translate the X-axis 130 by driving the first X-axis support 135 and the second X-axis support 136, It drives so that it can slide in the y direction shown in FIG. Moreover, as mentioned above, the X-axis drive system 131 drives a stage so that it can go straight in the x direction shown in FIG. Thereby, the gantry mechanism 100 sets the stage 140 in the plane defined in the x-direction and the y-direction shown in FIG. 1, the Y1-axis position which is the drive position in the Y1-axis drive system 111; It can move to a position determined by the Y2-axis position which is a drive position in the Y2-axis drive system 121, and the X-axis position which is a drive position in the X-axis drive system 131.

In the gantry mechanism 100 , the inertia of the Y1-axis drive system 111 and the inertia of the Y2-axis drive system 121 change according to the position of the stage 140 on the X-axis 130 . For this reason, the same thrust is applied to the Y1-axis drive system 111 when the position of the stage 140 on the X-axis 130 is the first X-axis position and the second X-axis position. Even on a sea-island, the driving speed of the first X-axis support 135 by the Y1-axis drive system 111 is different from each other. Similarly, in the case where the position of the stage 140 on the X-axis 130 is the first X-axis position and the second X-axis position, even if the same thrust is applied to the Y2-axis drive system 121 , , the driving speed of the second X-axis support 136 by the Y2-axis drive system 121 is different from each other.

In the gantry mechanism 100 , the drive speed of the first X-axis support 135 by the Y1-axis drive system 111 and the drive speed of the second X-axis support 136 by the Y2-axis drive system 121 When ? are different from each other, motion in the yaw direction, which is the rotational direction around the z-direction shown in FIG. 1 , occurs in the stage 140 . In order to suppress the movement in the yaw direction, the driving speed of the first X-axis support 135 by the Y1-axis drive system 111 and the second X-axis support 136 by the Y2-axis drive system 121 It is necessary to suppress the difference in driving speed.

Fig. 2 is a block diagram showing the configuration of the stage position control device 1 according to the first embodiment. However, not all of the components of the stage position control apparatus 1 are shown in FIG. In FIG. 2, among the components of the stage position control device 1, a component for outputting a Y1-axis drive system thrust command for instructing a thrust for driving the Y1-axis drive system 111, and a Y2-axis drive system 121 are shown. The elements for outputting the Y2-axis drive system thrust command that command the driving thrust are shown. In addition, in FIG. 2, among the components of the stage position control device 1, the component for outputting the X-axis drive system thrust command which instructs the thrust which drives the X-axis drive system 131 is not shown. However, the stage position control device 1 is configured to include a component, which is not shown in FIG. 2 , for outputting an X-axis drive system thrust command that instructs a thrust for driving the X-axis drive system 131 .

As shown in FIG. 2 , the stage position control device 1 includes a feed forward unit 10 , a Y-axis differential thrust command output unit 20 , a Y-axis center thrust command output unit 30 , and a Y1-axis A position detecting unit 41 , a Y2-axis position detecting unit 42 , an X-axis position detecting unit 43 , a thrust converting unit 50 , an inertia function calculating unit 60 , and a position converting unit 70 , , an X-axis position command acquisition unit 81 , a Y-axis center position command acquisition unit 82 , and a phase delay compensator 83 .

The Y1-axis position detection unit 41 detects a Y1-axis position that is a drive position in the Y1-axis drive system 111 . The Y1-axis position detection unit 41 is realized by, for example, an encoder provided in a linear motor or a rotary motor of the Y1-axis drive system 111 . Hereinafter, the Y1-axis position is referred to as y1. The first-order derivative by time of the Y1 axis position

is called The second-order derivative by time of the Y1 axis position

is called

The Y2-axis position detection unit 42 detects a Y2-axis position that is a drive position in the Y2-axis drive system 121 . The Y2-axis position detection unit 42 is realized by, for example, an encoder provided in a linear motor or a rotary motor of the Y2-axis drive system 121 . Hereinafter, the Y2-axis position is referred to as y2. First-order derivative by time of Y2-axis position

is called The second-order differentiation by time of the Y2-axis position

is called

The X-axis position detection unit 43 detects an X-axis position that is a drive position in the X-axis drive system 131 . The X-axis position detection unit 43 is realized by, for example, an encoder provided in a linear motor or a rotary motor of the X-axis drive system 131 . Hereinafter, the X-axis position is referred to as x.

The X-axis position command acquisition unit 81 acquires an X-axis position command that instructs the X-axis position. The X-axis position command may be, for example, a function indicating the relationship between the commanded X-axis position and time, or a correspondence table in which the commanded X-axis position and time are correlated.

The Y-axis central position command acquisition unit 82 acquires the Y-axis central position command that instructs the central positions of the Y1-axis position and the Y2-axis position. In this specification, the sum of the Y1-axis position and the Y2-axis position is called a Y-axis central position. Hereinafter, the Y-axis central position is referred to as Y1. The relationship between Y1 and y1 and y2 is expressed by the formula Y1 = y1 + y2. The Y-axis central position command may be, for example, a function indicating the relationship between the commanded Y-axis central position and time, or may be a correspondence table in which the commanded Y-axis central position and time are correlated.

The position conversion unit 70 calculates the sum of the Y1 axis position and the Y2 axis position from the Y1 axis position detected by the Y1 axis position detection unit 41 and the Y2 axis position detected by the Y2 axis position detection unit 42 . The Y-axis center position shown and the Y-axis differential position showing the difference between the Y1-axis position and the Y2-axis position are calculated. In this specification, the difference between the Y1-axis position and the Y2-axis position is referred to as a Y-axis differential position. Hereinafter, the Y-axis differential position is referred to as Y2. The relationship between Y2 and y1 and y2 is expressed by the formula Y2 = y1-y2.

The phase delay compensator 83 feeds back the Y-axis central position calculated by the later-described position converting unit 70 to the Y-axis central thrust command output unit 30 to be described later, the Y-axis central position The phase difference between the Y-axis central position commanded by the command acquisition unit 82 and the Y-axis central position calculated by the position converting unit 70 is compensated.

The Y-axis central thrust command output unit 30 calculates and outputs a first Y-axis central thrust command F1 that commands the central thrust of the Y1-axis drive system 111 and the Y2-axis drive system 121 . In this specification, the sum of the Y1-axis drive system thrust and the Y2-axis drive system thrust is called Y-axis central thrust. Hereinafter, the Y-axis center thrust command is referred to as F1. The Y1-axis drive system thrust command which instructs the thrust of the Y1-axis drive system 111 is called f1. The Y2-axis drive system thrust command which instructs the thrust of the Y2-axis drive system 121 is called f2.

The Y-axis central thrust command output unit 30 uses the Y-axis central position calculated by the position converting unit 70 as a feedback value with respect to the Y-axis central position command for which the phase difference is compensated by the phase delay compensating unit 83 . Feedback processing is performed by receiving as , and the first Y-axis center thrust command F1 is output.

Hereinafter, the output of the 1st Y-axis center thrust command F1 performed by the Y-axis center thrust command output part 30 is demonstrated in more detail.

As shown in FIG. 2 , the Y-axis center thrust command output unit 30 includes a position feedback unit 31 and a speed feedback unit 32 .

The position feedback unit 31 feeds back the Y-axis central position calculated by the position converting unit to the Y-axis central position command for which the phase difference is compensated by the phase delay compensating unit 83 , and PID (Proportional Integral Differential) processing to output the Y-axis center speed command that commands the center speed of the Y1-axis drive system 111 and the Y2-axis drive system 121 . In the present specification, the sum of the Y1-axis drive system speed and the Y2-axis drive system speed is referred to as the Y-axis central speed. Hereinafter, the Y-axis center speed command is referred to as V1.

The speed feedback unit 32 is a first-order differential by time of the Y-axis center position calculated by the position conversion unit with respect to the Y-axis center speed command V1 output by the position feedback unit 31 .

is fed back, PID processing is performed, and the first Y-axis center thrust command F1 is output.

The Y-axis differential thrust command output unit 20 calculates and outputs a first Y-axis differential thrust command that instructs the differential thrust between the Y1-axis drive system 111 and the Y2-axis drive system 121 . In this specification, the difference between the Y1-axis drive system thrust f1 and the Y2-axis drive system thrust f2 is called Y-axis differential thrust. Hereinafter, the first Y-axis differential thrust command is referred to as F2.

As described above, in the gantry mechanism 100 , the Y1-axis drive system 111 and the Y2-axis drive system 121 drive translationally the first X-axis support part 135 and the second X-axis support part 136 . By doing so, the X-axis 130 is slidably driven in the y-direction shown in FIG. 1 . For this reason, the Y-axis differential position command, which instructs the differential position between the Y1-axis position and the Y2-axis position, becomes 0 at any time. Accordingly, the Y-axis differential thrust command output unit 20 provides feedback by receiving, as a feedback value, the Y-axis differential position calculated by the position converting unit 70 for the Y-axis differential position command that becomes 0 at any time. processing is performed, and a second Y-axis differential thrust command F2 is output.

Hereinafter, the output of the 2nd Y-axis differential thrust command F2 performed by the Y-axis differential thrust command output part 20 is demonstrated in detail.

As shown in FIG. 2 , the Y-axis differential thrust command output unit 20 includes a position feedback unit 21 and a speed feedback unit 22 .

The position feedback unit 21 feeds back the Y-axis differential position calculated by the position conversion unit to the Y-axis differential position command that becomes 0 at any time, performs PID processing, and performs PID processing with the Y1-axis drive system 111; A Y-axis differential speed command that commands the differential speed of the Y2-axis drive system 121 is output. In this specification, the difference between the Y1-axis drive system speed and the Y2-axis drive system speed is referred to as a Y-axis differential speed. Hereinafter, the Y-axis differential speed command is referred to as V2.

The speed feedback unit 22 is a first-order differential by time of the Y-axis differential position calculated by the position conversion unit with respect to the Y-axis differential speed command V2 output by the position feedback unit 21 .

is fed back, PID processing is performed, and the first Y-axis differential thrust command F2 is output.

The inertia function calculation unit 60 calculates an inertia function representing the relationship between the inertia difference that is the difference between the inertia of the Y1-axis drive system 111 and the inertia of the Y2-axis drive system 121 and the X-axis position. . Hereinafter, the inertia of the Y1-axis drive system 111 is referred to as m1. The inertia of the Y2-axis drive system 121 is called m2.

3 : is a schematic diagram which shows an example of the inertia function calculated by the inertia function calculation part 60 which concerns on Embodiment 1. As shown in FIG.

As shown in FIG. 3, the inertia function is a function which shows the relationship between the inertia difference (m1-m2) and the X-axis position (x). Here, it is assumed that the inertia function is a function in which the inertia difference (m1-m2) is expressed by a linear expression of the X-axis position (x), as shown in FIG. 3 . However, if the inertia function is a function representing the relationship between the inertia difference (m1-m2) and the X-axis position (x), the inertia difference (m1-m2) is necessarily the linear expression of the X-axis position (x). There is no need to be limited to the function being displayed. For example, the inertia difference (m1-m2) may be a function expressed by an expression other than the linear expression of the X-axis position (x).

The inertia function calculation unit 60 includes a Y1-axis drive system thrust command f1 that instructs the thrust of the Y1-axis drive system 111 and a Y2-axis drive system thrust command f2 that commands the thrust of the Y2-axis drive system 121 . And, an X-axis thrust command fx that commands the thrust of the X-axis drive system 131 is output. The inertia function calculation unit 60 includes the Y1-axis position y1 detected by the Y1-axis position detection unit 41 , the Y2-axis position y2 detected by the Y2-axis position detection unit 42 , and the X-axis The X-axis position (x) detected by the position detection unit 43 is acquired. The inertia function calculation unit 60 includes the output Y1-axis drive system thrust command f1, the output Y2-axis drive system thrust command f2, the acquired Y1-axis position (y1), and the acquired Y2-axis position (y2) And, based on the acquired X-axis position (x), an inertia function is calculated.

Hereinafter, the calculation of the inertia function performed by the inertia function calculating part 60 is demonstrated in more detail.

4 is a flowchart of an inertia function calculation process according to the first embodiment. The inertia function calculation processing is an example of processing performed by the inertia function calculation unit 60 to calculate the inertia function.

When the inertia function calculation processing is started, the inertia function calculation unit 60 outputs the X-axis thrust command fx to the gantry mechanism 100 and moves the stage 140 to the first X-axis position. (Step S100). At this time, the inertia function calculation unit 60 acquires the X-axis position (x) from the X-axis position detection unit 43 , and confirms the X-axis position of the stage 140 , at the first X-axis position. The stage 140 is moved.

When the stage 140 is moved to the first X-axis position, the inertia function calculation unit 60 synchronizes the gantry mechanism 100 with the Y1-axis drive system thrust command f1 and the Y2-axis The drive system thrust command f2 is output, and the Y1-axis drive system 111 and the Y2-axis drive system 121 are excited (step S110).

When the Y1-axis drive system 111 and the Y2-axis drive system 121 are excited, the inertia function calculation unit 60 calculates the Y-axis position ( y1) and the Y-axis position y2 are acquired (step S120).

When the Y1-axis position (y1) and the Y2-axis position (y2) are acquired, the inertia function calculation unit 60 outputs the Y1-axis drive system thrust command f1 and Y2-axis drive system thrust command f2, and the acquired Y1 From the axial position y1 and the Y2-axis position y2 , the inertia m1 of the Y1-axis drive system 111 and the inertia m2 of the Y2-axis drive system 121 are calculated. That is, the inertia function calculation unit 60 is configured to calculate the inertia m1 of the Y1-axis drive system 111 and the Y2-axis drive system 121 when the stage 140 is located at the first X-axis position. The inertia m2 is calculated (step S130).

Next, the inertia function calculation unit 60 outputs the X-axis thrust command fx to the gantry mechanism 100, and moves the stage 140 to the second X-axis position (step S140). At this time, the inertia function calculation unit 60 acquires the X-axis position (x) from the X-axis position detection unit 43 , and confirms the X-axis position of the stage 140 , at the second X-axis position. The stage 140 is moved.

When the stage 140 is moved to the second X-axis position, the inertia function calculation unit 60 synchronizes the gantry mechanism 100 with the Y1-axis drive system thrust command f1 and the Y2-axis drive system thrust command. (f2) is output, and the Y1-axis drive system 111 and the Y2-axis drive system 121 are excited (step S150).

When the Y1-axis drive system 111 and the Y2-axis drive system 121 are excited, the inertia function calculation unit 60 calculates the Y-axis position ( y1) and the Y-axis position y2 are acquired (step S160).

When the Y1-axis position (y1) and the Y2-axis position (y2) are acquired, the inertia function calculation unit 60 outputs the Y1-axis drive system thrust command f1 and Y2-axis drive system thrust command f2, and the acquired Y1 From the axial position y1 and the Y2-axis position y2 , the inertia m1 of the Y1-axis drive system 111 and the inertia m2 of the Y2-axis drive system 121 are calculated. That is, the inertia function calculation unit 60 is configured to calculate the inertia m1 of the Y1-axis drive system 111 and the Y2-axis drive system 121 when the stage 140 is located at the second X-axis position. The inertia m2 is calculated (step S170).

Next, the inertia function calculation unit 60 calculates the inertia ( ) of the Y1-axis drive system 111 in the case where the stage 140 is located at the first X-axis position calculated in the process of step S130 . m1) and the inertia m2 of the Y2-axis drive system 121, and the Y1-axis drive system 111 in the case where the stage 140 is located at the second X-axis position calculated in the process of step S170. Based on the inertia m1 of , and the inertia m2 of the Y2-axis drive system 121, the inertia function 180 is calculated (step S180).

When the processing of step S180 is finished, the inertia function calculation unit 60 ends the inertia function calculation processing.

As described above, the inertia function calculation unit 60 receives a Y1-axis drive system thrust command that instructs the thrust of the Y1-axis drive system 111 and a Y2-axis drive system thrust command that commands the thrust of the Y2-axis drive system 121 . output, and an inertia function is calculated based on the following (a)-(d). (a) The Y1-axis drive system thrust command and Y2-axis drive system thrust command output when the position of the stage 140 is determined by the first X-axis position. (b) The Y1-axis position detected by the Y1-axis position detection unit 41 and Y2 detected by the Y2-axis position detection unit 42 in the case where the position of the stage 140 is determined by the first X-axis position axis position. (c) Y1-axis drive system thrust command and Y2-axis drive system thrust command output when the position of the stage 140 is determined by the second X-axis position. (d) The Y1-axis position detected by the Y1-axis position detection unit 41 and Y2 detected by the Y2-axis position detection unit 42 in the case where the position of the stage 140 is determined by the second X-axis position axis position.

The feedforward unit 10 converts the X-axis position command acquired by the X-axis position command acquisition unit 81 and the Y-axis central position command acquired by the Y-axis central position command acquisition unit 82 to the Y-axis It feeds forward to the 1st Y-axis differential thrust command F2 output from the differential thrust command output part 20, and outputs the 2nd Y-axis differential thrust command. Hereinafter, the second Y-axis differential thrust command is referred to as F2'.

Hereinafter, the output of the 2nd Y-axis differential thrust command F2' performed by the feed forward unit 10 will be described in more detail.

As shown in FIG. 2 , the feed forward unit 10 includes an inertia function storage unit 11 and a calculation unit 12 .

The inertia function storage unit 11 stores the inertia function calculated by the inertia function calculation unit 60 .

The calculation unit 12 includes an inertia function from the X-axis position commanded by the X-axis position command acquired by the X-axis position command acquisition unit 81 and the inertia function stored in the inertia function storage unit 11 . Calculate the difference The calculation unit 12 includes the first output by the Y-axis differential thrust command output unit 20 from the calculated inertia difference and the Y-axis central position command acquired by the Y-axis central position command acquisition unit 82 . A feed-forward value to be fed-forward to the Y-axis differential thrust command of 1 is calculated. More specifically, the calculator 12 calculates the inertia difference m1-m2 by substituting the X-axis position (x) commanded by the X-axis position command into the inertia function. The calculation unit 12 is a second derivative by the time of the Y-axis center position command to the calculated inertia difference (m1-m2).

By multiplying by

to calculate

The feedforward unit 10 is a feedforward value calculated from the first Y-axis differential thrust command F2 output from the Y-axis differential thrust command output unit 20 .

By subtracting , the second Y-axis differential thrust command F2' is calculated and output.

The thrust converting unit 50 controls the position of the stage 140 by using the first Y-axis central thrust command F1 and the second Y-axis differential thrust command F2'. More specifically, the thrust converting unit 50 includes the second Y-axis differential thrust command F2' output by the feed forward unit 10 and the first Y-axis central thrust command outputting unit. Based on the Y-axis center thrust command (F1) of (f2) is calculated. The thrust converting unit 50 outputs the calculated Y1-axis drive system thrust command f1 and Y2-axis drive system thrust command f2 to the gantry mechanism 100 . The thrust converter 50 drives the Y1-axis drive system 111 using the Y1-axis drive system thrust command f1, and drives the Y2-axis drive system 121 using the Y2-axis drive system thrust command f2. The position of the stage 140 is controlled.

The stage position control device 1 having the above configuration controls the position of the stage 140 in the gantry mechanism 100 .

Hereinafter, control of the position of the stage 140 performed by the stage position control apparatus 1 is demonstrated, referring drawings.

5 is a flowchart of stage position control processing according to the first embodiment. The stage position control processing is an example of processing performed by the stage position control device 1 to control the position of the stage 140 .

When the stage position control process is started, the Y1-axis position detection unit 41 detects the Y1-axis position, which is the driving position in the Y1-axis drive system 111 , and the Y2-axis position detection unit 42 , the Y2-axis drive system 121 . ), the Y2-axis position, which is the driving position, is detected (step S200).

When the Y1-axis position and the Y2-axis position are detected, the position converting unit 70 calculates the Y-axis central position and the Y-axis differential position from the Y1-axis position and the Y2-axis position (step S210).

When the Y-axis central position and the Y-axis differential position are calculated, the Y-axis central thrust command output unit 30 feeds back the Y-axis central position and outputs a first Y-axis central thrust command (step S220). The Y-axis differential thrust command output unit 20 feeds back the Y-axis differential position and outputs a first Y-axis differential thrust command (step S230).

When the first Y-axis differential thrust command is output, the feed forward unit 10 sends the X-axis position command acquired by the X-axis position command acquisition unit 81 and the Y-axis center position command acquisition unit 82 to The Y-axis center position command obtained by this is fed forward to the first Y-axis differential thrust command, and a second Y-axis differential thrust command is output (step S240).

When the second Y-axis differential thrust command is output, the thrust converter 50 converts the thrust of the Y1-axis drive system 111 based on the second Y-axis differential thrust command and the first Y-axis central thrust command. The Y1-axis drive system thrust command to command and the Y2-axis drive system thrust command to command the thrust of the Y2-axis drive system 121 are calculated (step S250). The calculated Y1-axis drive system thrust command and Y2-axis drive system thrust command are output to the gantry mechanism 100 (step S260), and the position of the stage 140 is controlled.

When the process of step S260 ends, the stage position control device 1 proceeds to the process of step S200 again. In this way, the loop processing consisting of the processing of step S200 to the processing of step S260 is repeated.

Hereinafter, the position control of the stage 140 by the stage position control device 1 will be considered.

transformation matrix J,

If , the Y-axis central velocity, which is the first-order differential of the Y-axis central position (Y1) by time, and the Y-axis differential velocity, which is the first-order derivative by the time of the Y-axis differential position (Y2), and the Y1-axis position (y1) are The conversion equation of the Y1-axis speed, which is the first-order derivative by time, and the Y2-axis speed, which is the first-order derivative, by time of the Y2-axis position (y2) is expressed by the following (Equation 1).

The conversion formula of the first Y-axis center thrust command (F1) and the first Y-axis differential thrust command (F2), the Y1-axis drive system thrust command (f1), and the Y2-axis drive system thrust command (f2) is: It is expressed by Equation 2).

The equations of motion of the Y1-axis drive system 111 and the Y2-axis drive system 121 are expressed by the following (Equation 3).

When this motion equation is coordinate-transformed using the transformation matrix J, the motion equation after the coordinate transformation is expressed by the following (Equation 4).

The expansion formulas 1 and 2, which developed the equation of motion after this transformation, are respectively expressed by the following (Formula 5) and (Formula 6).

In the expansion formulas 1 and 2, when m1 and m2 are different from each other, each of the interference term 1

, interference term 2

is not removed and remains

When the interference term 1 is not removed from the expansion formula 1 and when the interference term 2 is not removed from the expansion formula 2, the driving speed of the first X-axis support part 135 by the Y1-axis drive system 111 and Y2 The difference in the drive speed of the 2nd X-axis support part 136 by the shaft drive system 121 cannot be suppressed. That is, motion in the yaw direction occurs in the stage 140 .

Also, if the interference term 2 is removed from the expansion equation 2, the interference term 1 naturally converges to 0. For this reason, by removing the interference term 2 from the expansion formula 2, the motion of the stage 140 in the yaw direction can be suppressed.

In the stage position control device 1 , the feed forward unit 10 acquires an X-axis position command acquired by the X-axis position command acquisition unit 81 and an X-axis position command acquired by the Y-axis center position command acquisition unit 82 . Interference term 2 as a feedforward value from the Y-axis center position command

to calculate The feedforward unit 10 subtracts the interference term 2, which is the calculated feedforward value, from the first Y-axis differential thrust command F2 output from the Y-axis differential thrust command output unit 20 to obtain a second The Y-axis differential thrust command F2' is calculated and output. For this reason, the component of the interference term 2 is removed from the second Y-axis differential thrust command F2'.

Thrust conversion unit 50, Y1-axis drive system 111 based on the second Y-axis differential thrust command F2' and the first Y-axis center thrust command F1 from which the component of the interference term 2 is removed. A Y1-axis drive system thrust command f1 that commands the thrust of , and a Y2-axis drive system thrust command f2 that commands the thrust of the Y2-axis drive system 121 are calculated and output to the gantry mechanism 100 .

Accordingly, the stage position control device 1 can suppress the occurrence of the motion in the yaw direction of the stage 140 itself at a point in time when the motion in the yaw direction of the stage 140 does not occur.

(Embodiment 2)

Hereinafter, a stage position control device according to a second embodiment in which a part of the stage position control device 1 according to the first embodiment is changed and configured will be described.

In addition to removing the component of the interference term 2 from the first Y-axis differential thrust command F2, the stage position control device positively determines the interference term 1 from the first Y-axis central thrust command F1. Remove the ingredients.

6 is a block diagram showing the configuration of the stage position control device 1a according to the second embodiment. However, FIG. 6 does not show all the components of the stage position control apparatus 1a similarly to the case of FIG. In the following, with respect to the stage position control device 1a, the same components as those of the stage position control device 1 according to the first embodiment are assigned the same reference numerals and detailed description thereof is omitted, and the stage position control device ( 1) and the difference will be mainly explained.

As shown in FIG. 6 , in the stage position control device 1a , a feedback unit 90 is added from the stage position control device 1 according to the first embodiment, and the thrust converting unit 50 is a thrust converting unit. (50a) is changed and configured.

The feedback unit 90 obtains the X-axis position detected by the X-axis position detection unit 43 and the Y-axis differential position calculated by the position conversion unit 70 from the Y-axis center thrust command output unit 30 . It feeds back to the output 1st Y-axis center thrust command, and outputs the 2nd Y-axis center thrust command. Hereinafter, the second Y-axis center thrust command is referred to as F1'.

Hereinafter, the output of the 2nd Y-axis center thrust command F1' performed by the feedback part 90 is demonstrated in more detail.

As shown in FIG. 6 , the feedback unit 90 includes an inertia function storage unit 11 and a calculation unit 92 .

The calculation unit 92 calculates an inertia difference from the X-axis position detected by the X-axis position detection unit 43 and the inertia function stored in the inertia function storage unit 11 . The calculation unit 92 includes a first Y-axis center output by the Y-axis center thrust command output unit 30 from the calculated inertia difference and the Y-axis difference position calculated by the position conversion unit 70 . A feedback value fed back to the thrust command is calculated. More specifically, the calculation unit 92 substitutes the X-axis position (x) detected by the X-axis position detection unit into the inertia function to calculate the inertia difference (m1-m2), and the calculated inertia difference In (m1-m2), the second-order differentiation by time of the Y-axis differential position

By multiplying by

to calculate

The feedback unit 90 is a feedback value calculated from the first Y-axis central thrust command F1 output from the Y-axis central thrust command output unit 30 .

By subtracting , the second Y-axis center thrust command F1' is calculated and output.

The thrust converting unit 50a includes a second Y-axis differential thrust command F2' output from the feed forward unit 10 and a second Y-axis center thrust command outputted from the feedback unit 90 ( F1'), a Y1-axis drive system thrust command f1 that commands the thrust of the Y1-axis drive system 111 and a Y2-axis drive system thrust command f2 that commands the thrust of the Y2-axis drive system 121 are calculated. . The thrust converter 50a outputs the calculated Y1-axis drive system thrust command f1 and Y2-axis drive system thrust command f2 to the gantry mechanism 100, and uses the Y1-axis drive system thrust command f1 The position of the stage 140 is controlled by driving the Y1-axis drive system 111 and driving the Y2-axis drive system 121 using the Y2-axis drive system thrust command f2.

Hereinafter, the position control of the stage 140 by the stage position control device 1a of the above configuration will be considered.

In the stage position control device 1a , the feedback unit 90 provides feedback from the X-axis position detected by the X-axis position detection unit 43 and the Y-axis differential position calculated by the position conversion unit 70 . Interference term 1 as value

to calculate The feedback part 90 subtracts the interference term 1 which is a calculated feedback value from the 1st Y-axis central thrust command F1 output from the Y-axis central thrust command output part 30, and the 2nd Y-axis The center thrust command F1' is calculated and output. For this reason, the component of the interference term 2 is removed from the 2nd Y-axis center thrust command F1'.

The thrust converting unit 50a includes a second Y-axis differential thrust command F2' from which the component of the interference term 2 is removed, and a second Y-axis center thrust command F1' from which the component of the interference term 1 is removed. Based on , the Y1-axis drive system thrust command f1 that commands the thrust of the Y1-axis drive system 111 and the Y2-axis drive system thrust command f2 that commands the thrust of the Y2-axis drive system 121 are calculated, and the gantry mechanism (100) is output.

Accordingly, the stage position control device 1a can suppress the generation of the motion in the yaw direction of the stage 140 itself at a point in time when the motion in the yaw direction of the stage 140 does not occur.

(supplement)

As mentioned above, Embodiment 1 and Embodiment 2 were demonstrated as an illustration of the technique by this indication. However, the technology according to the present disclosure is not limited thereto, and as long as it does not depart from the spirit of the present disclosure, it is also applicable to the embodiment or modified example in which changes, substitutions, additions, omissions, etc. are appropriately performed.

For example, in Embodiment 1, the stage position control apparatus 1 is equipped with the inertia function calculation part 60 which calculates an inertia function, and the inertia function memory|storage part 11 is an inertia function. It has been described as a configuration for storing the inertia function calculated by the function calculation unit. However, the stage position control device 1 does not necessarily need to calculate the inertia function as long as the inertia function can be used. The stage position control device 1 does not include, for example, the inertia function calculation unit 60 , and the inertia function storage unit 11 retrieves the inertia function calculated by the external device from the external device. The structure may be acquired and stored.

The photodetector according to the present disclosure can be widely used in an apparatus for controlling the position of a stage and the like.

1, 1a: stage position control device 10: feed forward unit
11: inertia function storage unit 12, 92: calculation unit
20: Y-axis differential thrust command output unit 21, 31: position feedback unit
22, 32: speed feedback unit 30: Y-axis center thrust command output unit
41: Y1-axis position detection unit 42: Y2-axis position detection unit
43: X-axis position detection unit 50, 50a: thrust conversion unit
60: inertia function calculation unit 70: position conversion unit
81: X-axis position command acquisition unit 82: Y-axis center position command acquisition unit
83: phase delay compensator 90: feedback unit
100: gantry mechanism 110: Y1 axis
111: Y1-axis drive system 120: Y2-axis
121: Y2-axis drivetrain 130: X-axis
131: X-axis drive system 135: first X-axis support part
136: second X-axis support 140: stage

Claims (10)

Y1 axis and Y2 axis parallel to each other;
an X axis perpendicular to the Y1 axis and the Y2 axis;
On the Y1-axis, the Y1-axis position, which is the driving position in the Y1-axis drive system, the Y2-axis position, which is the driving position in the Y2-axis drive system, on the Y2-axis, and the X-axis position, which is the driving position in the X-axis drive system, on the X-axis stage positioned by
A stage position control device for controlling the position of the stage in a gantry mechanism having
a Y-axis central thrust command output unit for outputting a first Y-axis central thrust command for instructing a central thrust of the Y1-axis drive system and the Y2-axis drive system;
a Y-axis differential thrust command output unit for outputting a first Y-axis differential thrust command for instructing the differential thrust between the Y1-axis drive system and the Y2-axis drive system;
The X-axis position command for instructing the X-axis position and the Y-axis central position command for instructing the center positions of the Y1-axis position and the Y2-axis position are fed forward to the first Y-axis differential thrust command, a feedforward unit for outputting a Y-axis differential thrust command of 2;
and a thrust converter configured to control the position of the stage by using the first Y-axis central thrust command and the second Y-axis differential thrust command. The method according to claim 1,
The feed forward unit,
storing an inertia difference, which is a difference between the inertia of the Y1-axis drive system and the inertia of the Y2-axis drive system, and an inertia function representing the relationship between the X-axis position,
The inertia difference is calculated from the X-axis position commanded by the X-axis position command and the inertia function, and from the calculated inertia difference and the Y-axis center position command, to the first Y-axis differential thrust command A stage position control device that calculates a feedforward value to be fed forward. 3. The method according to claim 2,
The Y-axis center thrust command output unit outputs the first Y-axis center thrust command based on the Y-axis center position command. 4. The method according to claim 3,
a Y1-axis position detection unit for detecting the Y1-axis position;
Further comprising a Y2-axis position detection unit for detecting the Y2-axis position,
The Y-axis central thrust command output unit receives, as a feedback value, the Y1-axis position detected by the Y1-axis position detection unit and the Y-axis central position indicating the central position of the Y2-axis position detected by the Y2-axis position detection unit. , output the first Y-axis center thrust command,
The first Y-axis differential thrust command output unit returns a Y-axis differential position indicating a differential position between the Y1-axis position detected by the Y1-axis position detection unit and the Y2-axis position detected by the Y2-axis position detection unit as a feedback value. and outputting the first Y-axis differential thrust command by receiving it as . 5. The method according to any one of claims 1 to 4,
The thrust converting unit includes: a Y1-axis drive system thrust command for instructing a thrust of the Y1-axis drive system based on the first Y-axis central thrust command and the second Y-axis differential thrust command; By calculating a Y2-axis drive system thrust command that commands a thrust, driving the Y1-axis drive system using the Y1-axis drive system thrust command, and driving the Y2-axis drive system using the Y2-axis drive system thrust command, the stage A stage position control device that controls the position. 5. The method according to claim 4,
an X-axis position detection unit for detecting the X-axis position;
The X-axis position detected by the X-axis position detection unit and the differential position are fed back to the first Y-axis central thrust command, and a feedback unit for outputting a second Y-axis central thrust command is further provided;
The stage position control device, wherein the thrust converting unit controls the position of the stage by using the second Y-axis center thrust command. 7. The method of claim 6,
The feedback unit stores the inertia function, calculates the inertia difference from the X-axis position detected by the X-axis position detection unit and the inertia function, and calculates the inertia difference from the calculated inertia difference and the difference position. A stage position control device that calculates a feedback value fed back to a 1 Y-axis center thrust command. 8. The method of claim 7,
The thrust converting unit includes: a Y1-axis drive system thrust command for instructing a thrust of the Y1-axis drive system based on the second Y-axis central thrust command and the second Y-axis differential thrust command; By calculating a Y2-axis drive system thrust command that commands a thrust, driving the Y1-axis drive system using the Y1-axis drive system thrust command, and driving the Y2-axis drive system using the Y2-axis drive system thrust command, the stage A stage position control device that controls the position. 3. The method according to claim 2,
a Y1-axis position detection unit for detecting the Y1-axis position; a Y2-axis position detection unit for detecting the Y2-axis position;
A Y1-axis drive system thrust command that commands the thrust of the Y1-axis drive system and a Y2-axis drive system thrust command that instructs the thrust of the Y2-axis drive system are output, (a) the position of the stage is determined by the first X-axis position The Y1-axis drive system thrust command and the Y2-axis drive system thrust command output in the case determined, and (b) when the stage position is determined by the first X-axis position (c) the Y1-axis drive system thrust command output when the position of the stage is determined by the second X-axis position and the Y1-axis position detected by the Y1-axis position detected by the Y2-axis position detection unit and the Y2-axis drive system thrust command and (d) the Y1-axis position detected by the Y1-axis position detection unit and the Y2-axis position detection unit when the stage position is determined by the second X-axis position The stage position control device further comprising an inertia function calculation unit that calculates the inertia function based on the Y2-axis position detected by the . In the Y1 axis and Y2 axis parallel to each other, the X axis perpendicular to the Y1 axis and the Y2 axis, the Y1 axis position which is the driving position in the Y1 axis drive system on the Y1 axis, and the Y2 axis drive system on the Y2 axis A stage position control method for controlling the position of the stage in a gantry mechanism having a stage whose position is determined by a Y2-axis position, which is a driving position of , First Y-axis differential thrust for calculating a first Y-axis central thrust command that instructs the central thrust of the Y1-axis drive system and the Y2-axis drive system, and instructing the differential thrust between the Y1-axis drive system and the Y2-axis drive system The X-axis position command for calculating a command and commanding the X-axis position and the Y-axis center position command for instructing the center positions of the Y1-axis position and the Y2-axis position are applied to the first Y-axis differential thrust command. Feed-forward to calculate a second Y-axis differential thrust command,
and controlling the position of the stage by using the first Y-axis central thrust command and the second Y-axis differential thrust command.

Images